Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
06/2000
06/13/2000US6075155 Photopolymerizable monomers; solvent-free
06/13/2000US6074944 Methods for priming wafers employed in integrated circuit devices using dihydropyrane
06/13/2000US6074888 Method for fabricating semiconductor micro epi-optical components
06/13/2000US6074804 Multilayer photoresists pattern
06/13/2000US6074803 Bonding layers of insulation and subbing layers with resins with free radical photoinitiators
06/13/2000US6074801 Negative type photoresist composition used for light beam with short wavelength and method of forming pattern using the same
06/13/2000US6074800 Photoresists with photo acid generators and acid sensitive polymers with casting solvents
06/13/2000US6074798 Radiation-sensitive material containing a multilayer support material
06/13/2000US6074797 Precusor of waterless planographic printing plates
06/13/2000US6074786 Reticle for alignment and pitch determination
06/13/2000US6074742 Colored articles and compositions and methods for their fabrication
06/13/2000US6074708 Photoinitiator photopolymerizable resin composition, polymer and liquid crystal display device
06/13/2000US6074569 Stripping method for photoresist used as mask in Ch4 /H2 based reactive ion etching (RIE) of compound semiconductors
06/13/2000US6074561 Apparatus and method for recovering photoresist developers and strippers
06/13/2000US6074154 Substrate treatment system, substrate transfer system, and substrate transfer method
06/13/2000US6074065 Polariser made from brewster plates
06/11/2000CA2291547A1 Photoimageable compositions having improved chemical resistance and stripping ability
06/08/2000WO2000033432A1 Durable etalon based output coupler
06/08/2000WO2000033371A1 Composition for removing sidewall and method of removing sidewall
06/08/2000WO2000033140A1 Composition and method for removing probing ink and negative photoresist from silicon wafers
06/08/2000WO2000033139A1 Photoresist stripper and method of stripping
06/08/2000WO2000033138A1 Large-apertured projection lens with minimal diaphragm error
06/08/2000WO2000033137A2 Preparation of fractionated novolak resins by a novel extraction technique
06/08/2000WO2000033131A1 Color filters for flat panel displays
06/08/2000WO2000033121A1 Microlens structure having two anamorphic surfaces on opposing ends of a single high index substrate and method of fabricating the same
06/08/2000WO2000033084A2 Arrays of organic compounds attached to surfaces
06/08/2000WO2000033078A1 Porous coatings bearing ligand arrays
06/08/2000WO2000032678A1 Solvent resistant photosensitive compositions
06/08/2000WO2000032320A1 System and method for coating of substrates
06/08/2000WO2000010056A9 Photoacid generators and photoresists comprising same
06/08/2000DE19951770A1 Production of lithographic printing plate, by silver complex diffusion transfer process uses alkaline earth metal in developer solution
06/08/2000DE19855629A1 Teilchenoptische Anordnung und Verfahren zur teilchenoptischen Erzeugung von Mikrostrukturen A particle-particle arrangement and method for producing microstructures
06/07/2000EP1006570A1 Removal of post-rie polymer on Al/Cu metal line
06/07/2000EP1006556A1 Particle-optical device and method for producing microstructures
06/07/2000EP1006412A1 Development of radiation sensitive compositions
06/07/2000EP1006411A2 Illumination system for vuv microlithography
06/07/2000EP1006410A1 Aqueous developing solutions for reduced developer residue
06/07/2000EP1006409A2 Method for patterning a semiconductor wafer using a mask that has several regions with different scattering ability
06/07/2000EP1006389A2 Reduction objective for microlithography, apparatus and method for projection exposure
06/07/2000EP1006388A2 Reduction projection objective lens for microlithography
06/07/2000EP1006387A2 Projection objective lens for microlithography
06/07/2000EP1006373A2 Objective with crystal lenses and projection exposure apparatus for microlithography
06/07/2000EP1006119A1 Novel crystalline ion-association substance, process for producing the same, and latent photopolymerization initiator
06/07/2000EP1005668A1 Releasable photopolymer printing plate and method of forming same
06/07/2000EP1005664A1 Lithographic apparatus comprising a dedicated mirror projection system
06/07/2000EP0910816A4 Composite relief image printing plates and methods for preparing same
06/07/2000EP0852028B1 Black-and-white photothermographic and thermographic elements comprising hydroxamic acid compounds as contrast enhancers
06/07/2000CN1255921A Process for preparing coumarin sulfonates
06/07/2000CN1255653A Cross linking agent for photoslushing compound, and photoslushing compound compsns. containing same cross linking agent
06/07/2000CN1255652A Cross linking agent for photoslushing compound, and photoslushing compound compsns. containing same cross linking agent
06/07/2000CN1255651A High-density compound microarray chip preparing process based on electronic screen plate and silk screen print technology
06/06/2000WO2000039221A1 Improved method for producing thermally cleavable, soluble pigment derivatives
06/06/2000US6072852 High numerical aperture projection system for extreme ultraviolet projection lithography
06/06/2000US6072561 Exposure method and apparatus
06/06/2000US6072268 Lamp apparatus and method for re-using waste light
06/06/2000US6072251 Magnetically positioned X-Y stage having six degrees of freedom
06/06/2000US6072192 Test structure responsive to electrical signals for determining lithographic misalignment of vias relative to electrically active elements
06/06/2000US6072185 Charged-particle-beam exposure device and method capable of high-speed data reading
06/06/2000US6072184 Charged-particle-beam projection methods
06/06/2000US6072183 Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device
06/06/2000US6072162 Device and method for heating substrate, and method for treating substrate
06/06/2000US6072006 Preparation of partially cross-linked polymers and their use in pattern formation
06/06/2000US6071989 Process for preparing fine pigment dispersions
06/06/2000US6071979 To generate photoinitiators for polymerizing unsaturated monomers and curing an unsaturated oligomer/monomer mixture
06/06/2000US6071868 Photoresist stripping solution consists of alkanolamine, dimethylsulfoxide, n-methylpyrrolidone and glycolether
06/06/2000US6071827 Method for manufacturing semiconductor devices
06/06/2000US6071824 Method and system for patterning to enhance performance of a metal layer of a semiconductor device
06/06/2000US6071676 Integrated circuit formed by exposing to radiation or particle beam through mask an organometallic fluoride compound coated onto substrate, removing residue and unexposed compound to leave submicron patterned deposit
06/06/2000US6071675 Dispersing oleophilic solid particles in the oleophilic photosensitive layer of an on-press developable lithographic plate, to improve on-press developability and reduce tackiness
06/06/2000US6071674 Anodized metal plate coated with photosensitive layer containing photoacid generator, acid decomposable compound and cyanine dye infrared absorber
06/06/2000US6071673 Method for the formation of resist pattern
06/06/2000US6071670 Transparent resin, photosensitive composition, and method of forming a pattern
06/06/2000US6071669 Lowering peel strength of strippable support and photosensitive layer by using a non-photosensitive, non-tacky organic layer between an isolation layer attached to permanent support and photosensitive layer
06/06/2000US6071668 Coating on a grained and anodized aluminum support an image receiving layer containing physical development nuclei, guiding support over rolls having low electrical resistance and coating with water permeable silver halide emulsion layer
06/06/2000US6071667 Photosensitive resin composition containing a photosensitive polyamide resin
06/06/2000US6071666 Polybenzoxaxole precursor polyamide mixed with a photosensitive quinonediazide compound and a bis- or trisphenolic compound which enhances sensitivity and solubility of exposed portion of photoresist
06/06/2000US6071658 Forming a pattern on the mask, dividing the mask into patches and calculating the light intensity then exposure to electron beams
06/06/2000US6071657 Forming stripe pattern on interior of panels for phosphors
06/06/2000US6071655 Photographic prints with substrates and translucent glaze
06/06/2000US6071653 Photomasking a transparent substrate, forming a bar layer covering, forming a opaque layer and removal of bar layer
06/06/2000US6071595 Substrate with low secondary emissions
06/06/2000US6071369 Method for making an lithographic printing plate with improved ink-uptake
06/06/2000US6071315 Two-dimensional to three-dimensional VLSI design
06/06/2000US6071094 Photoresist dispense pump
06/06/2000US6070601 Jet-cleaning device for developing station
06/06/2000CA2087511C Method of fabricating bragg gratings using a silica glass phase grating mask
06/06/2000CA2057996C Manufacturing system for a polarizing picture
06/02/2000WO2000031804A1 Improved microlens upon a photodetector
06/02/2000WO2000031782A1 Silane-based oxide anti-reflective coating for patterning of metal features in semiconductor manufacturing
06/02/2000WO2000031781A1 Method for forming resist pattern
06/02/2000WO2000031780A1 Optical device, exposure system, and laser beam source, and gas feed method, exposure method, and device manufacturing method
06/02/2000WO2000031774A2 Holding device for a substrate
06/02/2000WO2000031592A1 Method of detecting aberrations of an optical imaging system
06/02/2000WO2000031591A1 Method of forming conductive pattern
06/02/2000WO2000030870A1 Method for decorating the surface of a painted substrate
06/02/2000WO2000030869A1 Method for decoratively shaping a painted substrate surface
05/2000
05/31/2000EP1005066A2 Resist pattern, process for the information of the same, and process for the formation of wiring pattern
05/31/2000EP1005065A2 Method of forming wiring pattern
05/31/2000EP1004937A2 Exposure apparatus and optical system therefor
05/31/2000EP1004936A1 Resist resin, resist resin composition, and process for patterning therewith