| Patents for G03F 9 - Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (10,803) |
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| 08/08/1995 | US5440394 Length-measuring device and exposure apparatus |
| 08/08/1995 | US5440138 Exposure method |
| 08/02/1995 | EP0426868B1 Positioning table |
| 08/01/1995 | US5437948 Process for adjusting a photolithographic exposure machine and associated device |
| 08/01/1995 | US5437946 Multiple reticle stitching for scanning exposure system |
| 07/27/1995 | WO1995020139A1 Grating-grating interferometric alignment system |
| 07/27/1995 | DE4418779C1 Irradiation device for X-ray lithography |
| 07/27/1995 | CA2180941A1 Grating-grating interferometric alignment system |
| 07/25/1995 | US5436724 Apparatus for measuring relative movement using a diffraction grating having an orthogonally polarized input beam |
| 07/18/1995 | US5434648 Proximity exposure method and machine therefor |
| 07/18/1995 | US5434425 Optical position detecting apparatus |
| 07/11/1995 | US5432608 Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same |
| 07/11/1995 | US5432603 Optical heterodyne interference measuring apparatus and method, and exposing apparatus and device manufacturing method using the same, in which a phase difference between beat signals is detected |
| 07/11/1995 | US5432589 Reference pin for positioning a printing plate, pusher for a printing plate, and original film holder |
| 07/11/1995 | US5432526 Liquid crystal display having conductive cooling |
| 07/11/1995 | US5432314 Transparent mask plate for charged particle beam exposure apparatus and charged particle beam exposure process using the transparent mask plate |
| 07/04/1995 | USH1463 Method for detecting positions of photomask and substrate |
| 06/21/1995 | EP0658813A1 Radiation-source unit for generating a beam having two directions of polarisation and two frequencies |
| 06/20/1995 | US5426010 Ultra high resolution printing method |
| 06/20/1995 | US5426007 Photomask and process of making semiconductor device by the use of the photomask |
| 06/14/1995 | CN1028916C Method for manufactura of original for exposed photographic printing |
| 06/13/1995 | US5424552 Projection exposing apparatus |
| 06/13/1995 | US5423467 Film registration gate assembly |
| 06/07/1995 | EP0656565A1 Exposure method and method of producing a photolithographic mask |
| 06/01/1995 | WO1995015004A1 Support element for an automatic loading tray of an exposure unit for silicon wafers |
| 05/31/1995 | CN1103227A Method for detecting state of focusing |
| 05/24/1995 | EP0654815A1 Support for an automatic loading table of an exposure unit for silicon wafer |
| 05/24/1995 | DE4441166A1 Storage capacitor mfr. for DRAM semiconductor memory device |
| 05/24/1995 | DE4338656A1 PCBs and image carriers i.e. films alignment device |
| 05/23/1995 | US5418613 Method and apparatus for detecting the position of a substrate having first and second patterns of different sizes |
| 05/23/1995 | US5418092 Process for manufacturing semiconductor integrated circuit device, exposure method and mask for the process |
| 05/16/1995 | US5416562 Method of detecting a position and apparatus therefor |
| 05/10/1995 | EP0652487A1 Rotational deviation detecting method and system using a periodic pattern |
| 05/09/1995 | US5414515 Surface position detecting device |
| 05/09/1995 | US5414514 On-axis interferometric alignment of plates using the spatial phase of interference patterns |
| 05/02/1995 | US5412214 Projection exposure method and apparatus with focus detection |
| 04/25/1995 | US5410621 Display system |
| 04/23/1995 | CA2109056A1 Resist trim tool |
| 04/19/1995 | EP0648154A1 Use of fresnel zone plates for material processing |
| 04/18/1995 | US5408320 Workpiece having alignment marks for positioning a pattern at a different pitch to be formed thereon, and method for fabricating the same |
| 04/18/1995 | US5408083 Method of measuring the best focus position having a plurality of measuring mark images and a plurality of focus positions |
| 04/18/1995 | US5407763 Mask alignment mark system |
| 04/11/1995 | US5406373 Alignment mark and aligning method using the same |
| 04/11/1995 | US5405810 Alignment method and apparatus |
| 04/04/1995 | US5404220 Measuring method and measuring apparatus for determining the relative displacement of a diffraction grating with respect to a plurality of beams |
| 04/04/1995 | US5404019 Charged particle exposure system having a capability of checking the shape of a charged particle beam used for exposure |
| 04/04/1995 | US5403754 Lithography method for direct alignment of integrated circuits multiple layers |
| 04/04/1995 | US5403684 PCB tooling apparatus and method for forming patterns in registration on both sides of a substrate |
| 04/04/1995 | US5402726 Register mark |
| 03/28/1995 | US5402205 Alignment system for a Half-Field Dyson projection system |
| 03/21/1995 | US5400386 Angle detecting device and optical apparatus, such as exposure apparatus, employing the same |
| 03/21/1995 | US5400145 Mark position detecting method and device for aligner and aligner having the device |
| 03/21/1995 | US5400118 Process and apparatus for printing periodicals and the like |
| 03/21/1995 | US5399450 Method of preparation of a color filter by electrolytic deposition of a polymer material on a previously deposited pigment |
| 03/15/1995 | EP0643330A1 A method and device for creation of imposition data, original film making and platemaking |
| 03/14/1995 | US5398041 Colored liquid crystal display having cooling |
| 03/07/1995 | US5396335 Position detecting method |
| 03/01/1995 | EP0640880A1 Alignment of wafers for lithographic patterning |
| 02/21/1995 | US5392361 Method and apparatus for detecting position of a mark |
| 02/21/1995 | US5392115 Method of detecting inclination of a specimen and a projection exposure device as well as method of detecting period of periodically varying signal |
| 02/14/1995 | US5390025 Method of locating work in automatic exposing apparatus |
| 02/14/1995 | US5390001 Photosensitive material printing apparatus |
| 02/14/1995 | US5389476 Method for producing life-sized decals |
| 02/14/1995 | US5388517 Method and apparatus for automatic alignment of objects and register mark for use therewith |
| 01/31/1995 | US5386319 High resolution imagery systems and methods |
| 01/31/1995 | US5386294 Pattern position measuring apparatus |
| 01/31/1995 | US5386269 Alignment and exposure apparatus |
| 01/31/1995 | US5385289 Embedded features for registration measurement in electronics manufacturing |
| 01/19/1995 | WO1995001874A1 Improved method of setting printing plates |
| 01/18/1995 | EP0634702A1 Measuring method and apparatus |
| 01/18/1995 | EP0634700A1 Scanning type exposure apparatus |
| 01/11/1995 | EP0633505A1 Process and device for adjusting the distance between a workpiece and a mask |
| 01/10/1995 | US5381210 Exposing apparatus |
| 01/03/1995 | US5379108 Alignment system |
| 12/27/1994 | US5377009 Alignment method |
| 12/22/1994 | WO1994029043A1 Method, apparatus for punching and bending plate |
| 12/22/1994 | WO1994028796A1 X-ray tube and microelectronics alignment process |
| 12/22/1994 | DE4412258A1 Method for producing a master copy for producing printing plates by the offset printing method |
| 12/08/1994 | WO1994028374A1 On-axis interferometric alignment |
| 12/08/1994 | DE4419521A1 Alignment method and device for an exposure process |
| 12/07/1994 | EP0627097A1 Multiple assembly register system |
| 12/06/1994 | US5371570 Refractive/diffractive optical system for broad-band through-the-lens imaging of alignment marks on substrates in stepper machines |
| 11/30/1994 | EP0626623A2 Masks for a double-sided exposing device |
| 11/29/1994 | US5369486 Position detector for detecting the position of an object using a diffraction grating positioned at an angle |
| 11/22/1994 | US5366581 Film pasting apparatus |
| 11/15/1994 | US5365342 Alignment and exposure apparatus and method for manufacture of integrated circuits |
| 11/15/1994 | US5365051 Projection exposure apparatus |
| 11/08/1994 | US5362585 Forming an array of latent images in a resist and analyzing scattered light from edges to provide information on correct exposure, focus and lens characteristics |
| 11/01/1994 | US5361132 Back to front alignment of elements on a substrate |
| 11/01/1994 | US5361122 Autofocusing device and projection exposure apparatus with the same |
| 10/27/1994 | WO1994024611A1 On axis mask and wafer alignment system |
| 10/26/1994 | EP0620931A1 Improved mask for photolithography |
| 10/20/1994 | DE4403741A1 Close exposure process, and apparatus therefor |
| 10/11/1994 | US5355306 Alignment system and method of alignment by symmetrical and asymmetrical analysis |
| 10/11/1994 | US5355219 Gap control apparatus and method utilizing heterodyne signal phase difference detection |
| 10/05/1994 | EP0618505A1 Device for exposing to light a double sided circuit board plate through printing plates |
| 09/29/1994 | WO1994022169A1 Bright field wafer target |
| 09/27/1994 | CA1332119C Resist compositions and use |
| 09/21/1994 | EP0616259A1 Process for making a flexographic printing form |
| 09/15/1994 | WO1994020223A1 Method and system for applying a marking to a substrate, particularly a painted border adjacent to and around a windshield plate |