Patents
Sitemap › G03 - Photography; Cinematography; Analogous techniques using waves other than optical waves; Electrography; Holography › G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; Materials therefor; Originals therefor; Apparatus specially adapted therefor › G03F 9 - Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
Patents for G03F 9 - Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (10,803)
05/1986
05/28/1986EP0182251A1 Alignment method for reduction projection type aligner
05/20/1986US4590382 Method of aligning two members utilizing marks provided thereon
05/13/1986US4588899 Alignment method
05/13/1986US4588288 Static pressure bearing and transport device utilizing the same
05/07/1986EP0179980A1 Method of forming alignment marks in a semiconductor body
04/1986
04/30/1986EP0179438A2 A projection aligner of a lithographic system
04/30/1986EP0179146A1 Focal plane adjusted photomask and methods of projecting images onto photosensitized workpiece surfaces.
04/29/1986US4585342 System for real-time monitoring the characteristics, variations and alignment errors of lithography structures
04/29/1986US4585337 Step-and-repeat alignment and exposure system
04/22/1986US4583298 Auto calibration method suitable for use in electron beam lithography
04/15/1986US4582768 Method for forming register marks
04/08/1986US4581715 Fourier transform processor
04/08/1986US4580900 Auto focus alignment and measurement system and method
04/02/1986EP0176088A2 Equal distribution density process
04/01/1986US4579453 Method and apparatus for detecting a mark position
03/1986
03/26/1986EP0174935A1 Dissimilar superimposed grating precision alignment and gap measurement systems.
03/25/1986US4578590 Continuous alignment target pattern and signal processing
03/25/1986US4577968 Method and arrangement for optical distance measurement
03/25/1986US4577958 Bore-sighted step-and-repeat projection alignment and exposure system
03/25/1986US4577957 Bore-sighted step-and-repeat projection alignment and exposure system
03/25/1986US4577945 Pattern transfer device and method
03/18/1986US4577095 Automatic focusing apparatus for a semiconductor pattern inspection system
03/18/1986US4576475 Contacting method and apparatus in contact copying
03/18/1986CA1202123A1 Method and apparatus for captivating a substrate within a holder
03/12/1986EP0173849A2 Laser lithography
03/11/1986US4575399 Antireflective coating on resist film, integrated circuit manufacture
03/11/1986US4575250 Aligning apparatus and method for mitigating instability caused by interference in alignment signal
03/04/1986US4573791 Step-and-repeat projection alignment and exposure system
02/1986
02/26/1986EP0172322A2 Masking apparatus
02/18/1986US4571538 Mask alignment measurement structure for semiconductor fabrication
02/11/1986US4570059 Automatic lens focus with respect to the surface of a workpiece
02/05/1986EP0170013A2 Lithographic apparatus performance measurement
02/05/1986EP0169967A2 Original angle setting device for scanner
02/04/1986US4568189 Apparatus and method for aligning a mask and wafer in the fabrication of integrated circuits
01/1986
01/30/1986WO1986000724A1 Mask-to-wafer alignment utilizing zone plates
01/28/1986US4566796 Method of determining position on a wafer
01/28/1986US4566795 Alignment apparatus
01/28/1986US4566762 Dual focus optical system
01/28/1986US4566194 Press plate positioning apparatus for automatic drawing machine
01/14/1986US4563820 Aligning system
01/07/1986US4563094 Method and apparatus for automatic alignment
01/02/1986EP0166637A1 Method and device for the recognition of a particular pattern of an image
12/1985
12/31/1985US4561773 Projection exposure apparatus
12/31/1985CA1198831A1 Nondestructive dimensional detection system
12/17/1985US4558949 Horizontal position detecting device
12/11/1985EP0164165A1 Apparatus for imaging a mask pattern on a substrate
12/10/1985US4557986 High resolution lithographic process
12/04/1985EP0163199A2 Process and apparatus for determining registration faults of successive structures incorporated in semiconductor substrate
11/1985
11/26/1985CA1197327A1 Step-and-repeat projection alignment and exposure system with auxiliary optical unit
11/21/1985WO1985005193A1 Focal plane adjusted photomask and methods of projecting images onto photosensitized workpiece surfaces
11/19/1985US4553845 Device for and method of aligning two bodies
11/19/1985US4553834 Mask aligner having a malfunction disposal device
11/12/1985US4553221 Digital filtering system
11/12/1985US4553213 Communication system
11/05/1985US4551816 Filter display system
10/1985
10/29/1985US4549843 Mask loading apparatus, method and cassette
10/22/1985US4549084 Alignment and focusing system for a scanning mask aligner
10/15/1985US4547446 Insertion of photoresist coated semiconductor into mask, alignmentand etching
10/15/1985CA1195437A1 Alignment target for electron-beam write system
10/08/1985US4545684 Alignment mark detecting apparatus and method
10/08/1985US4545683 Wafer alignment device
10/02/1985EP0156683A1 Apparatus for optical micro-lithography with a local alignment system
10/01/1985US4544311 Mask alignment apparatus
09/1985
09/26/1985WO1985004266A1 Dissimilar superimposed grating precision alignment and gap measurement systems
09/24/1985CA1194178A1 Device for detecting the position of an object
09/24/1985CA1194176A1 Device for detecting the position of an object
09/10/1985US4540278 Optical focusing system
09/10/1985US4540277 Device for the projection printing of masks into a workpiece
09/10/1985US4540251 Thermo-mechanical overlay signature tuning for Perkin-Elmer mask aligner
09/10/1985US4540240 Optical objective adjusting apparatus
09/10/1985US4540167 Apparatus for mounting a recording medium
09/10/1985US4539835 Calibration apparatus for capacitance height gauges
09/03/1985US4538914 Transfer apparatus for compensating for a transfer error
09/03/1985CA1193030A1 Alignment device for integrated circuit manufacturing machines
08/1985
08/27/1985US4538069 Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus
08/27/1985US4537501 Apparatus for the attitude control of plate-form body
08/27/1985US4537498 Focal plane adjusted photomask and methods of projecting images onto photosensitized workpiece surfaces
08/20/1985US4536239 Multi-layer circuit board inspection system
08/20/1985US4535694 Looped, elongate letterpieces printing plate for use on rotary presses, and method of preparation
08/13/1985US4534804 Migration of defect through lightly doped layer to form image
08/07/1985EP0151032A2 Method of adjusting relative positions of two objects by using diffraction grating and control apparatus therefor
08/07/1985EP0150445A2 Apparatus for film registration for the fabrication of printing plates for office offset-printing machines
08/06/1985US4534047 Mask ring assembly for X-ray lithography
08/06/1985US4533240 Film to panel registration device
08/06/1985US4533239 Positioning device for an exposing and developing apparatus
07/1985
07/23/1985US4531182 Machine control system operating from remote commands
07/23/1985US4531060 Positioning method
07/23/1985US4530604 Method of aligning a mask and a wafer for manufacturing semiconductor circuit elements
07/17/1985EP0148477A2 Exposure apparatus and method of aligning exposure mask with workpiece
07/10/1985EP0147493A1 Process and equipment for the automatic alignment of an object in respect of a reference
07/09/1985USRE31938 Web bending fixture
07/09/1985US4527889 Re-register anchors for film sheet
07/03/1985EP0147169A2 Flexure stage alignment apparatus
07/03/1985EP0146670A2 Apparatus for projecting a series of images onto dies of a semiconductor wafer
06/1985
06/26/1985EP0145902A1 Thermo-mechanical overlay signature tuning for photolithographic mask aligner
06/25/1985US4525852 Alignment apparatus
06/25/1985US4525061 Combination of a plate for exposure and frame plates
06/25/1985US4525060 Film exposure apparatus
06/18/1985US4523851 Precision IC alignment keys and method
06/12/1985EP0143893A1 Automatic wafer alignment method, method for determining the location of edges and wafer alignment system
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