Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
02/2000
02/10/2000WO2000006613A1 Photopolymerization process and composition employing a charge transfer complex and cationic photoinitiator
02/10/2000DE19929716A1 Verfahren zur Vorbereitung eines Aluminiumsubstrats für eine lithographische Druckplatte sowie für die Herstellung einer vorsensibilisierten lithographischen Druckplatte A method of preparing an aluminum substrate for a lithographic printing plate and for the production of a presensitized lithographic printing plate
02/10/2000DE19835476A1 Elektrode für eine Hochdruckentladungslampe mit langer Lebensdauer The electrode for a high pressure discharge lamp with a long service life
02/10/2000CA2334255A1 Photopolymerization process and composition employing a charge transfer complex and cationic photoinitiator
02/09/2000EP0978870A2 Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof
02/09/2000EP0978869A2 Method for forming a minute resist pattern and method for forming a gate electrode
02/09/2000EP0978764A1 Photosensitive resin derived from saponified poly(vinyl acetate), photosensitive resin composition containing the resin, and pattern formation method making use of the composition
02/09/2000EP0978763A1 Lithographic process for device fabrication using electron beam imaging
02/09/2000EP0978376A2 Radiation-sensitive mixture comprising IR-absorbing cyanine dyes having a betaine structure or having a betaine structure and containing an anion, and recording material prepared therewith
02/09/2000EP0978375A2 Radiation-sensitive mixture comprising IR-absorbing, anionic cyanine dyes and recording material prepared therewith
02/09/2000EP0978016A1 Antireflective coating compositions for photoresist compositions and use thereof
02/09/2000EP0978015A1 Light absorbing polymers
02/09/2000EP0977792A1 Nitrogen-containing epoxy resins for photocurable coating applications
02/09/2000EP0977747A1 Photoactive coumarin derivatives
02/09/2000EP0830552A4 Method for reducing the level of diluent in diluent-containing resins using microwave energy
02/09/2000EP0791189B1 Positioning device with a vibration-free object table
02/09/2000CN1244265A Method of contact printing on gold coated films
02/09/2000CN1244198A Photoactivatable nitrogen-containing bases based on 'alpha'-amino ketones
02/09/2000CN1244190A Non-volatile phenylglyoxalic esters
02/09/2000CN1244030A Phase-shift mask and manufacture thereof
02/09/2000CN1244029A Method and apparatus for removing corrosion inhibitor
02/09/2000CN1243971A Alkoxyl N-hydroxy alkyl acylamine used as corrosion inhibitor remover
02/09/2000CN1243823A N-chain alkyl alcohol alkoxyl acylamide compounds, corrosion inhibilor remover, composition for the remover and preparation thereof
02/08/2000US6023486 Soldered fan assembly for electric discharge laser
02/08/2000US6023338 Overlay alignment measurement of wafers
02/08/2000US6023321 Projection exposure apparatus and method
02/08/2000US6023320 Scanning exposure apparatus with surface position detecting system
02/08/2000US6023068 Semiconductor device manufacturing apparatus
02/08/2000US6023067 Blanking system for electron beam projection system
02/08/2000US6022906 α-aminoacetophenone photoinitiators
02/08/2000US6022672 Method of manufacturing semiconductors having improved temperature control
02/08/2000US6022666 Blend of alkali-soluble hydroxy group containing polymer and cyano group-containing oximesulfonate
02/08/2000US6022664 Mixture of a polymerizable vinyl monomer and organic borate compound
02/08/2000US6022650 Substrate box; photoresist layer; rotation
02/08/2000US6022597 Coating polyester cord with perhalophenylazide solution, exposing the coated cord to an energy source and/or heating the polyester cord coated with the perhalophenylazide to a temperature of from about 130-200 degrees c
02/08/2000US6022152 Non-abrasive processing of printing plates
02/08/2000US6022095 Curable compositions
02/08/2000US6021991 Active anti-vibration apparatus
02/03/2000WO2000005770A1 Method for double-sided patterning of high temperature superconducting circuits
02/03/2000WO2000005282A1 Water soluble positive-working photoresist composition
02/03/2000WO1999054786A9 Elastomeric mask and use in fabrication of devices, inlcuding pixelated electroluminescent displays
02/03/2000DE19834746A1 Strahlungsempfindliches Gemisch mit IR-absorbierenden, betainischen oder betainisch-anionischen Cyaninfarbstoffen und damit hergestelltes Aufzeichnungsmaterial A radiation-sensitive mixture with IR-absorbing, betaine or betaine-anionic cyanine dyes and thus produced recording material
02/03/2000DE19834745A1 Strahlungsempfindliches Gemisch mit IR-absorbierenden, anionischen Cyaninfarbstoffen und damit hergestelltes Aufzeichnungsmaterial A radiation-sensitive mixture with IR-absorbing, anionic cyanine dyes and thus produced recording material
02/03/2000DE19833683A1 Selective deposition, e.g. for conductive polymer coating or micro-manipulation, comprises selectively irradiating substrate with light-dependent electrical properties in solution of substance which precipitates in an electric field
02/02/2000EP0977244A2 Stage system and stage driving method for use in exposure apparatus
02/02/2000EP0977085A1 Photosensitive resin composition and color filter
02/02/2000EP0977076A2 Color filter, production process of color filter, liquid crystal display device using the color filter, and production process of black matrix
02/02/2000EP0976573A1 Flexibly supported lithographic printing plate having an improved dimensional stability
02/02/2000EP0976549A1 Processless thermal printing plate with well defined nanostructure
02/02/2000EP0976151A1 Methods and apparatus for removing photoresist mask defects-in a plasma reactor
02/02/2000EP0976010A1 Waterborne photoresists made from urethane acrylates
02/02/2000EP0976008A1 An apparatus and a method for illuminating a light-sensitive medium
02/02/2000EP0975996A1 Device for making grid structures in optical fibers
02/02/2000EP0975731A1 Ethylenediaminetetraacetic acid or its ammonium salt semiconductor process residue removal composition and process
02/02/2000EP0975577A1 Photocurable halofluorinated acrylates
02/02/2000EP0975437A1 Black matrix with conductive coating
02/02/2000EP0912223A4 Microfabricated filter and shell constructed with a permeable membrane
02/02/2000CN1243270A Positive-negative interoperable chemical amplifying slushing agent and photoetching technology
02/02/2000CN1243122A Sulfonium salt and preparation method thereof
02/01/2000US6021267 Aspect ratio program for optimizing semiconductor chip shape
02/01/2000US6021009 Method and apparatus to improve across field dimensional control in a microlithography tool
02/01/2000US6020966 Enhanced optical detection of minimum features using depolarization
02/01/2000US6020964 Interferometer system and lithograph apparatus including an interferometer system
02/01/2000US6020950 Exposure method and projection exposure apparatus
02/01/2000US6020710 Exposure method, and method of making exposure apparatus having dynamically isolated reaction frame
02/01/2000US6020676 Lamp with light reflection back into bulb
02/01/2000US6020528 Alkylphenylbisacylphosphine oxides and photoinitiator mixtures
02/01/2000US6020508 Radiation- or thermally-initiated cationically-curable epoxide compounds and compositions made from those compounds
02/01/2000US6020436 Photosensitive resin composition
02/01/2000US6020362 Glycoprotein IIB IIIA antagonists
02/01/2000US6020292 Aqueous solution containing a quaternary ammonium hydroxide and corrosion inhibitor
02/01/2000US6020257 Membrane dielectric isolation IC fabrication
02/01/2000US6020215 Process for manufacturing microstructure
02/01/2000US6020119 Using a halmethyl ethyl ether in presence of a lewis acid
02/01/2000US6020110 Production of electrodes for electrochemical sensing
02/01/2000US6020109 Irradiating integrated circuit pattern; transferring onto photoresist
02/01/2000US6020108 Preparation of photopolymeric letterpress printing plates
02/01/2000US6020107 Exposure photoresist to light; heating
02/01/2000US6020104 Radiation-sensitive resin composition utilizing monooxymonocarboxylic acid ester solvent
02/01/2000US6020093 Applying photosensitive resin to substrate; radiation; developing a pattern
02/01/2000US6020092 Partial one-shot electron beam exposure mask and method of forming a partial one-shot electron beam exposure pattern
02/01/2000US6020047 Polymer films having a printed self-assembling monolayer
02/01/2000US6020026 Process for the production of a coating of molecular thickness on a substrate
02/01/2000US6019844 Acoustic wave enhanced spin coater
02/01/2000US6019843 Apparatus for coating a semiconductor wafer with a photoresist
02/01/2000CA2201226C Method and device for regulating the temperature in a laser operated printing plate imaging unit of a printing press, particularly of an offset-printing press
02/01/2000CA2078097C Purple membrane preparations having increased holographic diffraction efficiency
02/01/2000CA1340890C Stereolithographic curl reduction
01/2000
01/27/2000WO2000004612A1 High pulse rate pulse power system
01/27/2000WO2000004571A1 Method for patterning cavities and enhanced cavity shapes for semiconductor devices
01/27/2000WO2000004421A1 Photosensitive black matrix composition and process of making it
01/27/2000DE19934049A1 Multi-column lithography system using charged particle radiation-like electron rays has control unit for adjusting waiting time for each intensifier connected to main deflectors
01/27/2000DE19932938A1 Magnetic device for treating fluid stream, e.g. defoaming alkaline developer for photoresist, has alternating poles so that magnetic flux changes along direction of fluid flow
01/27/2000DE19932014A1 Pattern data correction controller for one column of a multi-column electron beam exposure apparatus used for e.g. pattering a semiconductor wafer
01/27/2000DE19833315A1 Thin film structure, e.g. a thin film transistor structure for an active matrix LCD, is produced by thermally flowing a photosensitive masking layer over under-etched layer flanks prior to etching an underlying layer
01/26/2000EP0975010A1 Prevention of photoresist poisoning from dielectric antireflective coating in semiconductor fabrication
01/26/2000EP0974868A2 Exposure apparatus
01/26/2000EP0974078A1 Ternary photoinitiator system for curing of epoxy/polyol resin compositions
01/26/2000EP0974076A1 Method of producing an optical element and optical element therefrom
01/26/2000EP0974075A1 Black-pigmented structured high molecular weight material