| Patents for G03F 9 - Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (10,803) |
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| 11/12/1996 | US5574556 Stage mechanism in exposure apparatus |
| 11/12/1996 | US5573890 Method of optical lithography using phase shift masking |
| 11/12/1996 | US5573877 Exposure method and exposure apparatus |
| 11/07/1996 | WO1996035147A1 Process and device for adapting the position of printing plates to the deformation of the paper to be printed |
| 11/07/1996 | WO1996035146A1 A method of aligning images to be scanned and a scanning apparatus for such alignment |
| 11/07/1996 | DE19516368A1 Verfahren und Vorrichtung zur Anpassung der Lage von Druckplatten an die Verformung des zu bedruckenden Papieres Method and apparatus for adapting the position of printing plates to the deformation of the paper to be printed |
| 11/07/1996 | CA2220155A1 A method of aligning images to be scanned and a scanning apparatus for such alignment |
| 11/06/1996 | EP0741336A1 Method of producing flexible offset printing plates and an apparatus therefor |
| 11/05/1996 | US5572325 Apparatus for optically detecting a position of mark |
| 11/05/1996 | US5572288 Exposure apparatus with variable alignment optical system |
| 11/05/1996 | US5572036 Support element for an automatic load platform of a silicon wafer exposure unit |
| 10/31/1996 | WO1996034406A1 Manufacture of semiconductor integrated circuit device |
| 10/30/1996 | EP0740215A1 Scan type exposure apparatus and exposure method using the same |
| 10/29/1996 | US5570405 Registration and alignment technique for X-ray mask fabrication |
| 10/29/1996 | US5569930 Substrate height position detecting apparatus wherein a stop plate transmits a pattern of oblique light beams which are reflected by the substrate |
| 10/29/1996 | US5569929 Double-beam light source apparatus, position detecting apparatus and aligning apparatus |
| 10/29/1996 | US5569570 Automated mask alignment for UV projection exposure system |
| 10/22/1996 | US5568257 Adjusting device for an alignment apparatus |
| 10/22/1996 | US5567573 Optical device bearing a pattern for representing at least one image that is capable of having microscopic detail |
| 10/22/1996 | US5566840 Device for aligning printed circuit boards and pattern carriers |
| 10/16/1996 | EP0737898A1 Projection exposure apparatus and microdevice manufacturing method using the same |
| 10/16/1996 | EP0737844A2 Alignment apparatus and method |
| 10/16/1996 | EP0737330A1 Method of repetitively imaging a mask pattern on a substrate, and apparatus for performing the method |
| 10/15/1996 | US5566103 Optical system having an analog image memory, an analog refresh circuit, and analog converters |
| 10/15/1996 | US5565989 Photoreceiver having multiple functions |
| 10/15/1996 | US5565988 Alignment method and apparatus |
| 10/08/1996 | USRE35350 Method and apparatus for measuring surface distances from a reference plane |
| 10/08/1996 | US5563708 Semiconductor device manufacturing method wherein the substrate is interferically aligned by measuring the rotation of the original |
| 10/08/1996 | US5563682 Exposing apparatus with mask alignment system and method of aligning, exposing and transferring work |
| 10/01/1996 | US5561606 Method for aligning shot areas on a substrate |
| 10/01/1996 | US5561495 Focusing method in photolithography |
| 10/01/1996 | US5560297 Method of mounting a printing plate on a mounting sheet |
| 09/24/1996 | US5559601 Mask and wafer diffraction grating alignment system wherein the diffracted light beams return substantially along an incident angle |
| 09/24/1996 | US5559598 Apparatus for detecting misalignment between diffraction gratings and the position of a diffraction grating based on the phases or the phase difference between electrical signals |
| 09/24/1996 | US5558963 Method of producing photomask and exposing |
| 09/24/1996 | US5557855 Reticle |
| 09/17/1996 | US5557411 Position detection method |
| 09/17/1996 | US5557147 Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same |
| 09/11/1996 | EP0731377A1 Original holder |
| 09/10/1996 | US5555089 Absolute distance measuring interferometry using multi-pass resonant cavity referenced to a stabilized laser source |
| 09/10/1996 | US5554466 Color filter and method of preparation |
| 09/04/1996 | EP0730204A1 Auto-aperture apparatus |
| 09/03/1996 | US5552892 Illumination optical system, alignment apparatus, and projection exposure apparatus using the same |
| 09/03/1996 | US5552891 Automated mask alignment for UV projection expose system |
| 09/03/1996 | US5552888 Apparatus for measuring position of an X-Y stage |
| 09/03/1996 | US5552251 Circuits, photoresists, masking and measurement |
| 08/29/1996 | WO1996026047A1 A method and a device for applying perforations |
| 08/28/1996 | EP0729073A1 Positioning system and method and apparatus for device manufacture |
| 08/27/1996 | US5550635 Rotational deviation detecting method and system using a periodic pattern |
| 08/27/1996 | US5550633 Optical measuring apparatus having a partitioning wall for dividing gas flow in an environmental chamber |
| 08/27/1996 | US5549994 Non-reflective portion formed by destroying regularity of periodic structure of multilayer film |
| 08/22/1996 | DE19545518A1 Semiconductor substrate e.g. single crystal silicon wafer |
| 08/22/1996 | DE19505048A1 Video camera monitor with jointing device for viewing and joining two parts to provide two images |
| 08/20/1996 | US5548372 PCB tooling apparatus for forming patterns on both sides of a substrate |
| 08/13/1996 | US5545593 Method of aligning layers in an integrated circuit device |
| 08/13/1996 | US5545570 Method of inspecting first layer overlay shift in global alignment process |
| 08/06/1996 | US5543921 Aligning method utilizing reliability weighting coefficients |
| 08/06/1996 | US5543890 Process and device for adjusting the distance between a workpiece and a mask |
| 08/06/1996 | US5543256 Alignment pattern exposed before exposing device pattern; alignment pattern overlap-exposed after exposing device pattern |
| 07/30/1996 | US5542002 Method and apparatus for automatically inspecting a lithographic plate and reading its folio |
| 07/30/1996 | US5541729 Measuring apparatus utilizing diffraction of reflected and transmitted light |
| 07/23/1996 | US5537927 Apparatus and method for precisely drilling alignment pin register holes in pre-marked flexible printing plates |
| 07/17/1996 | EP0722123A1 Apparatus and method for exposing of workpiece |
| 07/17/1996 | EP0721608A1 Method of repetitively imaging a mask pattern on a substrate |
| 07/16/1996 | US5537565 Dynamic memory system having memory refresh |
| 07/10/1996 | EP0426866B1 Projection/exposure device and projection/exposure method |
| 07/09/1996 | US5534969 Alignment method and apparatus in an exposing process |
| 07/02/1996 | US5532822 Method of measuring orthogonality of stage unit |
| 07/02/1996 | US5532520 Semiconductor wafer with alignment marks |
| 07/02/1996 | US5532114 Four photo masks |
| 07/02/1996 | US5532091 Aligning method |
| 06/27/1996 | WO1996019351A1 Elongate, semi-tone printing process and substrates printed thereby |
| 06/27/1996 | CA2208272A1 Elongate, semi-tone printing process and substrates printed thereby |
| 06/25/1996 | US5530552 Double sided wafer, alignment technique |
| 06/25/1996 | US5530257 Double-beam light source apparatus, position detecting apparatus and aligning apparatus |
| 06/25/1996 | US5530256 Double-beam light source apparatus, position detecting apparatus and aligning apparatus |
| 06/18/1996 | US5528118 Guideless stage with isolated reaction stage |
| 06/18/1996 | US5528027 Scanning exposure apparatus having a scanning device for scanning light beams along the movement direction of a moving mask stage |
| 06/18/1996 | CA2004193C Molding blank decorating process, use of said process and products thereof |
| 06/11/1996 | US5526506 Computer system having an improved memory architecture |
| 06/11/1996 | US5525840 Semiconductor device having an alignment mark |
| 06/11/1996 | US5525808 Alignment method and alignment apparatus with a statistic calculation using a plurality of weighted coordinate positions |
| 06/11/1996 | US5524502 Positioning apparatus including a hydrostatic bearing for spacing apart a supporting surface and a guide surface |
| 06/05/1996 | EP0715215A1 Alignment method and semiconductor exposure method |
| 06/05/1996 | EP0715214A1 Process for positioning a mask relative to a workpiece and device for carrying out the process |
| 06/04/1996 | US5524131 For manufacturing microdevices |
| 06/04/1996 | US5523841 Distance measuring apparatus using multiple switched interferometers |
| 06/04/1996 | US5523574 Exposure apparatus |
| 05/29/1996 | CN1123466A A signal processing method, a method of adjusting a position detecting optical system, a target pattern, an exposure process, and an exposure apparatus |
| 05/28/1996 | US5521036 Positioning method and apparatus |
| 05/28/1996 | US5521033 Process for manufacturing semiconductor integrated circuit device, exposure method and mask for the process |
| 05/28/1996 | CA2070880C Structure and method for direct calibration of registration measurement systems to actual semiconductor wafer process topography |
| 05/22/1996 | EP0713147A2 Drum type image transfer apparatus |
| 05/08/1996 | EP0620931A4 Improved mask for photolithography. |
| 05/07/1996 | US5515410 Irradiation device for deep x-ray lithography |
| 05/01/1996 | EP0709735A2 Self-aligned alignment marks for phase-shifting masks |
| 04/30/1996 | US5511930 Precision positioning apparatus |
| 04/30/1996 | US5511479 System and method for providing pin register holes in flexible printing plates and apparatus and method for aligning plates on a flexographic printing press plate cylinder |
| 04/23/1996 | US5510892 Inclination detecting apparatus and method |
| 04/18/1996 | WO1996011376A1 On-axis mask and wafer alignment system |