| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 02/02/2010 | US7655922 Techniques for confining electrons in an ion implanter |
| 02/02/2010 | US7655907 Charged particle beam apparatus and pattern measuring method |
| 02/02/2010 | US7655906 Method and apparatus for scanning and measurement by electron beam |
| 02/02/2010 | US7654224 Method and apparatus for cleaning a CVD chamber |
| 02/02/2010 | US7654159 MEMS nanoindenter |
| 01/28/2010 | WO2010011252A1 Method and apparatus for measurement of beam angle in ion implantation |
| 01/28/2010 | WO2010010771A1 Charged corpuscular ray apparatus |
| 01/28/2010 | US20100021655 plasma electrode |
| 01/28/2010 | US20100019172 Multi-column electron beam exposure apparatus and multi-column electron beam exposure method |
| 01/28/2010 | US20100019149 Mapping-projection-type electron beam apparatus for inspecting sample by using electrons emitted from the sample |
| 01/28/2010 | US20100019148 Inspection apparatus for circuit pattern |
| 01/28/2010 | US20100019147 Method and apparatus for charged particle beam inspection |
| 01/28/2010 | US20100018649 Plasma Processing Apparatus And Method |
| 01/28/2010 | US20100018464 Dlc coating system and process and apparatus for making coating system |
| 01/28/2010 | DE102008033904A1 Antriebsendblock für eine Magnetronanordnung mit einem rotierenden Target Drive end block for a magnetron with a rotating target |
| 01/28/2010 | DE102006009160B4 Anordnung für die Separation von Partikeln aus einem Plasma Arrangement for the separation of particles from a plasma |
| 01/27/2010 | EP2148359A2 Specimen holder, specimen inspection apparatus, and specimen inspection method |
| 01/27/2010 | EP2148354A1 Electron source |
| 01/27/2010 | EP2147452A2 Treatment system for flat substrates |
| 01/27/2010 | CN101636813A Novel plasma system for improved process capability |
| 01/27/2010 | CN101636812A Apparatus and method for surface finishing of metals and metalloids, metal oxides and metalloid oxides, and metal nitrides and metalloid nitrides |
| 01/27/2010 | CN101636811A Method of reducing particle contamination for ion implanters |
| 01/27/2010 | CN100585828C Substrate carrying platform, substrate processing device and temperature control method |
| 01/27/2010 | CN100585795C Chamber isolation valve RF grounding |
| 01/27/2010 | CN100585794C Method for replacing electrode assembly of plasma reaction chamber |
| 01/27/2010 | CN100585787C Method of determining dose uniformity of a scanning ion implanter |
| 01/27/2010 | CN100585786C Method for performing focusing in a particle-optical device with the aid of astigmatism in the particle beam |
| 01/27/2010 | CN100585785C Field emission electron gun and electron beam apparatus using the same |
| 01/27/2010 | CN100584387C Device for sterilizing objects |
| 01/26/2010 | US7652774 Interferometric endpoint determination in a substrate etching process |
| 01/26/2010 | US7652271 Charged-particle beam lithography with grid matching for correction of beam shot position deviation |
| 01/26/2010 | US7652269 Laser atom probe methods |
| 01/26/2010 | US7652265 Air treatment system |
| 01/26/2010 | US7652263 Focussing lens for charged particle beams |
| 01/26/2010 | US7651586 Particle removal apparatus and method and plasma processing apparatus |
| 01/26/2010 | US7651552 Gas port assembly |
| 01/26/2010 | US7650853 Device for applying electromagnetic microwave radiation in a plasma cavity |
| 01/21/2010 | WO2010008924A2 Increasing current in charged particle sources and systems |
| 01/21/2010 | WO2010008467A2 System and method for reducing particles and contamination by matching beam complementary aperture shapes to beam shapes |
| 01/21/2010 | WO2010008458A1 Post-decel magnetic energy filter for ion implantation systems |
| 01/21/2010 | WO2010008455A2 Low- inertia multi -axis multi -directional mechanically scanned ion implantation system |
| 01/21/2010 | WO2010008307A2 Electron detection unit and a scanning electron microscope |
| 01/21/2010 | WO2010007368A2 Ion source with device for oxidising a sample |
| 01/21/2010 | WO2009132822A3 Device and method for pretreating and coating bodies |
| 01/21/2010 | US20100015537 Beam dose computing method and writing method and record carrier body and writing apparatus |
| 01/21/2010 | US20100012861 Method and apparatus for measurement of beam angle in ion implantation |
| 01/21/2010 | DE112007003418T5 Elektronenkanone und Elektronenstrahlbelichtungsgerät Electron gun and electron beam exposure apparatus |
| 01/21/2010 | DE102008033902A1 Endblock für eine Magnetronanordnung mit einem rotierenden Target und Vakuumbeschichtungsanlage End block for a magnetron with a rotating target and vacuum coating system |
| 01/21/2010 | DE102008031846A1 Method for producing electron beam between cathode and anode, involves removing gases from inner area of housing, in which gases are ionized in active micro ion getter pump, where ionized gases are bonded |
| 01/21/2010 | CA2730782A1 Ion source with device for oxidising a sample |
| 01/20/2010 | EP2145717A1 Chamber assembly for an electron beam processing device with a slide and a rotating disc |
| 01/20/2010 | EP1964148B1 Fluorine based cleaning of an ion source |
| 01/20/2010 | EP1274877B1 A method and a device for determining the end point of a cleaning operation of a cvd apparatus |
| 01/20/2010 | CN201387866Y Plasma treatment device |
| 01/20/2010 | CN101630624A Dual frequency RF match |
| 01/20/2010 | CN101630623A Inspection apparatus by charged particle beam and method for manufacturing device using inspection apparatus |
| 01/20/2010 | CN101630622A Hybrid phase plate |
| 01/20/2010 | CN100583377C Controlled dose ion implantation |
| 01/20/2010 | CN100583376C Method of implanting a substrate and an ion implanter for performing the method |
| 01/20/2010 | CN100583375C Electrostatic lens for ion beams |
| 01/20/2010 | CN100583374C Portable electron microscope using micro-column |
| 01/20/2010 | CN100583373C Method and system for ion beam containment in an ion beam guide |
| 01/20/2010 | CN100583372C Electronic gun with oil immersion and water cooling device |
| 01/20/2010 | CN100582291C Mechanism for compensating the spacing between sputter magnetron and target |
| 01/19/2010 | US7649172 Charged particle beam equipment with magnification correction |
| 01/19/2010 | US7648916 Method and apparatus for performing hydrogen optical emission endpoint detection for photoresist strip and residue removal |
| 01/19/2010 | US7648611 Plasma etching equipment |
| 01/19/2010 | US7648610 Baffle plate, apparatus for producing the same, method of producing the same, and gas processing apparatus containing baffle plate |
| 01/19/2010 | US7647887 Thin film forming apparatus |
| 01/14/2010 | WO2010004275A2 Sample holder |
| 01/14/2010 | WO2010003266A1 Remote plasma cleaning method and apparatus for applying said method |
| 01/14/2010 | US20100007062 Method and device for producing three-dimensional objects |
| 01/14/2010 | US20100006779 Ion implantation apparatus and ion implantation method |
| 01/14/2010 | US20100006755 Charged particle beam alignment method and charged particle beam apparatus |
| 01/14/2010 | US20100006560 Substrate heating apparatus and substrate heating method |
| 01/14/2010 | US20100006227 Microwave Plasma Reactor |
| 01/14/2010 | DE102008033282A1 Verfahren zur Entfernung einer Oberflächenschicht, Formkörper und Verwendung des Formkörpers A process for removing a surface layer, molded articles and the use of the shaped body |
| 01/14/2010 | DE102008033280A1 Verfahren zur Modifizierung von expandiertem Graphit und Verwendung des modifizierten expandierten Graphits A method for the modification of expanded graphite and use of the modified expanded graphite |
| 01/13/2010 | EP2144274A1 Method of preparing an ultra sharp tip, apparatus for preparing an ultra sharp tip, and use of an apparatus |
| 01/13/2010 | EP2143126A2 Plasma source with segmented magnetron cathode |
| 01/13/2010 | EP2143125A1 Apparatus |
| 01/13/2010 | EP2142959A1 Triangulating design data and encoding design intent for microlithographic printing |
| 01/13/2010 | EP2142681A2 Arrangement for producing coatings on substrates in vacuo |
| 01/13/2010 | EP2142679A2 Method and device for the plasma-assisted surface treatment of large-volume components |
| 01/13/2010 | EP1216483B1 Electron-optical lens arrangement with a displaceable axis |
| 01/13/2010 | EP1204507B1 Arc-free electron gun |
| 01/13/2010 | EP0939969B1 Scanning electron microscope |
| 01/13/2010 | CN101627454A Plasma source with liner for reducing metal contamination |
| 01/13/2010 | CN101625954A Repairing method of electrostatic sucking electrode |
| 01/13/2010 | CN101625953A Substrate holder |
| 01/13/2010 | CN101625952A In-chamber member temperature control method, in-chamber member, substrate mounting table and plasma processing apparatus including same |
| 01/13/2010 | CN100580870C Heat-conducting gas supply mechanism, supply method and substrate processing device and method |
| 01/13/2010 | CN100580865C Apparatus and method for investigating or modifying surface with charged particle beam |
| 01/13/2010 | CN100580858C Microwave ion source |
| 01/12/2010 | US7646003 Focusing apparatus and lithography system using the same |
| 01/12/2010 | US7645999 Method and apparatus for creating a plasma |
| 01/12/2010 | US7645988 Substrate inspection method, method of manufacturing semiconductor device, and substrate inspection apparatus |
| 01/12/2010 | US7645526 Member for plasma etching device and method for manufacture thereof |
| 01/12/2010 | US7645495 Method and apparatus for treating a substrate |
| 01/12/2010 | US7645356 Method of processing wafers with resonant heating |