| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 04/15/2003 | US6548219 Transparent to deep ultraviolet (DUV) radiation |
| 04/15/2003 | US6548215 Polymer particles in photosensitive layer; stability |
| 04/15/2003 | US6548214 Method of lithography utilizing orthogonal experiment to improve profile |
| 04/15/2003 | US6548213 Controlling transmission light |
| 04/15/2003 | US6548124 Nanometric scale coherently controlled molecular deposition |
| 04/15/2003 | US6548122 Depositing metal precursor on substrate, adding energy to reduce metal precursor and precipitate metal on substrate as a continuous metal layer |
| 04/15/2003 | US6548115 Modular coating apparatus adapted to couple to host system, such as a cluster or in-line type coating system, as well as to operate in stand-alone fashion; uses rotatable chuck |
| 04/15/2003 | US6548110 Process liquid dispense method and apparatus |
| 04/15/2003 | US6547975 Magnetic pole fabrication process and device |
| 04/15/2003 | US6547461 Photosensitive material automatic-processing apparatus |
| 04/15/2003 | US6547458 Optical monitoring integrated circuits |
| 04/15/2003 | US6546939 Removal residues from copper or aluminum surfaces; polishing with aqueous acidity solution containing buffers |
| 04/15/2003 | US6546868 Printing form and method of modifying the wetting characteristics of the printing form |
| 04/15/2003 | CA2216296C Imaging method for manufacture of microdevices |
| 04/10/2003 | WO2003030597A2 Machine and installation for tracing on a support |
| 04/10/2003 | WO2003030252A2 Process for producing interconnects |
| 04/10/2003 | WO2003030238A1 Processing method |
| 04/10/2003 | WO2003030237A1 Etching method |
| 04/10/2003 | WO2003030229A1 Aligner and method for fabricating device |
| 04/10/2003 | WO2003030228A2 Method and apparatus for mitigating cross-contamination between liquid dispensing jets in close proximity to a surface |
| 04/10/2003 | WO2003029901A1 Chemical-amplification-type positive radiation-sensitive resin composition |
| 04/10/2003 | WO2003029900A1 Negative-acting aqueous photoresist composition |
| 04/10/2003 | WO2003029899A1 Positive photosensitive polyimide resin composition |
| 04/10/2003 | WO2003029898A1 Photosensitive resin composition |
| 04/10/2003 | WO2003029873A2 Method and device for reducing speckle in an optical system |
| 04/10/2003 | WO2003028970A1 Method of producing resin molded product |
| 04/10/2003 | US20030069134 Surface active homopolymer of hydrofluoroalkyl (alk)acrylates that may contain other groups such as sulfonamides |
| 04/10/2003 | US20030068892 Metal shadow-mask in IC process flow |
| 04/10/2003 | US20030068837 Apparatus and method for deposition of an electrophoretic emulsion |
| 04/10/2003 | US20030068833 Error reduction in semiconductor processes |
| 04/10/2003 | US20030068585 Chemical consolidation of photoresists in the UV range |
| 04/10/2003 | US20030068584 Surface smoothing of stereolithographically formed 3-D objects |
| 04/10/2003 | US20030068579 Dissolving a gaseous molecule having oxidizing properties or reducing properties in an aqueous alkaline solution. |
| 04/10/2003 | US20030068575 Lithographic printing plate precursor |
| 04/10/2003 | US20030068574 Copolymer of hexafluoropropylene, an unsaturated carboxylic acid and/or anhydride and another unsaturated compound; acid generator; curing agent; and a fluorine-containing organic compound |
| 04/10/2003 | US20030068573 Chemical amplification type positive resist composition |
| 04/10/2003 | US20030068567 Photosensitive resin composition and printed wiring board |
| 04/10/2003 | US20030068566 Full phase shifting mask in damascene process |
| 04/10/2003 | US20030068565 Mask for use in measuring flare, method of manufacturing the mask, method of identifying flare-affected region on wafer, and method of designing new mask to correct for flare |
| 04/10/2003 | US20030068430 Nozzle arm movement for resist development |
| 04/10/2003 | US20030068012 Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge |
| 04/10/2003 | US20030067734 Methods for electrostatically chucking an object to an electrostatic chuck that reduce uncorrectable placement error of the object |
| 04/10/2003 | US20030067679 Preferred crystal orientation optical elements from cubic materials |
| 04/10/2003 | US20030067611 Point-diffraction interferometer |
| 04/10/2003 | US20030067604 Scan exposure apparatus and method, and device manufacturing method |
| 04/10/2003 | US20030067592 Reticle stage with reaction force cancellation |
| 04/10/2003 | US20030067591 Illumination optical system, exposure apparatus, and microdevice manufacturing method |
| 04/10/2003 | US20030066975 Photocatalytic layer; decomposing impurities by exposure toradiation |
| 04/10/2003 | US20030066961 Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same |
| 04/10/2003 | DE20220125U1 Numerically controlled (NC) exposure device for light-sensitive material e.g. for circuit board layout film, uses exposure head moving in direct contact with light-sensitive material |
| 04/09/2003 | EP1300932A2 Linear motor, stage apparatus, and exposure apparatus |
| 04/09/2003 | EP1300857A2 Apparatus and methods for surficial milling of selected regions on surfaces of multilayer-film reflective mirrors as used in X-ray optical systems |
| 04/09/2003 | EP1300727A2 Positive photosensitive composition |
| 04/09/2003 | EP1300434A2 Hyperbranched polymers with latent functionality and methods of making same |
| 04/09/2003 | EP1299775A1 Method of reducing metal ion content of film-forming resins using a liquid/liquid centrifuge |
| 04/09/2003 | EP1299774A1 Perfluoroalkylsulfonic acid compounds for photoresists |
| 04/09/2003 | EP1299773A1 Silicon-containing acetal protected polymers and photoresists compositions thereof |
| 04/09/2003 | EP1299772A1 Apparatus and method for forming photoresist pattern with target critical dimension |
| 04/09/2003 | EP1299770A2 Resin composition and three-dimensional object |
| 04/09/2003 | EP1299448A1 Accelerators useful for energy polymerizable compositions |
| 04/09/2003 | EP1299238A1 Coating composition and method for preparing radiation sensitive plate useful in lithographic printing and the like |
| 04/09/2003 | EP1299237A1 Printing plates comprising modified pigment products |
| 04/09/2003 | EP1159133B1 Positive-working photosensitive lithographic printing plate and method for producing the same |
| 04/09/2003 | EP1095346A4 Two-dimensional to three-dimensional vlsi design |
| 04/09/2003 | EP1051666B1 Solution of tetramethyl ammonium hydroxide in water, process for preparing the solution and use thereof |
| 04/09/2003 | CN1409832A Device and method in connection with production of structures |
| 04/09/2003 | CN1409377A Circle forming method |
| 04/09/2003 | CN1409376A Semiconductor device and its producing method |
| 04/09/2003 | CN1409175A Lighting optical system, exposure device and method for producing micro element |
| 04/09/2003 | CN1409174A Lithographic printing forebody |
| 04/09/2003 | CN1409173A Photosensitive resin composition and printing circuit board |
| 04/09/2003 | CN1409172A Photosensitive resin composition and printing circuit board |
| 04/09/2003 | CN1409171A Photoetching programming system and its use |
| 04/09/2003 | CN1408765A Resin composition for insulation and laminated body using said composition |
| 04/09/2003 | CN1408764A Light solidified and heat solidified resin composition and method for producing printed circuit board |
| 04/09/2003 | CN1105129C Fractionation of phenol formaldehyde condensate and photoresist compositions produced therefrom |
| 04/09/2003 | CN1105030C Dry lithographic printing plate front element and method for forming lithographic printing plate |
| 04/09/2003 | CN1105015C Method for producing screen printing stencil |
| 04/08/2003 | US6546543 Method of displaying, inspecting and modifying pattern for exposure |
| 04/08/2003 | US6546125 Photolithography monitoring using a golden image |
| 04/08/2003 | US6545829 Method and device for improved lithographic critical dimension control |
| 04/08/2003 | US6545808 Phase mask with spatially variable diffraction efficiency |
| 04/08/2003 | US6545748 Apparatus for the method of manufacturing a stent |
| 04/08/2003 | US6545746 Projection exposure apparatus |
| 04/08/2003 | US6545745 Extreme-UV lithography vacuum chamber zone seal |
| 04/08/2003 | US6545744 Two-sided substrate imaging using single-approach projection optics |
| 04/08/2003 | US6545377 Coil with cooling means |
| 04/08/2003 | US6545369 Overlay error reduction by minimization of unpatterned wafer area |
| 04/08/2003 | US6545284 Face position detection method and apparatus, and exposure method and exposure apparatus, a production method for an exposure apparatus and a production method for a semiconductor device |
| 04/08/2003 | US6545282 Apparatus and methods for reducing Coulombic blur in charged-particle-beam microlithography |
| 04/08/2003 | US6545274 Methods and devices for determining times for maintenance activity performed on a charged-particle-beam microlithography apparatus, and microelectronic-device-manufacturing methods comprising same |
| 04/08/2003 | US6545272 Apparatus and methods for monitoring contamination of an optical component in an optical system |
| 04/08/2003 | US6544903 Resist pattern forming method and semiconductor device manufacturing method |
| 04/08/2003 | US6544894 Method of producing chromium mask |
| 04/08/2003 | US6544859 Semiconductor processing methods and structures for determining alignment during semiconductor wafer processing |
| 04/08/2003 | US6544739 Method for marking samples |
| 04/08/2003 | US6544721 Multiple exposure method |
| 04/08/2003 | US6544720 Containing phthalocyanine compound |
| 04/08/2003 | US6544717 Undercoating composition for photolithographic resist |
| 04/08/2003 | US6544715 Positive photoresist composition for far ultraviolet ray exposure |