| Patents for G03F 9 - Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (10,803) |
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| 06/23/1992 | US5124562 Surface position detecting method at a predetermined and plurality of adjacent points |
| 06/23/1992 | US5123174 Positioning table |
| 06/09/1992 | US5120974 Position detecting method and device using image pickup of a mark |
| 06/09/1992 | US5120134 Exposure system including a device for analyzing an affect of a wafer resist upon a mark signal |
| 06/03/1992 | EP0488798A2 Position detecting method |
| 06/02/1992 | US5118957 Method and apparatus for precisely detecting surface position of a patterned wafer |
| 06/02/1992 | US5118953 Substrate alignment apparatus using diffracted and reflected radiation beams |
| 05/27/1992 | DE4037558A1 Device for stamping printing machine plates - comprises stamping tools with table and two side and one depth stops |
| 05/26/1992 | US5117254 Projection exposure apparatus |
| 05/20/1992 | EP0486316A2 Projection exposure method and apparatus |
| 05/19/1992 | US5114236 Position detection method and apparatus |
| 05/19/1992 | US5114235 Method of detecting positional deviation |
| 05/19/1992 | US5114223 Exposure method and apparatus |
| 05/14/1992 | WO1992008167A1 Proximity alignment using polarized illumination and double conjugate projection lens |
| 05/13/1992 | EP0484665A2 Pattern shift measuring method |
| 05/12/1992 | US5112133 Alignment system |
| 05/07/1992 | DE4135762A1 Irradiator with mask and object holders - has aligning travelling tables, each with narrow front section for preventing collision |
| 05/05/1992 | US5111240 Method for forming a photoresist pattern and apparatus applicable therewith |
| 04/29/1992 | EP0482553A2 Measuring device for x,y, gamma alignment tables |
| 04/21/1992 | US5106432 With sharp edges which are reliably detectable by automatic alignment systems |
| 04/07/1992 | US5103257 Process for producing or inspecting micropatterns on large-area substrates |
| 03/31/1992 | US5101226 Distance and tilt sensing apparatus |
| 03/31/1992 | US5100237 Apparatus for projecting a mask pattern on a substrate |
| 03/31/1992 | US5100234 Method and apparatus for aligning two objects, and method and apparatus for providing a desired gap between two objects |
| 03/25/1992 | EP0477026A1 Position signal producing apparatus |
| 03/25/1992 | EP0476837A1 An automatic optical exposing apparatus |
| 03/24/1992 | US5099116 Optical device for measuring displacement |
| 03/11/1992 | EP0474487A2 Method and device for optically detecting position of an article |
| 03/11/1992 | EP0474445A1 Autofocusing device and projection exposure apparatus with the same |
| 03/10/1992 | US5095330 Apparatus and method for forming an intermediate original sheet for printing a book |
| 03/10/1992 | US5094933 Unwinding, cutting |
| 03/10/1992 | US5094539 Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same |
| 03/10/1992 | US5094164 Method and device for in-register exposing and in-register printing of a flexible letterpress form |
| 03/10/1992 | US5094160 Accurate registration of printing screens to a platen |
| 03/05/1992 | WO1992004673A1 Improved memory system |
| 03/05/1992 | WO1992003842A1 Method and device for optical exposure |
| 03/05/1992 | CA2090862A1 Memory system |
| 03/03/1992 | US5093674 Method and system for compensating for paper shrinkage and misalignment in electrophotographic color printing |
| 02/25/1992 | CA1296180C Method for aligning photomasks |
| 02/11/1992 | US5087927 On-axis air gage focus system |
| 02/11/1992 | CA1295655C Nondestructive readout of a latent electrostatic image formed on an insulating material |
| 02/06/1992 | WO1992002041A1 Process for producing a marker indicating the orientation of the crystal lattice of a wafer |
| 02/05/1992 | EP0469880A1 Angle detecting device and optical apparatus, such as exposure apparatus, employing the same |
| 02/05/1992 | EP0469282A2 Method and system for compensating for paper shrinkage and misalignment in electrophotographic color printing |
| 01/29/1992 | EP0468741A1 Position detecting method |
| 01/28/1992 | CA1294813C Photoimaging processes and compositions |
| 01/23/1992 | DE4022904A1 Verfahren zum anbringen einer die orientierung des kristallgitters einer kristallscheibe angebenden markierung A method for attaching a marker the orientation of the crystal lattice of a crystal disc indicating |
| 01/22/1992 | EP0467445A1 Apparatus for projecting a mask pattern on a substrate |
| 01/02/1992 | EP0463587A1 Optical alignment detection apparatus |
| 12/24/1991 | US5074667 Position detector employing a sector fresnel zone plate |
| 12/18/1991 | EP0461254A1 Composite color illumination method and band light illumination in a double-focus detector utilizing chromatic aberration |
| 12/10/1991 | US5072126 Promixity alignment using polarized illumination and double conjugate projection lens |
| 12/04/1991 | EP0459737A2 Reticle for a reduced projection exposure apparatus |
| 12/04/1991 | CN2090074U Multi-standard colour photo expand extra device |
| 12/03/1991 | US5070250 Position detection apparatus with adjustable beam and interference fringe positions |
| 11/28/1991 | WO1991018401A1 Mask tray for and method of loading mask in lithography system |
| 11/28/1991 | WO1991018400A1 Mask tray for and method of loading mask in lithography system |
| 11/28/1991 | WO1991018259A1 X-ray lithography alignment system |
| 11/27/1991 | EP0458354A2 A compact reticle/wafer alignment system |
| 11/26/1991 | CA1292542C Apparatus and methods for the production of large area electro-optic devices |
| 11/06/1991 | EP0455446A2 Position detecting method and apparatus |
| 11/06/1991 | EP0455443A2 Positional deviation detecting method |
| 11/05/1991 | US5063528 Record position measuring apparatus |
| 10/30/1991 | EP0453946A2 Method of focusing optical head on object body and optical inspection system comprising an automatic focusing device |
| 10/27/1991 | CA2031015A1 Registration of artwork panels in the manufacture of printed circuit boards |
| 10/23/1991 | EP0453133A2 Method and apparatus for manufacture of X-ray mask |
| 10/23/1991 | EP0452700A2 Method and device for determining compass differences of printing image positions of a multicolour offset printing |
| 10/22/1991 | US5059808 Alignment method for patterning |
| 10/09/1991 | EP0450592A2 Alignment system, particularly for X-ray or photolithography |
| 10/02/1991 | EP0449582A2 Measuring method and apparatus |
| 10/02/1991 | EP0449180A2 Film exposure apparatus and method of exposure using the same |
| 10/01/1991 | US5053983 Filter system having an adaptive control for updating filter samples |
| 10/01/1991 | US5053628 Position signal producing apparatus for water alignment |
| 10/01/1991 | US5052120 Sheet positioning, clamping, and tensioning means |
| 09/24/1991 | CA1289401C Apparatus for automatic positioning of printing film on base film |
| 09/19/1991 | DE4007860A1 Copying machine for producing printing plates - has tray with movable spikes to position sheets which are to be copied |
| 09/17/1991 | US5050111 Alignment and exposure apparatus and method for manufacture of integrated circuits |
| 09/17/1991 | US5049925 Method and apparatus for focusing a wafer stepper |
| 09/17/1991 | US5048968 Alignment mark detecting optical system |
| 09/17/1991 | US5048967 Detection optical system for detecting a pattern on an object |
| 09/17/1991 | US5048926 Illuminating optical system in an exposure apparatus |
| 09/11/1991 | EP0445871A1 Apparatus for and method of projecting a mask pattern on a substrate |
| 09/10/1991 | US5046847 Method for detecting foreign matter and device for realizing same |
| 09/04/1991 | EP0444937A2 Exposure apparatus |
| 09/04/1991 | EP0444936A2 Exposure apparatus |
| 09/04/1991 | EP0444583A2 Marks printed on a printable support for reading the print register |
| 09/04/1991 | EP0444450A1 Latent-image control of lithography tools |
| 08/28/1991 | EP0443803A2 Dummy wafer |
| 08/27/1991 | US5043236 Process for determining the focussing of a photolithographic apparatus |
| 08/27/1991 | US5042945 Lithographic mask structure and device for positioning the same |
| 08/27/1991 | US5042165 Step and repeat apparatus |
| 08/22/1991 | DE4101750A1 Precision alignment procedure for VLSI process - using sensor to detect image of illuminated adjustment mark carried by adjusted object |
| 08/20/1991 | USRE33669 Aligning exposure method |
| 08/14/1991 | EP0441578A2 Positional deviation detecting method |
| 07/31/1991 | EP0439322A2 Device and method for measuring the gap between two opposed objects |
| 07/31/1991 | EP0439052A1 Exposure system |
| 07/17/1991 | EP0436930A2 Alignment marks for two objects to be aligned in superposition |
| 07/16/1991 | US5031334 Aligning method and apparatus for attaching a printing plate to a plate holder |
| 07/11/1991 | WO1991010110A1 Composite color illumination method and band light illumination in a double-focus detector utilizing chromatic aberration |
| 07/02/1991 | US5029222 Photoelectron image projection apparatus |