| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 11/26/2009 | WO2009141428A1 Imaging system |
| 11/26/2009 | WO2009141143A1 Plasma stamp, plasma treatment device, method for plasma treatment and method for producing a plasma stamp |
| 11/26/2009 | WO2009122145A3 Phase plate for electron microscope |
| 11/26/2009 | WO2009053689A3 Ion beam extraction assembly in an ion implanter |
| 11/26/2009 | US20090291564 Apparatus and method for plasma processing |
| 11/26/2009 | US20090289186 Small electron gun |
| 11/26/2009 | US20090289035 Plasma Processing Apparatus And Plasma Processing Method |
| 11/26/2009 | DE102008014578B3 Streufeldarme Magnetfalle sowie diese enthaltender Röntgendetektor Stray field magnetic trap arms and those containing X-ray detector |
| 11/25/2009 | EP2124245A1 Ultra high precision measurement tool |
| 11/25/2009 | EP2124244A1 Ultra high precision measurement tool with control loop |
| 11/25/2009 | EP2123791A1 Deep-pot-shaped copper sputtering target and process for producing the same |
| 11/25/2009 | EP2122658A2 Power source arrangement for multiple-target sputtering system |
| 11/25/2009 | EP2122657A1 Method for controlling ion energy in radio frequency plasmas |
| 11/25/2009 | EP2122656A1 Novel plasma system for improved process capability |
| 11/25/2009 | EP2122655A2 High throughput sem tool |
| 11/25/2009 | EP2122006A2 Methods and apparatus for forming diamond-like coatings |
| 11/25/2009 | EP1949408B1 Method and device for colouring a metal strip in vacuum by magnetron sputtering |
| 11/25/2009 | EP1110232B1 Automated set up of an energy filtering transmission electron microscope |
| 11/25/2009 | CN201352541Y Plasma treatment system |
| 11/25/2009 | CN101589451A RF substrate bias with high power impulse magnetron sputtering (HIPIMS) |
| 11/25/2009 | CN101589450A Arc suppression and pulsing in high power impulse magnetron sputtering (HIPIMS) |
| 11/25/2009 | CN101589449A Technique for improving the performance and extending the lifetime of an ion source with gas dilution |
| 11/25/2009 | CN101587821A Electrode plate |
| 11/25/2009 | CN101587820A Plasma etching method and device for improving depth difference of grooves |
| 11/25/2009 | CN101587815A Double-sided ion source |
| 11/25/2009 | CN101587814A A plasma processing apparatus and a processed air supply apparatus it uses |
| 11/25/2009 | CN101587813A A loading station mechanism, a plasma processing apparatus and a pressure exertion method |
| 11/25/2009 | CN101587156A Method and apparatus for measuring electron density of plasma and plasma processing apparatus |
| 11/25/2009 | CN100562974C Etching reaction system |
| 11/24/2009 | US7622725 Impurity introducing apparatus and impurity introducing method |
| 11/24/2009 | US7622714 Standard specimen for a charged particle beam apparatus, specimen preparation method thereof, and charged particle beam apparatus |
| 11/24/2009 | US7622151 Method of plasma enhanced chemical vapor deposition of diamond using methanol-based solutions |
| 11/19/2009 | WO2009139461A1 Electrode unit and charged particle beam device |
| 11/19/2009 | WO2009138348A1 A rotatable sputtering magnetron with high stiffness |
| 11/19/2009 | WO2009138134A1 Particle radiation unit having cleaning device |
| 11/19/2009 | WO2009115838A3 Specimen holder assembly |
| 11/19/2009 | WO2008110151A3 Method and device for the plasma-assisted surface treatment of large-volume components |
| 11/19/2009 | US20090285998 Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method |
| 11/19/2009 | US20090283705 Ion implanter for photovoltaic cell fabrication |
| 11/19/2009 | DE112008000170T5 Rasterelektronenmikroskop mit Längenmessfunktion und Größenmessverfahren Scanning electron microscope with length measurement function and size measurement method |
| 11/19/2009 | DE102009019426A1 Verfahren zum Inspizieren der Einregelzeit eines Ablenkungsverstärkers und Verfahren zum Beurteilen des Versagens eines Ablenkungsverstärkers A method for inspecting the settling time of a deflection amplifier and method for judging the failure of a deflection amplifier |
| 11/19/2009 | DE102008023027A1 Electrode arrangement for plasma-supported, magnetically-guided deposition or removal of thin layers on/from substrate surface in vacuum, has insulated element arranged in intermediate space between bases of backplate electrode and screen |
| 11/19/2009 | DE102008022145A1 Vorrichtung und Verfahren zum Hochleistungs-Puls-Gasfluß-Sputtern Apparatus and method for high-power pulse sputtering gas flow |
| 11/19/2009 | DE102005058207B4 Therapeutische Teilchenstrahl-Vorrichtung und Verfahren zur Erzeugung einer spiralförmigen Strahltrajektorie Therapeutic particle beam device and method for generating a spiral-shaped beam trajectory |
| 11/18/2009 | EP2120254A2 Plasma processing apparatus |
| 11/18/2009 | EP2119811A1 Continuous film forming apparatus |
| 11/18/2009 | EP2119810A2 Magnetron sputtering source |
| 11/18/2009 | EP2119526A1 Method of and apparatus for removal of surface oxides by electron attachment using two groups of electrodes electrically connected to opposed sources |
| 11/18/2009 | EP0847590B1 A scanning probe microscope having automatic probe exchange and alignment |
| 11/18/2009 | CN201348980Y Special composite support for scanning electronic microscope sample stages |
| 11/18/2009 | CN101584256A Device for forming a film by deposition from a plasma |
| 11/18/2009 | CN101584020A Method of forming a film by deposition from a plasma |
| 11/18/2009 | CN101584019A Magnetic monitoring of a Faraday cup for an ion implanter |
| 11/18/2009 | CN101584018A Ion implantation device with a dual pumping mode and method thereof |
| 11/18/2009 | CN101584017A Techniques for confining electrons in an ion implanter |
| 11/18/2009 | CN101583737A Film deposition of amorphous films by electron cyclotron resonance |
| 11/18/2009 | CN101582375A Capacity coupling plasma reactor with temperature uniform distribution wafer supporting |
| 11/18/2009 | CN101582367A Pulse type large beam spot electronic beam generating device |
| 11/18/2009 | CN101582366A Nonmagnetic bimetallic strip driver used in transmission electron microscope |
| 11/18/2009 | CN101582364A Double cup cover ion source filament seat structure for preventing metal spraying |
| 11/18/2009 | CN101580267A Method for growing nanometer zinc oxide structure through low-temperature heating of zinc and catalyst and application thereof |
| 11/18/2009 | CN100562209C Power supply unit for generating plasma and plasma apparatus including the same |
| 11/18/2009 | CN100561680C Plasma processing apparatus, process vessel for plasma processing apparatus and dielectric plate |
| 11/18/2009 | CN100561670C Plasma doping method |
| 11/18/2009 | CN100561655C A measurement method for plasma dynamic sheath layer diagnosis |
| 11/17/2009 | US7619729 Method for detecting particles and defects and inspection equipment thereof |
| 11/17/2009 | US7619230 Charged particle beam writing method and apparatus and readable storage medium |
| 11/17/2009 | US7619228 Technique for improved ion beam transport |
| 11/17/2009 | US7619225 Multifunction electron microscope specimen holder |
| 11/17/2009 | US7619219 Scanning electron microscope |
| 11/17/2009 | US7619218 Charged particle optical apparatus with aberration corrector |
| 11/17/2009 | US7619199 Time-resolved measurement apparatus and position-sensitive election multiplier tube |
| 11/17/2009 | US7618686 Method and apparatus for sequential plasma treatment |
| 11/12/2009 | WO2009136441A1 Electron beam lithography system and method for electron beam lithography |
| 11/12/2009 | WO2009135919A1 A system for analysing plasma |
| 11/12/2009 | WO2009135652A1 Device and method for high-performance pulsed gas flow sputtering |
| 11/12/2009 | WO2009135471A1 Plasma generator and method for controlling a plasma generator |
| 11/12/2009 | WO2009117077A3 Method and apparatus allowing simultaneous direct observation and electron capture of scintillation images in an electron microscope |
| 11/12/2009 | US20090278287 Substrate processing with reduced warpage and/or controlled strain |
| 11/12/2009 | US20090278059 Apparatus for detecting film delamination and a method thereof |
| 11/12/2009 | US20090277585 Plasma processing appratus and method and apparatus for measuring dc potential |
| 11/12/2009 | DE102008018609A1 Antriebsendblock für ein rotierendes Magnetron Drive end block for a rotating magnetron |
| 11/11/2009 | EP2117035A1 Mask for multicolumn electron beam exposure, electron beam exposure device and exposure method employing mask for multicolumn electron beam exposure |
| 11/11/2009 | EP2117029A1 Device for modifying substrate surfaces |
| 11/11/2009 | EP2116113A1 Door for vacuum chamber |
| 11/11/2009 | EP1665321B1 A method for measuring diffraction patterns from a transmission electron microscopy to determine crystal structures and a device therefor |
| 11/11/2009 | CN101578683A Method and apparatus for forming a film by deposition from a plasma |
| 11/11/2009 | CN101578682A Technique for reducing magnetic fields at an implant location |
| 11/11/2009 | CN101578681A Techniques for providing ion source feed materials |
| 11/11/2009 | CN101578680A Techniques for removing molecular fragments from an ion implanter |
| 11/11/2009 | CN101578388A Film deposition of amorphous films with a graded bandgap by electron cyclotron resonance |
| 11/11/2009 | CN101577211A Reaction chamber component resisting plasma corrosion, preparation method thereof and plasma reaction chamber comprising same |
| 11/11/2009 | CN100559546C Hollow type cathode discharging device |
| 11/11/2009 | CN100559155C Method for the removal of a microscopic sample from a substrate |
| 11/11/2009 | CN100558931C Ion implantation method and ion implantation device |
| 11/11/2009 | CN100558849C Luminous body, electron beam detector using the same, scanning electron microscope, and mass analysis device |
| 11/10/2009 | USRE40963 Positioning substrate in processing chamber, supplying high frequency power to spiral antenna generating induced electric field within, generating plasma and shaping electric field uniform distribution |
| 11/10/2009 | US7615764 Information acquisition apparatus, cross section evaluating apparatus, cross section evaluating method, and cross section working apparatus |
| 11/10/2009 | US7615763 System for magnetic scanning and correction of an ion beam |
| 11/10/2009 | US7615747 Sampling feedback system |