| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 09/28/2006 | US20060215144 Stage drive method, stage apparatus, and exposure apparatus |
| 09/28/2006 | US20060215140 Method of measuring the performance of an illumination system |
| 09/28/2006 | US20060215135 Advanced mask patterning with patterning layer |
| 09/28/2006 | US20060215134 Lithographic apparatus and device manufacturing method |
| 09/28/2006 | US20060215132 Lithographic apparatus and device manufacturing method |
| 09/28/2006 | US20060214519 Alignment apparatus and exposure apparatus using the same |
| 09/28/2006 | US20060214518 Alignment stage apparatus |
| 09/28/2006 | US20060214330 Use of novel micro- and nano-imprinting techniques for making supported three-dimensional micro- and nano-structures for pixel segregation in OLED-based displays; using polymers of lower glass transition temperatures and eliminates heating required to assemble thermoplastic polymers |
| 09/28/2006 | US20060214326 Resin composition for mold used in forming micropattern, and method for fabricating organic mold therefrom |
| 09/28/2006 | US20060214105 Micromachining process, system and product |
| 09/28/2006 | US20060213534 Integrated ashing and implant annealing method using ozone |
| 09/28/2006 | US20060213362 Lorentz motor control system for a payload |
| 09/28/2006 | US20060213072 Heavy machine and method for assisting in aligning a heavy machine |
| 09/28/2006 | US20060213053 Double layer patterning and technique for milling patterns for a servo recording head |
| 09/28/2006 | DE102005013187A1 Method for joining two components used in microlithography comprises forming a at a processing temperature a material mixture of two components, applying the mixture between the components and hardening the mixture to form a diffusion alloy |
| 09/27/2006 | EP1705695A1 Exposure apparatus and device producing method |
| 09/27/2006 | EP1705694A1 Exposure method and apparatus, and device producing method |
| 09/27/2006 | EP1705522A2 Plate-making method of lithographic printing plate precursor |
| 09/27/2006 | EP1705521A2 Exposure apparatus and device manufacturing method |
| 09/27/2006 | EP1705520A2 Exposure apparatus and exposing method and method of manufacturing a printed wiring board |
| 09/27/2006 | EP1705519A2 Coating compositions for use with an overcoated photoresist |
| 09/27/2006 | EP1705518A2 Positive resist composition and pattern forming method using the same |
| 09/27/2006 | EP1704585A2 Methods for fabricating isolated micro- and nano- structures using soft or imprint lithography |
| 09/27/2006 | EP1704446A2 Condenser optic with sacrificial reflective surface |
| 09/27/2006 | EP1704445A2 Device and method for the optical measurement of an optical system, measurement structure support, and microlithographic projection exposure apparatus |
| 09/27/2006 | EP1704173A1 Radiation curable aqueous compositions for low extractable film packaging |
| 09/27/2006 | EP1379918A4 Imageable element comprising graft polymer |
| 09/27/2006 | EP1194732A4 Gas insensitive interferometric apparatus and methods |
| 09/27/2006 | EP1194731A4 Interferometric apparatus and method that compensate refractive index fluctuations |
| 09/27/2006 | EP0970519B1 Integration of low-k polymers into interlevel dielectrics using controlled electron-beam radiation |
| 09/27/2006 | CN1839666A Electroluminescent device and its method |
| 09/27/2006 | CN1839464A Linking unit, exposure apparatus and method for manufacturing device |
| 09/27/2006 | CN1839463A Exposure apparatus and method for manufacturing device |
| 09/27/2006 | CN1839355A Stripping and cleaning compositions for microelectronics |
| 09/27/2006 | CN1839354A Apparatus and method for treating imaging material |
| 09/27/2006 | CN1839353A Apparatus and method for providing a confined liquid for immersion lithography |
| 09/27/2006 | CN1839352A Precursor paste and method of producing the same |
| 09/27/2006 | CN1839351A Phototool coating |
| 09/27/2006 | CN1839348A High resolution, dynamic positioning mechanism for specimen inspection and processing |
| 09/27/2006 | CN1839141A Perfluoropolyether amide-linked phosphonates, phosphates, and derivatives thereof |
| 09/27/2006 | CN1839023A Capillary imprinting technique |
| 09/27/2006 | CN1837965A Method for drawing sub-micron ultraviolet luminous pattern on zinc oxide film |
| 09/27/2006 | CN1837964A Composite vibration damping type photolithography device |
| 09/27/2006 | CN1837963A Method and apparatus for once forming of round grating by optical linear element |
| 09/27/2006 | CN1837962A Pattern exposure method and apparatus |
| 09/27/2006 | CN1837961A Exposure apparatus and exposing method and method of manufacturing a printed wiring board |
| 09/27/2006 | CN1837960A Lithographic apparatus and manufacturing method thereof |
| 09/27/2006 | CN1837959A Lithographic apparatus and method for determining z position errors/variations and substrate table flatness |
| 09/27/2006 | CN1837958A Planographic printing plate precursor and method of producing the same |
| 09/27/2006 | CN1837957A Photoresist compositions |
| 09/27/2006 | CN1837905A 柔性液晶显示器及其制造方法 Flexible liquid crystal display and manufacturing method |
| 09/27/2006 | CN1837879A Leveling and focusing mechanism |
| 09/27/2006 | CN1837862A Monitoring marking layout for microlens baking process |
| 09/27/2006 | CN1277299C Substrate calibrating apparatus, its processing device and delivery apparatus |
| 09/27/2006 | CN1277287C Method for shrinking critical dimension of semiconductor devices |
| 09/27/2006 | CN1277157C Method for forming fine resist pattern |
| 09/27/2006 | CN1277156C Photoresist removing composite |
| 09/27/2006 | CN1277155C Mask used for continuous lateral solidification and crystallization method using same |
| 09/27/2006 | CN1277154C Defective pixel compensation method |
| 09/27/2006 | CN1277153C Negative type colored photosensitive composition |
| 09/27/2006 | CN1277152C Original negative, exposure method and original negative making method |
| 09/27/2006 | CN1277132C Light sensitive resin composition for color filter |
| 09/27/2006 | CN1277130C Circular ring Dammar grating and method for manufacturing the same |
| 09/26/2006 | US7114145 System and method for lithography simulation |
| 09/26/2006 | US7114144 Mask pattern inspecting method, inspection apparatus, inspecting data used therein and inspecting data generating method |
| 09/26/2006 | US7113611 Disposable modular hearing aid |
| 09/26/2006 | US7113263 Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device |
| 09/26/2006 | US7113262 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 09/26/2006 | US7113261 Radiation system, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 09/26/2006 | US7113260 Projection exposure system for microlithography and method for generating microlithographic images |
| 09/26/2006 | US7113258 Lithographic apparatus |
| 09/26/2006 | US7113257 Assembly comprising a sensor for determining at least one of tilt and height of a substrate, a method therefor and a lithographic projection apparatus |
| 09/26/2006 | US7113256 Lithographic apparatus and device manufacturing method with feed-forward focus control |
| 09/26/2006 | US7113255 Grating patch arrangement, lithographic apparatus, method of testing, device manufacturing method, and device manufactured thereby |
| 09/26/2006 | US7113254 Lithographic projection apparatus, gas purging method, device manufacturing method, and purge gas supply system |
| 09/26/2006 | US7113253 computer programs comprising software codes for use in lithography |
| 09/26/2006 | US7112813 Device inspection method and apparatus using an asymmetric marker |
| 09/26/2006 | US7112772 Catadioptric projection objective with adaptive mirror and projection exposure method |
| 09/26/2006 | US7112616 Two-photon absorbing polymerizable composition and polymerization process thereof |
| 09/26/2006 | US7112397 Phenolic resin endcapped with nitrobenzene functionalized siloxyl coupling agent, acid generator, infrared absorber and alkali soluble resin; latitude of development, printing durability; positives |
| 09/26/2006 | US7112396 Multicolor image forming material |
| 09/21/2006 | WO2006098939A1 Apparatus and method for making microreplicated article |
| 09/21/2006 | WO2006098935A1 Apparatus and method for producing two-sided patterned web in registration |
| 09/21/2006 | WO2006098676A1 Ultraviolet curing resin composition |
| 09/21/2006 | WO2006098472A1 Plate member, substrate holding device, exposure device and exposure method, and device manufacturing method |
| 09/21/2006 | WO2006098391A1 Exposure apparatus and exposure method |
| 09/21/2006 | WO2006098291A1 Photosensitive resin composition |
| 09/21/2006 | WO2006098100A1 Lithographic printing plate making method and image exposing system |
| 09/21/2006 | WO2006097135A1 Projection exposure method and projection exposure system therefor |
| 09/21/2006 | WO2006080534A3 Illumination optical apparatus and optical apparatus |
| 09/21/2006 | WO2006072824A3 Process for relief printing |
| 09/21/2006 | WO2006049666A3 Edge cure prevention composition and process for using the same |
| 09/21/2006 | WO2006026993A9 A flexible nano-imprint stamp |
| 09/21/2006 | WO2005072235A3 Structured materials and methods |
| 09/21/2006 | US20060211814 Auxiliary for forming fine pattern and process for producing the same |
| 09/21/2006 | US20060211797 Use in making liquid crystal displays (LCD); acrylic copolymer with N-substituted maleimide units, a photosensitizer comprising the reaction product of 1,2-naphthoquinone-2-diazide-5-sulfonyl chloride and a trisphenol compound, and a crosslinking agent comprising a cyclohexene oxide; heat resistance |
| 09/21/2006 | US20060211256 Porous underlayer film and underlayer film forming composition used for forming the same |
| 09/21/2006 | US20060211249 Pattern transfer method and exposure system |
| 09/21/2006 | US20060211153 Photolithographic techniques for producing angled lines |
| 09/21/2006 | US20060211129 Real-time component monitoring and replenishment system for multicomponent fluids |