| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 06/17/2004 | US20040116312 Method for the removal of an imaging layer from a semiconductor substrate stack |
| 06/17/2004 | US20040115960 Fabrication of structures of metal/semiconductor compound by x-ray/euv projection lithography |
| 06/17/2004 | US20040115957 Apparatus and method for enhancing wet stripping of photoresist |
| 06/17/2004 | US20040115936 Remote ICP torch for semiconductor processing |
| 06/17/2004 | US20040115926 Method of wet etching an inorganic antireflection layer |
| 06/17/2004 | US20040115843 Methods and systems for determining a presence of macro defects and overlay of a specimen |
| 06/17/2004 | US20040115654 Preparing nucleotide sequence array platforms; genomics; genotyping |
| 06/17/2004 | US20040115568 Fabrication of sub-wavelength structures |
| 06/17/2004 | US20040115567 Wafer track apparatus and methods for dispensing fluids with rotatable dispense arms |
| 06/17/2004 | US20040115566 Patterned structures of high refractive index materials |
| 06/17/2004 | US20040115565 Method for patterning a layer of a low dielectric constant material |
| 06/17/2004 | US20040115564 Photolithographic methods of using a single reticle to form overlapping patterns |
| 06/17/2004 | US20040115563 Photosensitive coating material for a substrate and process for exposing the coated substrate |
| 06/17/2004 | US20040115558 Multilayer; containing photoinitiator, hardener; controlling thickness; pattern stability; color filter |
| 06/17/2004 | US20040115538 X-rays; exposure a self-supporting film of radiation sensitivity material to electrons beams scanning pattern ; generating film with reduced metal concentration |
| 06/17/2004 | US20040115485 Fluoride crystalline optical lithography lens element blank |
| 06/17/2004 | US20040115437 Dual cure reaction products of self-photoinitiating multifunction acrylates with cycloaliphatic epoxy compounds |
| 06/17/2004 | US20040114720 Droplet and filament target stabilizer for EUV source nozzles |
| 06/17/2004 | US20040114217 Objective with pupil obscuration |
| 06/17/2004 | US20040114152 Interferometry systems involving a dynamic beam-steering assembly |
| 06/17/2004 | US20040114150 Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser |
| 06/17/2004 | US20040114143 Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus |
| 06/17/2004 | US20040114142 Birefringence measurement at deep-ultraviolet wavelengths |
| 06/17/2004 | US20040114132 Test pattern, inspection method, and device manufacturing method |
| 06/17/2004 | US20040114124 Chuck, lithographic apparatus and device manufacturing method |
| 06/17/2004 | US20040114123 Lithographic apparatus and device manufacturing method |
| 06/17/2004 | US20040114122 Lithographic apparatus and method to determine beam characteristics |
| 06/17/2004 | US20040114121 Exposure apparatus, exposure method using the same, and method of manufacture of circuit device |
| 06/17/2004 | US20040114120 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 06/17/2004 | US20040114119 Lithographic apparatus and a measurement system |
| 06/17/2004 | US20040114118 Reflective liquid crystal display lithography system |
| 06/17/2004 | US20040114117 Lithographic apparatus and device manufacturing method |
| 06/17/2004 | US20040114116 Moving member mechanism and control method therefor |
| 06/17/2004 | US20040113101 Charged-particle-beam microlithography systems that detect and offset beam-perturbing displacements of optical-column components |
| 06/17/2004 | US20040113098 Structured organic materials and devices using low-energy particle beams |
| 06/17/2004 | US20040112862 Planarization composition and method of patterning a substrate using the same |
| 06/17/2004 | US20040112861 Method for modulating shapes of substrates |
| 06/17/2004 | US20040112859 Photosensitive film for circuit formation and process for producing printed wiring board |
| 06/17/2004 | US20040112405 Method and apparatus for cleaning a semiconductor substrate |
| 06/17/2004 | US20040112164 Alignment apparatus, exposure apparatus, and device manufacturing method |
| 06/17/2004 | US20040112153 Method and system for determining characteristics of substrates employing fluid geometries |
| 06/17/2004 | US20040112104 Method and apparatus for texturing a metal sheet or strip |
| 06/17/2004 | US20040111823 Manipulating device for photomasks that provides possibilities for cleaning and inspection of photomasks |
| 06/17/2004 | DE10314253A1 Process for scanning illumination of a reticule and a microlithographic projection unit has static illuminations at start and end and a scanning illumination |
| 06/17/2004 | DE10258732A1 Optical system for microlithographic projection units for wafers has compensating plate angled to optical path to equalize two linearly polarized components |
| 06/17/2004 | DE10256672A1 Process and device to separate stereolithographic hardened material layers from a contact surface successively photopolymerizes fluid layers and performs controlled separation |
| 06/17/2004 | DE10256614A1 Vorrichtung und Verfahren zur Herstellung von Flexodruckplatten für den Zeitungsdruck mittels digitaler Bebilderung Apparatus and method for producing flexographic printing plates for newspaper printing using digital imaging |
| 06/17/2004 | DE10254499A1 Schichtanordnung mit einer einen linsenartigen Effekt erzeugenden beugungsoptisch wirksamen Struktur Layer arrangement with a lens-like effect generating optically diffractive structure |
| 06/17/2004 | DE10036183B4 Verfahren und Gerät zum Erhitzen eines Wafers und Verfahren und Gerät zum Ausheizen eines Photoresistfilms auf einem Wafer Method and apparatus for heating a wafer, and method and apparatus for baking a photoresist film on a wafer |
| 06/17/2004 | CA2507521A1 Template |
| 06/17/2004 | CA2505893A1 Oxime ester photoinitiators with heteroaromatic groups |
| 06/16/2004 | EP1429191A1 Method for determining parameters for lithographic projection |
| 06/16/2004 | EP1429190A2 Exposure apparatus and method |
| 06/16/2004 | EP1429189A1 Lithographic apparatus and device manufacturing method |
| 06/16/2004 | EP1429188A2 Lithographic apparatus and device manufacturing method |
| 06/16/2004 | EP1429187A2 Droplet and filament target stabilizer for EUV source nozzles |
| 06/16/2004 | EP1429186A2 Pellicle frame with porous inserts or heightened bonding surfaces |
| 06/16/2004 | EP1429185A1 Etching method and composition for forming etching protective layer |
| 06/16/2004 | EP1429184A1 Functionalized copolymer for photopolymerizable composition |
| 06/16/2004 | EP1428676A2 Printing plate material |
| 06/16/2004 | EP1428416A1 Discharge source with gas curtain for protecting optics from particles |
| 06/16/2004 | EP1428245A1 Monolithic three-dimensional structures |
| 06/16/2004 | EP1428076A2 Device and method for optically scanning a substrate disk |
| 06/16/2004 | EP1428075A1 Method for high resolution patterning using low-energy electron beam, process for preparing nano device using the method |
| 06/16/2004 | EP1428074A1 Method for high resolution patterning using soft x-ray, process for preparing nano device using the method |
| 06/16/2004 | EP1244548B1 Heat-sensitive imaging element for providing lithographic printing plates |
| 06/16/2004 | EP1016092B1 Method and apparatus for producing extreme ultra-violet light for use in photolithography |
| 06/16/2004 | EP0930540B1 Photosensitive composition and use thereof |
| 06/16/2004 | EP0888578B1 Solutions and processes for removal of sidewall residue after dry-etching |
| 06/16/2004 | CN1505857A High-peak-power laser device and application to the generation of light in the extreme ultraviolet |
| 06/16/2004 | CN1505831A Method of etching organic antireflection coating (ARC) layers |
| 06/16/2004 | CN1505820A Composition for forming photosensitive dielectric material, and transfer film, dielectric material and electronic parts using the same |
| 06/16/2004 | CN1505773A Solvents and photoresist compositions for short wavelength imaging |
| 06/16/2004 | CN1505651A Polysiloxane, process for production thereof and radiation-sensitive resin composition |
| 06/16/2004 | CN1505127A Method and system for phase/amplitude error detection of alternating phase shifting masks in photolithography |
| 06/16/2004 | CN1505102A Manufacturing method of photo mask and semiconductor device |
| 06/16/2004 | CN1505101A Method for shrinking critical dimension of semiconductor devices |
| 06/16/2004 | CN1505100A Position design of alignment marks |
| 06/16/2004 | CN1505067A Magnetic actuator under piezoelectric control |
| 06/16/2004 | CN1505061A Process for producing metallic high-energy X-ray focusing combination lens |
| 06/16/2004 | CN1504842A 全息元件 Holographic elements |
| 06/16/2004 | CN1504833A Method to enhance resolution of a chemically amplified photoresist |
| 06/16/2004 | CN1504832A Lithographic apparatus and device manufacturing method |
| 06/16/2004 | CN1504831A Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 06/16/2004 | CN1504830A Lithographic apparatus and device manufacturing method |
| 06/16/2004 | CN1504829A Catadioptric lithographic projection apparatus with a non-inverting beamsplitter system |
| 06/16/2004 | CN1504828A Photopolymer holographic memory materials comprising high refractive index epoxy and low refractive index olefine monomer and manufacturing method thereof |
| 06/16/2004 | CN1504827A Method of forming planar color filters in an image sensor |
| 06/16/2004 | CN1504780A Process for producing polyimide optical waveguide |
| 06/16/2004 | CN1504777A Coloration-photosensitive resin composition |
| 06/16/2004 | CN1504448A Ketone photo initiator compound having active side chain, preparing process and application thereof |
| 06/16/2004 | CN1154193C Prodn. of organic electrical lighting device |
| 06/16/2004 | CN1154159C Process for ashing organic materials from substrates |
| 06/16/2004 | CN1154018C Improved contact and deep groove composition |
| 06/16/2004 | CN1153679C Thermosensitive polymeric image recording material and method for use |
| 06/16/2004 | CN1153666C Positive-working photosensitive lithographic printing plate and method for producing same |
| 06/15/2004 | US6751514 Service method, service system and manufacturing/inspection apparatus |
| 06/15/2004 | US6751003 Apparatus and method for selectively exposing photosensitive materials using a reflective light modulator |
| 06/15/2004 | US6751000 Reflective diffraction of radiation beams for image registration |
| 06/15/2004 | US6750976 Device for manufacturing semiconductor device and method of manufacturing the same |