Patents
Sitemap › G03 - Photography; Cinematography; Analogous techniques using waves other than optical waves; Electrography; Holography › G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; Materials therefor; Originals therefor; Apparatus specially adapted therefor › G03F 9 - Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
Patents for G03F 9 - Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (10,803)
11/1987
11/19/1987EP0245434A1 Device for aligning a photomask onto a printed wiring board.
11/19/1987EP0245431A1 Photoimaging processes and compositions.
11/10/1987US4705940 Focus detection in a projection optical system
11/04/1987EP0243520A1 Interferometric mask-wafer alignment
11/03/1987US4704033 Multiple wavelength linear zone plate alignment apparatus and method
11/03/1987US4704027 Dark field alignment and alignment mark systems
11/03/1987US4704020 Projection optical apparatus
10/1987
10/27/1987US4703434 Apparatus for measuring overlay error
10/27/1987US4703185 Arrangement for optical imaging of two subjects located in different object planes
10/27/1987US4702606 Position detecting system
10/21/1987EP0242178A2 Laser beam generator for use with an X-ray lithography system
10/20/1987US4701940 Linearly polarized X-ray patterning process
10/20/1987US4701606 Projection optical apparatus
10/20/1987US4701050 Semiconductor exposure apparatus and alignment method therefor
10/13/1987US4699515 Process of transfer of mask pattern onto substrate and apparatus for alignment therebetween
10/07/1987EP0240058A1 Positioning device comprising a Z-manipulator and a O-manipulator
10/06/1987US4698834 X-ray mask membrane deflection compensator and method
10/06/1987US4698513 Position detector by vibrating a light beam for averaging the reflected light
10/06/1987US4698284 Device for aligning a photomask onto a printed wiring board
09/1987
09/29/1987US4697087 Reverse dark field alignment system for scanning lithographic aligner
09/16/1987EP0237109A1 Method of aligning a mask and a substrate relative to each other and arrangementfor carrying out the method
09/16/1987EP0237102A1 Arrangement for aligning a mask and a substrate relative to each other
09/15/1987US4694477 Flexure stage alignment apparatus
09/15/1987US4694186 System for photoelectric detection
09/10/1987DE3614678C1 Register hole punch
09/09/1987EP0235861A1 Device for detecting a centring error
09/08/1987US4692648 Rotating collector assembly for electrical machines
09/08/1987CA1226682A1 Method of adjusting relative positions of two objects by using diffraction grating and control apparatus
09/02/1987EP0234591A2 An apparatus for composing a plurality of original films on a base sheet
09/01/1987US4690880 Coating, photoresists, images, exposure, development, etching
09/01/1987US4690529 Optical exposer
08/1987
08/19/1987EP0233089A2 Method for aligning first and second objects relative to each other, and apparatus for practicing this method
08/19/1987EP0233056A2 Light absorbing coating
08/18/1987US4688088 For detecting a mark having edges
08/18/1987US4687980 X-Y addressable workpiece positioner and mask aligner using same
08/18/1987US4687322 Projection optical apparatus
08/13/1987WO1987004791A1 Automatic printed circuit board imaging system
08/12/1987EP0231977A1 Optical imaging arrangement comprising an opto-electric focussing-error detection system
08/11/1987US4686655 Filtering system for processing signature signals
08/11/1987US4686622 Computer system architecture using serial communication
08/11/1987US4686531 Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus
08/11/1987US4685807 Optical microlithography apparatus with a local alignment system
08/11/1987US4685805 Small gap measuring apparatus
08/05/1987EP0231067A2 Photography pin board system
08/05/1987EP0230648A2 Method of forming an alignment mark
07/1987
07/21/1987US4682277 Movable light source type exposure apparatus
07/21/1987US4682037 Projection exposure apparatus having an alignment light of a wavelength other than that of the exposure light
07/21/1987US4681430 Method for focusing projection printer
07/15/1987CN86107270A Device for positioning optical mask onto printed-circuit boards
07/14/1987US4679942 Method of aligning a semiconductor substrate and a photomask
07/07/1987US4679071 Method of recording register marks
07/01/1987EP0226905A2 A method for facilitating the alignment of a photomask with individual fields on the surfaces of a number of wafers
07/01/1987EP0226893A1 Process for the high-precision measuring of bi-dimensional structures, and reference mask for carrying out the process
06/1987
06/30/1987US4677303 Automatic printed circuit board imaging system
06/30/1987US4677301 Alignment apparatus
06/30/1987US4677043 Stepper process for VLSI circuit manufacture utilizing radiation absorbing dyestuff for registration of alignment markers and reticle
06/16/1987EP0225457A1 Exposure apparatus for photosensitive layered materials
06/11/1987DE3605498A1 Device for aligning and stamping image carriers
06/09/1987US4672676 Method and apparatus for automatically aligning an object with respect to a reference pattern
06/09/1987US4672557 Automatic accurate alignment system
06/09/1987US4672457 Scanner system
06/03/1987EP0224458A2 Method and apparatus for adjusting the binding back margins, especially for sew-stitched, wire-stitched and block stitched magazines
06/02/1987US4669885 Apparatus for inspecting negatives
06/02/1987US4669884 Variable wavelength optical alignment system
06/02/1987US4669883 Method and apparatus for alignment
06/02/1987US4669867 Alignment and exposure apparatus
06/02/1987US4669866 Step-and-repeat alignment and exposure system and method therefore
06/02/1987US4669842 Projection optical device
05/1987
05/27/1987EP0222787A1 Method and device for aligning, controlling and/or measuring bidimensional objects.
05/26/1987US4668089 Exposure apparatus and method of aligning exposure mask with workpiece
05/20/1987EP0221916A1 Device for automatically determining the deviation between the structures of a pattern and those of an object compared therewith.
05/19/1987US4667109 Alignment device
05/19/1987US4666291 Light-exposure apparatus
05/12/1987US4664524 Optical self-alignment system
05/07/1987WO1987002791A1 Photoimaging processes and compositions
05/07/1987WO1987002790A1 Device for aligning a photomask onto a printed wiring board
05/06/1987EP0220571A1 Method and apparatus for alignment
05/05/1987US4663534 Position detecting device utilizing selective outputs of the photodetector for accurate alignment
05/05/1987US4662754 Method for facilitating the alignment of a photomask with individual fields on the surfaces of a number of wafers
05/05/1987US4662753 Apparatus and method for aligning objects
04/1987
04/28/1987US4660966 Optical alignment apparatus
04/22/1987EP0218613A1 Device for the alignment, testing and/or measurement of two-dimensional objects.
04/21/1987US4659228 Aligning apparatus
04/21/1987US4659227 Alignment apparatus
04/21/1987US4659225 Pattern exposure apparatus with distance measuring system
04/14/1987US4657379 Photomask and exposure apparatus using the same
04/09/1987WO1987002178A1 Optical exposure apparatus
04/07/1987US4656358 Laser-based wafer measuring system
04/07/1987US4656347 Diffraction grating position adjuster using a grating and a reflector
04/07/1987US4655601 Observation device and an aligner using same
04/07/1987US4655600 Alignment method
04/07/1987US4655599 Mask aligner having a photo-mask setting device
04/07/1987US4655598 Position detection method and apparatus
04/07/1987US4655594 Displacement device, particularly for the photolithographic treatment of a substrate
04/02/1987DE3534609A1 Method for the automated adjustment, performed with the use of adjusting marks, of a plurality of masks in a projection-printing method
04/01/1987EP0216305A2 Film checking apparatus
03/1987
03/31/1987US4654581 Capacitive mask aligner
03/31/1987US4653369 Flexographic printing plate mounting method and apparatus
03/31/1987CA1219893A1 Electro-magnetic apparatus
03/25/1987EP0215055A1 Laser-based wafer measuring system
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