Patents
Sitemap › G03 - Photography; Cinematography; Analogous techniques using waves other than optical waves; Electrography; Holography › G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; Materials therefor; Originals therefor; Apparatus specially adapted therefor › G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
04/2014
04/03/2014WO2014047750A1 Nano-imprinting device and method for high-brightness led patterning
04/03/2014WO2014016168A9 Mirror arrangement for an euv projection exposure apparatus, method for operating the same, and euv projection exposure apparatus
04/03/2014US20140093827 Resist pattern formation method and resist composition
04/03/2014US20140093826 Composition for forming liquid immersion upper layer film, resist pattern-forming method, polymer, and compound
04/03/2014US20140093825 Patterning process
04/03/2014US20140093824 Resist composition for euv or eb and method of forming resist pattern
04/03/2014US20140093823 Stabilized acid amplifiers
04/03/2014US20140093690 Method and apparatus for lithographic manufacture of multi-component polymeric fiber plates
04/03/2014US20140092374 Exposure apparatus, exposure method, and method of manufacturing device
04/03/2014US20140092373 Fabrication of high efficiency, high quality, large area diffractive waveplates and arrays
04/03/2014US20140092372 Multi-photon exposure system
04/03/2014US20140091267 Photosensitive resin composition for color filters and uses thereof
04/03/2014DE102013204441A1 Collector for converting advantage mission of radiation source in far-field, has far-field portions that are arranged separately from each other, so that far-field portions give non-contiguous, total far field
04/03/2014DE102013202757A1 Illumination system for projection exposure apparatus, has optical system comprising linear light conductance that is transverse to folding plane, and folding mirror arranged in vicinity of field or pupil plane
04/03/2014DE102012217769A1 Optisches System für eine mikrolithographische Projektionsbelichtungsanlage sowie mikrolithographisches Belichtungsverfahren Optical system for a microlithography projection exposure apparatus and microlithographic exposure method
04/02/2014CN203520013U Laser imaging processing device
04/02/2014CN203520012U Moving-iron magnetic suspension planar motor with vacuum hood
04/02/2014CN203520011U Exposure pressing and compacting device
04/02/2014CN203520010U Chuck for photoresist centrifugal coating machine
04/02/2014CN203520009U Parallelism degree operation mechanism of working platform
04/02/2014CN103703418A Mask, and optical filter manufacturing apparatus comprising same
04/02/2014CN103703417A Photosensitive composition, master plate for planographic printing plate, polyurethane, and method for producing polyurethane
04/02/2014CN103703416A Laser-engraveable compositions and flexographic printing precursors
04/02/2014CN103702933A Method for forming silicon oxynitride film, and substrate having silicon oxynitride film produced using this formation method
04/02/2014CN103700649A Photoetching mark applying epitaxial technology and method thereof
04/02/2014CN103698986A Sharp nozzle slit type technical nozzle of outflow structure
04/02/2014CN103698985A Prediction method of exposure energy parameter in photoetching pilot run
04/02/2014CN103698984A Ultrahigh-precision scanning, film-coating, positioning and photo-etching device
04/02/2014CN103698983A Holographic grating exposed interference fringe phase shifting and locking device
04/02/2014CN103698982A Colour film black matrix exposure machine and adjustment method for same
04/02/2014CN103698981A PCB (Printed Circuit Board) exposure energy test jig as well as preparation method and application thereof
04/02/2014CN103698980A Drawing apparatus and drawing method
04/02/2014CN103698979A Water-washable flexible resin plate and making method thereof
04/02/2014CN103698978A Ultraviolet light curing adhesive for printing and dyeing
04/02/2014CN103698977A Photosensitive resin composition, protective film and element with the protective film
04/02/2014CN103698976A Preparation of novel laser digital holographic high-density storage and display material
04/02/2014CN103698975A Nanometre imprinting device and imprinting method thereof
04/02/2014CN103698974A Titania-doped quartz glass for nanoimprint molds
04/02/2014CN103698885A High-image-quality projection optical system of ultraviolet band
04/02/2014CN103698856A Silicon-based optical fiber fixture and manufacturing method
04/02/2014CN103698855A Self-aligning silicon-based optical fiber clamp and manufacturing method thereof
04/02/2014CN103694404A Phenolic polymer and photoresist comprising same
04/02/2014CN103692800A Positive image anhydrous offset plate with single-layer silicon-containing vinyl ether structure and preparation method thereof
04/02/2014CN103692764A A printing form precursor having indicia and a method for preparing a printing form from the precursor
04/02/2014CN103062301B Magnetic suspension vibration isolator of double-layer air-flotation orthogonal decoupling and air-flotation ball bearing angle decoupling
04/02/2014CN102654731B Color photoresist, color filter and display device containing same
04/02/2014CN102608867B Photosensitive water developing corrosion-resistant composition and photosensitive water developing corrosion-resistant dry film
04/02/2014CN102604454B Nano stamping photoresist surface modifier
04/02/2014CN102466966B Method for improving electron beam exposure efficiency
04/02/2014CN102375334B Method of manufacturing microlens array, method of manufacturing solid-state image sensor, and solid-state image sensor
04/02/2014CN102352150B Liquid photosensitive solder resist white oil and manufacturing method thereof
04/02/2014CN102253464B Projection objective and projection exposure machine
04/02/2014CN102246095B Positive photosensitive organic-inorganic hybrid insulator composition
04/02/2014CN102150085B Substrate treating solution and method employing the same for treating a resist substrate
04/02/2014CN102124414B Photoresist remover composition and method for removing photoresist
04/02/2014CN102043335B Photosensitive resin composition, cured film, method for producing cured film, organic el display device and liquid crystal display device
04/02/2014CN101833193B Semi-transparent type crystal liquid display, transparent substrate and manufacturing method thereof
04/02/2014CN101681102B Color composition, method for producing color filter, and color filter
04/01/2014US8687168 Lithographic apparatus and device manufacturing method
04/01/2014US8686098 Fluorine-containing compound, fluorine-containing polymer compound, resist composition, top coat composition and pattern formation method
04/01/2014US8685910 Cleaning liquid used in photolithography and a method for treating substrate therewith
04/01/2014US8685865 Method of forming patterns of semiconductor device
04/01/2014US8685632 Radiation source, lithographic apparatus and device manufacturing method
04/01/2014US8685631 Inspection method for patterning of photoresist
04/01/2014US8685630 Methods of forming a pattern in a material and methods of forming openings in a material to be patterned
04/01/2014US8685629 Resist pattern forming process
04/01/2014US8685626 Method of measuring a characteristic
04/01/2014US8685625 Photoresist processing methods
04/01/2014US8685624 Photopolymerizable flexographic printing elements for printing with UV inks
04/01/2014US8685623 Lithographic imaging and printing without defects of electrostatic origin
04/01/2014US8685622 Method for preparing a lithographic printing plate
04/01/2014US8685620 Resist composition, method of forming resist pattern and polymeric compound
04/01/2014US8685619 Resist composition and method for producing resist pattern
04/01/2014US8685618 Resist composition and method for producing resist pattern
04/01/2014US8685617 Salt, photoresist composition and process for producing photoresist pattern
04/01/2014US8685616 Photoacid generators and lithographic resists comprising the same
04/01/2014US8685615 Photosensitive resist underlayer film forming composition
04/01/2014US8685614 Positive photosensitive composition
04/01/2014US8685595 Prepolymer-based polyurethane formulations for the production of holographic films
04/01/2014US8685306 Molding apparatus and molding method
04/01/2014CA2740694C Imaging particulate composition, paper and process, and imaging of paper using dual wavelength light
03/2014
03/27/2014WO2014047415A1 Apparatus and method for irradiating
03/27/2014WO2014046241A1 Substrate treatment system
03/27/2014WO2014046210A1 Partial hydrolysis-condensation product and ink repellent agent using same
03/27/2014WO2014046209A1 Ink-repellent composition, negative photosensitive resin composition, hardened film, partition wall, and optical element
03/27/2014WO2014046097A1 Photoresist composition, method for forming resist pattern, and acid generator
03/27/2014WO2014046062A1 Photosensitive resin composition
03/27/2014WO2014046055A1 Silicon-containing resist underlayer film-forming composition which contains cyclic organic group having heteroatom
03/27/2014WO2014045885A1 Dust removal device and dust removal method for exposure device
03/27/2014WO2014045789A1 Lithographic printing plate support and lithographic printing plate original plate
03/27/2014WO2014045783A1 Original planographic printing plate, and plate making method
03/27/2014WO2014045434A1 Positive photosensitive resin composition
03/27/2014WO2014044670A1 Lithographic method and apparatus
03/27/2014WO2014044496A2 Method of calibrating a reluctance actuator assembly, reluctance actuator and lithographic apparatus comprising such reluctance actuator
03/27/2014WO2014044477A1 Stage system and lithographic apparatus comprising such stage system
03/27/2014WO2014044295A1 Method and device for embossing
03/27/2014WO2014044120A1 Polymer material and bonding method
03/27/2014WO2013173468A3 Method and device for using substrate geometry to determine substrate analysis sampling
03/27/2014US20140087619 Photosensitive resin composition, photosensitive element using same, method for forming partition wall of image display device, and method for manufacturing image display device
03/27/2014US20140087313 Stripping solution for photolithography and pattern formation method
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