| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
|---|
| 06/10/2009 | CN201256139Y Special fixture for scanning electronic microscope |
| 06/10/2009 | CN201256138Y Ion beam leading out system for ionic source |
| 06/10/2009 | CN101452805A Processing container an plasma processing device |
| 06/10/2009 | CN100497724C Vacuum electric arc deposition equipment |
| 06/09/2009 | US7546016 Optical elements formed by inducing changes in the index of refraction by utilizing electron beam radiation |
| 06/09/2009 | US7544959 In situ surface contamination removal for ion implanting |
| 06/09/2009 | US7544958 Contamination reduction during ion implantation |
| 06/09/2009 | US7544957 Non-uniform ion implantation |
| 06/09/2009 | US7544937 Charged particle beam device for high spatial resolution and multiple perspective imaging |
| 06/09/2009 | US7544936 Method and device for observing a specimen in a field of view of an electron microscope |
| 06/09/2009 | US7544397 Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production |
| 06/09/2009 | US7544334 Device for sterilizing objects |
| 06/09/2009 | US7544276 Biased pulse DC reactive sputtering of oxide films |
| 06/09/2009 | US7544269 Method and apparatus for electron density measurement |
| 06/09/2009 | US7543546 Plasma processing apparatus, method for producing reaction vessel for plasma generation, and plasma processing method |
| 06/04/2009 | WO2009070265A1 Control of arbitrary scan path of a rotating magnetron |
| 06/04/2009 | WO2009070120A1 Lp-regularization of sparse representations applied to structure determination methods in molecular biology/structural chemistry |
| 06/04/2009 | WO2009069335A1 Electron emitting source and manufacturing method of electron emitting source |
| 06/04/2009 | WO2009068904A1 Particle beam apparatus |
| 06/04/2009 | WO2009068784A1 Method and device for producing a homogeneous discharge on non-insulating substrates |
| 06/04/2009 | WO2009068763A2 Method, device and system for measuring nanoscale deformations |
| 06/04/2009 | WO2009040406A3 Method and arrangement for redundant anode sputtering having a dual anode arrangement |
| 06/04/2009 | WO2009025393A3 Plasma processing device and plasma discharge state monitoring device |
| 06/04/2009 | WO2007061426A3 Laser-accelerated proton therapy units and superconducting eletromagnetig systems for same |
| 06/04/2009 | WO2007021855A3 Atmospheric process and system for controlled and rapid removal of polymers from high aspect ratio holes |
| 06/04/2009 | US20090140174 Impurity Introducing Apparatus and Impurity Introducing Method |
| 06/04/2009 | US20090139658 Plasma processing apparatus |
| 06/04/2009 | US20090139449 Silicon thin film in which an opening for selectively irradiating charged particles to a semiconductor substrate is provided and whose irradiation surface on which the charged particles are irradiated is implanted with an impurity, and selectively irradiating charged particles to semiconductor substrate |
| 06/03/2009 | EP2065915A1 Diamond electron source and method for manufacturing the same |
| 06/03/2009 | EP2064728A2 System and magnetic scanning and correction of an ion beam |
| 06/03/2009 | EP1402242B1 Using scatterometry to develop real time etch image |
| 06/03/2009 | CN101449354A New and improved ion source |
| 06/03/2009 | CN101446773A Maskless photon-electron spot-grid array printer |
| 06/03/2009 | CN100496182C Discharging power source, sputtering power source, and sputtering device |
| 06/03/2009 | CN100495635C A grid of transmission electronic microscope driven by thermal dual metal sheets |
| 06/03/2009 | CN100495634C Information acquisition apparatus, cross section evaluating apparatus, cross section evaluating method |
| 06/03/2009 | CN100495413C A method for adjoining adjacent coatings on a processing element |
| 06/03/2009 | CN100495073C Beam measuring equipment and beam measuring method using the same, emission device and material |
| 06/03/2009 | CN100495072C Ion beam measuring method and ion implanting apparatus |
| 06/03/2009 | CN100494487C Film-forming apparatus and film-forming method |
| 06/02/2009 | US7541601 Ion beam irradiating apparatus and method of adjusting uniformity of a beam |
| 06/02/2009 | US7541597 Automatic cleaning of ion sources |
| 06/02/2009 | US7541580 Detector for charged particle beam instrument |
| 06/02/2009 | US7540923 Shower head structure for processing semiconductor |
| 05/28/2009 | WO2009065938A1 Atom probe with a high acceptance |
| 05/28/2009 | WO2009065303A1 Plasma confinement device and semiconductor processing apparatus using the same |
| 05/28/2009 | WO2009036722A3 Device for the plasma treatment of workpieces |
| 05/28/2009 | WO2009003552A3 Treatment system for flat substrates |
| 05/28/2009 | US20090134343 Tracking control method and electron beam writing system |
| 05/28/2009 | US20090134121 Plasma processing apparatus and method |
| 05/28/2009 | US20090133838 Plasma Processor Apparatus |
| 05/28/2009 | US20090133630 Batch-Type Remote Plasma Processing Apparatus |
| 05/28/2009 | DE102007055010A1 Verfahren und Generatorschaltung zur Erzeugung von Plasmen mittels Hochfrequenzanregung A method and generator circuit for generating plasma by high frequency excitation |
| 05/27/2009 | EP2063450A1 Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus |
| 05/27/2009 | EP2063449A1 Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus |
| 05/27/2009 | EP2063221A1 Electron beam dimension measuring device and electron beam dimension measuring method |
| 05/27/2009 | EP2062283A2 Enhanced virtual anode |
| 05/27/2009 | EP2062278A2 System and method for managing power supplied to a plasma chamber |
| 05/27/2009 | CN201247756Y Target disc |
| 05/27/2009 | CN201247755Y Microscope objective device |
| 05/27/2009 | CN101443878A Electrode systems and methods of using electrodes |
| 05/27/2009 | CN101443877A Optical device for generating high current density picture composition electrified particle beam |
| 05/27/2009 | CN101442873A Equipment and method for processing plasma |
| 05/27/2009 | CN101442872A Electrode assemblies and plasma processing chambers incorporating the same |
| 05/27/2009 | CN101441986A Surface treatment device and manufacture method of lower electrode assembly body of the device |
| 05/27/2009 | CN101441983A Plasma confinement apparatus and semiconductor processing equipment applying the same |
| 05/27/2009 | CN101441982A Chamber lining and plasma processing apparatus |
| 05/27/2009 | CN101441970A Sample platform for observing silicon chip sample of scanning electron microscope |
| 05/27/2009 | CN101440484A Induction coupling plasma processing apparatus and method |
| 05/27/2009 | CN100492600C Plasma processing apparatus |
| 05/27/2009 | CN100492598C Method and equipment for etching substrate characteristic using alternative deposit/etching procedure |
| 05/27/2009 | CN100492584C Ion beam incident angle detector for ion implant systems |
| 05/26/2009 | US7539340 Apparatus and method for three-dimensional coordinate measurement |
| 05/26/2009 | US7538333 Contactless charge measurement of product wafers and control of corona generation and deposition |
| 05/26/2009 | US7538332 Method of Z-lift electrostatic nanolithography |
| 05/26/2009 | US7538323 Interferometer |
| 05/26/2009 | US7538320 Ion detection device and method with compressing ion-beam shutter |
| 05/26/2009 | US7537940 Method of manufacturing electronic device capable of controlling threshold voltage and ion implanter controller and system that perform the method |
| 05/26/2009 | US7537708 Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface |
| 05/26/2009 | US7537676 Cathode apparatus to selectively bias pallet during sputtering |
| 05/26/2009 | US7537672 Apparatus for plasma processing |
| 05/22/2009 | WO2009064397A2 Directed-energy systems and methods for disrupting electronic circuits |
| 05/22/2009 | WO2009062929A2 Beam device and system comprising a particle beam device and an optical microscope |
| 05/22/2009 | WO2009062845A2 Method and generator circuit for production of plasmas by means of radio-frequency excitation |
| 05/22/2009 | WO2009025394A3 Plasma processing device |
| 05/21/2009 | US20090126629 Film-forming system and film-forming method |
| 05/20/2009 | EP2061068A1 System for processing an object |
| 05/20/2009 | EP2061067A2 Beam device and system comprising a particle beam device and an optical microscope |
| 05/20/2009 | EP2061066A2 System and method for processing an object with a charged particle beam |
| 05/20/2009 | EP2061064A1 Electron source |
| 05/20/2009 | EP2060898A2 Method and system for sample preparation |
| 05/20/2009 | EP1695038A4 Controlling the flow of vapors sublimated from solids |
| 05/20/2009 | DE102007054392A1 Selbstadaptivität von Rasterelektronenmikroskopen Self-adaptivity of scanning electron microscopes |
| 05/20/2009 | CN201242995Y Plasma generator for sterilizing gas |
| 05/20/2009 | CN101437605A Method and apparatus for nanopowder and micropowder production using axial injection plasma spray |
| 05/20/2009 | CN101437354A Plasma processing apparatus |
| 05/20/2009 | CN101437352A Plasma relay apparatus |
| 05/20/2009 | CN101436523A Detection system and method for accurately measuring ion beam spot width |
| 05/20/2009 | CN101436506A Motorized manipulator for positioning a tem specimen |
| 05/20/2009 | CN101435075A Plasma processing gas supply member |