| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 04/22/2014 | US8703407 Pattern formation method |
| 04/22/2014 | US8703406 Method of forming large-area masters for replication of transfer lithography templates |
| 04/22/2014 | US8703405 Methods of generating three-dimensional process window qualification |
| 04/22/2014 | US8703404 Patterning process |
| 04/22/2014 | US8703403 Method and apparatus for drying a wafer |
| 04/22/2014 | US8703402 Resist pattern forming method and developer |
| 04/22/2014 | US8703401 Method for forming pattern and developer |
| 04/22/2014 | US8703400 Substrate treatment method, coating treatment apparatus, and substrate treatment system |
| 04/22/2014 | US8703399 Method of manufacturing display apparatus |
| 04/22/2014 | US8703397 Method for providing side shields for a magnetic recording transducer |
| 04/22/2014 | US8703396 Methods of forming patterns |
| 04/22/2014 | US8703395 Pattern-forming method |
| 04/22/2014 | US8703394 Method for forming thin film pattern and flat display device having the same |
| 04/22/2014 | US8703393 Method for fabricating a circuit |
| 04/22/2014 | US8703392 Method and apparatus for developing process |
| 04/22/2014 | US8703391 Polymeric matrix materials for infrared metamaterials |
| 04/22/2014 | US8703390 Method of making a flexographic printing sleeve forme |
| 04/22/2014 | US8703389 Method and system for forming patterns with charged particle beam lithography |
| 04/22/2014 | US8703387 Resist composition, method of forming resist pattern, novel compound, and acid generator |
| 04/22/2014 | US8703386 Metal peroxo compounds with organic co-ligands for electron beam, deep UV and extreme UV photoresist applications |
| 04/22/2014 | US8703385 Photoresist composition |
| 04/22/2014 | US8703384 Positive resist composition and patterning process |
| 04/22/2014 | US8703383 Photosensitive copolymer and photoresist composition |
| 04/22/2014 | US8703382 Photosensitive resin composition for flexographic printing having excellent solvent resistance |
| 04/22/2014 | US8703381 Lithographic printing plate precursors for on-press development |
| 04/22/2014 | US8703369 Method of determining focus and dose of an apparatus of optical micro-lithography |
| 04/22/2014 | US8703367 Positive photosensitive resin composition |
| 04/22/2014 | US8703366 Compound, polymerizable composition, color filter, and method of producing the same, solid-state imaging device, and planographic printing plate precursor |
| 04/22/2014 | US8703363 Reflection hologram storage method |
| 04/22/2014 | US8702901 Method for manufacturing reflective mask and apparatus for manufacturing reflective mask |
| 04/17/2014 | WO2014058061A1 Light-degradable material, substrate and method for patterning same |
| 04/17/2014 | WO2014058018A1 Coating liquid for forming inorganic oxide coating film, inorganic oxide coating film, and display device |
| 04/17/2014 | WO2014057926A1 Exposure device, exposure method, device production method, program, and recording medium |
| 04/17/2014 | WO2014057386A1 Positioning device, control device and control method |
| 04/17/2014 | WO2014057246A1 Registration system for phototools |
| 04/17/2014 | WO2014056513A1 Illumination system of a microlithographic projection exposure apparatus |
| 04/17/2014 | WO2014056512A1 Method of operating a microlithographic apparatus |
| 04/17/2014 | WO2014012660A3 Method for operating a microlithographic projection exposure apparatus |
| 04/17/2014 | WO2013166348A3 Surface modification of pigments and compositions comprising the same |
| 04/17/2014 | WO2013100203A3 Apparatus for loading a flexible substrate and a lithography apparatus |
| 04/17/2014 | US20140106281 Substrate processing method |
| 04/17/2014 | US20140106280 Lithography methods, methods for forming patterning tools and patterning tools |
| 04/17/2014 | US20140106278 Dry film resist sheet and method of manufacturing the same |
| 04/17/2014 | US20140106267 Method of forming an image having multiple phases |
| 04/17/2014 | US20140106264 Photolithography mask, photolithography mask arrangement, and method for exposing a wafer |
| 04/17/2014 | US20140106263 Euv mask set and methods of manufacturing euv masks and integrated circuits |
| 04/17/2014 | US20140106134 Methods of fabricating transparent and nanomaterial-based conductive film |
| 04/17/2014 | US20140104672 Electrowetting display device |
| 04/17/2014 | US20140104614 Active Spectral Control During Spectrum Synthesis |
| 04/17/2014 | US20140104590 Exposure apparatus and method of manufacturing device |
| 04/17/2014 | US20140104589 Facet mirror device |
| 04/17/2014 | US20140104588 Projection objective for microlithography |
| 04/17/2014 | US20140104587 Projection arrangement |
| 04/17/2014 | US20140104586 Substrate processing method |
| 04/17/2014 | US20140103270 Radiation-sensitive composition, method for forming pattern, color filter and method of producing the same, and solid-state image sensor |
| 04/17/2014 | US20140103251 Compositions for use in semiconductor devices |
| 04/17/2014 | US20140103010 Plasma mediated ashing processes that include formation of a protective layer before and/or during the plasma mediated ashing process |
| 04/17/2014 | US20140102355 Producing polarization-modulating optical element for microlithography system |
| 04/17/2014 | DE102013204419A1 Three-dimensional optical single mirror facet for projection exposure system of EUV lighting system, has optical active area attached at support structure, where facet is attached at support structure by attachment element and support part |
| 04/16/2014 | EP2720285A1 Method of fabricating patterned substrate |
| 04/16/2014 | EP2720253A1 Illumination optical assembly, exposure device, and device manufacture method |
| 04/16/2014 | EP2720086A1 Methods of fabricating transparent and nanomaterial-based conductive film |
| 04/16/2014 | EP2720085A1 Photocurable composition and encapsulated apparatus including barrier layer formed of the same |
| 04/16/2014 | EP2718767A1 Composition of solutions and conditions for use enabling the stripping and complete dissolution of photoresists |
| 04/16/2014 | EP2718766A1 Photoresists containing polymer-tethered nanoparticles |
| 04/16/2014 | EP2718753A1 Color filter, ccd sensor, cmos sensor, organic cmos sensor, and solid-state image sensor |
| 04/16/2014 | CN203553154U Measurement mark |
| 04/16/2014 | CN203551947U Wafer roasting device and automatic developing machine with same |
| 04/16/2014 | CN203551946U Big-table-board LED exposure machine |
| 04/16/2014 | CN203551945U Collimating mirror adjusting mechanism of exposure machine |
| 04/16/2014 | CN203551944U Automatic door mechanism of exposure machine |
| 04/16/2014 | CN103733138A Method for correcting alignment of substrate to be exposed, and exposure device |
| 04/16/2014 | CN103733137A Resist stripping agent |
| 04/16/2014 | CN103733136A Underlayer film-forming material for lithography, underlayer film for lithography, and pattern formation method |
| 04/16/2014 | CN103733135A Resist composition, resist pattern formation method, polyphenol compound used therein, and alcohol compound capable of being derived therefrom |
| 04/16/2014 | CN103733134A Developable bottom antireflective coating compositions for negative resists |
| 04/16/2014 | CN103732573A Method for producing tetraalkylammonium salt solution |
| 04/16/2014 | CN103732410A Single-motor-driven gravure cylinder chuck mechanism |
| 04/16/2014 | CN103732001A Solder resist layer and printed wiring board |
| 04/16/2014 | CN103730339A Methods for manufacturing micro/nano scale pattern stamping die |
| 04/16/2014 | CN103728848A Position detection apparatus, exposure apparatus, and exposure method |
| 04/16/2014 | CN103728847A Anti-corrosion agent stripping liquid mixing method and device |
| 04/16/2014 | CN103728846A Photoresist removing liquid recycling system |
| 04/16/2014 | CN103728845A Developer composition for flat panel display |
| 04/16/2014 | CN103728844A Rotary screen developer |
| 04/16/2014 | CN103728843A Electronic shutter for ultraviolet LED (Light Emitting Diode) exposure machine |
| 04/16/2014 | CN103728842A Adjusting and supporting mechanism of illuminating lens unit of photoetching machine illuminating system |
| 04/16/2014 | CN103728841A Light converging pattern formation member, exposure method, and device manufacturing method |
| 04/16/2014 | CN103728840A Coating compositions for photolithography |
| 04/16/2014 | CN103728839A Photosensitive resin composition for color filter and color filter using the same |
| 04/16/2014 | CN103728838A Preparation device and preparation method of photoresist |
| 04/16/2014 | CN103728837A Photosensitive resin combination and method of preparing quantum dot pattern from photosensitive resin combination |
| 04/16/2014 | CN103728836A Acid generator compounds and photoresists comprising same |
| 04/16/2014 | CN103728835A Photoacid generator and resist composition comprising same |
| 04/16/2014 | CN103728834A Photoacid generator and resist composition comprising same |
| 04/16/2014 | CN103728833A Photosensitive resin composition, protective film and element containing the protective film |
| 04/16/2014 | CN103721427A Resist stripper regeneration methods and devices |
| 04/16/2014 | CN103210349B Positive-type photoresist composition |
| 04/16/2014 | CN102998740B Device and method for simultaneously inscribing multi-wavelength array gratings in ribbon fiber |
| 04/16/2014 | CN102778813B Photosensitive resin composition |