Patents
Sitemap › G03 - Photography; Cinematography; Analogous techniques using waves other than optical waves; Electrography; Holography › G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; Materials therefor; Originals therefor; Apparatus specially adapted therefor › G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
06/2005
06/01/2005EP1536289A2 Measuring method using interference
06/01/2005EP1536288A2 Coil support unit, motor and exposure apparatus using the same, and device manufacturing method
06/01/2005EP1536287A2 Measuring method and apparatus using a shearing interferometer, exposure method and apparatus using the same, and device manufacturing method
06/01/2005EP1536286A1 Highly heat-resistant, negative-type photosensitive resin composition
06/01/2005EP1536285A2 Photosensitive composition, compound for use in the photosensitive composition, and pattern forming method using the photosensitive composition
06/01/2005EP1536282A2 Methods and systems for estimating reticle bias states
06/01/2005EP1536253A1 Method of manufacturing a branch optical waveguide
06/01/2005EP1535968A2 Process for the preparation of cyanine dyes with polysulfonate anions
06/01/2005EP1535115A2 Method and device for producing exposed structures
06/01/2005EP1535114A2 Negative-working photosensitive composition and negative-working photosensitive planographic printing plate
06/01/2005EP1535113A2 Exposure method, exposure mask, and exposure apparatus
06/01/2005EP1535112A2 Reticle carrier
06/01/2005EP1535100A1 Objective with birefringent lenses
06/01/2005EP1442088B1 Gravure printing process using free radical curable printing inks
06/01/2005EP1377880B1 Lithograph and microscope with one-dimensional trigger mask and method for production of digital holograms in a storage medium
06/01/2005EP1117478B1 Support for a method for determining an analyte and a method for producing the support
06/01/2005CN1623321A Printing plate handling system
06/01/2005CN1623236A A method of forming a metal pattern and a method of fabricating tft array panel by using the same
06/01/2005CN1623219A High-performance non-contact support platforms
06/01/2005CN1623207A Air-cooled lamp, and article treatment system and method utilizing an air-cooled lamp
06/01/2005CN1623122A Method for fabricating a structure for a microelectromechanical system (MEMS) device
06/01/2005CN1623121A Photoresist composition for deep UV radiation containing an additive
06/01/2005CN1622966A Optical devices made from radiation curable fluorinated compositions
06/01/2005CN1622943A Heterocycle-bearing onium salts
06/01/2005CN1622910A Method and device for loading / unloading a drum plotter
06/01/2005CN1622286A Photolithography evaluating method and photolithography process
06/01/2005CN1622282A Method for forming alignment pattern of semiconductor device
06/01/2005CN1622281A Method for producing semiconductor device and cleaning device for resist stripping
06/01/2005CN1621946A Scanner linearity tester
06/01/2005CN1621945A Method for making dimethyl silicone polymer micro flow control chip composite type optical cured resin die arrangement
06/01/2005CN1621944A Projection light etching image-forming system
06/01/2005CN1621943A Positive type photosensitive composition
06/01/2005CN1621941A Photomasks including shadowing elements therein and related methods and systems
06/01/2005CN1621871A Method of manufacturing a branch optical waveguide
06/01/2005CN1621555A Mask and container and manufacturing apparatus
06/01/2005CN1621228A Gravure process
06/01/2005CN1204614C Beam positioning in microlithographic writing
06/01/2005CN1204603C Drying method for microfine structure body and microfine structure body produced by said method
06/01/2005CN1204591C Plasma focus light source with improved pulse power system
06/01/2005CN1204586C Manufacture of plasma display plate
06/01/2005CN1204468C Holograph printing system and stereo holograph
06/01/2005CN1204460C Manufacturing method for metal film electrode with small section oblique angle and products thereof
06/01/2005CN1204459C Exposure system as well as exposure method applied in color light filter
06/01/2005CN1204458C Method and apparatus for applying photoresist dry film on printed circuit board or substrate
06/01/2005CN1204457C PS plate with steel base
06/01/2005CN1204456C Laser imaged printing plates comprising multi-layer slip film
06/01/2005CN1204455C System and method for lightening corner of mask to become round in production of said mask
06/01/2005CN1204004C Support frame and PS plate for lithographic printing plate
05/2005
05/31/2005US6901577 Pattern forming method and semiconductor device manufactured by using said pattern forming method
05/31/2005US6901133 X-ray exposure method and semiconductor device manufactured using this X-ray exposure method as well as X-ray mask, X-ray exposure unit and resist material
05/31/2005US6901090 Exposure apparatus with laser device
05/31/2005US6900946 Zoom system, in particular, a zoom system for an illumination device of a microlithographic projection system
05/31/2005US6900888 Method and apparatus for inspecting a pattern formed on a substrate
05/31/2005US6900887 Method and system for measuring stray light
05/31/2005US6900881 Step and repeat imprint lithography systems
05/31/2005US6900880 Exposure apparatus, surface position adjustment unit, mask, and device manufacturing method
05/31/2005US6900879 Projection exposure apparatus
05/31/2005US6900878 Reticle-holding pods and methods for holding thin, circular reticles, and reticle-handling systems utilizing same
05/31/2005US6900827 Optical recorder and method thereof
05/31/2005US6900250 Photopolymerization using photoinitiators
05/31/2005US6900141 Method of forming a resist pattern and fabricating tapered features
05/31/2005US6900140 Anisotropic etching of organic-containing insulating layers
05/31/2005US6900134 Method for forming openings in a substrate using bottom antireflective coatings
05/31/2005US6900126 Method of forming metallized pattern
05/31/2005US6900078 Tape stiffener, semiconductor device component assemblies including same, and stereolithographic methods for fabricating same
05/31/2005US6900075 Mixed LVR and HVR reticle set design for the processing of gate arrays, embedded arrays and rapid chip products
05/31/2005US6900003 Photoresist processing aid and method
05/31/2005US6900002 Antireflective bi-layer hardmask including a densified amorphous carbon layer
05/31/2005US6900001 Flood exposure of photoresist to eliminate pullback; shrinkage inhibition
05/31/2005US6900000 Depositing an antireflective compound in a layer on said substrate surface by chemical vapor deposition; and applying a photoresist layer to said antireflective compound layer to yield the circuit precursor.
05/31/2005US6899999 Electroconductive wiring formed in dielectric body for use in electric/electronic appliances, and communication devices; electroless plating
05/31/2005US6899998 Method and a plate for digitally-imaged offset printing
05/31/2005US6899997 Amplification
05/31/2005US6899996 Hydrophilic water swelling particles in nonaqeuos solvent; lithography printing plates
05/31/2005US6899995 Protecting groups in polymers, photoresists and processes for microlithography
05/31/2005US6899994 On-press developable IR sensitive printing plates using binder resins having polyethylene oxide segments
05/31/2005US6899992 Imaging, development lithography printing plates
05/31/2005US6899991 Photo-curable resin composition, patterning process, and substrate protecting film
05/31/2005US6899990 Epoxy compound having alicyclic structure, polymer, resist composition and patterning process
05/31/2005US6899989 A optionally substituted triphenylsulfonium benzenesulfonate acid generator; resin containing vinylphenol units and 1-alkoxyalkoxystyrene units
05/31/2005US6899982 Method and apparatus for proper ordering of registration data
05/31/2005US6899980 Photomask material and process of producing photomask from the photomask material
05/31/2005US6899936 Stamper, manufacturing method therefor and optical device manufactured therewith
05/31/2005US6899818 Method and composition for removing sodium-containing material from microcircuit substrates
05/31/2005US6899814 Creating a mask for producing a printing plate
05/26/2005WO2005048338A1 A method and a semiconductor substrate for transferring a pattern from a phase mask to a substrate
05/26/2005WO2005048335A1 Minimizing the loss of barrier materials during photoresist stripping
05/26/2005WO2005048328A1 Exposure apparatus and device manufacturing method
05/26/2005WO2005048327A1 Exposure method and exposure device
05/26/2005WO2005048326A1 Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device producing method
05/26/2005WO2005048325A1 Stage drive method, stage apparatus, and exposure apparatus
05/26/2005WO2005048283A2 Surface and site-specific polymerization by direct-write lithography
05/26/2005WO2005047983A1 Alkyl ester developing solvent for photopolymerizable printing plates
05/26/2005WO2005047982A1 Terpene ether developing solvent for photopolymerizable printing plates
05/26/2005WO2005047981A2 Thermophoretic techniques for protecting reticles from contaminants
05/26/2005WO2005047980A2 Monolithic silicon euv collector
05/26/2005WO2005047979A2 Optical system
05/26/2005WO2005047978A1 Aqueous resist composition
05/26/2005WO2005047977A1 Method of fixing organic molecule and micro/nano-article
05/26/2005WO2005047976A2 Varying feature size in resist
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