| Patents for G03F 9 - Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (10,803) |
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| 12/29/1993 | EP0576185A2 Exposure drum mask |
| 12/28/1993 | US5272980 Alignment method for transfer and alignment device |
| 12/22/1993 | EP0574459A1 Registration system |
| 12/21/1993 | US5272517 Height measurement apparatus using laser light beam |
| 12/21/1993 | US5272501 Projection exposure apparatus |
| 12/16/1993 | DE4219004A1 Punch for stamping mounting holes in reproduction film esp. for multi-colour e.g. offset printing - consisting of stamping table and support plate with stamping system having several punching tools for the prodn. of holes controlled across processor unit. |
| 12/14/1993 | US5270771 Aligner and exposure method for manufacturing semiconductor device |
| 12/08/1993 | EP0573299A1 Position detection method using an optical interference signal and electronic filtering of this signal in the spatial frequency domain |
| 12/07/1993 | US5268744 Method of positioning a wafer with respect to a focal plane of an optical system |
| 12/02/1993 | DE4217430A1 Pick=up arrangement for detecting and representing objects for comparison - has electronic camera and prismatic deflection devices forming partial images of simultaneously detected object regions |
| 11/30/1993 | US5266790 Focusing technique suitable for use with an unpatterned specular substrate |
| 11/30/1993 | US5266425 Self-aligned process for applying color filters to electronic output color image intensifiers |
| 11/24/1993 | EP0570807A1 Method and apparatus for aligning depth images |
| 11/23/1993 | US5264310 Semiconductors |
| 11/16/1993 | US5262822 Exposure method and apparatus |
| 11/16/1993 | US5262257 Forming circuit and alignment pattern areas with different materials irradiation with electron beam, multilayer |
| 11/11/1993 | WO1993022143A1 Method and apparatus for mounting of colour separation films upon preparing of printing plates |
| 11/09/1993 | US5260771 Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same |
| 11/09/1993 | US5260580 Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device |
| 11/03/1993 | EP0568478A1 Darkfield alignment system using a confocal spatial filter |
| 11/02/1993 | US5257444 Plate making apparatus |
| 10/26/1993 | US5255607 Method and apparatus for maintaining registration when making a printing plate |
| 10/19/1993 | US5254209 Method of making micromechanical components |
| 10/06/1993 | EP0564255A2 Stage device and pattern transfer system using the same |
| 10/05/1993 | US5250983 Photo reticle for fabricating a semiconductor device |
| 09/28/1993 | US5249016 Semiconductor device manufacturing system |
| 09/22/1993 | EP0561302A1 Manufacture of alignment marks for holographic lithography |
| 09/21/1993 | US5247329 Projection type exposure method and apparatus |
| 09/16/1993 | DE4208103A1 Auto-correlation of measuring inaccuracies in lithography system - forming superimposed images of linear and strip grids on high resolution film, subjecting to effect for set time, and observing using microscopic |
| 09/14/1993 | US5245470 Polarizing exposure apparatus using a polarizer and method for fabrication of a polarizing mask by using a polarizing exposure apparatus |
| 09/08/1993 | EP0559397A2 Precision positioning apparatus |
| 09/08/1993 | EP0558781A1 Method and apparatus for exposure of substrates |
| 09/07/1993 | US5243379 Exposure drum mask |
| 09/07/1993 | US5243195 Projection exposure apparatus having an off-axis alignment system and method of alignment therefor |
| 09/07/1993 | US5242770 Improved resolution, reduced proximity effects |
| 09/02/1993 | WO1993017369A1 Multiple assembly register system |
| 08/31/1993 | US5241361 Pattern shift measuring method |
| 08/31/1993 | US5241188 Apparatus for detecting a focussing position |
| 08/26/1993 | DE4205944A1 Method of adjusting relative positions of mask film and circuit board - involves adjusting positions of film and board with absolute coordination systems so each can be moved in same plane independently |
| 08/26/1993 | DE4205301A1 Mehrfach-montage-registersystem Multiple-montage-register system |
| 08/25/1993 | EP0556669A1 Proximity mask alignment using a stored video image |
| 08/18/1993 | EP0555213A1 Proximity alignment using polarized illumination and double conjugate projection lens |
| 08/17/1993 | US5237393 Reticle for a reduced projection exposure apparatus |
| 08/17/1993 | CA1321298C Alignment of lithographic system |
| 08/12/1993 | DE4203699A1 Offset printing plate mfr. on copying machines - secures copy documents on mounting further apart than after illumination for suction together by copying frame |
| 08/10/1993 | US5235408 Position detecting method and apparatus |
| 08/03/1993 | US5233669 Device for and method of detecting positioning marks for cutting ceramic laminated body |
| 08/03/1993 | US5233536 Method and apparatus for perforating a printed circuit board |
| 08/03/1993 | CA1320828C Aligning |
| 07/27/1993 | US5231467 Reflective alignment position signal producing apparatus |
| 07/22/1993 | WO1993014445A1 Improved mask for photolithography |
| 07/22/1993 | CA2124077A1 Improved mask for photolithography |
| 07/20/1993 | US5229617 Position detecting method having reflectively scattered light prevented from impinging on a detector |
| 07/13/1993 | US5227862 Projection exposure apparatus and projection exposure method |
| 07/13/1993 | US5227838 Exposure system |
| 07/13/1993 | US5227626 Lithography apparatus using scanning tunneling microscopy |
| 07/13/1993 | US5227268 X-ray mask and its fabricating method-comprising a first and second alignment pattern |
| 07/13/1993 | US5226362 Pallet alignment assembly |
| 07/07/1993 | EP0549633A1 Improved memory system |
| 07/06/1993 | US5225892 Positional deviation detecting method |
| 07/06/1993 | US5225686 Positioning method and positioning mechanism for use in exposure apparatus |
| 06/29/1993 | US5222293 System for placing an object on a carrier and method |
| 06/15/1993 | US5220176 Apparatus and method for detecting alignment marks having alignment optical systems' driving means |
| 06/08/1993 | US5218415 Device for optically detecting inclination of a surface |
| 06/08/1993 | US5218193 Double-focus measurement apparatus utilizing chromatic aberration by having first and second bodies illuminated respectively by a single wavelength ray and a ray having a plurality of wavelengths |
| 06/08/1993 | US5217550 Alignment transfer method |
| 06/01/1993 | US5216257 Method and apparatus for alignment and overlay of submicron lithographic features |
| 05/25/1993 | US5214493 Reduction exposure apparatus with correction for alignment light having inhomogeneous intensity distribution |
| 05/25/1993 | US5214489 Aligning device for exposure apparatus |
| 05/25/1993 | US5213916 Photolithography, integrated circuits, layers with different optical transmissivities |
| 05/19/1993 | EP0222787B1 Method and device for aligning, controlling and/or measuring bidimensional objects |
| 05/19/1993 | CN1072273A Point-to-point photoetch method and system used for producing circular optical grating code disk |
| 05/13/1993 | WO1993009467A1 Method and apparatus for transfer of a reticle pattern onto a substrate by scanning |
| 05/05/1993 | EP0539757A1 Optical type encoder |
| 05/05/1993 | EP0539384A1 Process for producing a marker indicating the orientation of the crystal lattice of a wafer |
| 05/04/1993 | US5208680 Layout position designating sheet and method of mounting original using the same |
| 05/04/1993 | US5207414 Media handling system for photoplotter and method of use |
| 04/27/1993 | US5205039 Method for registering multiple printing plates |
| 04/20/1993 | US5204739 Proximity mask alignment using a stored video image |
| 04/20/1993 | US5204535 For use in an exposure apparatus |
| 04/14/1993 | EP0536842A1 X-ray alignment system |
| 04/14/1993 | EP0536655A1 Measuring method and measuring apparatus |
| 04/13/1993 | US5202748 In situ process control system for steppers |
| 04/13/1993 | US5202275 Forming insulation films, doping gate electrodes of random memory cells |
| 04/06/1993 | US5200800 Position detecting method and apparatus |
| 04/06/1993 | US5200798 Method of position detection and the method and apparatus of printing patterns by use of the position detection method |
| 03/31/1993 | EP0534759A1 Position detector |
| 03/31/1993 | EP0534758A1 Method and device for measuring positional deviation |
| 03/31/1993 | EP0534757A1 Method and device for measuring displacement |
| 03/31/1993 | EP0534720A1 Register marks |
| 03/30/1993 | US5198857 Film exposure apparatus and method of exposure using the same |
| 03/28/1993 | CA2078732A1 Displacement measuring device and displacement measuring method |
| 03/28/1993 | CA2078726A1 Position detector |
| 03/23/1993 | US5197089 Pin chuck for lithography system |
| 03/23/1993 | US5196711 Deviation measuring device including a mask having a grating pattern and a zone plate pattern |
| 03/23/1993 | US5195417 Registration of artwork panels in the manufacture of printed circuit boards |
| 03/17/1993 | EP0531779A1 X-ray mask containing a cantilevered tip for gap control and alignment |
| 03/16/1993 | US5194744 Compact reticle/wafer alignment system |
| 03/16/1993 | US5193690 Method of and apparatus for automatically inspecting an exposed and bent lithographic plate |
| 03/10/1993 | EP0531102A1 Aligner and exposure method for manufacturing semiconductor device |