| Patents for G03F 9 - Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (10,803) |
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| 07/02/1991 | US5028797 An alignment system for align first and second objects using alignment marks |
| 06/25/1991 | US5027225 Apparatus for fabricating pre-press masking film |
| 06/25/1991 | US5026976 Double-focus detector utilizing chromatic aberration |
| 06/25/1991 | US5026166 Apparatus for pre-aligning substrate preparatory to fine alignment |
| 06/18/1991 | US5025168 Alignment apparatus including three beams and three gratings |
| 06/18/1991 | US5025165 Method for producing a semiconductor device using an electron beam exposure tool and apparatus for producing the device |
| 06/11/1991 | US5023815 Method and apparatus for registering color film separations |
| 06/04/1991 | US5021821 Film circuit substrate exposure apparatus |
| 05/28/1991 | US5020006 Method for finding a reference point |
| 05/21/1991 | US5017514 Method of manufacturing a semiconductor device using a main vernier pattern formed at a right angle to a subsidiary vernier pattern |
| 05/15/1991 | EP0426868A1 Positioning table |
| 05/15/1991 | EP0426866A1 Projection/exposure device and projection/exposure method |
| 05/14/1991 | US5015866 Stage apparatus in exposing apparatus |
| 05/14/1991 | US5014413 Method and apparatus for facilitating loading of a panel processing machine and positioning of artwork on a work surface thereon |
| 05/08/1991 | EP0425739A1 Alignment apparatus and SOR X-ray exposure apparatus having same |
| 04/30/1991 | US5012345 Film registration apparatus and method |
| 04/23/1991 | US5010418 Image pick-up device |
| 04/17/1991 | CN1012406B Optical receptor |
| 04/16/1991 | US5008705 Autofocus system for microlithography |
| 04/10/1991 | EP0421645A2 Apparatus for and method of optical inspection in a total internal reflection holographic imaging system |
| 04/03/1991 | EP0420700A2 Exposure apparatus |
| 04/03/1991 | EP0420574A2 Alignment system |
| 04/03/1991 | EP0245431A4 Photoimaging processes and compositions |
| 04/02/1991 | US5005046 Pattern forming method |
| 04/02/1991 | US5004348 Alignment device |
| 03/27/1991 | EP0419240A2 Exposure apparatus |
| 03/26/1991 | US5003345 Apparatus and method for aligning and focusing an image of a reticle onto a semiconductor wafer |
| 03/26/1991 | US5003342 Exposure apparatus |
| 03/19/1991 | US5000573 Method of alignment with the use of diffraction gratings and an apparatus therefor |
| 03/12/1991 | US4999669 Levelling device in an exposure apparatus |
| 03/12/1991 | US4999487 Dual focus |
| 03/12/1991 | US4998823 Two-dimensional position detecting method and apparatus |
| 03/06/1991 | EP0415724A2 Alignment system |
| 03/05/1991 | US4996763 Method of locating work in automatic exposing apparatus |
| 02/19/1991 | US4993837 Method and apparatus for pattern detection |
| 02/13/1991 | EP0412756A2 Exposure apparatus |
| 02/12/1991 | US4991962 High precision alignment system for microlithography |
| 02/06/1991 | EP0411966A2 Position detection method and apparatus |
| 01/30/1991 | EP0410802A2 Position detecting method |
| 01/29/1991 | US4988197 Method and apparatus for aligning two objects, and method and apparatus for providing a desired gap between two objects |
| 01/29/1991 | US4987686 Step and repeat apparatus |
| 01/23/1991 | EP0409573A2 Method of detecting positional deviation |
| 01/23/1991 | EP0409572A2 Position detecting system |
| 01/16/1991 | EP0408393A2 Screen printing method |
| 01/16/1991 | EP0408381A2 Position signal producing apparatus |
| 01/16/1991 | EP0408349A2 Mask for lithography |
| 01/16/1991 | EP0221916B1 Device for automatically determining the deviation between the structures of a pattern and those of an object compared therewith |
| 01/15/1991 | US4984890 Method and an apparatus for aligning first and second objects with each other |
| 01/09/1991 | CN2069127U Optical and automatic photomechanical production arrangement |
| 01/01/1991 | US4982227 Photolithographic exposure apparatus with multiple alignment modes |
| 01/01/1991 | US4981529 Semiconductor substrate provided with marks for alignment even under a resist film |
| 01/01/1991 | US4981385 Releasable fastener |
| 12/25/1990 | US4980718 Registration method in photolithography and equipment for carrying out this method |
| 12/19/1990 | EP0403227A1 Registration apparatus |
| 12/18/1990 | US4978841 Automatic leveling system and a method of leveling a workpiece based on focus detection |
| 12/18/1990 | US4977683 Image control board |
| 12/12/1990 | EP0401691A2 Method and device for detecting registration marks in a multicolour printing press |
| 12/11/1990 | US4977361 X-Y addressable workpiece positioner and mask aligner using same |
| 12/11/1990 | US4977048 Actinic alignment to CEM coated resist films |
| 11/22/1990 | EP0398566A2 Support apparatus for panels |
| 11/22/1990 | EP0398006A2 Vacuum blanket |
| 11/20/1990 | US4971444 Method and apparatus for detecting the position of an object |
| 11/20/1990 | US4971443 Optical position detecting method and apparatus therefor |
| 11/15/1990 | WO1990013790A1 Positioning table |
| 11/14/1990 | EP0397530A2 Alignment apparatus |
| 11/13/1990 | US4970587 Alignment table for automatic exposing apparatus |
| 11/01/1990 | WO1990013000A1 Projection/exposure device and projection/exposure method |
| 10/31/1990 | EP0394568A1 Video probe aligning of object to be acted upon |
| 10/30/1990 | US4967088 Method and apparatus for image alignment in ion lithography |
| 10/24/1990 | EP0393775A1 Apparatus for projecting a mask pattern on a substrate |
| 10/16/1990 | US4964146 Pattern transistor mask and method of using the same |
| 10/09/1990 | US4962423 Mark detecting method and apparatus |
| 10/09/1990 | US4962318 Alignment system for exposure apparatus |
| 09/26/1990 | EP0389209A2 Pattern forming method |
| 09/20/1990 | WO1990010891A1 Method and apparatus for automation of the working step of composing in a process reproduction plant |
| 09/20/1990 | DE3905093A1 Method and device for the production of printing plates |
| 09/18/1990 | US4958082 Position measuring apparatus |
| 09/18/1990 | US4956906 Method of preparing pre-distorted images for decorating a shaped blank |
| 09/11/1990 | US4955780 Wafer positioning apparatus |
| 09/05/1990 | EP0385272A2 Double-focus detector utilizing chromatic aberration |
| 09/04/1990 | US4955062 Pattern detecting method and apparatus |
| 09/04/1990 | US4954951 System and method for increasing memory performance |
| 08/30/1990 | DE3910048A1 Method for producing or inspecting microstructures on large-area substrates |
| 08/28/1990 | US4952970 Autofocusing system for a projecting exposure apparatus |
| 08/28/1990 | US4952815 Focusing device for projection exposure apparatus |
| 08/28/1990 | US4952060 Alignment method and a projection exposure apparatus using the same |
| 08/21/1990 | US4950910 For depicting a pattern on a sample |
| 08/16/1990 | EP0381985A2 Method for printing non-absorbing materials and printing plate for realizing the method |
| 08/14/1990 | US4948983 Alignment of mask and semiconductor wafer using linear fresnel zone plate |
| 07/24/1990 | US4944036 Signature filter system |
| 07/24/1990 | US4943733 Projection optical apparatus capable of measurement and compensation of distortion affecting reticle/wafer alignment |
| 07/18/1990 | EP0378033A1 Process for setting up a photolithographic exposure machine |
| 07/17/1990 | US4942516 Single chip integrated circuit computer architecture |
| 07/17/1990 | US4941745 Projection aligner for fabricating semiconductor device having projection optics |
| 07/10/1990 | CA1271313A1 Reticle transporter |
| 07/04/1990 | EP0245434B1 Device for aligning a photomask onto a printed wiring board |
| 07/03/1990 | US4938598 Method and apparatus for position detection on reduction-projection system |
| 06/26/1990 | US4937618 Alignment and exposure apparatus and method for manufacture of integrated circuits |
| 06/26/1990 | US4937459 Alignment signal detecting device |
| 06/26/1990 | US4937162 Method of obtaining relatively aligned patterns on two opposite surfaces of an opaque slice |