| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 08/07/2008 | US20080185952 Apparatus for Producing Secondary Electrons, a Secondary Electrode, and an Acceleration Electrode |
| 08/07/2008 | US20080185537 In situ surface contamination removal for ion implanting |
| 08/07/2008 | US20080184934 Plasma reactor for the treatment of large size substrates |
| 08/06/2008 | EP1953798A2 Process kit for substrate processing chamber |
| 08/06/2008 | EP1953797A2 A method of processing workpiece in a plasma reactor with variable height ground return path to control plasma ion density uniformity |
| 08/06/2008 | EP1953796A2 Plasma reactor with ion distribution uniformity controller employing plural VHF sources |
| 08/06/2008 | EP1953795A2 Improving plasma process uniformity across a wafer by apportioning power among plural VHF sources |
| 08/06/2008 | EP1953793A1 Specimen holder, specimen inspection apparatus, specimen inspection method, and method of fabricating specimen holder |
| 08/06/2008 | EP1953792A2 Apparatus for observing a sample with a particle beam and an optical microscope |
| 08/06/2008 | EP1953791A1 Apparatus for observing a sample with a particle beam and an optical microscope |
| 08/06/2008 | EP1953790A1 Method for thinning a sample and sample carrier for performing said method |
| 08/06/2008 | EP1953789A1 Method for thinning a sample and sample carrier for performing said method |
| 08/06/2008 | EP1953124A1 Graphite member for beam-line internal member of ion implantation apparatus |
| 08/06/2008 | EP1951407A1 Microwave plasma abatement apparatus |
| 08/06/2008 | CN201096521Y Non-contact type plasma temperature and electron density measuring apparatus |
| 08/06/2008 | CN101238540A Methods and apparatus for incorporating nitrogen in oxide films |
| 08/06/2008 | CN101238539A Dose cup located near bend in final energy filter of serial implanter for closed loop dose control |
| 08/06/2008 | CN101238538A Beam stop and beam tuning methods |
| 08/06/2008 | CN101236892A Ion beam apparatus having plasma sheath controller |
| 08/06/2008 | CN101236891A Plasma processing device |
| 08/06/2008 | CN101236888A Vaccuum processing apparatus |
| 08/06/2008 | CN100409726C Plasma processing device |
| 08/06/2008 | CN100409446C Image pickup device and manufacturing method thereof |
| 08/06/2008 | CN100409414C Gas switching device, gas supply source system, method for control gas flow and method for etching silicon |
| 08/05/2008 | US7408643 Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples |
| 08/05/2008 | US7408329 Power supply unit for gas discharge processes |
| 08/05/2008 | US7408225 Apparatus and method for forming thin film using upstream and downstream exhaust mechanisms |
| 08/05/2008 | US7408186 Controlled alignment catalytically grown nanostructures |
| 08/05/2008 | US7408178 Method for the removal of a microscopic sample from a substrate |
| 08/05/2008 | US7408175 Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former |
| 08/05/2008 | US7408172 Charged particle beam apparatus and charged particle beam irradiation method |
| 08/05/2008 | US7407565 Method and apparatus for ionized plasma deposition |
| 08/05/2008 | US7406925 Plasma processing method and apparatus |
| 07/31/2008 | WO2008092089A1 Honeycomb structure and method of using the structure |
| 07/31/2008 | WO2008091729A2 Technique for improving the performance and extending the lifetime of an ion source with gas dilution |
| 07/31/2008 | WO2008090380A1 Improved particle beam generator |
| 07/31/2008 | WO2008089950A1 Mems sensor for in situ tem atomic force microscopy |
| 07/31/2008 | WO2008065635A3 A plasma system and measurement method |
| 07/31/2008 | WO2008021654A3 Exhaust assembly for a plasma processing system and method |
| 07/31/2008 | US20080179546 Ion beam apparatus having plasma sheath controller |
| 07/31/2008 | US20080179536 Changed particle beam emitting device and method for adjusting the optical axis |
| 07/31/2008 | US20080179518 Microreactor for a Transmission Electron Microscope and Heating Element and Method of Manufacture Thereof |
| 07/31/2008 | US20080179517 Sample dimension measuring method and scanning electron microscope |
| 07/31/2008 | US20080179005 Plasma processing apparatus and control method thereof |
| 07/31/2008 | US20080178906 Bare aluminum baffles for resist stripping chambers |
| 07/31/2008 | DE102008004568A1 Ion beam device for use in semiconductor manufacturing device, has plasma shell control unit e.g. porous material layer, with ion extraction opening that is smaller than ion extraction opening of grid structure |
| 07/30/2008 | EP1950789A1 Phase plate for electron microscope, and its manufacturing method |
| 07/30/2008 | EP1950786A2 Cold field emitter |
| 07/30/2008 | EP1949409A1 Method and installation for the vacuum colouring of a metal strip by means of magnetron sputtering |
| 07/30/2008 | EP1949408A1 Method and installation for the vacuum colouring of a metal strip by means of magnetron sputtering |
| 07/30/2008 | EP1949407A2 Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator |
| 07/30/2008 | EP1949406A1 Down-stream plasma etching with deflectable plasma beam |
| 07/30/2008 | EP1949405A2 Systems and methods that mitigate contamination and modify surface characteristics during ion implantation processes through the introduction of gases |
| 07/30/2008 | EP1949404A2 Charged particle radiation therapy |
| 07/30/2008 | EP1948846A1 Method for monitoring a plasma, device for carrying out this method, use of this method for depositing a film onto a pet hollow body |
| 07/30/2008 | EP1157454A4 Power supply with flux-controlled transformer |
| 07/30/2008 | CN101233792A Plasma generator and film forming method employing same |
| 07/30/2008 | CN101233598A Plasma amplifier for plasma treatment plant |
| 07/30/2008 | CN101233597A Charged beam dump and particle attractor |
| 07/30/2008 | CN101232770A Device for medium to block discharging plasma body jet current |
| 07/30/2008 | CN101231943A Plasma processing apparatus and method |
| 07/30/2008 | CN101231932A Manipulator for rotating and translating a sample holder |
| 07/30/2008 | CN101231252A Method and device for eliminating energy jitter of electronic microscope electron energy loss spectrum |
| 07/30/2008 | CN100407363C 在综合处理系统中用于等离子搀杂和离子注入的方法和装置 Methods and apparatus for integrated processing system, etc. In the ion doping and ion implantation |
| 07/29/2008 | US7405521 Multiple frequency plasma processor method and apparatus |
| 07/29/2008 | US7404991 Device and control method for micro wave plasma processing |
| 07/29/2008 | US7404879 Ionized physical vapor deposition apparatus using helical self-resonant coil |
| 07/29/2008 | US7404874 Method and apparatus for treating wafer edge region with toroidal plasma |
| 07/29/2008 | US7404806 Hemo-aide |
| 07/24/2008 | WO2008089178A2 Plasma source with liner for reducing metal contamination |
| 07/24/2008 | WO2008088970A1 Technique for reducing magnetic fields at an implant location |
| 07/24/2008 | WO2008087386A1 Charged particle analyser system and method |
| 07/24/2008 | US20080173828 Ion implantation device and method for implanting ions |
| 07/24/2008 | US20080173815 Electron beam apparatus and device production method using the electron beam apparatus |
| 07/24/2008 | US20080173814 Electron beam inspection system and inspection method and method of manufacturing devices using the system |
| 07/24/2008 | US20080173403 Plasma stabilization method and plasma apparatus |
| 07/24/2008 | DE19643710B4 Vorrichtung zur Versorgung eines Verbrauchers mit einer gepulsten elektrischen Spannung für eine Werkstückbehandlung in einer Gasentladung Device for supplying a consumer with a pulsed electric voltage for a workpiece treatment in a gas discharge |
| 07/23/2008 | EP1947675A1 Manipulator for rotating and translating a sample holder |
| 07/23/2008 | EP1947674A1 Electron gun, electron beam exposure system and exposure method |
| 07/23/2008 | EP1946623A2 Method and device for igniting and generating an expanding diffuse microwave plasma and method and device for plasma treating surfaces and substances by using this plasma |
| 07/23/2008 | EP1946351A2 Ion implanter with contaminant collecting surface |
| 07/23/2008 | EP1945832A1 Dual mode ion source for ion implantation |
| 07/23/2008 | EP1620915A4 Plasma production device and method and rf driver circuit with adjustable duty cycle |
| 07/23/2008 | EP1341718B1 Method and device for electronic cyclotron resonance plasma deposit of single-wall carbon nanotubes and resulting nanotubes |
| 07/23/2008 | EP1192637B1 Method and device for electronic cyclotronic resonance plasma deposit of carbon nanofibre layers in fabric form and resulting fabric layers |
| 07/23/2008 | EP0995345B1 Gas excitation device with surface wave plasma |
| 07/23/2008 | CN101228618A Method and apparatus for process control in time division multiplexed (TDM) etch processes |
| 07/23/2008 | CN101228608A Maskless lithography system with improved reliability |
| 07/23/2008 | CN101227790A Plasma jet apparatus |
| 07/23/2008 | CN101226120A Micro drafting device for testing test piece material nano metric mechanical properties |
| 07/23/2008 | CN100405878C Plasma etching device |
| 07/23/2008 | CN100405557C Plasma treatment device |
| 07/23/2008 | CN100405537C Plasma reaction device |
| 07/23/2008 | CN100405533C Microwave-excited plasma processing apparatus |
| 07/23/2008 | CN100405526C Ion implantation apparatus and method |
| 07/22/2008 | US7403089 Magnet assemblies |
| 07/22/2008 | US7402821 Application of digital frequency and phase synthesis for control of electrode voltage phase in a high-energy ion implantation machine, and a means for accurate calibration of electrode voltage phase |
| 07/22/2008 | US7402820 Ion beam contamination determination |
| 07/22/2008 | US7402350 Highly tetrahedral amorphous carbon coatings and systems and methods for their production |
| 07/17/2008 | WO2008086527A2 Electron beam lithography method and apparatus using a dynamically controlled photocathode |