| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 01/12/2010 | US7645341 Showerhead electrode assembly for plasma processing apparatuses |
| 01/07/2010 | WO2010002632A1 System and method to fabricate magnetic random access memory |
| 01/07/2010 | WO2010001953A1 Electron source device, ion source device and charged particle source device |
| 01/07/2010 | WO2010001790A1 Charged particle beam device |
| 01/07/2010 | WO2009048850A3 Methods utilizing organosilicon compounds for manufacturing pre-seasoned components and plasma reaction apparatuses having pre-seasoned components |
| 01/07/2010 | US20100003826 Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof |
| 01/07/2010 | US20100003770 Elemental analysis method and semiconductor device manufacturing method |
| 01/07/2010 | US20100001183 Phase Plate, Imaging Method, and Electron Microscope |
| 01/07/2010 | DE112007002611T5 Mechanischer Scanner Mechanical scanner |
| 01/07/2010 | CA2727268A1 System and method to fabricate magnetic random access memory |
| 01/06/2010 | EP2141725A1 Surface emission type electron source and drawing device |
| 01/06/2010 | EP2140543A2 Magnetron plasma system |
| 01/06/2010 | EP2140476A1 Vacuum arc vaporization source, and an arc vaporization chamber with a vacuum arc vaporization source |
| 01/06/2010 | EP2140475A2 Anode for producing a plasma by way of electric arc discharges |
| 01/06/2010 | EP2140226A2 Nanorobot module automation and exchange |
| 01/06/2010 | EP1356501B1 Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof |
| 01/06/2010 | CN101620972A plasma processing apparatus |
| 01/06/2010 | CN100578732C Vacuum processing apparatus |
| 01/06/2010 | CN100578724C Vacuum sputtering cathode |
| 01/06/2010 | CN100577881C Method for removal of copper oxide film from substrate processing surface |
| 01/06/2010 | CN100577856C Power coupling for high-power sputtering |
| 01/06/2010 | CN100577855C Sputter method and device for the production of residual stress optimized coatings |
| 01/05/2010 | US7642532 Aperture design for improving critical dimension accuracy and electron beam lithography throughput |
| 01/05/2010 | US7642531 Apparatus and method for reducing particulate contamination in gas cluster ion beam processing equipment |
| 01/05/2010 | US7642530 Ion implantation apparatus and ion implanting method |
| 01/05/2010 | US7642529 Method of determining angle misalignment in beam line ion implanters |
| 01/05/2010 | US7642514 Charged particle beam apparatus |
| 01/05/2010 | US7642513 Device for obtaining the image and/or spectra of electron energy loss |
| 01/05/2010 | US7642180 Semiconductor on insulator vertical transistor fabrication and doping process |
| 01/05/2010 | US7641382 Leak judgment method, and computer-readable recording medium with recorded leak-judgment-executable program |
| 12/31/2009 | US20090325328 Plasma processing apparatus and plasma processing method |
| 12/31/2009 | US20090324848 Metal film production apparatus |
| 12/31/2009 | US20090323895 Method and Apparatus for Treating Workpieces |
| 12/31/2009 | US20090321634 Multi-beam ion/electron spectra-microscope |
| 12/31/2009 | US20090321632 System and method for reducing particles and contamination by matching beam complementary aperture shapes to beam shapes |
| 12/31/2009 | US20090321630 Post-decel magnetic energy filter for ion implantation systems |
| 12/31/2009 | US20090321018 Peripherally engaging electrode carriers and assemblies incorporating the same |
| 12/31/2009 | DE19756774B4 Mikrowellenplasmaquelle Microwave plasma source |
| 12/30/2009 | WO2009158249A2 Particle trap for a plasma source |
| 12/30/2009 | WO2009157358A1 Transmission electron microscope apparatus comprising electron spectroscope, sample holder, sample stage, and method for acquiring spectral image |
| 12/30/2009 | WO2009157182A1 Semiconductor inspecting apparatus |
| 12/30/2009 | WO2009157054A1 Multicolumn electron beam exposure apparatus and magnetic field generating apparatus |
| 12/30/2009 | WO2009156242A1 Method to produce a field-emitter array with controlled apex sharpness |
| 12/30/2009 | WO2009156121A1 Arrangement for coating tape-shaped film substrates |
| 12/30/2009 | WO2009131714A3 Low contamination, low energy beamline architecture for high current ion implantation |
| 12/30/2009 | EP2139300A1 Plasma electron temperature measuring method and device |
| 12/30/2009 | EP2139019A1 Method to produce a field-emitter array with controlled apex sharpness |
| 12/30/2009 | EP2137336A2 Method and arrangement for photon ablation of a target |
| 12/30/2009 | EP2137329A1 Melting furnace including wire-discharge ion plasma electron emitter |
| 12/30/2009 | EP1161309B1 A method for a repetitive ion beam processing with a by carbon containing ion beam |
| 12/30/2009 | CN201374309Y Device for scanning electron microscope or ion sputtering film coating and etching in vacuum equipment |
| 12/30/2009 | CN201374308Y Manual-auto integrated focusing electron microscope |
| 12/30/2009 | CN100576438C Plasma confinement baffle and flow equalizer for enhanced magnetic control of plasma radial distribution |
| 12/30/2009 | CN100576416C Configurable vacuum system and method |
| 12/30/2009 | CN100576415C Ion implantation device and method for obtaining uneven ion implant energy |
| 12/30/2009 | CN100576414C Electron beam irradiation device and drawing device |
| 12/29/2009 | US7639350 Apparatus and method for testing defects |
| 12/29/2009 | US7638780 UV cure equipment with combined light path |
| 12/29/2009 | US7638777 Imaging system with multi source array |
| 12/29/2009 | CA2507319C Method and device for microwave plasma deposition of a coating on a thermoplastic container surface |
| 12/24/2009 | US20090319031 Bioabsorbable Polymeric Stent With Improved Structural And Molecular Weight Integrity |
| 12/24/2009 | US20090317565 Plasma cvd equipment |
| 12/24/2009 | US20090314963 Method for forming trench isolation |
| 12/24/2009 | US20090314962 Method and apparatus for controlling beam current uniformity in an ion implanter |
| 12/24/2009 | US20090314956 Writing utensil sterilization apparatus |
| 12/24/2009 | US20090314435 Plasma processing unit |
| 12/23/2009 | WO2009155275A1 Sample imaging with charged particles |
| 12/23/2009 | WO2009155272A2 Cross-section systems and methods |
| 12/23/2009 | WO2009155266A1 Apparatus and method for wafer level arc detection |
| 12/23/2009 | WO2009155166A2 Techniques for measuring ion beam emittance |
| 12/23/2009 | WO2009154954A2 Isotope ion microscope methods and systems |
| 12/23/2009 | WO2009154953A2 Sample inspection methods, systems and components |
| 12/23/2009 | WO2009154631A1 Ion sources, systems and methods |
| 12/23/2009 | WO2009153939A1 Charged particle beam apparatus, and method of controlling the same |
| 12/23/2009 | EP2136388A2 Deposition of Materials |
| 12/23/2009 | EP2135625A1 Microwave plasma sterilizing device and method |
| 12/23/2009 | EP2135493A1 A plasma system |
| 12/23/2009 | EP1494512B1 Ecr plasma source and ecr plasma device |
| 12/23/2009 | EP1349698B1 Friction fit target assembly for high power sputtering operation |
| 12/23/2009 | EP1336191B1 Stepped upper electrode for plasma processing uniformity |
| 12/23/2009 | CN101609790A Processing device |
| 12/23/2009 | CN101609780A Microwave plasma processing apparatus and method of supplying microwaves using the apparatus |
| 12/23/2009 | CN101609779A Focus ring and plasma processing apparatus |
| 12/23/2009 | CN101609771A Method for preparing transmission electron microscope micro-grids |
| 12/23/2009 | CN100573829C Silicon slice etching equipment |
| 12/23/2009 | CN100573827C Electromagnetic field supply apparatus and plasma processing device |
| 12/23/2009 | CN100573816C Reaction cavity lining and reaction cavity including the same |
| 12/23/2009 | CN100573803C Vacuum processing chamber for very large area substrates |
| 12/23/2009 | CN100573802C Vacuum arc source comprising a device for generating a magnetic field |
| 12/23/2009 | CN100573801C Motioning equipment for electron column |
| 12/23/2009 | CN100573800C Rod shaped probe type DC gas activation device in low pressure |
| 12/23/2009 | CN100573777C Field emission electronic source and its manufacturing method |
| 12/22/2009 | US7635851 Electron beam apparatus and method of generating an electron beam irradiation pattern |
| 12/22/2009 | US7635850 Ion implanter |
| 12/17/2009 | WO2009151458A1 Ion sources, systems and methods |
| 12/17/2009 | WO2009150556A1 A device for and a method of monitoring an etching procedure |
| 12/17/2009 | WO2009150226A2 Apparatus and method for the treatment of semiconductor substrates |
| 12/17/2009 | WO2009150080A1 Sensor head for an x-ray detector and x-ray detector containing said sensor head |
| 12/17/2009 | WO2009149526A1 Plasma process and reactor for treating metallic pieces |
| 12/17/2009 | US20090311866 Method and apparatus for production of metal film or the like |