| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 12/17/2009 | US20090309039 Application specific implant system and method for use in solar cell fabrications |
| 12/17/2009 | US20090309024 Electron-beam device and detector system |
| 12/17/2009 | DE19964472B4 Dichtmechanismus zum Abdichten einer Vakuumkammer Sealing mechanism for sealing a vacuum chamber |
| 12/16/2009 | EP2133903A2 Electron spectroscopy |
| 12/16/2009 | EP2132763A2 High throughput sem tool |
| 12/16/2009 | EP2132356A2 Pecvd process chamber backing plate reinforcement |
| 12/16/2009 | EP1869691B1 Gas shower plate for plasma processing apparatus |
| 12/16/2009 | EP1632994B1 Plasma processing apparatus and plasma processing method |
| 12/16/2009 | EP1557872B1 Plasma chemical vapor deposition method |
| 12/16/2009 | EP1306893B1 Plasma processing apparatus |
| 12/16/2009 | EP1293588B1 Plasma cvd apparatus and method |
| 12/16/2009 | CN101606217A Ion implanting apparatus |
| 12/16/2009 | CN101606216A Scanning electron microscope having length measuring function and sample dimension length measuring method |
| 12/16/2009 | CN101606215A Electron microscope and a method for measuring the defocus variation or the limit resolution |
| 12/16/2009 | CN101604654A Substrate support device and plasma processing apparatus |
| 12/16/2009 | CN101604610A Chamber and treating device |
| 12/16/2009 | CN101604609A Vacuum isolating valve |
| 12/16/2009 | CN100570818C Plasma processing apparatus |
| 12/16/2009 | CN100570805C Method and apparatus for preventing instabilities in radio-frequency plasma processing |
| 12/16/2009 | CN100570400C Correlated measuring method for ion average velocity of orienting plasma beam |
| 12/16/2009 | CN100570322C Clamp for preparing detection sample in use for electron microscope |
| 12/16/2009 | CN100569995C Magnet assembly for a planar magnetron |
| 12/16/2009 | CN100569354C Method for eliminating need of matching circuit for plasma srouce |
| 12/15/2009 | US7633242 Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge |
| 12/15/2009 | US7633069 Dual-mode electron beam column |
| 12/15/2009 | US7633064 Electric charged particle beam microscopy and electric charged particle beam microscope |
| 12/15/2009 | US7633061 Method and apparatus for measuring pattern dimensions |
| 12/15/2009 | US7632758 Process and apparatus for forming oxide film, and electronic device material |
| 12/15/2009 | US7632551 Method for preparing reactive layered material in graphite form |
| 12/15/2009 | US7632419 Apparatus and method for monitoring processing of a substrate |
| 12/15/2009 | US7632383 Vacuum sputtering cathode |
| 12/15/2009 | US7632379 Plasma source and plasma processing apparatus |
| 12/10/2009 | WO2009148881A2 Electron detection systems and methods |
| 12/10/2009 | WO2009148643A2 Microchannel plate devices with multiple emissive layers |
| 12/10/2009 | WO2009148305A1 Method and apparatus for plasma surface treatment of moving substrate |
| 12/10/2009 | WO2009147894A1 Ion beam device |
| 12/10/2009 | WO2009147202A1 Writing strategy |
| 12/10/2009 | WO2009127659A3 Beamlet blanker arrangement |
| 12/10/2009 | DE112007002604T5 Ionenstrahldiagnose Ion beam diagnostics |
| 12/10/2009 | DE102008027363A1 Device for treating large substrates, e.g. glass plates, in a plasma comprises a vacuum chamber with a gas-permeable plasma sleeve which imitates the outer contour of a substrate, an antenna arrangement and further plasma-producing units |
| 12/10/2009 | DE102008027322A1 Druckstufensystem für eine Vorrichtung zum Elektronenstrahlschweißen und Verfahren zum Elektronenstrahlschweißen Pressure stage system for a device for electron beam welding and electron beam welding method of |
| 12/10/2009 | DE102008025495A1 Electron microscopy system for examining surface of object, has voltage supply system configured to place electron beam source, radiant pipe and object in negative, positive and third potentials, respectively in operating mode |
| 12/09/2009 | EP2131385A1 Hybrid phase plate |
| 12/09/2009 | EP2131384A1 Hybrid phase plate |
| 12/09/2009 | EP2130414A1 Device and method for generating a plasma beam |
| 12/09/2009 | EP1697961B1 Method and apparatus for stabilizing a glow discharge plasma under atmospheric conditions |
| 12/09/2009 | EP1491255B1 Method for carrying out homogeneous and heterogeneous chemical reactions using plasma |
| 12/09/2009 | EP1362362B1 Wafer area pressure control |
| 12/09/2009 | EP1325509B1 Method and device for treating surfaces using a glow discharge plasma |
| 12/09/2009 | EP1303866B1 System and method for improving thin films by gas cluster ion be am processing |
| 12/09/2009 | EP1193746B1 Apparatus for plasma processing |
| 12/09/2009 | CN101601333A Apparatus and method for plasma arc coating |
| 12/09/2009 | CN101601118A Method and apparatuses for providing electrical contact for plasma processing applications |
| 12/09/2009 | CN101599408A Microwave plasma processing apparatus |
| 12/09/2009 | CN101599407A Array type microfaraday cage |
| 12/09/2009 | CN100568461C Magnetic field generator for generating magnetron plasma |
| 12/09/2009 | CN100568453C Plasma processing apparatus, gas dispensing device and gas delivery method |
| 12/09/2009 | CN100568099C Checking method and element manufacture method |
| 12/08/2009 | US7629598 Particle beam irradiation method using depth and lateral direction irradiation field spread and particle beam irradiation apparatus used for the same |
| 12/08/2009 | US7629590 Method and apparatus for extending equipment uptime in ion implantation |
| 12/08/2009 | US7629578 Charged particle beam device |
| 12/08/2009 | US7629033 Plasma processing method for forming a silicon nitride film on a silicon oxide film |
| 12/08/2009 | US7628864 Substrate cleaning apparatus and method |
| 12/03/2009 | WO2009145908A1 Control of particles on semiconductor wafers when implanting boron hydrides |
| 12/03/2009 | WO2009145798A2 Methods for modifying features of a workpiece using a gas cluster ion beam |
| 12/03/2009 | WO2009145556A2 Multipole lens for microcolumn |
| 12/03/2009 | WO2009118164A3 Nanoscale charge carrier mapping |
| 12/03/2009 | WO2009077450A3 Scanning charged particle beams |
| 12/03/2009 | WO2009043824A3 Device for deflecting or guiding in a particle beam |
| 12/03/2009 | US20090297863 Method for producing a hydrophobic coating, device for implementing said method and support provided with a hydrophobic coating |
| 12/03/2009 | US20090294698 Control of particles on semiconductor wafers when implanting boron hydrides |
| 12/03/2009 | US20090294690 Method of forming tem sample holder |
| 12/03/2009 | US20090294063 Plasma processing apparatus |
| 12/03/2009 | DE102008024486A1 Plasmastempel, Plasmabehandlungsvorrichtung, Verfahren zur Plasmabehandlung und Herstellungsverfahren für einen Plasmastempel Temple plasma, plasma treating apparatus, process for plasma treatment and manufacturing method for a plasma Temple |
| 12/03/2009 | DE102008001812A1 Positioniereinrichtung für ein Teilchenstrahlgerät Positioning device for a particle beam |
| 12/02/2009 | EP2128887A1 TEM with aberration corrector and phase plate |
| 12/02/2009 | EP2128886A1 Charged particle source with integrated energy filter |
| 12/02/2009 | EP2128885A1 Charged particle source with integrated energy filter |
| 12/02/2009 | EP2126955A1 Improved particle beam generator |
| 12/02/2009 | EP1872372B1 Laser irradiated hollow cylinder serving as a lens for ion beams |
| 12/02/2009 | EP1680800B1 Method and device for ion beam processing of surfaces |
| 12/02/2009 | EP1451848B1 Device and method for reducing the impact of distortions in a microscope |
| 12/02/2009 | EP1247295B1 Method and apparatus for detecting the endpoint of a photoresist stripping process |
| 12/02/2009 | CN101595548A Technique for using an improved shield ring in plasma-based ion implantation |
| 12/02/2009 | CN101593659A Precooling-type electron microscope sample desk |
| 12/02/2009 | CN101593658A Charged particle source with integrated energy filter |
| 12/02/2009 | CN100565787C Substrate support having temperature control surface |
| 12/02/2009 | CN100565775C Inductive plasma processor having coil with plural windings and method of controlling plasma density |
| 12/02/2009 | CN100565774C Electronic optical focusing, deflexion and signals collection method for the turning gear immerged object lens |
| 12/02/2009 | CN100565773C Emitter for an ion source and method of producing same |
| 12/02/2009 | CN100565772C Tapered carbon nano tube and electronic source used for the same |
| 12/02/2009 | CN100565246C Ion beam detection device and method, and ion beam irradiation device |
| 12/02/2009 | CN100564580C An end-block for carrying a rotatable target sputtering apparatus |
| 12/01/2009 | US7626166 Electron microscope |
| 12/01/2009 | US7626165 Focused ion beam apparatus and method of preparing/observing sample |
| 12/01/2009 | US7626163 Defect review method and device for semiconductor device |
| 12/01/2009 | US7625494 Plasma etching method and plasma etching unit |
| 12/01/2009 | US7625472 Plasma-assisted sputter deposition system |
| 12/01/2009 | US7625460 Multifrequency plasma reactor |
| 11/26/2009 | WO2009141655A2 Improved particle beam generator |