| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 12/25/2008 | US20080315130 Focused ion beam processing system and method |
| 12/25/2008 | US20080315127 Ion Implanter Operating in Pulsed Plasma Mode |
| 12/25/2008 | US20080315122 Charged particle beam system and method for evacuation of the system |
| 12/25/2008 | US20080315097 Charged particle beam apparatus and specimen holder |
| 12/25/2008 | US20080315095 Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method |
| 12/25/2008 | US20080315090 Objective lens, electron beam system and method of inspecting defect |
| 12/25/2008 | US20080314522 Apparatus and method to confine plasma and reduce flow resistance in a plasma reactor |
| 12/24/2008 | WO2008155560A1 Method for quantitative analysis of a material |
| 12/24/2008 | WO2008155087A2 Plasma reactor, and method for the production of monocrystalline diamond layers |
| 12/24/2008 | WO2008089178A3 Plasma source with liner for reducing metal contamination |
| 12/24/2008 | WO2006018139A3 Device for producing excited and/or ionised particles in a plasma |
| 12/24/2008 | EP2007175A2 Plasma generator and method of generating plasma using the same |
| 12/24/2008 | EP2006881A2 In-chamber electron detector |
| 12/24/2008 | EP2005460A1 Optics for generation of high current density patterned charged particle beams |
| 12/24/2008 | CN101331579A Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator |
| 12/24/2008 | CN100446637C Plasma processing apparatus and method for using the same |
| 12/24/2008 | CN100446168C Mounting mechanism for plasma extraction aperture |
| 12/23/2008 | US7469195 Integrated stepwise statistical process control in a plasma processing system |
| 12/23/2008 | US7468517 Single stage charged particle beam energy width reduction system for charged particle beam system |
| 12/23/2008 | US7468512 Computer program products for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profiles |
| 12/23/2008 | US7468494 Reaction enhancing gas feed for injecting gas into a plasma chamber |
| 12/23/2008 | US7467598 System for, and method of, etching a surface on a wafer |
| 12/18/2008 | WO2008154397A1 Rotatable magnetron sputtering with axially moveable target electrode tube |
| 12/18/2008 | WO2008154222A1 Particle reduction through gas and plasma source control |
| 12/18/2008 | WO2008153785A2 Substrate cleaning chamber and components |
| 12/18/2008 | WO2008152464A2 Detection device for electron microscope |
| 12/18/2008 | WO2008152135A1 Multitarget sputter source and method for the deposition of multi-layers |
| 12/18/2008 | WO2008151335A1 Apparatus for the production of plasma or radicals by means of microwaves |
| 12/18/2008 | WO2008133882A9 Factory-alignable compact cantilever probe |
| 12/18/2008 | US20080311310 DLC Coating System and Process and Apparatus for Making Coating System |
| 12/18/2008 | US20080308729 Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former |
| 12/18/2008 | US20080308041 Plasma processing apparatus |
| 12/18/2008 | DE102007027097A1 Flüssigmetall-Ionenquelle zur Erzeugung von Lithium-Ionenstrahlen Liquid metal ion source for the generation of lithium-ion beams |
| 12/17/2008 | EP2003526A1 Method and device for controlling and monitoring a position of a holding element |
| 12/17/2008 | EP2002460A2 Surface treatments for spiral bevel gear sets |
| 12/17/2008 | EP2002459A2 Improved detector for charged particle beam instrument |
| 12/17/2008 | EP2002458A1 Particle-beam exposure apparatus with overall-modulation of a patterned beam |
| 12/17/2008 | EP2002270A2 High performance miniature rf sensor for use in microelectronics plasma processing tools |
| 12/17/2008 | EP1664378B1 Deposition method using a thermal plasma expanded by a replaceable plate |
| 12/17/2008 | EP1238406B1 Gas cluster ion beam smoother apparatus |
| 12/17/2008 | CN201167434Y Plasma current-jetting apparatus |
| 12/17/2008 | CN201167433Y Current-jetting apparatus for medium barrier discharging plasma |
| 12/17/2008 | CN101326613A Middling pressure plasma system for removing surface layer without losing substrate |
| 12/17/2008 | CN101325837A Plasma processing apparatus and radio frequency matching network thereof |
| 12/17/2008 | CN101322955A Production method of nano material |
| 12/16/2008 | US7465945 Method and apparatus for processing a micro sample |
| 12/16/2008 | US7465939 Aberration correction device and method for operating same |
| 12/16/2008 | US7465919 Ion detection system with neutral noise suppression |
| 12/16/2008 | US7465478 Plasma immersion ion implantation process |
| 12/16/2008 | US7465407 Plasma processing method and apparatus |
| 12/16/2008 | US7465406 Method of exposing a substrate to a surface microwave plasma, etching method, deposition method, surface microwave plasma generating apparatus, semiconductor substrate etching apparatus, semiconductor substrate deposition apparatus, and microwave plasma generating antenna assembly |
| 12/16/2008 | US7465357 Computer-readable medium that contains software for executing a method for cleaning a CVD chamber |
| 12/16/2008 | US7464941 Sealing mechanism for sealing a vacuum chamber |
| 12/16/2008 | US7464717 Method for cleaning a CVD chamber |
| 12/16/2008 | US7464663 Roll-vortex plasma chemical vapor deposition system |
| 12/16/2008 | US7464662 Compact, distributed inductive element for large scale inductively-coupled plasma sources |
| 12/16/2008 | US7464581 Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring |
| 12/11/2008 | WO2008150739A1 Apparatus and methods for improving treatment uniformity in a plasma process |
| 12/11/2008 | WO2008150020A1 Liquid crystal device and method of manufacturing the same |
| 12/11/2008 | WO2008149461A1 Charged particle beam inspection apparatus and method for inspecting charged particle beam |
| 12/11/2008 | WO2008149342A2 System and method for noninvasively monitoring conditions of a subject |
| 12/11/2008 | WO2008148773A1 Gas distributor comprising a plurality of diffusion-welded panes and a method for the production of such a gas distributor |
| 12/11/2008 | WO2008042310A3 Improved atmospheric pressure plasma electrode |
| 12/11/2008 | US20080305600 Method and apparatus for fabricating high tensile stress film |
| 12/11/2008 | US20080302979 Working Method by Focused Ion Beam and Focused Ion Beam Working Apparatus |
| 12/11/2008 | US20080302965 Electron Interferometer or Electron Microscope |
| 12/11/2008 | US20080302964 Method and apparatus for inspecting integrated circuit pattern |
| 12/11/2008 | US20080302963 Sheet beam-type testing apparatus |
| 12/11/2008 | DE19942484B4 Verfahren zum Anzeigen, Prüfen und Abwandeln von Mustern für eine Belichtung A method for displaying, testing and modifying patterns for exposure |
| 12/11/2008 | DE102007026847A1 Teilchenstrahlgerät und Verfahren zur Anwendung bei einem Teilchenstrahlgerät Particle beam device and method for use in a particle beam |
| 12/11/2008 | DE102007024843A1 Verfahren zum Erzeugen von Strukturen in einem Resistmaterial und Elektronenstrahlbelichtungsanlagen A method for producing patterns in a resist material, and electron beam exposure systems |
| 12/10/2008 | EP2001038A2 Charged particle beam device and method applied in a charged particle beam device |
| 12/10/2008 | EP1999776A1 Coating apparatus |
| 12/10/2008 | EP1999292A1 Sputtering apparatus |
| 12/10/2008 | EP1419514B1 Split double gap buncher and method for ion bunching in an ion implantation system |
| 12/10/2008 | EP1314182B1 System and method for removing particles entrained in an ion beam |
| 12/10/2008 | EP1314181B1 Electrostatic trap for particles entrained in an ion beam |
| 12/10/2008 | CN101322219A Means to establish orientation of ion beam to wafer and correct angle errors |
| 12/10/2008 | CN101322218A Method for focusing electron beam in electron column |
| 12/10/2008 | CN101322217A Technique for shaping a ribbon-shaped ion beam |
| 12/10/2008 | CN101322216A Technique for providing a segmented electrostatic lens in an ion implanter |
| 12/10/2008 | CN101321427A DC magnetic filtering cathode vacuum arc plasma source |
| 12/10/2008 | CN101320765A Photoelectric conversion device and manufacturing method |
| 12/10/2008 | CN101320680A Anti-arc protection device and its assembling method |
| 12/10/2008 | CN101320679A Plasma processing system |
| 12/10/2008 | CN101320676A Evacuation method and storage medium |
| 12/10/2008 | CN101320675A Plasma processing device, electrode temperature adjusting device and method |
| 12/10/2008 | CN101318186A Refurbishment of a coated chamber component |
| 12/10/2008 | CN100442451C Plasma processing system |
| 12/10/2008 | CN100442435C Electron beam writing equipment and electron beam writing method |
| 12/10/2008 | CN100442430C Plasma processor with electrode simultaneously responsive to plural frequencies |
| 12/10/2008 | CN100442429C Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a mutli-part electrode |
| 12/10/2008 | CN100442428C Sweep electron microscope having non-slip sample take-and-place device |
| 12/10/2008 | CN100442427C Cathode anode micro cavity electrode plasma device structure using one-dimensional nanometer material |
| 12/10/2008 | CN100442061C Method for toolmatching and troubleshooting a plasma processing system |
| 12/10/2008 | CN100441735C Sputtering apparatus capable of changing distance between substrate and deposition preventing plate used for film formation |
| 12/10/2008 | CN100441732C Plasma-assisted reinforced coating |
| 12/09/2008 | US7463791 Method for automatic alignment of tilt series in an electron microscope |
| 12/09/2008 | US7463173 Charged particle beam apparatus, abnormality detecting method for DA converter unit, charged particle beam writing method, and mask |
| 12/09/2008 | US7462847 Ion implanter and ion implantation control method thereof |