| Patents for G03F 9 - Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (10,803) |
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| 03/24/1987 | US4653008 Method of controlling platemaking positions and errors |
| 03/24/1987 | US4652914 Method of recording register marks |
| 03/24/1987 | US4652134 Mask alignment system |
| 03/24/1987 | US4652118 Device for mounting film in-register for producing printing plates for small offset printing presses |
| 03/17/1987 | US4650983 Focusing apparatus for projection optical system |
| 03/10/1987 | US4648708 Pattern transfer apparatus |
| 03/04/1987 | EP0212219A2 Visibility enhancement of first order alignment marks |
| 03/03/1987 | CA1218763A1 Focal plane adjusted photomask and methods of projecting images onto photosensitized workpiece surfaces |
| 02/24/1987 | US4645924 Observation apparatus with selective light diffusion |
| 02/24/1987 | US4645338 Optical system for focus correction for a lithographic tool |
| 02/24/1987 | US4645336 Method and apparatus for determining the trimmed images of originals for reproduction on printing technology |
| 02/17/1987 | US4643579 Aligning method |
| 02/12/1987 | WO1987000968A1 Positioning table |
| 02/10/1987 | US4642468 Position detecting method for detecting the relative positions of the first and second members |
| 02/10/1987 | US4641921 Optical adjusting process |
| 02/03/1987 | US4641257 Measurement method and apparatus for alignment |
| 02/03/1987 | US4641244 Method and apparatus for registering color separation film |
| 02/03/1987 | US4641035 Apparatus and a method for position detection of an object stepped portion |
| 02/03/1987 | US4640888 Etching a slit reflecting light as one peak |
| 02/03/1987 | US4640619 Microlithographic calibration scheme |
| 01/27/1987 | CA1217224A1 Electro-magnetic alignment apparatus |
| 01/27/1987 | CA1217223A1 Electro-magnetic alignment assemblies |
| 01/27/1987 | CA1217088A1 Displacement device, particularly for the photolithographic treatment of a substrate |
| 01/20/1987 | CA1216876A1 Electro-magnetic alignment device |
| 01/14/1987 | EP0078323B1 Apparatus for projecting a series of images onto dies of a semiconductor wafer |
| 01/13/1987 | US4636968 Method of positioning a beam to a specific portion of a semiconductor wafer |
| 01/13/1987 | US4636626 Apparatus for aligning mask and wafer used in semiconductor circuit element fabrication |
| 01/13/1987 | US4636080 Two-dimensional imaging with line arrays |
| 01/13/1987 | US4636077 Aligning exposure method |
| 01/13/1987 | US4636067 Photography pin board system |
| 01/06/1987 | US4634876 Object position detecting apparatus using accumulation type sensor |
| 01/06/1987 | US4634240 Optical apparatus using polarized light |
| 12/30/1986 | US4632724 Visibility enhancement of first order alignment marks |
| 12/30/1986 | US4632557 Alignment target image enhancement for microlithography process |
| 12/30/1986 | EP0205571A1 Establishing and/or evaluating alignment by means of alignment marks. |
| 12/23/1986 | US4631416 Wafer/mask alignment system using diffraction gratings |
| 12/23/1986 | CA1215570A1 Exposure device |
| 12/17/1986 | EP0204901A2 Process and device for printing an electronic circuit in an exact relation to the reference holes in a circuit board |
| 12/16/1986 | US4629313 Exposure apparatus |
| 12/16/1986 | CA1215412A1 Suction device for holding plates |
| 12/04/1986 | WO1986007169A1 Device for automatically determining the deviation between the structures of a pattern and those of an object compared therewith |
| 12/02/1986 | US4627010 Method and device for discriminating stillness of a step exposure apparatus |
| 12/02/1986 | US4627005 Equal density distribution process |
| 12/02/1986 | US4626907 Method and apparatus for mutually aligning objects |
| 11/26/1986 | EP0202961A1 Apparatus for projecting and exposing a photomask pattern onto re-exposing substrates |
| 11/20/1986 | WO1986006852A1 Method and device for aligning, controlling and/or measuring bidimensional objects |
| 11/18/1986 | US4623257 Alignment marks for fine-line device fabrication |
| 11/12/1986 | EP0200814A1 Method and apparatus for registering color separation film |
| 11/11/1986 | US4621922 Device for the projection copying of masks onto a workpiece |
| 11/04/1986 | US4620785 Sheet-like member having alignment marks and an alignment apparatus for the same |
| 10/29/1986 | EP0199014A2 Apparatus and method for determining focus correction for a lithographic tool |
| 10/28/1986 | US4619524 Device for the projection copying of masks |
| 10/22/1986 | EP0198571A2 Method and system for patching original and extracting original-trimming data in scanner |
| 10/21/1986 | US4618261 Optical gap measuring |
| 10/15/1986 | EP0197221A1 Device for measuring the position of an object |
| 10/15/1986 | EP0197161A1 Press plate positioning apparatus for automatic drawing machine |
| 10/14/1986 | US4617469 Alignment apparatus |
| 10/14/1986 | US4616908 For projecting a reduced image of a reticle |
| 10/09/1986 | WO1986005895A1 Device for the alignment, testing and/or measurement of two-dimensional objects |
| 10/07/1986 | US4616130 Projection exposure apparatus |
| 10/07/1986 | US4615621 Auto-focus alignment and measurement system and method |
| 10/07/1986 | US4615614 Optical exposure apparatus |
| 10/07/1986 | US4615515 For use in a semiconductor circuit manufacturing apparatus |
| 10/01/1986 | CN85107228A Method and apparatus for registering color separation film |
| 09/30/1986 | US4614864 Apparatus for detecting defocus |
| 09/30/1986 | US4614433 Mask-to-wafer alignment utilizing zone plates |
| 09/30/1986 | US4614432 Pattern detector |
| 09/30/1986 | US4614431 Alignment apparatus with optical length-varying optical system |
| 09/30/1986 | US4614415 Illumination signal processing system |
| 09/25/1986 | WO1986005587A1 Laser-based wafer measuring system |
| 09/23/1986 | CA1211869A1 Continuous alignment target pattern and signal processing |
| 09/09/1986 | US4611122 Signal detection apparatus with plural elongate beams corresponding |
| 09/09/1986 | US4610940 Method for fabricating a photomask pattern |
| 09/09/1986 | US4610442 Positioning table |
| 08/19/1986 | US4607213 Shielded capacitive mask aligner |
| 08/19/1986 | US4606643 Fine alignment system |
| 08/06/1986 | EP0189869A2 Improved step-and-repeat aligment and exposure system and method therefore |
| 08/06/1986 | EP0189435A1 Mask-to-wafer alignment utilizing zone plates. |
| 08/05/1986 | US4603473 Method of fabricating integrated semiconductor circuit |
| 07/23/1986 | EP0188234A2 Improved step-and-repeat alignment and exposure system |
| 07/22/1986 | US4601560 Focus adjustment in an alignment and exposure apparatus |
| 07/17/1986 | WO1986004158A1 Establishing and/or evaluating alignment by means of alignment marks |
| 07/15/1986 | US4600309 Process and apparatus for theoptical alignment of patterns in two close-up planes in an exposure means incorporating a divergent radiation source |
| 07/15/1986 | US4600282 For aligning an object with an imaging plane of an optical system |
| 07/08/1986 | US4599657 Image pick-up device |
| 07/08/1986 | US4599122 Method of taping separation films for photoengraving and apparatus therefor |
| 07/08/1986 | US4599000 Position detection signal processing apparatus |
| 07/01/1986 | US4598242 Mask feed method and apparatus for exposure replicate systems |
| 07/01/1986 | US4597669 Pattern detector |
| 07/01/1986 | US4597664 Step-and-repeat projection alignment and exposure system with auxiliary optical unit |
| 06/25/1986 | EP0185263A1 Apparatus for imaging two objects placed in different object planes |
| 06/24/1986 | US4596467 Dissimilar superimposed grating precision alignment and gap measurement systems |
| 06/24/1986 | CA1206629A1 Device for photolithographically treating a thin substrate |
| 06/17/1986 | US4595295 Alignment system for lithographic proximity printing |
| 06/17/1986 | US4595282 Recording apparatus |
| 06/17/1986 | US4594868 System and plate bending machine for registering in an offset printing press |
| 06/17/1986 | CA1206030A1 Bore-sighted step-and-repeat projection alignment and exposure system |
| 06/11/1986 | EP0184063A2 Method of positioning printing plates before cutting registration holes as well as device for carrying out the method |
| 06/03/1986 | US4592650 Apparatus for projecting a pattern on a semiconductor substrate |
| 06/03/1986 | US4592648 Device for projection copying of masks onto a workpiece |