| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 07/05/2006 | EP1677152A1 Polarized radiation in lithographic apparatus and device manufacturing method |
| 07/05/2006 | EP1677151A1 Lithographic apparatus and device manufacturing method |
| 07/05/2006 | EP1677150A1 Lithographic apparatus, illumination system and filter system |
| 07/05/2006 | EP1677149A1 Lithographic apparatus, radiation system and filter system |
| 07/05/2006 | EP1677148A2 System for correcting the non-uniformity of illumination in a photolithography device |
| 07/05/2006 | EP1677147A1 Block copolymer composition for photosensitive flexographic plate |
| 07/05/2006 | EP1676869A1 Photoresist resin and photoresist resin composition |
| 07/05/2006 | EP1676304A2 Integrated ashing and implant annealing method |
| 07/05/2006 | EP1676174A2 Apparatus and method for aligning surfaces |
| 07/05/2006 | EP1676173A1 Photopolymerizable compositions and flexographic plates prepared from controlled distribution block copolymers |
| 07/05/2006 | EP1675972A2 Method for plasma treating a surface |
| 07/05/2006 | EP1675802A1 Method for patterning a substrate surface |
| 07/05/2006 | EP1675725A1 Elastomeric stamp, patterning method using such a stamp and method for producing such a stamp |
| 07/05/2006 | EP1573399B1 Microstructure comprising an adhesive coating and method for making same |
| 07/05/2006 | EP1451015A4 High speed negative working thermal printing plates |
| 07/05/2006 | EP1444081A4 Composite kinematic coupling |
| 07/05/2006 | EP1430573A4 SIX TO TEN KHz, OR GREATER GAS DISCHARGE LASER SYSTEM |
| 07/05/2006 | EP1421653A4 Laser lithography light source with beam delivery |
| 07/05/2006 | EP1358670B1 Process for removing residues from the microstructure of an object |
| 07/05/2006 | EP1340106A4 Protective overcoat for replicated diffraction gratings |
| 07/05/2006 | EP1257878B1 A mold for nano imprinting |
| 07/05/2006 | EP1027172A4 Protective overcoat for replicated diffraction gratings |
| 07/05/2006 | EP1025464B1 Composite relief image printing plates |
| 07/05/2006 | EP1002242B1 Semiconductor wafer fabrication system having two energy detectors for a laser |
| 07/05/2006 | CN1799122A Method of measuring focus deviation in pattern exposure and pattern exposure method |
| 07/05/2006 | CN1799007A Thinner composition for removing photosensitive resin |
| 07/05/2006 | CN1799006A Micropattern formation material and method of micropattern formation |
| 07/05/2006 | CN1799005A Pattern forming material and method of pattern formation |
| 07/05/2006 | CN1799004A Applications of semiconductor nano-sized particles for photolithography |
| 07/05/2006 | CN1799003A Imprint lithography process and sensor |
| 07/05/2006 | CN1798953A Heat pipe with temperature control |
| 07/05/2006 | CN1798793A Novel surface-active polysiloxane photoinitiators |
| 07/05/2006 | CN1797221A Wet etching device and wet etching method |
| 07/05/2006 | CN1797220A Radiation exposure apparatus comprising a gas flushing system |
| 07/05/2006 | CN1797219A System and method for fault indication on a substrate in maskless applications |
| 07/05/2006 | CN1797218A Uniformity correction system having light leak and shadow compensation |
| 07/05/2006 | CN1797217A Methods and systems for lithographic beam generation |
| 07/05/2006 | CN1797216A Method for etching and for forming a contact hole using thereof |
| 07/05/2006 | CN1797215A Pellicle for photolithography and pellicle frame |
| 07/05/2006 | CN1797214A Lithographic apparatus and device manufacturing method |
| 07/05/2006 | CN1797213A Level sensor, lithographic apparatus and device manufacturing method |
| 07/05/2006 | CN1797212A Lithographic apparatus and device manufacturing method |
| 07/05/2006 | CN1797211A Method for manufacturing color element film-equipped substrate and color element film-equipped substrate |
| 07/05/2006 | CN1797210A Method of fabricating ips mode LCD and method of forming alignment layer in ips mode LCD |
| 07/05/2006 | CN1797209A Light exposure apparatus |
| 07/05/2006 | CN1797208A Lithographic apparatus and device manufacturing method |
| 07/05/2006 | CN1797207A Lithographic apparatus and device manufacturing method |
| 07/05/2006 | CN1797206A Lithographic apparatus and device manufacturing method |
| 07/05/2006 | CN1797205A Lithographic apparatus,Illumination system and debris trapping system |
| 07/05/2006 | CN1797204A Lithographic apparatus with multiple alignment arrangements and alignment measuring method |
| 07/05/2006 | CN1797203A Lithographic apparatus and device manufacturing method |
| 07/05/2006 | CN1797202A Polarized radiation in lithographic apparatus and device manufacturing method |
| 07/05/2006 | CN1797201A Method for fabricating micro image |
| 07/05/2006 | CN1797200A Method for fabricating T shaped grating by mixed Nano stamping and optical photolithography |
| 07/05/2006 | CN1797199A Method for forming Micro-Nano structure of mobile mask in gray scale |
| 07/05/2006 | CN1797198A Method for forming pattern of photoresist and finishing technique |
| 07/05/2006 | CN1797197A Photosensitive resin composites, spacer for display panel and display panel |
| 07/05/2006 | CN1797196A Photosensitive resin composites, spacer for display panel and display panel |
| 07/05/2006 | CN1797195A Composition for coating a photoresist pattern |
| 07/05/2006 | CN1797194A Method for removing impurities grown on a phase shift mask |
| 07/05/2006 | CN1797193A Method and device for fabricating graphical stamp in Nano grade |
| 07/05/2006 | CN1797191A Method for detecting failure of database patterns of photo mask |
| 07/05/2006 | CN1797190A Multi-transmission phase mask and method for manufacturing the same |
| 07/05/2006 | CN1797162A Liquid crystal display device and fabricating method thereof |
| 07/05/2006 | CN1797161A Tft array substrate and fabrication method thereof |
| 07/05/2006 | CN1797160A Liquid crystal display device and fabricating method thereof |
| 07/05/2006 | CN1797159A Thin-film transistor array substrate and its manufacturing method |
| 07/05/2006 | CN1797150A Liquid crystal display device and fabricating method thereof |
| 07/05/2006 | CN1797149A Liquid crystal display device and fabricating method thereof |
| 07/05/2006 | CN1797143A Method for manufacturing pixel structure |
| 07/05/2006 | CN1797117A Liquid crystal display device and method of manufacturing the same |
| 07/05/2006 | CN1797108A Alkali soluble resin, and composition containing the resin and capable of sensing optical activity |
| 07/05/2006 | CN1797043A Method for fabricating microlens |
| 07/05/2006 | CN1796131A Coating method, liquid supplying head and liquid supplying apparatus |
| 07/05/2006 | CN1796128A Fluid jet device and menufacturing method |
| 07/05/2006 | CN1263357C Scanning method |
| 07/05/2006 | CN1263113C Method for manufacturing semiconductor device |
| 07/05/2006 | CN1263096C Dry photo etching method and method for forming grating pattern |
| 07/05/2006 | CN1263094C Method for mfg. semiconductor device |
| 07/05/2006 | CN1262889C Developing device and method |
| 07/05/2006 | CN1262888C Substrate processing device, liquid processing device and liquid processing method |
| 07/05/2006 | CN1262887C Photoetch instrument and method for making integrated circuit device |
| 07/05/2006 | CN1262886C Stripe reduced pattern making for print plate |
| 07/05/2006 | CN1262885C Parallel processing type optical range finder |
| 07/05/2006 | CN1262884C Photoresist composite containing cycloolefine polymer and hydrophobic non-steroidal alicyclic additive |
| 07/05/2006 | CN1262883C Method and system of automatic fluid dispensing for imprint lithography processes |
| 07/05/2006 | CN1262873C Manufacturing method of liquid crystal display array substrate |
| 07/05/2006 | CN1262863C Objective with pupil obscuration |
| 07/05/2006 | CN1262576C Resin composition |
| 07/04/2006 | US7073163 Method of simulating patterns, computer program therefor, medium storing the computer program and pattern-simulating apparatus |
| 07/04/2006 | US7072777 Exposure apparatus anti-vibration apparatus, system identification apparatus and system identification method |
| 07/04/2006 | US7072565 polysilsesquioxanes and polysiloxanes and second component containing a plurality of functional groups chosen from epoxides, oxetanes, vinyl ethers; can be used in forming the clad and/or core layers to be coated on copper foil and, in the dried state, bent around a conical Mandrel bar without cracking |
| 07/04/2006 | US7072502 Alternating phase-shift mask inspection method and apparatus |
| 07/04/2006 | US7072375 Line-narrowed gas laser system |
| 07/04/2006 | US7072102 Methods for reducing polarization aberration in optical systems |
| 07/04/2006 | US7072049 Model optimization for structures with additional materials |
| 07/04/2006 | US7072048 Interferometric plural-dimensional displacement measuring system |
| 07/04/2006 | US7072040 Mask for inspecting an exposure apparatus, a method of inspecting an exposure apparatus, and an exposure apparatus |
| 07/04/2006 | US7072027 Exposure apparatus, method of controlling same, and method of manufacturing devices |
| 07/04/2006 | US7072026 Exposure apparatus and optical component for the same |