| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 09/22/2009 | US7592607 Device for treating a flowing fluid |
| 09/22/2009 | US7592591 X-ray analyzer using electron beam |
| 09/22/2009 | US7592590 Charged particle beam device with detection unit switch and method of operation thereof |
| 09/22/2009 | US7592586 Mapping-projection-type electron beam apparatus for inspecting sample by using electrons reflected from the sample |
| 09/22/2009 | US7592564 Plasma generation and processing with multiple radiation sources |
| 09/22/2009 | US7592261 Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system |
| 09/22/2009 | US7592103 Electron beam writing method and lithography mask manufacturing method |
| 09/22/2009 | US7591923 Apparatus and method for use of optical system with a plasma processing system |
| 09/17/2009 | WO2009113169A1 Multi-column electron beam photolithography system |
| 09/17/2009 | WO2009113149A1 Device for measuring pattern length and method for measuring pattern length |
| 09/17/2009 | WO2009112416A1 Low stray field magnetic traps and x-ray detectors comprising them |
| 09/17/2009 | WO2009112053A1 Plasma system |
| 09/17/2009 | WO2009062845A3 Method and generator circuit for production of plasmas by means of radio-frequency excitation |
| 09/17/2009 | US20090233442 Method and apparatus for production of metal film or the like |
| 09/17/2009 | US20090233438 Self-ionized and inductively-coupled plasma for sputtering and resputtering |
| 09/17/2009 | US20090230329 Ion implantation method |
| 09/17/2009 | US20090229758 Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same |
| 09/17/2009 | US20090229755 Plasma processing apparatus |
| 09/17/2009 | US20090229521 Method and device for microwave plasma deposition of a coating on a thermoplastic container surface |
| 09/17/2009 | CA2718253A1 Plasma system |
| 09/16/2009 | EP2101343A2 Scanning transmission electron microscope and method of aberration correction therefor |
| 09/16/2009 | EP2100485A1 Apparatus and method for plasma arc coating |
| 09/16/2009 | EP2100322A1 Vacuum coating unit for homogeneous pvd coating |
| 09/16/2009 | EP1410698B1 High-frequency matching network |
| 09/16/2009 | EP0807964B1 Device for treating planar elements with a plasma jet |
| 09/16/2009 | CN101536136A Method and device for the cold-plasma deposition of a boundary layer and machine using such a device |
| 09/16/2009 | CN101533765A Vacuum processing system being able to carry process object into and out of vacuum chamber |
| 09/16/2009 | CN100542373C Plasma generator |
| 09/16/2009 | CN100541731C Method and apparatus for process control in time division multiplexed (TDM) etch processes |
| 09/16/2009 | CN100540726C Modular device for surface coating |
| 09/15/2009 | US7589335 Charged-particle beam pattern writing method and apparatus and software program for use therein |
| 09/15/2009 | US7589333 Methods for rapidly switching off an ion beam |
| 09/15/2009 | US7588799 Metal film production apparatus |
| 09/15/2009 | US7587989 Plasma processing method and apparatus |
| 09/11/2009 | WO2009111454A1 Xrf system having multiple excitation energy bands in highly aligned package |
| 09/11/2009 | WO2009111149A1 Gas field ion source with coated tip |
| 09/11/2009 | WO2009068763A4 Method, device and system for measuring nanoscale deformations |
| 09/11/2009 | CA2753990A1 Xrf system having multiple excitation energy bands in highly aligned package |
| 09/10/2009 | US20090223928 Inductively coupled plasma processing apparatus |
| 09/10/2009 | US20090223633 Apparatus And Method For Plasma Etching |
| 09/10/2009 | DE4428992B4 CVD-Beschichtungsvorrichtung und deren Verwendung CVD coating apparatus and the use thereof |
| 09/10/2009 | DE10231203B4 Targetträgeranordnung Target support assembly |
| 09/09/2009 | EP2099056A2 Electrostatic lens for ion beams |
| 09/09/2009 | EP2097921A1 Radio-frequency power supply arrangement, in particular a plasma supply device and method for operation of a radio-frequency power supply device |
| 09/09/2009 | EP2097920A1 Plasma supply device |
| 09/09/2009 | EP1943660B9 Charged particle beam exposure system |
| 09/09/2009 | CN101529551A Method and apparatus for preventing instabilities in radio-frequency plasma processing |
| 09/09/2009 | CN101529550A Method of controlling electron beam focusing of pierce type electron gun and control device therefor |
| 09/09/2009 | CN100538987C Symmetric beamline and methods for generating a mass-analyzed ribbon ion beam |
| 09/09/2009 | CN100538986C Fixing device and scanning electronic microscope for testing sample |
| 09/09/2009 | CN100538985C Charged particle beam column and method for directing a charged particle beam |
| 09/09/2009 | CN100537844C Method and apparatus for maintaining by-product volatility in deposition process |
| 09/09/2009 | CN100537830C Apparatus and methods for ionized deposition of a film or thin layer |
| 09/08/2009 | US7586210 Power delivery control and balancing between multiple loads |
| 09/08/2009 | US7586111 Ion implanter having combined hybrid and double mechanical scan architecture |
| 09/08/2009 | US7586110 Techniques for detecting ion beam contamination in an ion implantation system and interlocking same |
| 09/08/2009 | US7586109 Technique for improving the performance and extending the lifetime of an ion source with gas dilution |
| 09/08/2009 | US7586105 Microfabricated cantilever chip |
| 09/08/2009 | US7586101 Ion sources for ion implantation apparatus |
| 09/08/2009 | US7586093 Apparatus and method for inspecting a sample of a specimen by means of an electron beam |
| 09/08/2009 | US7586085 Photo-detection device and method |
| 09/08/2009 | US7585685 Method of determining wafer voltage in a plasma reactor from applied bias voltage and current and a pair of constants |
| 09/08/2009 | US7585386 Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method |
| 09/08/2009 | US7585384 Apparatus and method to confine plasma and reduce flow resistance in a plasma reactor |
| 09/03/2009 | WO2009108636A1 Method of fabricating microchannel plate devices with multiple emissive layers |
| 09/03/2009 | WO2009106942A1 Semiconductor growth system which includes a boron carbide reactor component |
| 09/03/2009 | WO2009106560A1 Projection lens arrangement |
| 09/03/2009 | WO2009106397A1 Projection lens arrangement |
| 09/03/2009 | WO2004010151A3 Method and system for electron density measurement |
| 09/03/2009 | US20090222753 Defect inspection tool and method of parameter tuning for defect inspection tool |
| 09/03/2009 | US20090218510 Specimen stage |
| 09/03/2009 | DE102009007319A1 Verfahren zum Herstellen einer Halbleitervorrichtung oder Photomaske A method of manufacturing a semiconductor device or a photomask |
| 09/03/2009 | DE102007028293B4 Plasmareaktor, dessen Verwendung und Verfahren zur Herstellung einkristalliner Diamantschichten A plasma reactor, its use and methods for preparing single-crystal diamond films |
| 09/02/2009 | EP2096663A2 Improved beam positioning for beam processing |
| 09/02/2009 | EP2096662A2 Charged particle beam device |
| 09/02/2009 | EP2096661A1 Cold cathode field emission electron gun and its application to electron beam instruments |
| 09/02/2009 | EP2096190A1 Coating apparatus for coating a web |
| 09/02/2009 | EP2095395A1 Method for identifying an arc discharge in a plasma process and arc discharge identification apparatus |
| 09/02/2009 | EP2095394A1 Decentralized plasma arc control |
| 09/02/2009 | EP2095393A2 Apparatus and method for surface finishing of metals and metalloids, metal oxides and metalloid oxides, and metal nitrides and metalloid nitrides |
| 09/02/2009 | EP2095392A1 Method for operating a plasma process and plasma system |
| 09/02/2009 | EP2095391A2 Particle-optical arrangement |
| 09/02/2009 | EP2095098A1 Sample support structure and methods |
| 09/02/2009 | EP1428006A4 Method and apparatus for scanned instrument calibration |
| 09/02/2009 | EP1252361B1 Method of cleaning and conditioning plasma reaction chamber |
| 09/02/2009 | CN101523546A Sensor for ion implanter |
| 09/02/2009 | CN101521980A Plasma processing apparatus and plasma processing method |
| 09/02/2009 | CN101521143A Lining mechanism for semiconductor processing equipment and manufacturing method thereof |
| 09/02/2009 | CN101521137A Integrally manual and automatic focusing electron microscope |
| 09/02/2009 | CN100536062C A source of liquid metal ions and a method for controlling the source |
| 09/01/2009 | US7583830 Method for correcting image artifacts due to detector overexposure in computed tomography |
| 09/01/2009 | US7582884 Charged particle beam exposure method and charged particle beam exposure device |
| 09/01/2009 | US7582845 Microwave plasma processing device and plasma processing gas supply member |
| 09/01/2009 | US7582569 Distributor and distributing method, plasma processing system and method, and process for fabricating LCD |
| 09/01/2009 | US7582186 Method and apparatus for an improved focus ring in a plasma processing system |
| 09/01/2009 | US7582185 Plasma-processing apparatus |
| 09/01/2009 | US7582182 Method and apparatus for measuring electron density of plasma and plasma processing apparatus |
| 09/01/2009 | US7581511 Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes |
| 08/27/2009 | WO2009105506A1 Ionization gauge with operational parameters and geometry designed for high pressure operation |
| 08/27/2009 | WO2009104957A1 Plasma treatment apparatus and method for treatment of a substrate with atmospheric pressure glow discharge electrode configuration |