Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
02/2007
02/13/2007US7177008 Exposure apparatus and method
02/13/2007US7177007 Temperature adjustment apparatus, exposure apparatus having the temperature adjustment apparatus, and semiconductor device manufacturing method
02/13/2007US7177006 Exposure apparatus and method
02/13/2007US7176545 Apparatus and methods for maskless pattern generation
02/13/2007US7176484 Use of an energy source to convert precursors into patterned semiconductors
02/13/2007US7176471 Electron beam exposure method and electron beam exposure apparatus
02/13/2007US7176415 Heating method for a band-shaped body and heating apparatus for a band-shaped body
02/13/2007US7176407 Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site
02/13/2007US7176297 Photoactivatable silane compounds and methods for their synthesis and use
02/13/2007US7176114 Method of depositing patterned films of materials using a positive imaging process
02/13/2007US7176066 Fabrication of nanoelectronic circuits
02/13/2007US7175974 applying mixtures of curing agents, light absorbers, acid generators, solvents and polydimethylsiloxane on the surfaces of a layer to be etched, then baking to form films, applying photosensitive materials, exposing to a light source and developing to form patterns
02/13/2007US7175972 Method for fabricating a thin film magnetic head
02/13/2007US7175971 Exposure processing method of a planographic printing plate and apparatus for executing the same method
02/13/2007US7175969 enclosing lithographic printing plates in water impervious sheets, to improves storage stability in humid environments
02/13/2007US7175968 Lithographic apparatus, device manufacturing method and a substrate
02/13/2007US7175967 Heat treatment of multilayer imageable elements
02/13/2007US7175966 Water and aqueous base soluble antireflective coating/hardmask materials
02/13/2007US7175965 comprising hydrophilic supports having image forming layers containing thermoplastic resin microstructure particles and light to heat conversion materials
02/13/2007US7175964 Printing plate material and its developing process
02/13/2007US7175963 Chemical amplification type positive resist composition and a resin therefor
02/13/2007US7175962 Incompletely oxidized transition metal having oxygen content lower than stoichiometric oxygen content; selectively exposed and developed to pattern; resolution
02/13/2007US7175961 Bistable molecules that undergo redox reactions, such as rotaxanes and catenanes, or that undergo an electric field induced band gap change that causes the molecules to change from a fully conjugated to a less conjugated state
02/13/2007US7175960 Positive resist composition and patterning process
02/13/2007US7175952 Method of generating mask distortion data, exposure method and method of producing semiconductor device
02/13/2007US7175950 comprising: a particle comprising a chromophore, which is photobleachable upon exposure to a specific energy by being altered by the specific energy when the particle is within a tissue; anda carrier
02/13/2007US7175949 highly sensitive radiation-sensitive compositions and imageable elements that can be imaged at a wavelength of from about 150 to about 1500 nm
02/13/2007US7175946 Modified pigment products and black matrixes comprising same
02/13/2007US7175945 Phase shifting zones for separation of light source used to determine the quality of photolithographic prints
02/13/2007US7175943 Multilayer photomasking; circuit patterns; connecting opacity zones; adjustment of pattern using photomasking
02/13/2007US7175940 Generating photolithography masks; calibration patterns
02/08/2007WO2007015423A1 Photosensitive resin composition, composition for solder resist, and photosensitive dry film
02/08/2007WO2007015393A1 Method for manufacturing color filter, color filter and liquid crystal display
02/08/2007WO2007015375A1 Photosensitive resin composition and cured article thereof
02/08/2007WO2007015352A1 Resist composition and method of forming resist pattern
02/08/2007WO2007015306A1 Charged particle beam plotting device and method
02/08/2007WO2005057669A3 Irradiation apparatus
02/08/2007WO2005031801A3 Apparatus for multiple beam deflection and intensity stabilization
02/08/2007US20070032628 Crosslinked compositions comprising a poly(arylene ether) and a nonlinear optical chromophore, and devices incorporating same
02/08/2007US20070032564 Photopolymerizable composition.
02/08/2007US20070032086 Mehtod of manufacturing an electronic device
02/08/2007US20070031877 Support for analyte determination methods and method for producing the support
02/08/2007US20070031764 Exposure process
02/08/2007US20070031763 Method of fabricating semiconductor device
02/08/2007US20070031762 Methods of patterning substrates; and templates comprising one or both of CdS and CdSe
02/08/2007US20070031761 Polymers, methods of use thereof, and methods of decomposition thereof
02/08/2007US20070031760 Immersion lithography watermark reduction
02/08/2007US20070031756 Photosensitive resin composition, method of forming level difference pattern using the photosensitive resin composition, and method of producing ink jet head
02/08/2007US20070031755 Material for forming resist-protecting film for immersion exposure process, resist-protecting film made of such material, and method for forming resist pattern using such resist-protec- ting film
02/08/2007US20070031742 Color filter structure and display device using the color filter, and manufacturing method thereof
02/08/2007US20070031736 Method and apparatus for compensating for the effects of gravity on pellicle used for protecting a reticle from contamination
02/08/2007US20070030471 Lithographic apparatus and device manufacturing method using dose control
02/08/2007US20070030468 Optical element and projection exposure apparatus based on use of the optical element
02/08/2007US20070030465 Exposure apparatus and a device manfacturing method using the same
02/08/2007US20070030463 Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system
02/08/2007US20070029686 Photoresists; photomasks
02/08/2007US20070029511 High repetition rate laser produced plasma EUV light source
02/08/2007DE10326324B4 Lithographiedruckplatten-Vorläufer mit 1,4-Dihydropyridin-Sensibilisator enthaltender Beschichtung, Verfahren zum Bebildern und Bebilderte Lithographiedruckplatte The lithographic printing plate precursor with 1,4-dihydropyridine-sensitizer containing coating, and method of imaging lithographic printing plate Illustrated
02/08/2007DE102006031101A1 Adapting method for number of stepping motor cycles per revolution involves performing recording of original printing by setting corrected number of stepping motor cycles per revolution in accordance with predetermined relationship
02/08/2007DE102005036911A1 Honey comb condenser for homogeneously illuminating target surface, has lens arrays comprising monolith, and lattice screen removing false light portions leaving from one array and embedded in recesses of arrays
02/08/2007DE102005036892A1 Photolithographic illustration and transmission of complete mask layout simulation method for use in semiconductor manufacture involves joining overlapping areas by interpolation such that image of entire chip is produced
02/08/2007DE102005034669A1 Mask for lithographic projection on substrate, has arrangement with auxiliary structures and having space for structural components, where space is larger than another space having adjacent auxiliary structures
02/08/2007DE102005002550B4 Lift-Off-Verfahren Lift-off method
02/07/2007EP1750176A2 Positive-type radiation-sensitive resin composition for producing a metal-plating formed material, transcription film and production method of a metal-plating formed material
02/07/2007EP1750175A1 Positive photosensitive composition
02/07/2007EP1750172A1 Wavelength converting optical system, laser light source, exposure apparatus, mask examining apparatus, and macromolecular crystal lens machining device
02/07/2007EP1749247A1 A measurement configuration based on linear scales able to measure to a target also moving perpendicular to the measurement axis
02/07/2007EP1749242A1 Optical module for a lens
02/07/2007EP1749241A1 Apparatus for providing a pattern of polarization
02/07/2007EP1749240A1 Photopolymer printing plate precursor.
02/07/2007EP1749239A2 Method for pre-exposing relief image printing plate
02/07/2007EP1749230A2 Catadioptric imaging system employing immersion liquid for use in broad band microscopy
02/07/2007EP1749087A2 Non-fluoride containing supercritical fluid composition for removal of ion-implant photoresist
02/07/2007EP1299238B1 Radiation sensitive product, method for preparing a radiation sensitive product and printing or imaging process using the product
02/07/2007CN2867397Y Platemaking machine with automatic partition pumped vacuum and counterweight device
02/07/2007CN2867396Y Computer direct platemaking machine with semi-automatic plate loading and unloading device for printing industry
02/07/2007CN1910522A Polarization-modulating optical element
02/07/2007CN1910521A Positive photosensitive composition
02/07/2007CN1910520A Processless digitally imaged photopolymer elements using microspheres
02/07/2007CN1910519A 感光性树脂组合物及其固化产物 The photosensitive resin composition and a cured product of
02/07/2007CN1910518A Photosensitive inorganic paste composition, sheet-shaped unbaked body, and method of producing plasma display front plate
02/07/2007CN1910517A Adaptive real time control of a reticle/mask system
02/07/2007CN1910516A Computer-implemented methods for detecting defects in reticle design data
02/07/2007CN1910494A Catadioptric projection objective
02/07/2007CN1910308A Advanced multi-pressure workpiece processing
02/07/2007CN1910221A 树脂和树脂组合物 Resin and the resin composition
02/07/2007CN1908819A Developing treatment apparatus and developing treatment method
02/07/2007CN1908818A Lens position control method, lens position control apparatus, cutting method, and cutting apparatus
02/07/2007CN1908817A Device for regulating temperature of laser module in a printing plate exposure unit
02/07/2007CN1908816A Positive-type radiation-sensitive resin composition for producing a metal-plating formed material, transcription film and production method of a metal-plating formed material
02/07/2007CN1908815A Photo curable composition and optical spacer block for use in liquid crystal display device and photo-curable colouration composition
02/07/2007CN1908812A A method, program product and apparatus for performing double exposure lithography
02/07/2007CN1908702A Euvl reflection device, method of fabricating the same
02/07/2007CN1907736A Method for making multi-channel stealth pattern on metallic material surface
02/07/2007CN1907725A Novel technique of producing laser paper
02/07/2007CN1299334C Substrate treating method and treater
02/07/2007CN1299332C Fluid pressure imprint lithography
02/07/2007CN1299328C Method for reducing and ensuring pattern gaps
02/07/2007CN1299170C Scanning exposuring device
02/07/2007CN1299169C Manufacturing method of photoetching apparatus and device