| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 05/12/2005 | US20050100823 Comprises butadiene-styrene copolymers; flexography; improved relief image quality |
| 05/12/2005 | US20050100822 Printed circuit board that includes a solder resist has a photocurable and thermosetting resin composition derived from the reaction of a multifunctional oxetane compound, an acrylic acid, where the hydroxy group of the subsequent acrylate ester is reacted with an acid anhydride to form carboxyl groups |
| 05/12/2005 | US20050100821 Photosensitive composition and image recording material using the same |
| 05/12/2005 | US20050100819 photoresists comprising mixtures of acrylic ester copolymers, acid generators and quenchers, having improved sensitivity, suitable for excimer laser lithography |
| 05/12/2005 | US20050100818 Composition for an organic bottom anti-reflective coating and method for forming pattern using the same |
| 05/12/2005 | US20050100815 Process for the production of high-molecular compounds for photoresist |
| 05/12/2005 | US20050100814 Using fluorocopolymer; exposure, imaging, development |
| 05/12/2005 | US20050100802 Method for post-OPC multi layer overlay quality inspection |
| 05/12/2005 | US20050100799 Mixture of photomasks; controlling incline of pattern; lithography; phase shifting; removal of mask by etching |
| 05/12/2005 | US20050100798 Device and method for providing wavelength reduction with a photomask |
| 05/12/2005 | US20050100745 Anti-corrosion layer on objective lens for liquid immersion lithography applications |
| 05/12/2005 | US20050100683 Method of improving post-develop photoresist profile on a deposited dielectric film |
| 05/12/2005 | US20050100679 Substrate processing method and substrate processing system |
| 05/12/2005 | US20050100071 Electromagnetic radiation generation using a laser produced plasma |
| 05/12/2005 | US20050099814 Illumination optical system and exposure apparatus having the same |
| 05/12/2005 | US20050099704 Flange assembly of an optical system |
| 05/12/2005 | US20050099635 Exposure apparatus with interferometer |
| 05/12/2005 | US20050099629 Substrate processing apparatus |
| 05/12/2005 | US20050099616 Movable stage system, lithographic apparatus, and device manufacturing method |
| 05/12/2005 | US20050099614 Multiple exposure method |
| 05/12/2005 | US20050099613 Mask for inspecting an exposure apparatus, a method of inspecting an exposure apparatus, and an exposure apparatus |
| 05/12/2005 | US20050099611 Minimizing thermal distortion effects on EUV mirror |
| 05/12/2005 | US20050099579 Liquid crystal display panel and fabricating method thereof |
| 05/12/2005 | US20050099551 Liquid crystal display device including polycrystalline silicon thin film transistor and method of fabricating the same |
| 05/12/2005 | US20050099069 Hermetically sealed elements of an actuator |
| 05/12/2005 | US20050098741 Lithographic projection apparatus, particle barrier for use therein, integrated structure manufacturing method, and device manufactured thereby |
| 05/12/2005 | US20050098537 Method for large-area patterning dissolved polymers by making use of an active stamp |
| 05/12/2005 | US20050098534 Formation of conductive templates employing indium tin oxide |
| 05/12/2005 | US20050098099 Patterning apparatus and film patterning method |
| 05/12/2005 | US20050097764 Enhanced visibility of overlay measurement marks |
| 05/12/2005 | DE4320033B4 Verfahren zur Bildung eines Metallmusters bei der Herstellung einer Halbleitereinrichtung A method of forming a metal pattern in the manufacture of a semiconductor device |
| 05/12/2005 | DE10392578T5 System und Verfahren zur Herstellung von gedruckten Schaltungsplatinen unter Verwendung von nichtgleichmässig modifizierten Bildern System and method for manufacture of printed circuit boards using non-uniformly modified images |
| 05/11/2005 | EP1530151A2 Process for correcting the recording skew when illuminating a printing master |
| 05/11/2005 | EP1530092A1 Lithographic apparatus and device manufacturing method |
| 05/11/2005 | EP1530091A1 Radiation detector |
| 05/11/2005 | EP1530090A1 Lithographic apparatus and device manufacturing method |
| 05/11/2005 | EP1530089A1 Lithographic apparatus and device manufacturing method |
| 05/11/2005 | EP1530088A1 Lithographic apparatus and device manufacturing method |
| 05/11/2005 | EP1530087A2 Illumination optical system and exposure apparatus |
| 05/11/2005 | EP1530086A1 A method and an apparatus for producing micro-chips |
| 05/11/2005 | EP1530085A2 Electro-optic device substrate and method for manufacturing the same, electro-optic device and method for manufacturing the same, photomask, and electronic device |
| 05/11/2005 | EP1530084A1 A method for performing transmission tuning of a mask pattern to improve process latitude |
| 05/11/2005 | EP1530083A2 OPC based on decomposition into eigen-functions |
| 05/11/2005 | EP1529796A1 Photosensitive ceramic compositions containing polycarbonate polymers |
| 05/11/2005 | EP1529638A2 Printing plate, fabricating method thereof, method of making a printing plate with a print image, method of reproducing the printing plate with a print image, and printing press |
| 05/11/2005 | EP1529308A1 Method and compositions for hardening photoresist in etching processes |
| 05/11/2005 | EP1529246A1 Method of forming a rim phase shifting mask and using the rim phase shifting mask to form a semiconductor device |
| 05/11/2005 | EP1487885A4 A novel process for producing anhydride-containing polymers for radiation sensitive compositions |
| 05/11/2005 | EP1185475A4 Cassette buffering within a minienvironment |
| 05/11/2005 | EP1101258B1 High pulse rate pulse power system |
| 05/11/2005 | EP1003561B1 Latent reactive polymers with biologically active moieties |
| 05/11/2005 | CN2699337Y Light screen master film capable of preventing electron beam deviation caused by electric charge effect |
| 05/11/2005 | CN1615539A Substrate inspecting device, coating/developing device and substrate inspecting method |
| 05/11/2005 | CN1615461A A cleaning agent composition for a positive or a negative photoresist |
| 05/11/2005 | CN1615460A Negative-working photoimabeable bottom antireflective coating |
| 05/11/2005 | CN1615459A Process for producing an image using a first minimum bottom antireflective coating composition |
| 05/11/2005 | CN1615458A Negative deep ultraviolet photoresist |
| 05/11/2005 | CN1615457A Patterning of solid state features by direct write nanolithographic printing |
| 05/11/2005 | CN1615333A Spin-on-glass anti-reflective coatings for photolithography |
| 05/11/2005 | CN1615332A Anti-reflective coatings for photolithography and methods of preparation thereof |
| 05/11/2005 | CN1615302A Positive-working photoimageable bottom antireflective coating |
| 05/11/2005 | CN1615212A Composite kinematic coupling |
| 05/11/2005 | CN1614516A Photoresist treating process |
| 05/11/2005 | CN1614515A Optical element, lithographic apparatus such optical element and device manufacturing method |
| 05/11/2005 | CN1614514A Lithographic apparatus and device manufacturing method |
| 05/11/2005 | CN1614513A Lithographic apparatus and device manufacturing method |
| 05/11/2005 | CN1614512A Lithographic apparatus and device manufacturing method |
| 05/11/2005 | CN1614511A Lithographic apparatus and device manufacturing method |
| 05/11/2005 | CN1614510A Photoelectric device, its substrate and manufacture, and electronic apparatus |
| 05/11/2005 | CN1614509A Anti-corrosion layer on objective lens for liquid immersion lithography applications |
| 05/11/2005 | CN1614490A Thin film transistor substrate using a horizontal electric field type liquid crystal display device and fabricating method thereof |
| 05/11/2005 | CN1614489A Thin film transistor substrate for horizontal electric field LCD device and its manufacture |
| 05/11/2005 | CN1614487A Thin film transistor substrate of horizontal electric field type liquid crystal display device and fabricating method thereof |
| 05/11/2005 | CN1614473A Color filter substrate and its manufacture and liquid crystal display device |
| 05/11/2005 | CN1614448A Production for aluminium-material X-ray assembled lens |
| 05/11/2005 | CN1201375C Liquid state film drying method and device |
| 05/11/2005 | CN1201207C Light source generator and exposure method of contact hole |
| 05/11/2005 | CN1201206C Exposure device |
| 05/11/2005 | CN1201205C 曝光方法及其装置 Exposure method and apparatus |
| 05/11/2005 | CN1201204C Method for forming pattern of non-photo-imaing ceramic strip |
| 05/11/2005 | CN1201190C Reflector with lug on its inclined surface and its making process |
| 05/11/2005 | CN1200978C Coloring composition |
| 05/11/2005 | CN1200943C Organometallic acyl-aryl phosphine |
| 05/10/2005 | US6892109 Remote maintenance system |
| 05/10/2005 | US6892108 Method for adjusting processing parameters of at least one plate-shaped object in a processing tool |
| 05/10/2005 | US6891927 Light generation apparatus, exposure apparatus, and device manufacturing method |
| 05/10/2005 | US6891683 Refractive projection objective with a waist |
| 05/10/2005 | US6891627 Methods and systems for determining a critical dimension and overlay of a specimen |
| 05/10/2005 | US6891624 Cyclic error reduction in average interferometric position measurements |
| 05/10/2005 | US6891610 Methods and systems for determining an implant characteristic and a presence of defects on a specimen |
| 05/10/2005 | US6891603 Manufacturing method in manufacturing line, manufacturing method for exposure apparatus, and exposure apparatus |
| 05/10/2005 | US6891602 Device for aligning masks in photolithography |
| 05/10/2005 | US6891601 High resolution, dynamic positioning mechanism for specimen inspection and processing |
| 05/10/2005 | US6891600 Lithographic apparatus and device manufacturing method |
| 05/10/2005 | US6891599 Stage apparatus and exposure apparatus |
| 05/10/2005 | US6891597 Driving apparatus, exposure apparatus, and device manufacturing method |
| 05/10/2005 | US6891596 Refractive projection objective for immersion lithography |
| 05/10/2005 | US6891593 Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method using the apparatus, and semiconductor manufacturing factory |
| 05/10/2005 | US6891387 System for probing, testing, burn-in, repairing and programming of integrated circuits |
| 05/10/2005 | US6891175 Exposure apparatus and device manufacturing method using the same |