Patents
Sitemap › G03 - Photography; Cinematography; Analogous techniques using waves other than optical waves; Electrography; Holography › G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; Materials therefor; Originals therefor; Apparatus specially adapted therefor › G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
03/2005
03/10/2005US20050055122 Overlay registration control system and method employing multiple pilot lot in-line overlay registration measurement
03/10/2005US20050054883 1-hydroxy-1-(5-norbornene-2-yl)-2,2,4,4,4-pentafluorobutane-3-one; 1-(5-norbornene-2-yl)-2,2,4,4,4-pentafluorobutane-1,3,3-triol; excellent in transparency to irradiation, dry etching resistance, has low hydrophobicity, excellent in development characteristics, useful for photoresist resin
03/10/2005US20050054769 Use of hydroxyl-functional polyalkylorganosiloxanes as solvents for cationic photoinitiators for use in radiation-curable silicones
03/10/2005US20050054744 Multiphoton photosensitization system
03/10/2005US20050054549 Using mixture of hydrofluoric acid and ammonia; cleaning metal gates; removal photoresists; corrosion resistance
03/10/2005US20050054217 Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock
03/10/2005US20050054216 Methods of forming patterned photoresist layers over semiconductor substrates
03/10/2005US20050054210 Multiple exposure method for forming patterned photoresist layer
03/10/2005US20050054205 Mask trimming apparatus and mask trimming method
03/10/2005US20050054123 Method and apparatus for detecting end point
03/10/2005US20050053928 Arrays for detecting nucleic acids
03/10/2005US20050053874 Supplying solution containing low concentration of developer; development; supplying solution containing high concentration of developer; rinsing
03/10/2005US20050053869 Integrated circuits; etching using chelate compound in liquids
03/10/2005US20050053867 Method for making a lithographic printing plate
03/10/2005US20050053866 Image fornming layer containing colorant, photoinitiator and unsaturated compound
03/10/2005US20050053864 Phthalocyanine precursors in infrared sensitive compositions
03/10/2005US20050053862 Mixture of unsaturated compound, alkali solubility binder and swelling agents with organometallic compound and triazine compound
03/10/2005US20050053861 Onium salt compound and radiation-sensitive resin composition
03/10/2005US20050053859 Photoresist, photolithography method using the same, and method for producing photoresist
03/10/2005US20050053851 Energy is reflected by first image before passing through substrate and reflected by second image after passing through substrate; masking for photolithography
03/10/2005US20050053850 Further method to pattern a substrate
03/10/2005US20050053849 Controlling thickness of beams; elongated structures; multilayer adhesion; configurated into narrow zones
03/10/2005US20050053848 Pattern on surface of substrate ; extracting contours from image map ; generating features; analyzing, determination, positioning
03/10/2005US20050053273 aligning spatial light modulators to write a second layer of patterns over a first layer of patterns on a workpiece, comprising illuminating alignment markings with radiation, detecting the markings using cameras and analyzing posistioning; phase shifting masks (PSM)
03/10/2005US20050052980 Optical power adjusting method and apparatus
03/10/2005US20050052760 Device for the low-deformation mounting of a rotationally asymmetric optical element
03/10/2005US20050052737 Optical sheet and process for producing the same
03/10/2005US20050052708 Image-drawing device and image-drawing method
03/10/2005US20050052651 Method and system for measuring stray light
03/10/2005US20050052634 Automatic focusing apparatus
03/10/2005US20050052633 Exposure apparatus and device fabrication method using the same
03/10/2005US20050052632 Exposure technique
03/10/2005US20050052631 Sealing assembly, a lithographic projection apparatus, and a device manufacturing method
03/10/2005US20050052583 Method for forming pattern of liquid crystal display device and method for fabricating thin film transistor array substrate of liquid crystal display device using the same
03/10/2005US20050052464 Multi-exposure drawing method and apparatus thereof
03/10/2005US20050052143 Alignment stage apparatus, exposure apparatus, and semiconductor device manufacturing method
03/10/2005US20050051841 Stress-controlled dielectric integrated circuit
03/10/2005US20050051739 Lithographic projection apparatus, gas purging method, device manufacturing method, and purge gas supply system
03/10/2005US20050051698 Conforming template for patterning liquids disposed on substrates
03/10/2005US20050051536 Heating elements deposited on a substrate and related method
03/10/2005US20050051516 Mask and method of manufacturing the same, electro-luminescence device and method of manufacturing the same, and electronic instrument
03/10/2005US20050051246 Substrate processing method and substrate processing apparatus
03/10/2005US20050051196 Dispensing develop onto semiconductor wafer; adjustable vertical knife rings; spacing gap
03/10/2005US20050051194 Contacting with high pressure fluids; depressurization; controlling temperature by adiabatic expansion
03/10/2005US20050050757 Microstructure drying treatment method and its apparatus and its high pressure vessel
03/09/2005EP1513380A1 Plotting device and plotting method
03/09/2005EP1513023A1 Method of evaluating optical element
03/09/2005EP1513022A1 Lithographic apparatus and device manufacturing method
03/09/2005EP1513021A1 Lithographic apparatus and a method of compensating for thermal deformation in a lithographic apparatus
03/09/2005EP1513020A2 Photosensitive lithographic printing plate
03/09/2005EP1513019A2 Projection optical system, exposure apparatus and device fabricating method
03/09/2005EP1513018A1 Lithographic apparatus and device manufacturing method
03/09/2005EP1513017A1 Lithographic apparatus and device manufacturing method
03/09/2005EP1513016A2 Image recording material and planographic printing plate
03/09/2005EP1513015A1 Planographic printing plate material
03/09/2005EP1513014A2 Polyamide resin, positive-working photosensitive resin composition, and method for producing pattern-formed resin film
03/09/2005EP1513013A2 Resist pattern thickening material, process for forming resist pattern, and process for manufacturing semiconductor device
03/09/2005EP1512112A2 Use of overlay diagnostics for enhanced automatic process control
03/09/2005EP1512050A2 Cleaning compositions for microelectronic substrates
03/09/2005EP1512049A1 Method for transferring a pattern
03/09/2005EP1512048A2 Method and system for fabricating nanoscale patterns in light curable compositions using an electric field
03/09/2005EP1511754A1 Multimer forms of mono- and bis-acylphosphine oxides
03/09/2005EP1511632A2 Method and device for transferring a pattern from a stamp to a substrate
03/09/2005EP1319170B1 Position measuring device
03/09/2005EP1078287A4 Structure for micro-machine optical tooling and method for making and using
03/09/2005CN1592948A Exposure apparatus, and device manufacturing method
03/09/2005CN1592871A Method for forming fine patterns
03/09/2005CN1592870A Positive resist composition and method of forming resist pattern from the same
03/09/2005CN1592738A Bismide compound, acid generator and resist composition each containing the same, and method of forming pattern from the composition
03/09/2005CN1592689A High resolution laserable assemblages for laser-induced thermal image transfer
03/09/2005CN1592528A Conductive film pattern forming method, electrooptical apparatus and electronic apparatus
03/09/2005CN1591782A Method of manufacturing a semiconductor device
03/09/2005CN1591773A Film electric crystal array substrate and its micro-shadow mfg. method, and light shade designing method
03/09/2005CN1591715A Method for manufacturing ceramic green sheet and method for manufacturing electronic part using that ceramic green sheet
03/09/2005CN1591714A Method for manufacturing ceramic green sheet and method for manufacturing electronic part using that ceramic green sheet
03/09/2005CN1591631A Method for manufacturing a master and forming a pattern, a master, a stamper, an optical information recording medium and a resist
03/09/2005CN1591199A Composition and method for removing copper-compatible resist
03/09/2005CN1591198A Lithographic apparatus, device manufacturing method, and device manufactured thereby
03/09/2005CN1591197A Lithographic apparatus and device manufacturing method
03/09/2005CN1591196A Lithographic apparatus and device manufacturing method
03/09/2005CN1591195A Lithographic apparatus and a method of compensating for thermal deformation in a lithographic apparatus
03/09/2005CN1591194A Lithographic apparatus and device manufacturing method
03/09/2005CN1591193A Attaching a pellicle frame to a reticle
03/09/2005CN1591192A Lithographic apparatus and device manufacturing method
03/09/2005CN1591191A Etching method and method for mfg circuit device thereby
03/09/2005CN1591190A Method and apparatus for pyroelectric lithography using patterned emitter
03/09/2005CN1591189A Source and mask optimization
03/09/2005CN1591188A Photo resistance pumping spraying; reconnaissance circuit and its system
03/09/2005CN1591187A Alkali-soluble polymer and polymerizable composition thereof
03/09/2005CN1591186A Photopolymerizable composition and image recording material
03/09/2005CN1591185A Positive photoetching gum composition and method for forming photoetching gum pattern using the same
03/09/2005CN1591184A Light, heat, electronic beam acid generating source containing 2, 1, 4,- heavy nitrogen naphthaquinone sulfuryl and preparing process thereof
03/09/2005CN1591183A Image recording material and planographic printing plate
03/09/2005CN1591182A Optical etching method
03/09/2005CN1591112A Substrate for electro-optical device and manufacturing method thereof, electro-optical device and manufacturing method thereof
03/09/2005CN1591108A Film forming method, distributing pattern forming method, semiconductor device mfg method
03/09/2005CN1591051A Light shielding film for display device, its manufacturing method, and composite for forming the film
03/09/2005CN1591047A Method for mfg optical element having resin film with micro concave-convex pattern
03/09/2005CN1590957A Original negative, exposure method and original negative making method
03/09/2005CN1590484A Organic anti-reflective coating polymer, its preparation method and organic anti-reflective coating composition comprising the same
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