| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 12/08/2005 | US20050271950 vinyl acetate-vinyl chloride copolymers or polyurethane layers containing carbon black nanoparticles, that is impervious to ultraviolet light and exhibits excellent wear resistance and bonding strength to substrate films, used for preparation of flexographic printing plate |
| 12/08/2005 | US20050271558 Processing apparatus, measuring apparatus, and device manufacturing method |
| 12/08/2005 | US20050271421 Calibration method for exposure device, exposure method and exposure device |
| 12/08/2005 | US20050271382 Resist pattern forming apparatus and method thereof |
| 12/08/2005 | US20050271381 Method for replenishing development replenisher in automatic developing machine for photosensitive lithographic printing plate precursor |
| 12/08/2005 | US20050271109 Very narrow band, two chamber, high rep-rate gas discharge laser system |
| 12/08/2005 | US20050270857 Semiconductor manufacturing apparatus |
| 12/08/2005 | US20050270659 Catadioptric projection lens and method for compensating the intrinsic birefringence in such a lens |
| 12/08/2005 | US20050270648 Projection optical system, exposure apparatus, device manufacturing method, and device manufactured by using the same |
| 12/08/2005 | US20050270613 System and method for dose control in a lithographic system |
| 12/08/2005 | US20050270608 Illumination optical system and exposure apparatus |
| 12/08/2005 | US20050270523 Method of characterizing flare |
| 12/08/2005 | US20050270517 Supporting system in exposure apparatus |
| 12/08/2005 | US20050270516 System for magnification and distortion correction during nano-scale manufacturing |
| 12/08/2005 | US20050270515 Lithographic apparatus and device manufacturing method |
| 12/08/2005 | US20050270514 Two-dimensional light-modulating nano/micro aperture array and high-speed nano pattern recording system utilized with the array |
| 12/08/2005 | US20050270513 Lithographic apparatus and device manufacturing method |
| 12/08/2005 | US20050270512 Lithographic apparatus and device manufacturing method |
| 12/08/2005 | US20050270511 Radiation system, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 12/08/2005 | US20050270510 Illumination assembly, method for providing a radiation beam, lithographic projection apparatus and device manufacturing method |
| 12/08/2005 | US20050270509 Measuring apparatus, exposure apparatus having the same, and device manufacturing method |
| 12/08/2005 | US20050270507 Movement method, exposure method and exposure apparatus, and device manufacturing method |
| 12/08/2005 | US20050270506 Lithographic apparatus and device manufacturing method |
| 12/08/2005 | US20050270505 Method of photolithography using a fluid and a system thereof |
| 12/08/2005 | US20050270504 Measurement method and apparatus, exposure apparatus, and device fabrication method |
| 12/08/2005 | US20050270312 Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing |
| 12/08/2005 | US20050269934 Protective cover for a lamp, set including a lamp and a protective cover, method of installing a source in a lithographic apparatus, device manufacturing method and device manufactured thereby |
| 12/08/2005 | US20050269748 Method for purging an optical lens |
| 12/08/2005 | US20050269745 Method of varying dimensions of a substrate during nano-scale manufacturing |
| 12/08/2005 | US20050269529 Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source |
| 12/08/2005 | US20050269525 Lithographic apparatus and device manufacturing method |
| 12/08/2005 | US20050269290 Etch-resistant film, forming method thereof, surface-modified resist pattern, forming method thereof, semiconductor device and manufacturing method thereof |
| 12/08/2005 | US20050269285 Method for fabricating a nanopattern and a carbon nanotube bio-nanoarray using the self-assembly of supramolecules and UV etching |
| 12/08/2005 | US20050269055 Method and apparatus for production of a cast component |
| 12/08/2005 | US20050269035 Fine pattern forming apparatus and fine pattern inspecting apparatus |
| 12/08/2005 | US20050268939 Wet cleaning apparatus and methods |
| 12/08/2005 | US20050268804 Lithographic method for small line printing |
| 12/08/2005 | US20050268698 High-resolution gas gauge proximity sensor |
| 12/08/2005 | US20050268581 Chemical filter arrangement for a semiconductor manufacturing apparatus |
| 12/08/2005 | DE102004022016A1 Forming a pattern on a semiconductor substrate layer comprises applying a photosensitive resist to the substrate, exposing the resist and heating |
| 12/07/2005 | EP1603153A1 Detection method of optimal position detection equation, positioning method, exposure method, device manufacturing method, and device |
| 12/07/2005 | EP1602983A1 Water soluble resin composition, method of pattern formation and method of inspecting resist pattern |
| 12/07/2005 | EP1602982A2 method of producing a lithographic printing plate and planographic printing method |
| 12/07/2005 | EP1602981A2 Illumination optical system and exposure apparatus |
| 12/07/2005 | EP1602980A2 Protective cover for a lamp, set including a lamp and a protective cover, method of installing a source in a lithographic apparatus, device manufacturing method and device manufactured thereby |
| 12/07/2005 | EP1602979A2 Lithography apparatus and pattern forming method using the same |
| 12/07/2005 | EP1602978A1 Exposure apparatus for liquid crystal panel and exposure apparatus |
| 12/07/2005 | EP1602977A1 Positive resist composition and compound used therein |
| 12/07/2005 | EP1602976A1 Resist material and pattern formation method |
| 12/07/2005 | EP1602975A1 Radiation-sensitive resin composition |
| 12/07/2005 | EP1602974A1 Mask making method, mask making device, and mask drawing device |
| 12/07/2005 | EP1602480A1 Method for colored image formation |
| 12/07/2005 | EP1602116A2 Discharge produced plasma euv light source |
| 12/07/2005 | EP1602012A1 Immersion lithography methods using carbon dioxide |
| 12/07/2005 | EP1602011A2 Photoresist composition for deep ultraviolet lithography |
| 12/07/2005 | EP1602010A2 Photosensitive composition and use thereof |
| 12/07/2005 | EP1602009A2 Novel photosensitive resin compositions |
| 12/07/2005 | EP1601931A2 Apparatus and method for detecting overlay errors using scatterometry |
| 12/07/2005 | EP1386378A4 Improved fan for gas discharge laser |
| 12/07/2005 | EP1337470B1 Process for recovering onium hydroxides from solutions containing onium compounds |
| 12/07/2005 | EP1256149A4 Electric discharge laser with acoustic chirp correction |
| 12/07/2005 | CN1705915A Binary half tone photomasks and microscopic three-dimensional devices and method of fabricating the same |
| 12/07/2005 | CN1705914A Chemically amplified positive photosensitive resin composition |
| 12/07/2005 | CN1705913A Negative blue-violet laser photosensitive composition, image forming material, image former and method of image formation |
| 12/07/2005 | CN1705912A Pattern forming materials and pattern formation method using the materials |
| 12/07/2005 | CN1705646A Hexaarylbiimidazole compounds and photopolymerization initiator compositions containing the same |
| 12/07/2005 | CN1705570A Photosensitive resin composition for lithographic printing plate and lithographic printing original plate |
| 12/07/2005 | CN1705044A Leadless silver paste composition for pdp addressing electrodes |
| 12/07/2005 | CN1704849A Mask frame conveying device and exposure device |
| 12/07/2005 | CN1704848A Exposure device |
| 12/07/2005 | CN1704847A Light shield and method for making inclined reflection bumpers by using the same |
| 12/07/2005 | CN1704846A Positive resist composition and compound used therein |
| 12/07/2005 | CN1704845A Photosensitive polymer and chemically amplified photoresist composition including the same |
| 12/07/2005 | CN1704797A Projection optical system and pattern drawing device |
| 12/07/2005 | CN1704455A Coating compositions for use with an overcoated photoresist |
| 12/07/2005 | CN1230873C Regulating device and method of position deviation optical detecting device |
| 12/07/2005 | CN1230719C Nonaqueous protective film stripping liquid handling apparatus and nonaqueous protective film stripping liquid handling method |
| 12/07/2005 | CN1230718C Method and composition for removing sodium-containing material from microcircuit substrates |
| 12/07/2005 | CN1230717C Photographic corrosion mfg method for mixing chromium-free film and phase transition mixed type photo mask, and photographic corrosion manufacturing method employing the mask |
| 12/07/2005 | CN1230716C Mask-free nano pattern making method and equipment |
| 12/07/2005 | CN1230715C Photoresist composition for deep UV and process thereof |
| 12/07/2005 | CN1230714C Process for making active system organic electroluminescent display |
| 12/07/2005 | CN1230713C Surfaces with release agent |
| 12/07/2005 | CN1230674C Whole set testing equipment employing X-rays |
| 12/07/2005 | CN1230457C Compound with isocyanate group, coating composite containing same, and preparation and use thereof |
| 12/07/2005 | CN1230455C Copolymer resin, preparation thereof, and photoresist using the same |
| 12/07/2005 | CN1230310C Use of electronically active primer layers in thermal patterning of meterials |
| 12/07/2005 | CN1230297C Original edition used for lithographic printing plate |
| 12/06/2005 | US6973636 Method of defining forbidden pitches for a lithography exposure tool |
| 12/06/2005 | US6973208 Method and apparatus for inspection by pattern comparison |
| 12/06/2005 | US6972853 coating grids comprising photoresist layers on semiconductor substrates, measure characteristics, determine variation, indicate error condition, adjust parameters; photolithography, integrated circuits |
| 12/06/2005 | US6972847 Position detecting system and exposure apparatus using the same |
| 12/06/2005 | US6972844 Microprocessing apparatus, semiconductor device manufacturing apparatus, and device manufacturing method |
| 12/06/2005 | US6972843 Lithography alignment |
| 12/06/2005 | US6972836 Measuring method of illuminance unevenness of exposure apparatus, correcting method of illuminance unevenness, manufacturing method of semiconductor device, and exposure apparatus |
| 12/06/2005 | US6972833 Plate positioning and processing method and plate positioning and processing apparatus |
| 12/06/2005 | US6972832 Method of grounding a photoblank to a holding device |
| 12/06/2005 | US6972831 Projection exposure system for microlithography and method for generating microlithographic images |
| 12/06/2005 | US6972830 Beam-splitter optics design that maintains an unflipped (unmirrored) image for a catadioptric lithographic system |
| 12/06/2005 | US6972421 Extreme ultraviolet light source |