| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 09/30/2004 | US20040191640 Forming pattern on substrate; heat sensitive elements; imaging, development ; adhesion to surfaces; masking; printing plates |
| 09/30/2004 | US20040191639 Surface of pattern having organosilicon release agents |
| 09/30/2004 | US20040191638 Phase shifting mask shapes; lithographic shortening; calibration; shape design ; integrated circuits |
| 09/30/2004 | US20040191538 Nanometer-controlled polymeric thin films that resist adsorption of biological molecules and cells |
| 09/30/2004 | US20040191479 Anti-reflection film material and a substrate having an anti-reflection film and a method for forming a pattern |
| 09/30/2004 | US20040190677 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 09/30/2004 | US20040190578 High power gas discharge laser with helium purged line narrowing unit |
| 09/30/2004 | US20040190151 Objective with fluoride crystal lenses |
| 09/30/2004 | US20040190102 Differentially-cured materials and process for forming same |
| 09/30/2004 | US20040190008 Method for process optimization and control by comparison between 2 or more measured scatterometry signals |
| 09/30/2004 | US20040190007 Lithography line width monitor reflecting chip-wide average feature size |
| 09/30/2004 | US20040189998 Interferometric servo control system for stage metrology |
| 09/30/2004 | US20040189996 Method of aligning a template with a substrate employing moire patterns |
| 09/30/2004 | US20040189995 Position detection apparatus |
| 09/30/2004 | US20040189994 Liquid in spacing between substrate and template; light activation curable liquid spreading, covering substrate |
| 09/30/2004 | US20040189974 Perforation and image exposure system |
| 09/30/2004 | US20040189973 Substrate exposure system |
| 09/30/2004 | US20040189972 Lithographic apparatus, method of manufacturing a device, and device manufactured thereby |
| 09/30/2004 | US20040189971 Wafer edge exposing apparatus |
| 09/30/2004 | US20040189970 Exposure device |
| 09/30/2004 | US20040189969 Drive mechanism, exposure device, optical equipment, and device manufacturing method |
| 09/30/2004 | US20040189968 Cataoptric projection optical system, exposure apparatus and device fabrication method |
| 09/30/2004 | US20040189967 Method of manufacturing a device, device manufactured thereby, computer program and lithographic apparatus |
| 09/30/2004 | US20040189966 Lithographic apparatus and device manufacturing method |
| 09/30/2004 | US20040189965 Projection optical system and exposure device having the projection optical system |
| 09/30/2004 | US20040189962 Projection exposure apparatus |
| 09/30/2004 | US20040189960 Plate positioning and processing method and plate positioning and processing apparatus |
| 09/30/2004 | US20040189787 System and method for providing high brightness illumination |
| 09/30/2004 | US20040188915 Plate supplying apparatus |
| 09/30/2004 | US20040188889 High aspect ratios; writing, etching; exposure to ion beam; impacting |
| 09/30/2004 | US20040188636 Exposure apparatus |
| 09/30/2004 | US20040188628 Apparatus and method for measuring EUV light intensity distribution |
| 09/30/2004 | US20040188547 Developer dispensing nozzle with movable shutter plates |
| 09/30/2004 | US20040188384 Method for making a metal forming structure |
| 09/30/2004 | US20040188381 Positive tone bi-layer imprint lithography method |
| 09/30/2004 | US20040187792 Chamber for high-pressure wafer processing and method for making the same |
| 09/30/2004 | US20040187786 Processing apparatus for processing sample in predetermined atmosphere |
| 09/30/2004 | US20040187723 Printing plate removing/supplying device |
| 09/30/2004 | US20040187719 Photosensitive, flexo printing element, and method for the production of newspaper flexo printing plates |
| 09/30/2004 | US20040187616 Bellows lateral stiffness adjustment |
| 09/30/2004 | US20040187452 Load-lock system, exposure processing system, and device manufacturing method |
| 09/30/2004 | DE19718983B4 Vorrichtungen, Verwendung und Verfahren zum Aufbringen einer Substanz auf eine Oberfläche eines Halbleiterwafers Devices, use and method of applying a substance to a surface of a semiconductor wafer |
| 09/30/2004 | DE10309772A1 Vorrichtung zur Fokuseinstellung der Belichtungsköpfe in einem Druckplattenbelichter Device for focus adjustment of the exposure heads in a platesetter |
| 09/30/2004 | DE10233631B4 Lithographie-Druckplattenvorläufer mit zwei strahlungsempfindlichen Schichten The lithographic printing plate precursor having two radiation sensitive layers |
| 09/30/2004 | DE102004008024A1 Verfahren zur Herstellung von mikrotechnischen Bauteilen und damit erzeugte Anordnung A process for the production of micro-components, and assembly thus produced |
| 09/30/2004 | CA2488389A1 Radiation curable composition, optical waveguide and method of forming the optical waveguide |
| 09/29/2004 | EP1463096A1 EXPOSURE DEVICE, EXPOSURE METHOD, METHOD OF PRODUCING SEMICONDUCTOR DEVICE, ELECTROOPTIC DEVICE, AND ELECTRONIC EQUIPMENT |
| 09/29/2004 | EP1463040A2 Method and device for use in the manufacture of optical disk media |
| 09/29/2004 | EP1462872A2 Image setting apparatus having drum simulating supports |
| 09/29/2004 | EP1462859A2 Resin molded product production process, metal structure production process, and resin molded product |
| 09/29/2004 | EP1462858A1 Positive resist composition and method of forming resist pattern using the same |
| 09/29/2004 | EP1462780A1 Apparatus and method for measuring EUV light intensity distribution |
| 09/29/2004 | EP1462251A1 Method for making lithographic printing plate |
| 09/29/2004 | EP1462250A2 Plate positioning and processing method and plate positioning and processing apparatus |
| 09/29/2004 | EP1462247A1 Positive working heat-sensitive lithographic printing plate precursor |
| 09/29/2004 | EP1461826A1 High-performance non-contact support platforms |
| 09/29/2004 | EP1461666A1 Determining the aberrations of an imaging system |
| 09/29/2004 | EP1461596A2 Direct write nanolithographic deposition of nucleic acids from nanoscopic tips |
| 09/29/2004 | EP1461373A1 Polymeric compositions and uses therefore |
| 09/29/2004 | EP1461142A1 Method of producing a sheet comprising through pores and the application thereof in the production of micronic and submicronic filters |
| 09/29/2004 | EP1401994A4 Aqueous buffered fluoride-containing etch residue removers and cleaners |
| 09/29/2004 | EP1044457B1 X-ray irradiation apparatus including an x-ray source provided with a capillary optical system |
| 09/29/2004 | EP1007349B1 Patterned conducting polymer surfaces and process for preparing the same and devices containing the same |
| 09/29/2004 | EP0965067B1 Positive photoresists containing novel photoactive compounds |
| 09/29/2004 | EP0963572B1 Positioning device having three coil systems mutually enclosing angles of 120 degrees, and lithographic device comprising such a positioning device |
| 09/29/2004 | CN2645225Y Lighthouse central adjusting device |
| 09/29/2004 | CN1533516A Resist removing agent |
| 09/29/2004 | CN1533386A Slfonium salts, methods for their preparation and use therof as photoinitiators for radiation curable systems |
| 09/29/2004 | CN1532891A Photomask, light spot detector and detecting method and exposur method |
| 09/29/2004 | CN1532848A Energy ray radiator |
| 09/29/2004 | CN1532634A Method and device for recovering gas used in lighographic plate printing tool |
| 09/29/2004 | CN1532633A Base board exposure device |
| 09/29/2004 | CN1532632A Method for forming double layer photoresist and its use |
| 09/29/2004 | CN1532631A Base board for optical mask, optical mask blank and optical mask |
| 09/29/2004 | CN1532616A Method for producing thin film transistor liquid crystal display panel |
| 09/29/2004 | CN1532577A 曝光装置 Exposure device |
| 09/29/2004 | CN1532566A Radiation sensitive composition for color filter |
| 09/29/2004 | CN1532036A Method for producing resin formed product, method for producing metal structure budy and resin forming product |
| 09/29/2004 | CN1169412C Transmission system for synchrotron radiation light |
| 09/29/2004 | CN1169122C Hard disc driver |
| 09/29/2004 | CN1169024C Precise workstable structure for array IC photoetching system |
| 09/29/2004 | CN1169023C Process for producing etched grid |
| 09/29/2004 | CN1169022C Method for forming micro light etch resistant pattern |
| 09/29/2004 | CN1169021C Photosensitive resin composition and method of improving dry etching resistance of photosensitive resin composition |
| 09/29/2004 | CN1168700C Cyclic amine substd. phenylalkanone and preparing method thereof |
| 09/28/2004 | US6798862 X-ray mask and method for providing same |
| 09/28/2004 | US6798814 Gas discharge laser, method of operating a gas discharge laser, and use of a sintered filter |
| 09/28/2004 | US6798588 Method for applying a scale to a carrier |
| 09/28/2004 | US6798577 Illumination apparatus with light shielding near an exit plane of an optical pipe and projection exposure apparatus using same |
| 09/28/2004 | US6798516 Projection exposure apparatus having compact substrate stage |
| 09/28/2004 | US6798505 Method and apparatus for article inspection including speckle reduction |
| 09/28/2004 | US6798497 Lithographic projection apparatus, device manufacturing method, device manufactured thereby, and measurement method |
| 09/28/2004 | US6798496 Device for exposing a face of a panel |
| 09/28/2004 | US6798495 Exposure apparatus, exposure method and device production method |
| 09/28/2004 | US6798494 Apparatus for generating partially coherent radiation |
| 09/28/2004 | US6798493 Photolithography apparatus and exposure method |
| 09/28/2004 | US6798491 Exposure apparatus and an exposure method |
| 09/28/2004 | US6798478 Liquid crystal display apparatus and method of manufacturing the same |
| 09/28/2004 | US6798437 Imaging of printing forms using a laser diode bar which also includes non-activatable laser diodes |
| 09/28/2004 | US6797965 Charged particle beam apparatus, pattern measuring method, and pattern drawing method |