Patents
Sitemap › G03 - Photography; Cinematography; Analogous techniques using waves other than optical waves; Electrography; Holography › G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; Materials therefor; Originals therefor; Apparatus specially adapted therefor › G03F 9 - Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
Patents for G03F 9 - Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (10,803)
06/1990
06/26/1990US4936665 High resolution imagery systems and methods
06/26/1990US4936175 Printing plate registering method and device
06/19/1990US4935773 For holding a sensitive sheet of material in precise registration
06/19/1990US4935334 Method for forming a photoresist pattern and apparatus applicable therewith
06/12/1990US4933715 Method of detecting position of a mark
06/12/1990US4932781 Gap measuring apparatus using interference fringes of reflected light
06/06/1990EP0371897A1 Process for the decoration of a conformable model, use of this process and product obtained
06/05/1990CA1269824A1 Device for aligning a photomask onto a printed wiring board
05/1990
05/30/1990EP0370834A2 Semiconductor device, and method of manufacture
05/29/1990US4929083 Focus and overlay characterization and optimization for photolithographic exposure
05/14/1990EP0349632A4 Gap sensing/adjustment apparatus and method for a lithography machine.
05/08/1990US4924304 Video probe aligning of object to be acted upon
05/08/1990US4923301 Alignment of lithographic system
05/03/1990DE3836888A1 Copier for the exposure of printing plates
04/1990
04/24/1990CA1268264A1 Determination of best focus for step and repeat projection aligners
04/18/1990EP0363884A2 Layout position designating sheet and method of mounting original using the same
04/17/1990US4918320 Alignment method usable in a step-and-repeat type exposure apparatus for either global or dye-by-dye alignment
04/17/1990US4918301 Position sensor having double focuses and utilizing a chromatic aberration
04/11/1990EP0363164A2 X-ray exposure system
04/10/1990US4916482 Apparatus for composing a plurality of original films on a base sheet
04/04/1990EP0361934A2 Exposure method
04/04/1990EP0361933A2 Alignment system
04/04/1990EP0361818A2 Universal platen holddown apparatus
03/1990
03/22/1990WO1990002640A1 Apparatus for punching and/or cutting sheets of material
03/21/1990EP0359170A2 Two-dimensional position detecting method and apparatus
03/20/1990US4910706 Analog memory for storing digital information
03/20/1990US4910679 Step-and-repeat alignment and exposure method and apparatus
03/20/1990US4910606 Solid state pick-up having particular exposure and read-out control
03/14/1990EP0358515A2 Device for detecting positional relationship between two objects
03/14/1990EP0358514A2 Position detecting method and apparatus
03/14/1990EP0358513A2 Position detecting method and apparatus
03/14/1990EP0358512A2 Position detecting method and apparatus
03/14/1990EP0358511A2 Device for detecting positional relationship between two objects
03/14/1990EP0358425A2 Position detecting method and apparatus
03/07/1990EP0357426A2 Light quantity controlling apparatus
03/06/1990US4907035 Universal edged-based wafer alignment apparatus
03/06/1990US4906852 Projection alignment method and apparatus
02/1990
02/28/1990EP0355496A2 Position detector employing a sector fresnel zone plate
02/27/1990US4904087 Method for aligning photomasks
02/20/1990US4902900 Device for detecting the levelling of the surface of an object
02/20/1990US4902133 Method and an apparatus for aligning first and second objects with each other
02/13/1990US4901109 Alignment and exposure apparatus
02/07/1990EP0354148A2 Apparatus for projecting a series of images onto dies of a semiconductor wafer
02/05/1990EP0334936A4 Method and apparatus for registering color separation film.
01/1990
01/30/1990US4897689 Photographic exposure apparatus including a means for the relative positioning of a photographic material and an original in sheet form
01/30/1990US4897553 Projection exposure apparatus
01/23/1990US4896260 Data processor having integrated circuit memory refresh
01/23/1990US4895447 Phase-sensitive interferometric mask-wafer alignment
01/17/1990EP0218613B1 Device for the alignment, testing and/or measurement of two-dimensional objects
01/10/1990EP0349632A1 Gap sensing/adjustment apparatus and method for a lithography machine.
01/09/1990US4893163 Semiconductor wafer
01/03/1990EP0348908A2 Apparatus and method for forming an intermediate original sheet for printing a book
12/1989
12/27/1989EP0348022A1 Fastener for releasably securing together a plurality of sheet or plate members e.g. printing plates
12/27/1989CN1038357A Mfg. method of original for exposed photographic printing
12/19/1989US4888614 Observation system for a projection exposure apparatus
12/12/1989US4886974 Mark detecting device for detecting the center of a mark by detecting its edges
12/07/1989DE3915642A1 Ausricht- und belichtungsvorrichtung Alignment and exposure apparatus
11/1989
11/30/1989DE3816613A1 Device for producing dimensionally correct copies from originals which have form below the tolerance in terms of length
11/29/1989EP0343856A2 Alignment of lithographic system
11/29/1989EP0343609A2 Method of manufacturing main plates for exposure printing
11/28/1989US4883359 Alignment method and pattern forming method using the same
11/23/1989EP0342316A2 Method of electron beam lithography alignment
11/15/1989EP0342061A2 Projection exposure apparatus
11/15/1989EP0341848A2 Optical alignment system for use in photolithography and having reduced reflectance errors
11/15/1989EP0341743A2 Alignment of mask and semiconductor wafer using linear fresnel zone plate
11/14/1989US4881100 Alignment method
11/14/1989US4880310 Optical device for alignment in a projection exposure apparatus
11/14/1989US4880309 Dark field target design system for alignment of semiconductor wafers
11/14/1989US4880308 Aligning apparatus
11/02/1989WO1989010584A1 A method for making a reticle mask
11/02/1989EP0339953A2 Lithographic mask structure and device for positioning the same
10/1989
10/25/1989EP0338200A2 Method and apparatus for characterization of optical systems
10/25/1989EP0338110A1 Method for forming a photoresist pattern and apparatus applicable with said method
10/24/1989US4876165 Coating substrate with soluble heat resistant dye in curable resin vehicle
10/19/1989DE3814229C1 Device for the enlarged viewing of an original
10/17/1989US4875076 Exposure apparatus
10/17/1989US4874954 Projection exposure apparatus
10/17/1989US4874282 Pallet stocker apparatus for printer
10/11/1989EP0336537A1 Device for detecting positional relationship between two objects
10/04/1989EP0335074A2 Alignment mark system
10/04/1989EP0334936A1 Method and apparatus for registering color separation film
10/03/1989US4871955 System for strictly positioning an object along an axis
10/03/1989US4871919 Electron beam lithography alignment using electric field changes to achieve registration
10/03/1989US4871257 Optical apparatus for observing patterned article
09/1989
09/26/1989US4870668 Gap sensing/adjustment apparatus and method for a lithography machine
09/26/1989US4870559 Intelligent transducer
09/26/1989US4870452 Projection exposure apparatus
09/26/1989US4870289 Apparatus for controlling relation in position between a photomask and a wafer
09/26/1989US4870288 Alignment method
09/26/1989US4869481 Plate-like article holding device
09/20/1989EP0333326A2 Position detecting method and apparatus
09/19/1989US4867566 Method and apparatus for calibrating artwork from a direct imaging system
09/13/1989EP0332300A2 Method and apparatus for measuring an interval between two objects
09/12/1989US4866262 Optical imaging arrangement comprising an opto-electronic focussing-error detection system
09/12/1989US4865455 Optical device having a variable geometry filter usable for aligning a mask or reticle with a wafer
09/05/1989US4864123 Apparatus for detecting the level of an object surface
08/1989
08/29/1989US4862008 Method and apparatus for optical alignment of semiconductor by using a hologram
08/29/1989US4861162 Alignment of an object
08/23/1989EP0329433A2 Position detecting method and apparatus
08/23/1989EP0329430A2 Position detecting device
1 ... 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109