| Patents for G03F 9 - Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (10,803) |
|---|
| 10/18/2011 | US8039181 Method and system for reducing overlay errors in semiconductor volume production using a mixed tool scenario |
| 10/18/2011 | US8039180 Scattering bar OPC application method for sub-half wavelength lithography patterning |
| 10/18/2011 | US8039179 Integrated circuit layout design |
| 10/18/2011 | US8039177 Method of correcting a flare and computer program product |
| 10/18/2011 | US8039176 Method for fracturing and forming a pattern using curvilinear characters with charged particle beam lithography |
| 10/13/2011 | WO2011125401A1 Exposure method and exposure device |
| 10/12/2011 | EP2375289A2 Moving/guiding apparatus and exposure apparatus using the same |
| 10/12/2011 | CN101799634B Multichannel collecting and correcting device of alignment signal of photoetching machine |
| 10/12/2011 | CN101436006B Double-surface position alignment apparatus and method |
| 10/11/2011 | US8035824 Differential critical dimension and overlay metrology apparatus and measurement method |
| 10/11/2011 | US8035798 Lithographic apparatus and device manufacturing method |
| 10/11/2011 | US8034515 Pattern forming method, pattern designing method, and mask set |
| 10/11/2011 | US8033814 Device for holding a template for use in imprint lithography |
| 10/06/2011 | US20110244378 Device and method for providing wavelength reduction with a photomask |
| 10/05/2011 | CN102207695A Alignment system and alignment method for photolithographic device |
| 10/05/2011 | CN102207694A Imaging adjustment unit and focusing and leveling control system using the unit |
| 10/05/2011 | CN102207689A Alignment system and align mark precision extraction method of write-through lithography machine |
| 10/05/2011 | CN102207683A Mask alignment surface shape detection device for DUV (deep ultra violet) photolithographic device |
| 10/04/2011 | US8029954 Exposure method and memory medium storing computer program |
| 10/04/2011 | US8029953 Lithographic apparatus and device manufacturing method with double exposure overlay control |
| 10/04/2011 | US8029947 Systems and methods for implementing and manufacturing reticles for use in photolithography tools |
| 09/28/2011 | EP1753622B1 Method for producing a printing plate and for feeding the same to an impression cylinder of a printing press |
| 09/28/2011 | CN201993580U 防止干膜被扯起的线路手动对位菲林贴胶带 Prevent line manual hoist to position the dry film is film taping |
| 09/28/2011 | CN201993579U 一种用于制作线路板的对位台 A bit units for the production of circuit boards |
| 09/28/2011 | CN102200701A Fixing device for mask |
| 09/28/2011 | CN101533231B Off-axis alignment system and alignment method |
| 09/27/2011 | US8027529 System for improving critical dimension uniformity |
| 09/22/2011 | WO2011113682A1 Method and apparatus for alignment optimization with respect to plurality of layers |
| 09/22/2011 | US20110228241 Lithographic apparatus and device manufacturing method |
| 09/21/2011 | CN102193346A Non-contact quick pre-positioning method and device for substrate of LED (light-emiting diode) automatic exposure machine |
| 09/21/2011 | CN102193340A Image processing method by projection photo-etching focusing |
| 09/21/2011 | CN102193339A Maskless photoetching alignment system |
| 09/21/2011 | CN102193330A Lithographic apparatus and device manufacturing method |
| 09/21/2011 | CN102193320A Alignment device for photoetching machines and alignment method thereof |
| 09/21/2011 | CN102193307A Method for enhancing identifiability of pattern requiring measurement |
| 09/20/2011 | US8023112 Alignment apparatus and fabrication apparatus for planar member and alignment method and fabrication method for planar member |
| 09/20/2011 | US8021804 Photomask manufacturing method |
| 09/15/2011 | WO2011111327A1 Alignment method and flat panel display manufacture method |
| 09/14/2011 | CN102183880A Quick pre-locating device for base plate of light emitting diode (LED) automatic exposure machine |
| 09/13/2011 | US8018657 Optical arrangement of autofocus elements for use with immersion lithography |
| 09/13/2011 | US8017289 Method for manufacturing a surface and integrated circuit using variable shaped beam lithography |
| 09/13/2011 | US8017288 Method for fracturing circular patterns and for manufacturing a semiconductor device |
| 09/13/2011 | US8017286 Method for design and manufacture of a reticle using a two-dimensional dosage map and charged particle beam lithography |
| 09/09/2011 | WO2011107564A1 Pattern generators comprising a calibration system |
| 09/07/2011 | CN101634814B Primary aligning device and primary aligning system |
| 09/06/2011 | US8012651 Mounting a pellicle to a frame |
| 09/06/2011 | US8012385 soft lithographic method without an exposing apparatus; placing a mold having a groove on the substrate and injecting a color resin into the groove |
| 09/01/2011 | WO2011104376A1 Method and apparatus for performing pattern alignment |
| 09/01/2011 | WO2011104375A1 Method and apparatus for performing pattern alignment |
| 09/01/2011 | WO2011104374A1 Method and apparatus for performing pattern alignment |
| 09/01/2011 | WO2011104373A1 Method and apparatus for performing pattern alignment |
| 09/01/2011 | WO2011104372A1 Method and apparatus for performing pattern alignment |
| 09/01/2011 | WO2011104173A1 Lithographic apparatus and device manufacturing method |
| 09/01/2011 | WO2011080311A4 Exposure method |
| 08/31/2011 | CN102169294A Method for measuring scanning inclination of mask table in scanning mask aligner |
| 08/30/2011 | US8007968 Substrate processing method, program, computer-readable storage medium and substrate processing system |
| 08/30/2011 | US8007959 Photomask and pattern formation method using the same |
| 08/25/2011 | WO2011101187A1 Lithographic apparatus and device manufacturing method |
| 08/25/2011 | WO2011101184A1 Lithographic apparatus and method of producing a reference substrate |
| 08/24/2011 | EP2360524A2 Imprint apparatus, template of imprint apparatus, and article manufacturing method |
| 08/24/2011 | CN102163012A Virtual photomask system and method for superposing virtual photomask |
| 08/24/2011 | CN102163002A Lithographic apparatus and device manufacturing method |
| 08/24/2011 | CN102162992A Imprint apparatus, template of imprint apparatus, and article manufacturing method |
| 08/24/2011 | CN101727011B Alignment method of lithography machine |
| 08/18/2011 | WO2011099563A1 Substrate processing device |
| 08/18/2011 | DE102010007970A1 Verfahren und Vorrichtung zum aktiven Keilfehlerausgleich zwischen zwei im wesentlichen zueinander parallel positionierbaren Gegenständen Method and device for active wedge error compensation between two substantially parallel repositionable articles |
| 08/17/2011 | EP2357529A2 Optical imaging arrangement |
| 08/17/2011 | CN201936122U 多动向检测对位装置 Multi-position trend detection device |
| 08/17/2011 | CN1804725B Apparatus and method for supporting and thermally conditioning a substrate, a support table, a chuck |
| 08/17/2011 | CN102156393A Plate printing method for mask plate in lithography machine |
| 08/17/2011 | CN102156392A Device and method for detecting alignment parameter of photoetching machine |
| 08/17/2011 | CN101312180B Superposed marker and method for forming same as well as uses |
| 08/17/2011 | CN101071279B Lithographic apparatus, calibration method, device manufacturing method |
| 08/16/2011 | US7998759 Maunfacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server |
| 08/16/2011 | US7998643 Method of correcting an error in phase difference in a phase shift mask |
| 08/16/2011 | US7998641 Photomask and pattern formation method using the same |
| 08/11/2011 | WO2011097234A2 Improved printing plate registration |
| 08/11/2011 | WO2011097144A2 Improved detection of a misregistered printing plate |
| 08/11/2011 | WO2002039794A9 System and method for fabricating printed circuit boards |
| 08/11/2011 | DE10105978B4 Mehrstrahl-Abtastvorrichtung zur Abtastung eines fotoempfindlichen Materials mit einem Multi-Spot-Array sowie Verfahren zur Korrektur der Position von Bildpunkten des Multi-Spot-Arrays Multi-beam scanning device for scanning a photosensitive material with a multi-spot array and method for correcting the position of pixels of the multi-spot array |
| 08/10/2011 | CN1965389B Substrate holding device, exposure device having the same, exposure method, method for producing element |
| 08/10/2011 | CN101034263B Method and system for enhanced lithographic alignment |
| 08/03/2011 | CN102141738A Nanometer-level automatic focusing system for projection lithography |
| 07/28/2011 | WO2011090057A1 Substrate, method for exposure of substrate to light, and photo-alignment treatment method |
| 07/27/2011 | CN201909945U Film alignment fixture |
| 07/27/2011 | CN101604124B Mold, pattern forming method, and pattern forming apparatus |
| 07/26/2011 | US7986396 Exposure apparatus |
| 07/26/2011 | US7985517 Lithography simulation method, computer program product, and pattern forming method |
| 07/26/2011 | US7985516 Substrate processing method, computer-readable storage medium and substrate processing system |
| 07/26/2011 | US7985514 Method for fracturing a pattern for writing with a shaped charged particle beam writing system using dragged shots |
| 07/21/2011 | WO2011087129A1 Exposure method, exposure device, and manufacturing method for device |
| 07/20/2011 | CN102132216A Mask holding mechanism |
| 07/20/2011 | CN102129183A Focusing and levelling measuring device |
| 07/19/2011 | US7982850 Immersion lithographic apparatus and device manufacturing method with gas supply |
| 07/19/2011 | US7981575 Method for optical proximity correction of a reticle to be manufactured using variable shaped beam lithography |
| 07/14/2011 | DE102005019184B4 Verfahren zum Erzeugen eines Druckkopfs A method for generating a print head |
| 07/13/2011 | EP2242595B1 Printing plates |
| 07/13/2011 | CN201897692U Masking plate with alignment marks |
| 07/13/2011 | CN102124411A Device for microlithographic projection illumination and device for the inspection of a surface of a substrate |
| 07/13/2011 | CN102122120A Two-table switching system of stepping and scanning lithography machine |