| Patents for G03F 9 - Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (10,803) |
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| 09/13/1994 | US5347356 Substrate aligning device using interference light generated by two beams irradiating diffraction grating |
| 09/13/1994 | US5347118 Aligning method and apparatus detecting misalignment using image signals from image pickup |
| 09/13/1994 | US5345870 "Direct-to-press" positive lithographic printing plate and method for making same |
| 09/08/1994 | DE4306677A1 Registerstanze für Druckplatten Register punch for printing plates |
| 09/06/1994 | US5345310 Identifying and compensating for slip-plane dislocations in photolithographic mask alignment |
| 08/31/1994 | EP0613051A1 Method of exposing and apparatus therefor |
| 08/30/1994 | US5343292 Method and apparatus for alignment of submicron lithographic features |
| 08/30/1994 | US5343291 Method and apparatus for measuring an interval between two objects |
| 08/25/1994 | DE4308895C1 Device for the accurately fitting positioning of printed circuit boards and a printing tool (printing tool) |
| 08/25/1994 | DE4304912A1 Method and device for the automatic production of chips |
| 08/23/1994 | US5340992 Apparatus and method of detecting positional relationship using a weighted coefficient |
| 08/18/1994 | WO1994018522A1 Method for detecting positional shift and gap |
| 08/17/1994 | EP0610889A1 A "direct-to-press" positive lithographic printing plate and method for making same |
| 08/16/1994 | US5339275 Analog memory system |
| 08/16/1994 | US5338630 Observing optical characteristics of exposed undeveloped photoresist without removing wafer from stepper |
| 08/16/1994 | US5337668 Method of and apparatus for producing register mark pattern |
| 08/10/1994 | EP0610055A2 Compound objective lens having two focal points and apparatus using the lens |
| 08/09/1994 | US5337151 Double-sided circuit board exposure machine and method with optical registration and material variation compensation |
| 08/09/1994 | US5335405 Method and apparatus for aligning phototools for photoprocessing of printed circuit boards |
| 08/04/1994 | DE4303144A1 Mfg. printing plate for offset printing |
| 08/03/1994 | EP0608448A1 Method and apparatus for determining position |
| 08/02/1994 | US5334467 Gray level mask |
| 08/02/1994 | US5334466 X-ray mask and process comprising convex-concave alignment mark with alignment reflection film |
| 08/02/1994 | CA2010480C Method and apparatus for facilitating loading of a panel processing machine and positioning of artwork on a work surface thereon |
| 07/26/1994 | US5333167 Mask structure for x-ray exposure and x-ray exposure device and method using it |
| 07/26/1994 | US5333050 Measuring method and apparatus for meausring the positional relationship of first and second gratings |
| 07/19/1994 | US5331371 Alignment and exposure method |
| 07/19/1994 | US5331369 Method of forming patterns and apparatus for carrying out the same |
| 07/19/1994 | US5331191 Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same |
| 07/13/1994 | CN1089360A Color filter of liquid crystal display device and method for manufacturing the same |
| 07/12/1994 | US5329354 Alignment apparatus for use in exposure system for optically transferring pattern onto object |
| 07/12/1994 | US5329334 Integrated circuit test reticle and alignment mark optimization method |
| 07/12/1994 | US5329332 System for achieving a parallel relationship between surfaces of wafer and reticle of half-field dyson stepper |
| 07/12/1994 | US5328074 Film registration gate assembly |
| 07/12/1994 | US5327658 Registration board assembly |
| 07/05/1994 | US5327221 Device for detecting positional relationship between two objects |
| 07/05/1994 | US5327194 Lithographic printing plate printer |
| 06/28/1994 | US5325414 X-ray mask alignment method and apparatus therefor as well as X-ray mask to be used to said method and said apparatus |
| 06/28/1994 | US5325176 Position detecting method and apparatus including Fraunhofer diffraction detector |
| 06/28/1994 | US5324953 Reduced-projection exposure system with chromatic aberration correction system including diffractive lens such as holographic lens |
| 06/22/1994 | EP0602918A1 Method and apparatus for preparing printing plates |
| 06/22/1994 | EP0602200A1 System for detecting a latent image using an alignment apparatus |
| 06/21/1994 | US5323209 Apparatus for precision alignment of plates used in two-sided contact printing |
| 06/21/1994 | US5323207 Projection exposure apparatus |
| 06/21/1994 | US5323016 Focusing method |
| 06/16/1994 | DE4342123A1 Colour filter for LCD display - has a register code pattern with a given step difference to give a diffused light from a light beam |
| 06/14/1994 | US5321502 Measuring method and measuring apparatus |
| 06/07/1994 | US5319444 Position detecting method and apparatus |
| 05/31/1994 | US5317615 Exposure apparatus |
| 05/31/1994 | US5317141 Apparatus and method for high-accuracy alignment |
| 05/31/1994 | US5316984 Bright field wafer target |
| 05/31/1994 | US5316897 Exposing a substrate to radiation according to a predetermined pattern recorded on a mask |
| 05/31/1994 | US5316276 Thickness compensation actuator system |
| 05/31/1994 | CA1329930C Universal platen holddown apparatus |
| 05/25/1994 | EP0598406A1 Method of and apparatus for producing register mark pattern |
| 05/24/1994 | USRE34615 Video probe aligning of object to be acted upon |
| 05/24/1994 | US5315349 Projection aligner |
| 05/10/1994 | US5310627 Enhancing contrast, proofing elements for printing multicolor images |
| 05/05/1994 | DE4242632C1 X-ray mask copying system using X-ray beam lithography - uses telescope and capacitive spacing sensor for accurate alignment and spacing of mask holders and heat sink |
| 05/04/1994 | EP0595196A1 Optical focus test pattern monitoring system and process |
| 05/03/1994 | US5309247 Image pick-up device |
| 05/03/1994 | US5309197 Projection exposure apparatus |
| 05/03/1994 | US5308682 Alignment check pattern for multi-level interconnection |
| 04/26/1994 | US5307420 Method and apparatus for monitoring plates in marking device |
| 04/26/1994 | US5306902 Confocal method and apparatus for focusing in projection lithography |
| 04/05/1994 | US5300973 Track image registration system |
| 04/05/1994 | US5300786 Optical focus phase shift test pattern, monitoring system and process |
| 03/31/1994 | WO1994007179A1 Method and apparatus for the photolithographic exposure of excess photoresist on a substrate |
| 03/29/1994 | US5299251 Exposure apparatus |
| 03/29/1994 | US5298976 Method and apparatus for measuring surface distances from a reference plane |
| 03/29/1994 | US5298939 Method and apparatus for transfer of a reticle pattern onto a substrate by scanning |
| 03/29/1994 | US5298761 Method and apparatus for exposure process |
| 03/29/1994 | US5298365 Size-reducing projection exposure optical system |
| 03/29/1994 | CA2018449C Process and device for detecting print register marks on a multi-colour printing press |
| 03/22/1994 | US5296916 Mask alignment system for components with extremely sensitive surfaces |
| 03/16/1994 | EP0587208A1 Confocal method and apparatus for focusing in projection lithography |
| 03/15/1994 | US5294980 Positioning detecting method and apparatus |
| 03/10/1994 | DE4329803A1 Projection exposure method for ultra large scale integration chip mfr. - diffracting exposure light beam to eliminate perpendicular incidence angle component |
| 03/03/1994 | DE4228904A1 Checking printing forms e.g. of non-impact printer for quality control prior to printing - using photoelectric or piezoelectric scanner to generate digital signals which reproduce surface structure and position of register marks from each form in set, and comparing with stored values |
| 03/02/1994 | EP0585041A1 Surface position detecting method |
| 03/01/1994 | US5291239 System and method for leveling semiconductor wafers |
| 03/01/1994 | US5291023 Position detecting system utilizing a weight coefficient to determine a gravity center of light |
| 02/15/1994 | US5286963 Projection exposure apparatus and method, a semiconductor device manufacturing system and method, and a semiconductor device manufactured by illuminating an original having a circuit pattern when the original and a wafer are in a focused state |
| 02/15/1994 | CA1326948C Releasable fastener |
| 02/08/1994 | US5285259 Position detecting method |
| 02/08/1994 | US5285258 Method of and an apparatus for detecting alignment marks |
| 02/08/1994 | US5284725 Photo-mask for manufacture of two-layer tab |
| 02/03/1994 | WO1994002807A1 Double-sided circuit board exposure machine and method with optical registration and sag compensation |
| 02/02/1994 | EP0581118A1 Light source for a heterodyne interferometer |
| 02/01/1994 | US5283205 Method for manufacturing a semiconductor device on a substrate having an anisotropic expansion/contraction characteristic |
| 02/01/1994 | US5283141 Photolithography control system and method using latent image measurements |
| 01/20/1994 | WO1994001808A1 System for detecting a latent image using an alignment apparatus |
| 01/20/1994 | WO1994001240A1 Use of fresnel zone plates for material processing |
| 01/18/1994 | US5280437 Structure and method for direct calibration of registration measurement systems to actual semiconductor wafer process topography |
| 01/13/1994 | DE4221482A1 Verfahren und Vorrichtung zur Lagekontrolle eines Druckbildes auf einer Druckform Method and device for position control of a print image on a printing forme |
| 01/12/1994 | EP0578562A1 Procedure for determining the focus of a photolithographic exposure apparatus |
| 01/06/1994 | WO1994000802A1 Process and device for monitoring the position of a printed image on a printing block |
| 01/04/1994 | US5276337 Accuracy of alignment and O/L measurement systems by means of tunable source and handling of signal |
| 01/04/1994 | US5275517 Riston cutting machine |
| 12/29/1993 | EP0576372A1 Device for aligning a film in a projection gate |