| Patents for G03F 9 - Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (10,803) |
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| 12/07/1988 | EP0294363A2 Method and device for positioning and aligning the image pattern of a mask on a substrate |
| 12/06/1988 | US4789242 Optical apparatus for detecting the position of an object |
| 11/23/1988 | EP0292140A2 Photoreceptor |
| 11/22/1988 | US4786166 Determination of focal plane for a scanning projection aligner |
| 11/17/1988 | DE3715865A1 X-ray mask made from silicon combined with silicon nitride layers, and process for the production thereof |
| 11/16/1988 | CN88102717A Nondestructive readout of latent electrostatic image formed on insulating material cross-reference to related applications |
| 11/15/1988 | US4785187 Alignment device |
| 11/01/1988 | US4782368 Method for correction for chromatic aberration and exposure apparatus using the same |
| 10/25/1988 | US4780617 Method for successive alignment of chip patterns on a substrate |
| 10/25/1988 | US4780616 Projection optical apparatus for mask to substrate alignment |
| 10/25/1988 | US4780615 Alignment system for use in pattern transfer apparatus |
| 10/25/1988 | US4779986 Reduction projection system alignment method and apparatus |
| 10/18/1988 | US4779001 Interferometric mask-wafer alignment |
| 10/18/1988 | US4778275 Method of aligning a mask and a substrate relative to each other and arrangement for carrying out the method |
| 10/11/1988 | US4777641 Method and apparatus for alignment |
| 10/11/1988 | US4777374 Pattern position detecting method and apparatus for detecting the position of an alignment direction of a wafer target pattern |
| 10/11/1988 | US4777117 Process for producing color filter using alignment marks |
| 09/21/1988 | EP0179146B1 Focal plane adjusted photomask and methods of projecting images onto photosensitized workpiece surfaces |
| 09/20/1988 | US4772119 Device for detecting a magnification error in an optical imaging system |
| 09/20/1988 | US4771551 Method of and apparatus for applying angle data marks to originals for image data scanning |
| 09/20/1988 | CA1242111A1 Device for in-register film mounting for the production of printing plates for small offset presses |
| 09/14/1988 | EP0282246A2 Apparatus for automatic positioning of printing film on base film |
| 09/13/1988 | US4771180 Exposure apparatus including an optical system for aligning a reticle and a wafer |
| 09/13/1988 | US4770533 Apparatus for detecting position of an object such as a semiconductor wafer |
| 09/07/1988 | EP0281030A2 Measurement of registration of overlaid test patterns by the use of reflected light |
| 09/07/1988 | EP0280919A2 Method and apparatus for alligning a substrate for printed circuits in relation to a printing device of an engine for working printed circuit boards |
| 09/06/1988 | US4769680 Apparatus and method for making large area electronic devices, such as flat panel displays and the like, using correlated, aligned dual optical systems |
| 09/06/1988 | US4768883 Determining software corrections to provide correct baseline distances |
| 08/30/1988 | US4768064 Conveyor device for alignment |
| 08/16/1988 | US4764795 Prepress graphic registration system |
| 08/16/1988 | US4764791 Work alignment apparatus for double-sided exposure of a work |
| 08/16/1988 | US4764014 Interferometric measuring methods for surfaces |
| 08/09/1988 | US4763204 Solid state image pick-up device having a shutter which is capable of still and motion picture photography |
| 08/02/1988 | CA1239785A1 Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus |
| 07/26/1988 | US4759626 Determination of best focus for step and repeat projection aligners |
| 07/19/1988 | US4758864 Projection exposure apparatus |
| 07/19/1988 | US4758731 Method and arrangement for aligning, examining and/or measuring two-dimensional objects |
| 07/12/1988 | US4757207 Measurement of registration of overlaid test patterns by the use of reflected light |
| 07/05/1988 | US4755053 Secondary alignment fiducials for automatic alignment using machine vision. |
| 06/15/1988 | EP0271024A2 Optical focus sensor system |
| 06/14/1988 | US4750836 Method of measuring misalignment between superimposed patterns |
| 06/07/1988 | US4749278 Arrangement for aligning a mask and a substrate relative to each other |
| 06/01/1988 | DE3638428C1 Processing device with in-register positioning for offset printing formes |
| 05/31/1988 | US4748478 Projection exposure apparatus |
| 05/31/1988 | US4748333 Surface displacement sensor with opening angle control |
| 05/24/1988 | US4746800 Positioning device comprising a z-manipulator and a θ-manipulator |
| 05/18/1988 | EP0267721A2 Determination of best focus for step and repeat projection aligners |
| 05/17/1988 | US4744666 Alignment detection optical system of projection type aligner |
| 05/10/1988 | US4744042 Transform processor system having post processing |
| 05/04/1988 | EP0265957A2 Apparatus for automatically providing positioning holes on film material |
| 05/04/1988 | EP0265658A2 High energy laser mask and method of making same |
| 05/03/1988 | US4742376 Step-and-repeat alignment and exposure system |
| 05/03/1988 | US4741622 Method and apparatus for detecting diversion |
| 05/03/1988 | US4741523 Positioning pin device |
| 05/03/1988 | CA1235937A1 Interferometric plate alignment |
| 04/26/1988 | US4740125 Method and apparatus for adjusting the binding back margins, especially for sew-stitched, wire-stitched and block stitched magazines |
| 04/19/1988 | US4739396 Projection display system |
| 04/19/1988 | US4739373 Projection exposure apparatus |
| 04/19/1988 | US4738909 Registration plate with pins, clamps and collar |
| 04/12/1988 | US4737033 Alignment key and method of making the same |
| 03/30/1988 | EP0261141A1 Automatic printed circuit board imaging system |
| 03/29/1988 | US4734745 Method for projecting and exposing a photomask pattern onto re-exposing substrates and its apparatus |
| 03/09/1988 | EP0258794A2 Air gauge diffuser |
| 03/01/1988 | US4728799 Height measurement and correction method for electron beam lithography system |
| 03/01/1988 | US4728193 Precision automatic mask-wafer alignment system |
| 02/23/1988 | US4727381 Appartus for, and methods of, inscribing patterns on semiconductor wafers |
| 02/16/1988 | US4725737 Alignment method and apparatus for reduction projection type aligner |
| 02/16/1988 | CA1232981A1 Apparatus for imaging a mask pattern on a substrate |
| 02/16/1988 | CA1232972A1 Equal density distribution process |
| 02/09/1988 | US4723846 Optical path length compensating optical system in an alignment apparatus |
| 02/09/1988 | US4723845 Optical apparatus for the detection of position |
| 02/03/1988 | EP0254871A2 Reverse dark field alignment system for scanning lithographic aligner |
| 02/02/1988 | US4723221 Method for manufacturing semiconductor device and apparatus therefor |
| 01/28/1988 | WO1988000720A1 Process and device for fine focussing an image on a projection surface |
| 01/27/1988 | EP0254644A2 Mask alignment and measurement of critical dimensions in integrated circuits |
| 01/21/1988 | DE3634609A1 Verfahren und vorrichtung zur fein-fokussierung eines bildes auf eine projektionsflaeche Method and device for fine-focusing of an image on a projection |
| 01/20/1988 | EP0253349A2 Device for precise relative adjustment of a mask and a semiconductor wafer in a lithography apparatus and method for its use |
| 01/20/1988 | EP0253283A2 Semiconductor wafer exposure device with synchrotron radiation in a lithography apparatus |
| 01/19/1988 | US4719705 Reticle transporter |
| 01/14/1988 | WO1988000362A1 Improved registration method in photolithography and equipment for carrying out this method |
| 01/12/1988 | US4719357 Semiconductor circuit manufacturing apparatus having selectively operable detectors for effecting automatic alignment |
| 01/07/1988 | EP0252029A2 Technique for the alignment through conventional photolithography of a structure on the back of a sample with high recording accuracy |
| 01/07/1988 | EP0250964A2 Reticle transporter |
| 01/05/1988 | US4717257 Alignment device |
| 12/29/1987 | US4716441 Light exposure apparatus |
| 12/23/1987 | EP0250391A2 Arrangement for positioning a structure image of a mask on a substrate |
| 12/22/1987 | US4714331 Method and apparatus for automatic focusing |
| 12/16/1987 | EP0249139A2 Resist compositions and use |
| 12/15/1987 | US4713784 Alignment apparatus |
| 12/09/1987 | CN87100831A Method for aligning interrelated position of first body and second body and apparatus for achieving the method |
| 12/08/1987 | US4712016 Alignment system allowing alignment when alignment marks are absent |
| 12/08/1987 | US4711567 For producing semiconductor devices |
| 12/02/1987 | EP0247665A1 Device for detecting a magnification error in an optical imaging system |
| 12/01/1987 | US4710029 Projection type exposing apparatus |
| 12/01/1987 | US4710026 Position detection apparatus |
| 11/25/1987 | EP0246611A2 Optical arrangement for generation of crossed linear picture-elements |
| 11/24/1987 | US4708545 Method for drilling reference holes in multi-layer printed wiring board assembly |
| 11/24/1987 | US4708484 Projection alignment method and apparatus |
| 11/24/1987 | US4708466 Exposure apparatus |
| 11/24/1987 | US4708465 Position detecting device for transferring an image |