| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 02/25/2015 | EP2840588A1 Method for processing and/or for observing an object, and particle beam device for carrying out the method |
| 02/25/2015 | EP2839500A1 Microwave plasma generating device and method for operating same |
| 02/24/2015 | US8963337 Thin wafer support assembly |
| 02/24/2015 | US8963107 Beam line design to reduce energy contamination |
| 02/24/2015 | US8963102 Charged particle beam microscope, sample holder for charged particle beam microscope, and charged particle beam microscopy |
| 02/24/2015 | US8963101 Apparatus and method for thermal assisted desorption ionization systems |
| 02/24/2015 | US8963100 Nitrogen ions from a gas field ion source held at a pressure of 1.0 x 10^(-6) pa to 1.0 x 10^(-2) pa |
| 02/24/2015 | US8963099 Electrode of electrostatic lens and method of manufacturing the same |
| 02/24/2015 | US8963085 Photon induced near field electron microscope and biological imaging system |
| 02/24/2015 | US8963084 Contamination reduction electrode for particle detector |
| 02/24/2015 | US8963083 Switchable multi perspective detector, optics therefore and method of operating thereof |
| 02/24/2015 | US8963079 Systems and methods for transfer of ions for analysis |
| 02/24/2015 | US8962488 Synchronized radio frequency pulsing for plasma etching |
| 02/24/2015 | US8961894 Generation of microbiocide inside a package utilizing a controlled gas composition |
| 02/24/2015 | US8961888 Plasma generator |
| 02/24/2015 | US8961756 Ganged scanning of multiple magnetrons, especially two level folded magnetrons |
| 02/24/2015 | US8961745 Plant and method for producing a semiconductor film |
| 02/24/2015 | US8961737 Plasma processing apparatus |
| 02/24/2015 | US8961735 Plasma processing apparatus and microwave introduction device |
| 02/24/2015 | US8961694 Plasma generator and method for cleaning an object |
| 02/24/2015 | US8961693 Component supporting device |
| 02/24/2015 | US8961688 Method and device for plasma treating workpieces |
| 02/24/2015 | US8960235 Gas dispersion apparatus |
| 02/24/2015 | US8960124 Plasma processing apparatus and plasma processing method |
| 02/19/2015 | WO2015023026A1 Method and device for producing a transmission electron microscopy specimen |
| 02/19/2015 | WO2015023025A1 Method for producing transmission electron microscopy specimen using tripod polishing and focused ion beams |
| 02/19/2015 | WO2015022793A1 Charged particle beam device having a function cancelling mode and a function expanding mode |
| 02/19/2015 | WO2015022510A1 Electron microscopy sample support comprising porous metal foil |
| 02/19/2015 | WO2015022500A1 Graphene modification |
| 02/19/2015 | WO2015022166A1 Sputtering target, device for fastening a sputtering target, method for recognizing the release of a sputtering material and production method |
| 02/19/2015 | US20150050815 Semiconductor device manufacturing method, substrate processing method, and substrate processing apparatus |
| 02/19/2015 | US20150050750 Plasma processing method and plasma processing apparatus |
| 02/19/2015 | US20150050490 Low Stress Hard Coatings And Applications Thereof |
| 02/19/2015 | US20150048862 Detecting arcing using processing chamber data |
| 02/19/2015 | US20150048740 Sub-pulsing during a state |
| 02/19/2015 | US20150048739 Elongated Capacitively Coupled Plasma Source For High Temperature Low Pressure Environments |
| 02/19/2015 | US20150048735 Encapsulated magnetron |
| 02/19/2015 | US20150048254 Hybrid electrostatic lens with increased natural frequency |
| 02/19/2015 | US20150048248 Method for processing and/or for observing an object, and particle beam device for carrying out the method |
| 02/19/2015 | US20150048247 Scanning ion microscope and secondary particle control method |
| 02/19/2015 | US20150048052 Plasma processing apparatus |
| 02/19/2015 | US20150048049 Method and apparatus for forming a periodic pattern using a self-assembled block copolymer |
| 02/19/2015 | US20150047975 Sputtering target with backside cooling grooves |
| 02/19/2015 | US20150047974 Plasma processing apparatus and high frequency generator |
| 02/19/2015 | US20150047971 Sputtering target, method of manufacturing sputtering target, method of manufacturing barium titanate thin film, and method of manufacturing thin film capacitor |
| 02/19/2015 | US20150047786 Sealing groove methods for semiconductor equipment |
| 02/19/2015 | US20150047785 Plasma Processing Devices Having Multi-Port Valve Assemblies |
| 02/19/2015 | DE102013216857A1 Verfahren zum Bearbeiten und/oder zum Beobachten eines Objekts sowie Teilchenstrahlgerät zur Durchführung des Verfahrens Method for processing and / or for observing an object, as well as particle beam device for carrying out the method |
| 02/19/2015 | DE102013216303A1 Sputtertarget, Vorrichtung zum Befestigen eines Sputtertargets, Verfahren zum Erkennen des Lösens eines Sputtermaterials sowie Herstellungsverfahren Sputtering target device for fixing a sputtering target of the method for detecting detachment of a sputtering material and manufacturing method |
| 02/19/2015 | DE102011115913B4 Verfahren zum Fügen und Trennen von Werkstücken mit einem Elektronenstrahl im Nicht-Vakuum und Füge- und/oder Trenneinrichtung Method for joining and cutting workpieces with an electron beam in a vacuum and non-joining and / or separating device |
| 02/19/2015 | DE10038145C5 Einrichtung zur Behandlung von Werkstücken mit Elektronenstrahlen Apparatus for the treatment of work pieces using electron beams |
| 02/18/2015 | EP2838112A1 Etching method |
| 02/18/2015 | EP2838109A1 Method of using an environmental transmission electron microscope |
| 02/18/2015 | EP2838108A1 Method of using an environmental transmission electron microscope |
| 02/18/2015 | EP2838107A1 Circuit probe for charged particle beam system |
| 02/18/2015 | EP2837926A1 Detaching probe from TEM sample during sample preparation |
| 02/18/2015 | EP2837709A1 Method of manufacturing target for sputtering and method of manufacturing organic light-emitting display apparatus |
| 02/18/2015 | EP2836622A2 Apparatus for the growing diamonds by microwave plasma chemical vapour deposition process and substrate stage used therein |
| 02/17/2015 | US8959461 Pattern measurement device and pattern measurement method |
| 02/17/2015 | US8957959 Charged particle microscope and measurement image correction method thereof |
| 02/17/2015 | US8957572 Microplasma jet devices, arrays, medical devices and methods |
| 02/17/2015 | US8957395 Charged particle beam lithography system and target positioning device |
| 02/17/2015 | US8957394 Compact high-voltage electron gun |
| 02/17/2015 | US8957393 Particle beam irradiation apparatus and particle beam therapy system |
| 02/17/2015 | US8957390 Electron gun arrangement |
| 02/17/2015 | US8957389 Electromagnetic lens for electron beam exposure apparatus |
| 02/17/2015 | US8957372 Scanning electron microscope |
| 02/17/2015 | US8957371 Producing images of a specimen |
| 02/17/2015 | US8956820 Method for detecting cancer cells using vertically aligned carbon nanotubes |
| 02/17/2015 | US8956516 System and apparatus to facilitate physical vapor deposition to modify non-metal films on semiconductor substrates |
| 02/17/2015 | US8956515 Multilayer-film sputtering apparatus and method of forming multilayer film |
| 02/17/2015 | US8956512 Magnetron sputtering apparatus and film forming method |
| 02/17/2015 | US8956511 Method for producing a multilayer coating and device for carrying out said method |
| 02/17/2015 | US8956500 Methods to eliminate “M-shape” etch rate profile in inductively coupled plasma reactor |
| 02/17/2015 | US8956499 Plasma processing device |
| 02/17/2015 | US8956461 Apparatuses, systems and methods for rapid cleaning of plasma confinement rings with minimal erosion of other chamber parts |
| 02/17/2015 | US8955456 Microwave plasma reactor for manufacturing synthetic diamond material |
| 02/12/2015 | WO2015020309A1 Scanning electron microscope capable of adjusting beam spot and measuring method using same |
| 02/12/2015 | WO2015019665A1 Charged particle beam device comprising nanochip and gas supply mechanism |
| 02/12/2015 | WO2015019491A1 Charged particle beam generating device, charged particle beam device, sample processing method, and sample observation method |
| 02/12/2015 | US20150047079 Iridium Tip, Gas Field Ion Source, Focused Ion Beam Apparatus, Electron Source, Electron Microscope, Electron Beam Applied Analysis Apparatus, Ion-Electron Multi-Beam Apparatus, Scanning Probe Microscope, and Mask Repair Apparatus |
| 02/12/2015 | US20150044615 Drawing data generating method, processing apparatus, storage medium, drawing apparatus, and method of manufacturing article |
| 02/12/2015 | US20150044614 Drawing apparatus, and method of manufacturing article |
| 02/12/2015 | US20150044424 Bottom electrode and manufacturing method thereof |
| 02/12/2015 | US20150044390 Method of cleaning the filament and reactor's interior in facvd |
| 02/12/2015 | US20150041684 Charged particle beam writing apparatus and charged particle beam writing method |
| 02/12/2015 | US20150041676 Soundproof cover for charged-particle beam device, and charged-particle beam device |
| 02/12/2015 | US20150041672 Multi charged particle beam writing method, and multi charged particle beam writing apparatus |
| 02/12/2015 | US20150041671 Charged particle beam writing method and charged particle beam writing apparatus |
| 02/12/2015 | US20150041650 Gas Field Ionization Ion Source and Ion Beam Apparatus |
| 02/12/2015 | US20150041649 Pattern Dimension Measuring Device, Charged Particle Beam Apparatus, and Computer Program |
| 02/12/2015 | US20150041648 Pattern critical dimension measurement equipment and method for measuring pattern critical dimension |
| 02/12/2015 | US20150041647 Method of using an environmental transmission electron microscope |
| 02/12/2015 | US20150041646 Inspection system and inspection image data generation method |
| 02/12/2015 | US20150041645 Image acquisition apparatus, image acquisition method and defect inspection apparatus |
| 02/12/2015 | US20150041644 Electronic microscope, setting method of observation condition of electronic microscope, and observation method using electronic microscope |
| 02/12/2015 | US20150041643 Processing apparatus and method using a scanning electron microscope |
| 02/12/2015 | US20150041432 Self-sustained non-ambipolar direct current (dc) plasma at low power |
| 02/12/2015 | US20150041313 Silver-based cylindrical target and process for manufacturing same |
| 02/12/2015 | US20150041312 Li-CONTAINING PHOSPHORIC-ACID COMPOUND SINTERED BODY AND SPUTTERING TARGET, AND METHOD FOR MANUFACTURING SAID Li-CONTAINING PHOSPHORIC-ACID COMPOUND SINTERED BODY |