| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 10/14/2009 | CN100550272C Process for endpoint detection in processing chambers |
| 10/14/2009 | CN100550271C Showerhead electrode design for semiconductor processing reactor |
| 10/14/2009 | CN100550270C High resolution atom probe |
| 10/13/2009 | US7602484 Method and apparatus for performing limited area spectral analysis |
| 10/13/2009 | US7601976 Dual beam system |
| 10/13/2009 | US7601972 Inspection system by charged particle beam and method of manufacturing devices using the system |
| 10/13/2009 | US7601971 Charged beam gun |
| 10/13/2009 | US7601969 Illumination condenser for a particle optical projection system |
| 10/13/2009 | US7601956 Method for measuring diffraction patterns from a transmission electron microscopy to determine crystal structures and a device therefor |
| 10/13/2009 | US7601953 Systems and methods for a gas field ion microscope |
| 10/13/2009 | US7601619 Method and apparatus for plasma processing |
| 10/13/2009 | US7601469 Plasma etching chamber and method for manufacturing photomask using the same |
| 10/13/2009 | US7601405 DLC coating system and process and apparatus for making coating system |
| 10/13/2009 | US7601241 Plasma processing apparatus and plasma processing method |
| 10/13/2009 | US7601240 Disturbance-free, recipe-controlled plasma processing system and method |
| 10/08/2009 | WO2009123311A1 Diffraction image capturing method and charged particle beam device |
| 10/08/2009 | WO2009122964A1 Ion implanter, ion implantation method and program |
| 10/08/2009 | WO2009122555A1 Manufacturing method of semiconductor device, method for adjusting ion beam, and ion implantation apparatus |
| 10/08/2009 | WO2009122145A2 Phase plate for electron microscope |
| 10/08/2009 | WO2009080707A3 Methods and systems for removing a material from a sample |
| 10/08/2009 | US20090252886 System and method for nanotube growth via ion implantation using a catalytic transmembrane |
| 10/08/2009 | US20090250626 Liquid sanitization device |
| 10/08/2009 | US20090250444 Microwave plasma processing device |
| 10/08/2009 | DE102009014067A1 Plasmabearbeitungsvorrichtung The plasma processing apparatus |
| 10/07/2009 | EP2107593A2 Apparatus for depositing silicon-based thin film and method for depositing silicon-based thin film |
| 10/07/2009 | EP2107592A2 Apparatus for mass-producing sulicon-based thin film and method for mass-producing silicon-based thin film |
| 10/07/2009 | EP2107591A1 Multistage gas cascade amplifier |
| 10/07/2009 | EP2107590A2 Aberration corrector for transmission electron microscope |
| 10/07/2009 | EP2106677A1 Rf power amplifier stability network |
| 10/07/2009 | EP2106555A2 Method for s/tem sample analysis |
| 10/07/2009 | EP2106457A1 Method for the production of a directional layer by means of cathode sputtering, and a device for carrying out the method |
| 10/07/2009 | EP1673488B1 Modular device for surface coating |
| 10/07/2009 | EP1438734B1 Methods and apparatus for plasma doping and ion implantation in an integrated processing system |
| 10/07/2009 | EP1359236B1 Sputter film forming method |
| 10/07/2009 | EP1183707B1 Apparatus and methods for secondary electron emission microscopy with dual beam |
| 10/07/2009 | CN101553897A New and improved beam line architecture for ion implanter |
| 10/07/2009 | CN101553074A 顶板 Roof |
| 10/07/2009 | CN101552183A Plasma processing apparatus |
| 10/07/2009 | CN101552182A Marginal ring mechanism used in semiconductor manufacture technology |
| 10/06/2009 | US7598498 Electric field lens and ion implanter having the same |
| 10/06/2009 | US7598497 Charged particle beam scanning method and charged particle beam apparatus |
| 10/06/2009 | US7598496 Charged-particle beam system |
| 10/06/2009 | US7598492 Charged particle microscopy using super resolution |
| 10/06/2009 | US7598471 Method of electric discharge machining a cathode for an electron gun |
| 10/01/2009 | WO2009119504A1 Electrostatic lens for charged particle radiation |
| 10/01/2009 | WO2009119074A1 Spin polarized electron source |
| 10/01/2009 | WO2009119060A1 Ion source |
| 10/01/2009 | US20090246655 Electron beam writing apparatus and method |
| 10/01/2009 | US20090242808 Techniques for improved uniformity tuning in an ion implanter system |
| 10/01/2009 | US20090242800 Electron-beam dimension measuring apparatus and electron-beam dimension measuring method |
| 10/01/2009 | US20090242795 Cryo-charging specimen holder for electron microscope |
| 10/01/2009 | US20090242791 Two-grid ion energy analyzer and methods of manufacturing and operating |
| 10/01/2009 | US20090242790 Ion energy analyzer and methods of manufacturing and operating |
| 10/01/2009 | US20090242741 Solid-state image capturing apparatus, manufacturing method for the solid-state image capturing apparatus, and electronic information device |
| 10/01/2009 | DE102008016923A1 Vorrichtung zur Plasmabehandlung von Werkstücken Apparatus for plasma treatment of workpieces |
| 10/01/2009 | DE102007048559B4 Vorrichtung zur Strahlbearbeitung von Werkstücken, Ionenstrahlbearbeitungsanlage Apparatus for beam machining of workpieces, ion beam machining system |
| 09/30/2009 | EP2105944A1 Environmental cell for a particle-optical apparatus |
| 09/30/2009 | EP2105943A2 Environmental cell for a particle-optical apparatus |
| 09/30/2009 | EP2105727A1 Scanning electron microscope comprising a film for holding a sample and a dish for receiving sample material from a damaged film |
| 09/30/2009 | EP2104864A2 Method for creating s/tem sample and sample structure |
| 09/30/2009 | EP1982347B1 Device for coupling between a plasma antenna and a power signal generator |
| 09/30/2009 | CN201319363Y Electronic microscope with directly-inserted display screen device |
| 09/30/2009 | CN101546702A Plasma processing device and insulation cover plate |
| 09/30/2009 | CN101546685A Plasma processing apparatus and plasma etching method |
| 09/30/2009 | CN101546134A Electron beam writing apparatus and method |
| 09/30/2009 | CN100546098C Distributor and distribution method, plasma handling system and method, and method for manufacturing LCD |
| 09/29/2009 | US7595488 Method and apparatus for specifying working position on a sample and method of working the sample |
| 09/29/2009 | US7595482 Standard component for length measurement, method for producing the same, and electron beam metrology system using the same |
| 09/29/2009 | US7595098 Method and apparatus for depositing material on a substrate |
| 09/29/2009 | US7595096 Method of manufacturing vacuum plasma treated workpieces |
| 09/29/2009 | US7594479 Plasma CVD device and discharge electrode |
| 09/24/2009 | WO2009117412A1 Specimen holder used for mounting samples in electron microscopes |
| 09/24/2009 | WO2009117077A2 Method and apparatus allowing simultaneous direct observation and electron capture of scintillation images in an electron microscope |
| 09/24/2009 | WO2009116634A1 Microstructure inspection method, microstructure inspection apparatus, and microstructure inspection program |
| 09/24/2009 | WO2009115838A2 Specimen holder assembly |
| 09/24/2009 | WO2009115135A1 Method for controlling ion energy in radio frequency plasmas |
| 09/24/2009 | WO2009085165A3 Ionization gauge having electron multiplier cold emmission source |
| 09/24/2009 | WO2009073316A3 Method and apparatus for controlling a gas cluster ion beam formed from gas mixture |
| 09/24/2009 | WO2008015700A3 A method for nanopositioning object and device thereof |
| 09/24/2009 | US20090238443 Pattern measurement methods and pattern measurement equipment |
| 09/24/2009 | US20090236547 Extraction electrode system for high current ion implanter |
| 09/24/2009 | US20090236540 Stage and electron microscope apparatus |
| 09/24/2009 | US20090236521 Method and system for ultrafast photoelectron microscope |
| 09/24/2009 | US20090236218 Method for depositing multilayer coatings |
| 09/24/2009 | DE102008009410A1 Elektronenstrahlvorrichtung und Verfahren zum Justieren eines Elektronenstrahls, der von einer Elektronenstrahlvorrichtung erzeugt wird An electron beam apparatus and method for adjusting an electron beam generated by an electron beam device |
| 09/24/2009 | DE102004011118B4 Extraktionselektrode mit Lochblendenmuster für eine Plasmastrahlquelle Extraction electrode aperture pattern for a plasma beam source |
| 09/24/2009 | CA2718546A1 Specimen holder assembly |
| 09/23/2009 | EP2102907A2 High-z structure and method for co-alignment of mixed optical and electron beam lithographic fabrication levels |
| 09/23/2009 | EP2102889A2 Rf substrate bias with high power impulse magnetron sputtering (hipims) |
| 09/23/2009 | EP2102888A2 Arc suppression and pulsing in high power impulse magnetron sputtering (hipims) |
| 09/23/2009 | EP2102887A1 Plasma generator and method for cleaning an object |
| 09/23/2009 | EP2102886A1 Electron microscope and a method for measuring the defocus variation or the limit resolution |
| 09/23/2009 | CN101542677A Device for the pre-treatment of substrates |
| 09/23/2009 | CN101542676A Method and device for etching a substrate by means of a plasma |
| 09/23/2009 | CN101542675A Ion beam accelerating apparatus with electrodes mounted in a movable mount |
| 09/23/2009 | CN101541140A Plasma treatment equipment and shielding ring thereof |
| 09/23/2009 | CN100543920C Charged particle beamlet exposure system |
| 09/23/2009 | CN100543582C Pattern size correcting device and pattern size correcting method |
| 09/22/2009 | US7594216 Method and system for forming a mask pattern, method of manufacturing a semiconductor device, system forming a mask pattern on data, cell library and method of forming a photomask |
| 09/22/2009 | US7592612 Method and apparatus for surface potential reflection electron mask lithography |