| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 08/16/2007 | CA2641764A1 Device for coupling between a plasma antenna and a power signal generator |
| 08/16/2007 | CA2641561A1 Radio frequency ion guide |
| 08/15/2007 | EP1819208A2 Device and method for creating activated and/or ionised particles in a plasma |
| 08/15/2007 | EP1818970A2 Method for preparing a sample for electron microscopic investigation, the sample carrier and transport carrier used |
| 08/15/2007 | EP1817557A2 Apparatus and method of detecting probe tip contact with a surface |
| 08/15/2007 | EP1817265A2 Method of forming coated article using sputtering target(s) and ion source(s) and corresponding apparatus |
| 08/15/2007 | EP1276356B1 Apparatus for plasma processing |
| 08/15/2007 | EP1166323B1 Method and apparatus for compensating non-uniform wafer processing in plasma processing |
| 08/15/2007 | CN2935709Y High voltage automatic discharge device for ion implantation apparatus |
| 08/15/2007 | CN2935467Y Anti-corrosion aluminum element with multi-coating |
| 08/15/2007 | CN2935461Y Discharging arc room of long life ion source |
| 08/15/2007 | CN1332420C Preloaded plasma reactor device and its use |
| 08/15/2007 | CN1332414C Ion beam irradiation device |
| 08/15/2007 | CN101019203A 带电粒子束曝光系统 Charged particle beam exposure system |
| 08/15/2007 | CN101019201A 带电粒子枪 Charged particle gun |
| 08/15/2007 | CN101018884A Apparatus including gas distribution member supplying process gas and radio frequency (RF) power for plasma processing |
| 08/15/2007 | CN101017771A Gas supply apparatus, substrate processing apparatus and gas supply method |
| 08/15/2007 | CN101017769A Plasma processing apparatus and plasma processing method |
| 08/15/2007 | CN101017761A Metal gas mixing ion injector |
| 08/15/2007 | CN101017760A A measurement method for plasma dynamic sheath layer diagnosis |
| 08/14/2007 | US7256407 Lithographic projection apparatus and reflector assembly for use therein |
| 08/14/2007 | US7256406 Emitter for electron-beam projection lithography system, and method of manufacturing and operating the emitter |
| 08/14/2007 | US7256405 Sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method |
| 08/14/2007 | US7256400 Electron beam inspection apparatus |
| 08/14/2007 | US7255898 Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof |
| 08/14/2007 | US7255774 Process apparatus and method for improving plasma production of an inductively coupled plasma |
| 08/14/2007 | US7255773 Plasma processing apparatus and evacuation ring |
| 08/09/2007 | WO2007089468A2 Architecture for ribbon ion beam ion implanter system |
| 08/09/2007 | WO2007089146A1 Method for surface treatment by plasma and surface treatment apparatus |
| 08/09/2007 | WO2007089124A1 Device for sustaining differential vacuum degrees for electron column |
| 08/09/2007 | WO2007087661A1 Method and device for the continuous plasma treatment of materials, in particular for the descaling of a metal strand |
| 08/09/2007 | WO2007071043A3 Excimer radiation lamp assembly, and source module and fluid treatment system containing same |
| 08/09/2007 | WO2007038580A3 Apparatus and methods to remove films on bevel edge and backside of wafer |
| 08/09/2007 | WO2007038134A3 Method of aligning a particle-beam-generated pattern to a pattern on pre-patterned substrate |
| 08/09/2007 | US20070184640 Method for producing solid element plasma and its plasma source |
| 08/09/2007 | US20070184563 Apparatus and method for plasma etching |
| 08/09/2007 | US20070184562 Plasma Processing Method And Plasma Processing Apparatus |
| 08/09/2007 | US20070182844 Optical system for producing differently focused images |
| 08/09/2007 | US20070181868 Silicon electrode plate for plasma etching with superior durability |
| 08/09/2007 | US20070181832 Controlling the characteristics of implanter ion-beams |
| 08/09/2007 | US20070181831 Method and apparatus for processing a micro sample |
| 08/09/2007 | US20070181830 Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions |
| 08/09/2007 | US20070181826 Laser atom probe methods |
| 08/09/2007 | US20070181146 Plasma cvd apparatus and dry cleaning method of the same |
| 08/09/2007 | US20070181145 Method for cleaning process chamber of substrate processing apparatus, substrate processing apparatus, and method for processing substrate |
| 08/09/2007 | US20070181064 Plasma source assembly and method of manufacture |
| 08/09/2007 | DE10223533B4 Ionenimplantiervorrichtung An ion implanter |
| 08/09/2007 | DE102006047729A1 Focusing and positioning auxiliary device for particle-optical raster microscope has object and focusing comprises positioning auxiliary device, lighting device, which produces collimated beam or focused ray of light |
| 08/09/2007 | DE102005005801B4 Elektrostatisches Ablenksystem für Korpuskularstrahlung An electrostatic deflection system for corpuscular |
| 08/08/2007 | EP1816674A1 Anisotropic etching method |
| 08/08/2007 | EP1816670A2 Predictive failure scheme for industrial power delivery system |
| 08/08/2007 | EP1816669A2 Particle-optical apparatus with a predetermined final vacuum pressure |
| 08/08/2007 | EP1816668A2 Particle-optical apparatus with a predetermined final vacuum pressure |
| 08/08/2007 | EP1815494A1 Inductively coupled plasma processing apparatus |
| 08/08/2007 | EP1815493A1 Vacuum processing chamber for very large area substrates |
| 08/08/2007 | EP1643001A4 High velocity method for deposing diamond films from a gaseous phase in shf discharge plasma and device for carrying out said method |
| 08/08/2007 | EP1586106A4 An extractor for a micro-column, an alignment method for an extractor aperture to an electon emitter, and a measuring method and an alignment method using thereof |
| 08/08/2007 | EP1366647A4 Apparatus for generating low temperature plasma at atmospheric pressure |
| 08/08/2007 | EP0976152B1 Pattern film repair using a gas assisted focused particle beam system |
| 08/08/2007 | CN101015034A Faraday dose and uniformity monitor for plasma based ion implantion |
| 08/08/2007 | CN101015033A Device and method for measurement of beam angle and divergence normal to plane of scanned beam or ribbon beam |
| 08/08/2007 | CN101014222A Device for carrying out method of cleaning the surface of a material coated with an organic substance and a generator |
| 08/08/2007 | CN101013649A Particle-optical apparatus with a predetermined final vacuum pressure |
| 08/07/2007 | US7253645 Detection of defects in patterned substrates |
| 08/07/2007 | US7253425 Method and apparatus for forming optical elements by inducing changes in the index of refraction by utilizing electron beam radiation |
| 08/07/2007 | US7253424 Method of implanting a substrate and an ion implanter for performing the method |
| 08/07/2007 | US7253423 Technique for uniformity tuning in an ion implanter system |
| 08/07/2007 | US7253419 Apertured plate support mechanism and charged-particle beam instrument equipped therewith |
| 08/07/2007 | US7253418 Device and method for the examination of samples in a non vacuum environment using a scanning electron microscope |
| 08/07/2007 | US7253417 Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lens |
| 08/07/2007 | US7253410 Charge-control pre-scanning for e-beam imaging |
| 08/07/2007 | US7253117 Methods for use of pulsed voltage in a plasma reactor |
| 08/07/2007 | US7252911 Implanting ions into a mask substrate with pattern-forming material with light-transmissive exposure regions; ions in the regions dissipate electrostatic charges, thus preventing the buildup of electrostatic charges which could otherwise attract image-distorting particles to the mask or damage the mask |
| 08/07/2007 | US7252745 Filtered cathodic arc deposition method and apparatus |
| 08/07/2007 | US7252738 Apparatus for reducing polymer deposition on a substrate and substrate support |
| 08/07/2007 | US7252737 Pedestal with integral shield |
| 08/07/2007 | CA2327741C Means for controlling target erosion and sputtering in a magnetron |
| 08/02/2007 | WO2007087213A2 Methods of implanting ions and ion sources used for same |
| 08/02/2007 | WO2007087212A1 Methods of implanting ions and ion sources used for same |
| 08/02/2007 | WO2007087210A1 Plasma immersion ion source with low effective antenna voltage |
| 08/02/2007 | WO2007087209A1 Methods and apparatus for ion beam angle measurement in two dimensions |
| 08/02/2007 | WO2007087126A1 Cathode for a vacuum sputtering system |
| 08/02/2007 | WO2007086875A1 Work processing system and plasma generating apparatus |
| 08/02/2007 | WO2007086400A1 Method and apparatus for inspecting sample surface |
| 08/02/2007 | WO2007086398A1 Apparatus and method for inspecting sample surface |
| 08/02/2007 | WO2007086254A1 Charged particle beam equipment |
| 08/02/2007 | WO2007059197A3 Technique for shaping a ribbon-shaped ion beam |
| 08/02/2007 | WO2007059052A3 Systems and methods that mitigate contamination and modify surface characteristics during ion implantation processes through the introduction of gases |
| 08/02/2007 | US20070178698 Substrate processing apparatus and fabrication process of a semiconductor device |
| 08/02/2007 | US20070178679 Methods of implanting ions and ion sources used for same |
| 08/02/2007 | US20070178402 Laser irradiation device and method of fabricating organic light emitting display device using the same |
| 08/02/2007 | US20070177132 Method and Apparatus for Self-Referenced Dynamic Step and Scan Intra-Field Scanning Distortion |
| 08/02/2007 | US20070176124 Plasma doping method and plasma doping apparatus |
| 08/02/2007 | US20070176123 Ion implanter having a superconducting magnet |
| 08/02/2007 | US20070176122 Architecture for ribbon ion beam ion implanter system |
| 08/02/2007 | US20070176115 Ion implantation system and control method |
| 08/02/2007 | US20070176114 Ion implantation system and control method |
| 08/02/2007 | US20070176103 Method and device for observing a specimen in a field of view of an electron microscope |
| 08/02/2007 | US20070175586 Plasma Processing Apparatus And Plasma Processing Method |
| 08/02/2007 | US20070175396 Film-forming apparatus |