| Patents for G03F 9 - Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (10,803) |
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| 12/07/1982 | US4362389 Method and apparatus for projection type mask alignment |
| 12/07/1982 | US4362385 Process and arrangement for copying masks on a workpiece with arrangement for correction of alignment errors |
| 11/25/1982 | WO1982004133A1 Apparatus for projecting a series of images onto dies of a semiconductor wafer |
| 11/24/1982 | EP0065449A2 Alignment target for electron-beam write system |
| 11/24/1982 | EP0065115A1 Alignment apparatus for X-ray or optical lithography |
| 11/23/1982 | US4360273 Optical alignment of masks for X-ray lithography |
| 11/17/1982 | EP0064604A1 Precision lamp positioner |
| 11/03/1982 | EP0063980A1 Projection apparatus with a focusing device |
| 11/03/1982 | EP0063830A1 Device for detecting the position of an object |
| 11/02/1982 | US4357100 Arrangement for projection copying masks on to a work piece |
| 10/26/1982 | US4356392 Optical imaging system provided with an opto-electronic detection system for determining a deviation between the image plane of the imaging system and a second plane on which an image is to be formed |
| 10/26/1982 | US4356223 Semiconductor device having a registration mark for use in an exposure technique for micro-fine working |
| 10/26/1982 | US4355892 Method for the projection printing |
| 10/06/1982 | EP0061536A1 Method of manufacturing a semiconductor device having improved alignment marks and alignment marks for said method |
| 10/05/1982 | US4353087 Automatic mask alignment |
| 09/28/1982 | US4351892 Alignment target for electron-beam write system |
| 09/16/1982 | WO1982003126A1 Reregistration system for a charged particle beam exposure system |
| 09/07/1982 | CA1131369A1 Temperature compensated alignment system |
| 09/03/1982 | EP0053159A4 A pattern recognition system and method. |
| 08/24/1982 | US4345836 Two-stage wafer prealignment system for an optical alignment and exposure machine |
| 08/10/1982 | US4344160 Automatic wafer focusing and flattening system |
| 08/10/1982 | US4343878 System for providing photomask alignment keys in semiconductor integrated circuit processing |
| 08/10/1982 | US4343877 System for design and production of integrated circuit photomasks and integrated circuit devices |
| 08/03/1982 | US4342906 Pulse width modulated feedback arrangement for illumination control |
| 07/28/1982 | EP0056736A1 Improvements in or relating to apparatus for positioning sheet material |
| 07/20/1982 | US4340305 Plate aligning |
| 07/14/1982 | EP0055939A1 Previewing apparatus of flats |
| 07/07/1982 | EP0055303A1 Mask for copying a pattern onto a photoresist layer, process for the production of this mask, and its use in a photolithographic process |
| 06/30/1982 | EP0054641A1 Thermally compensated shadow mask |
| 06/30/1982 | EP0054598A1 Method for the inspection and automatic sorting of objects with configurations of fixed dimensional tolerances, and device for carrying out the method |
| 06/15/1982 | US4335313 Method and apparatus for aligning an opaque mask with an integrated circuit wafer |
| 06/09/1982 | EP0053463A2 Optical apparatus having a mirror and a mirror mounting stage |
| 06/09/1982 | EP0053159A1 A pattern recognition system and method |
| 06/01/1982 | US4333044 Methods of and system for aligning a device with a reference target |
| 05/12/1982 | EP0051567A1 Apparatus for the automatic adjustment of at least one object |
| 04/27/1982 | US4327292 Alignment process using serial detection of repetitively patterned alignment marks |
| 04/27/1982 | US4326805 Method and apparatus for aligning mask and wafer members |
| 04/20/1982 | US4325632 Method of photographic printing and a photographic original plate for use therein |
| 04/13/1982 | US4325077 Automatic wafer alignment system |
| 03/30/1982 | US4322819 Memory system having servo compensation |
| 03/30/1982 | US4322161 Stripper's table and method of compositing lithographic work pieces |
| 03/16/1982 | US4319845 Method for achieving alignment between objects |
| 03/09/1982 | CA1119396A1 High resolution alignment technique and apparatus |
| 03/02/1982 | US4318003 Method and machine for positioning films on base sheets |
| 02/16/1982 | US4315692 Mask alignment for semiconductor processing |
| 02/10/1982 | EP0045321A2 Method and device for optical distance measurement |
| 02/09/1982 | US4315201 Alignment apparatus for mask and wafer used in manufacturing semiconductor circuit elements |
| 01/19/1982 | US4311389 Method for the optical alignment of designs in two near planes and alignment apparatus for performing this method |
| 01/13/1982 | EP0043508A2 Apparatus for the transport and the alignment of printing plates |
| 01/12/1982 | US4310878 Digital feedback control system |
| 01/12/1982 | US4309813 Mask alignment scheme for laterally and totally dielectrically isolated integrated circuits |
| 12/23/1981 | EP0042136A1 Registration method and means |
| 11/26/1981 | WO1981003377A1 A pattern recognition system and method |
| 11/17/1981 | US4301470 Alignment apparatus |
| 11/17/1981 | US4301363 Alignment device |
| 11/17/1981 | US4301237 Positioning a masked substrate having metallized grids |
| 11/11/1981 | EP0039407A2 System for automatically positioning a wafer within the focal plane of an optical system |
| 10/20/1981 | US4296197 Halftone printing system |
| 09/29/1981 | US4292576 Mask-slice alignment method |
| 09/23/1981 | EP0036026A1 Addressable device for the positioning of a work-piece |
| 09/09/1981 | EP0035113A1 Alignment apparatus |
| 09/01/1981 | CA1108224A1 Print original with means for attachment to print cylinder |
| 08/18/1981 | US4284349 Means for imaging a lithographic plate |
| 07/14/1981 | US4278893 Alignment apparatus |
| 07/08/1981 | EP0031680A2 Focusing apparatus |
| 07/07/1981 | US4277548 Method of producing a charge plate for use in an ink recorder |
| 07/07/1981 | CA1104338A1 Diffraction type alignment/measurement of configurations on spaced planes |
| 06/24/1981 | EP0030899A1 Optical aligning system for two patterns provided with grid-type aligning marks, especially for direct photorepeating on silicon |
| 06/24/1981 | EP0030878A1 Optical aligning system for two patterns and photorepeater making use of such a system |
| 06/23/1981 | US4275306 Alignment apparatus |
| 05/26/1981 | US4269505 Device for the projection printing of the masks of a mask set onto a semiconductor substrate |
| 05/19/1981 | US4268563 Radiation mask for producing structural configurations in photo-sensitive resists by X-ray exposure |
| 05/13/1981 | EP0028367A2 Registration process in a printing apparatus |
| 05/12/1981 | US4266876 Automatic alignment apparatus |
| 05/05/1981 | US4265542 Apparatus and method for fine alignment of a photomask to a semiconductor wafer |
| 04/29/1981 | EP0027570A2 Apparatus for prealignment of a wafer |
| 04/28/1981 | US4264192 System for pre-stripping alignment of color separations |
| 04/14/1981 | US4262208 Photo-electrical detecting apparatus |
| 04/07/1981 | US4260670 X-ray mask |
| 03/31/1981 | US4259019 Apparatus for the automatic alignment of two superimposed objects, for example a semiconductor wafer and a transparent mask |
| 03/18/1981 | EP0025380A1 Process for transferring onto a support the true shadow of a mask pierced with regularly distributed slits, and application of this process to photolithography in particular |
| 03/18/1981 | EP0025038A1 Process and equipment for copying masks on a piece |
| 03/18/1981 | EP0025036A1 Process for focusing a mask image onto a workpiece. |
| 02/24/1981 | US4253112 Process for automatic alignment of two objects to be adjusted with respect to one another |
| 02/24/1981 | US4252442 Adjusting method and apparatus for positioning planar components |
| 02/17/1981 | US4251160 Method and arrangement for aligning a mask pattern relative to a semiconductor substrate |
| 02/17/1981 | US4251129 Photoelectric detecting device |
| 01/13/1981 | CA1093297A1 Plate aligning |
| 01/07/1981 | EP0020982A2 A method and apparatus for orienting a wafer in a desired position at a work station |
| 12/30/1980 | US4242038 Wafer orienting apparatus |
| 12/10/1980 | EP0019941A1 Reduction projection aligner system |
| 12/10/1980 | EP0019721A1 Optical projection apparatus for aligning a projection image on a surface |
| 11/11/1980 | US4232969 Projection optical system for aligning an image on a surface |
| 10/29/1980 | EP0017921A1 Piezoelectric-drive system, especially for focussing systems |
| 10/29/1980 | EP0017759A2 Improved step-and-repeat projection alignment and exposure system |
| 10/15/1980 | EP0017044A2 A system for positioning a utilization device |
| 09/30/1980 | US4225241 Method and apparatus for adjusting the relative positioning of planar transparent objects, such as the glass plates of a liquid crystal display, and a liquid crystal display adjusted by the method and apparatus |
| 09/16/1980 | US4223055 Multi-layer graphic arts tape system |
| 09/03/1980 | EP0015173A1 Optical aligning system for two patterns and photorepeater making use of such a system |
| 08/26/1980 | US4219719 Method and apparatus for automatically positioning a workpiece relative to a scanning field or mask |