| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
|---|
| 07/17/2008 | WO2008085405A1 Method of reducing particle contamination for ion implanters |
| 07/17/2008 | WO2008084537A1 Electron gun and electron beam exposure device |
| 07/17/2008 | WO2008084212A2 Apparatus support structure |
| 07/17/2008 | WO2008084202A2 Apparatus support |
| 07/17/2008 | WO2008067563A3 Adaptive controller for ion source |
| 07/17/2008 | WO2008042585A3 Multi-purpose electrostatic lens for an ion implanter system |
| 07/17/2008 | WO2007067318A3 Ion sources, systems and methods |
| 07/17/2008 | DE112006002412T5 Ionenquelle und Plasma-Bearbeitungsvorrichtung Ion source and plasma processing apparatus |
| 07/17/2008 | DE10242538B4 Verfahren zur Regelung der Elektronenstrahlleistung von Elektronenquellen Method for controlling the electron beam power of electron sources |
| 07/17/2008 | DE10235981B4 Teilchenoptische Vorrichtung und Elektronenmikroskop A particle-optical and electron microscope |
| 07/17/2008 | DE102008003114A1 Evaporating material evaporating method, involves utilizing energy supplied from outside for evaporation of material, and increasing energy of steam particles of evaporating material by supplying plasma, which is produced by magnetron |
| 07/17/2008 | DE102005061663B4 Ionenimplantationsvorrichtung An ion implantation apparatus |
| 07/16/2008 | EP1944790A2 Improvements relating to ion implanters |
| 07/16/2008 | EP1944388A1 Magnet structure for magnetron sputtering system, cathode electrode unit and magnetron sputtering system |
| 07/16/2008 | EP1944387A1 System and method for restoring or regenerating an article |
| 07/16/2008 | EP1943662A1 Lithography system, sensor and measuring method |
| 07/16/2008 | EP1943661A1 Charged particle inspection method and charged particle system |
| 07/16/2008 | EP1943660A1 Charged particle beam exposure system |
| 07/16/2008 | EP1943561A1 Lithography system and projection method |
| 07/16/2008 | EP1358363B1 Diamond coatings on reactor wall and method of manufacturing thereof |
| 07/16/2008 | EP1190434B1 Real-time prediction of proximity resist heating and correction of raster scan electron beam lithography |
| 07/16/2008 | CN101223624A Ion source and plasma processing device |
| 07/16/2008 | CN101222814A Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor |
| 07/16/2008 | CN101222813A Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor |
| 07/16/2008 | CN101221905A Silicon slice etching equipment |
| 07/16/2008 | CN101221904A Silicon slice etching equipment and method for controlling cavity top cover lifting |
| 07/16/2008 | CN101221882A Adapter of transmission electron microscope example bench, its substrate and manufacturing method thereof |
| 07/16/2008 | CN101221881A Impedance matching method and device |
| 07/16/2008 | CN101221356A Mask etch plasma reactor with backside optical sensors and multiple frequency control of etch distribution |
| 07/16/2008 | CN101221245A Correlated measuring method for ion average velocity of orienting plasma beam |
| 07/16/2008 | CN101221106A Nano material drawing device in scanning electron microscope driven by piezoelectric ceramic piece |
| 07/16/2008 | CN101221105A Stress test grid of nano material used for transmission electron microscopy |
| 07/16/2008 | CN100402697C Device for carrying out a plasma-assisted process |
| 07/15/2008 | US7400839 Method and device for measuring surface potential distribution, method and device for measuring insulation resistance, electrostatic latent image measurement device, and charging device |
| 07/15/2008 | US7399987 Planar electron emitter (PEE) |
| 07/15/2008 | US7399980 Systems and methods for beam angle adjustment in ion implanters |
| 07/15/2008 | US7399966 Scanning electron microscope |
| 07/15/2008 | US7399965 Method of detecting array of liquid crystal display and apparatus thereof |
| 07/15/2008 | US7399964 Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system |
| 07/15/2008 | US7399385 Alternating current rotatable sputter cathode |
| 07/15/2008 | US7399154 Vacuum processing system being able to carry process object into and out of vacuum chamber |
| 07/10/2008 | WO2008083301A1 Apparatus and method for plasma arc coating |
| 07/10/2008 | WO2008083023A1 Method and apparatuses for providing electrical contact for plasma processing applications |
| 07/10/2008 | WO2008083020A2 Technique for using an improved shield ring in plasma-based ion implantation |
| 07/10/2008 | WO2008082000A1 Aberration evaluation pattern, aberration evaluation method, aberration correction method, electron beam drawing apparatus, electron microscope, master, stamper, recording medium, and structure |
| 07/10/2008 | WO2008080244A1 Method for the production of a directional layer by means of cathode sputtering, and a device for carrying out the method |
| 07/10/2008 | WO2008061603A3 Phase plate, image producing method and electron microscope |
| 07/10/2008 | WO2008059070A3 Method for regulating nanoscale electron beam induced depositions |
| 07/10/2008 | WO2008058491A3 Scanning electron microscope |
| 07/10/2008 | US20080164408 Power Supply for an Ion Implantation System |
| 07/10/2008 | DE112006001555T5 Ladungspartikel-Strahlvorrichtung und Verfahren zum Erzeugen eines Ladungspartikel-Strahlabbilds Charged particle beam device and method for generating a charged particle beam image, |
| 07/10/2008 | DE10235456B4 Elektronenmikroskopiesystem Electron system |
| 07/10/2008 | DE102008003943A1 Ionenstrahlbereitstellungsvorrichtung Ion beam delivery apparatus |
| 07/10/2008 | DE102007033443A1 Method for determining the extension of cross-section of electron beam, involves deviating electron beam along axis by deviation device and determining proportionality factor between deviation current of device and deviation course |
| 07/09/2008 | EP1941531A2 Electron-optical corrector for an aplanatic imaging system |
| 07/09/2008 | EP1941530A2 Beam blanker driver system and method |
| 07/09/2008 | EP1941529A2 Electrostatic deflection system with impedance matching for high positioning accuracy |
| 07/09/2008 | EP1941528A2 Particle -optical component |
| 07/09/2008 | EP1941527A2 Electron beam source for use in electron gun |
| 07/09/2008 | EP1941157A2 Microwave combustion system for internal combustion engines |
| 07/09/2008 | EP1941071A2 Cathode incorporating fixed or rotating target in combination with a moving magnet assembly and applications thereof |
| 07/09/2008 | CN201083670Y Transmission electron microscope one-dimensional nano material test slide |
| 07/09/2008 | CN101218658A Wafer-scanning ion implanter having fast beam deflection apparatus for beam glitch recovery |
| 07/09/2008 | CN101217097A A transmission electron microscope measurement support grid based on phase change materials |
| 07/09/2008 | CN101217096A A quick RF automatic impedance matching method |
| 07/09/2008 | CN100401491C Envelope follower end point detection in time division multiplexed processes |
| 07/09/2008 | CN100401481C Plasma processing method and apparatus |
| 07/09/2008 | CN100401471C Plasma processing chamber, potential controlling apparatus, method, program and storage medium |
| 07/09/2008 | CN100401451C Dual frequency plasma etch reactor with independent plasma density/chemistry and ion energy control |
| 07/09/2008 | CN100401450C Hollow anode plasma reactor and method |
| 07/09/2008 | CN100401449C A method of implanting a substrate and an ion implanter for performing the method |
| 07/09/2008 | CN100401013C Displacement meter and displacement measuring method |
| 07/08/2008 | US7397052 Method and apparatus for specimen fabrication |
| 07/08/2008 | US7397051 Method and apparatus for specimen fabrication |
| 07/08/2008 | US7397050 Method and apparatus for specimen fabrication |
| 07/08/2008 | US7397047 Technique for tuning an ion implanter system |
| 07/08/2008 | US7397046 Method for implanter angle verification and calibration |
| 07/08/2008 | US7397040 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 07/08/2008 | US7397031 Method of inspecting a circuit pattern and inspecting instrument |
| 07/08/2008 | US7397030 Integrated local and global optical metrology for samples having miniature features |
| 07/08/2008 | US7396746 Methods for stable and repeatable ion implantation |
| 07/08/2008 | US7396481 Etching method of organic insulating film |
| 07/08/2008 | US7396480 Method for front end of line fabrication |
| 07/08/2008 | US7396432 Composite shadow ring assembled with dowel pins and method of using |
| 07/08/2008 | US7395779 Plasma processing apparatus |
| 07/03/2008 | WO2008080002A2 Method of diffusion-bond powder metallurgy sputtering target |
| 07/03/2008 | WO2008079921A1 Ion implantation with a collimator magnet and a neutral filter magnet |
| 07/03/2008 | WO2008078636A1 Ion injecting device, and ion injecting method |
| 07/03/2008 | WO2008078161A2 Computerized plant for producing structures made of resin, composites, or the like |
| 07/03/2008 | WO2008058246A3 Ion implantation device with a dual pumping mode and method thereof |
| 07/03/2008 | WO2008042664A3 Technique for improved ion beam transport |
| 07/03/2008 | US20080160789 Laser patterning of encapsulated organic light emitting diodes |
| 07/03/2008 | US20080158537 Optical switching in lithography system |
| 07/03/2008 | US20080158536 Optical switching in lithography system |
| 07/03/2008 | US20080157007 Active particle trapping for process control |
| 07/03/2008 | US20080156770 Method of Fabricating Grabbing Face of Sample Grabbing Portion |
| 07/03/2008 | US20080156441 Plasma processing apparatus and electrode plate, electrode supporting body, and shield ring thereof |
| 07/03/2008 | US20080156440 Surface processing apparatus |
| 07/03/2008 | DE112005000720T5 Verfahren und Vorrichtung zur Ionenfragmentierung durch Elektroneneinfang Method and apparatus for ion fragmentation by electron |
| 07/02/2008 | EP1939925A1 Cathodic arc evaporation device and method of igniting said arc |