Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
07/2007
07/04/2007EP1803964A2 Hybrid stiffness modul for vibration isolation
07/04/2007EP1803963A1 Hybrid stiffness modul for vibration isolation
07/04/2007EP1803804A2 Method and material for cleaning a substrate
07/04/2007EP1803803A2 Cleaning compounds and method and system for using the cleaning compound
07/04/2007EP1803708A1 Adamantane derivative, process for producing the same, and photosensitive material for photoresist
07/04/2007EP1803504A2 Method for removing contamination from a substrate and for making a cleaning solution
07/04/2007EP1803036A2 Projection exposure apparatus for microlithography
07/04/2007EP1803035A1 Rigidification of structures to be deployed by inflating, particularly for use in space
07/04/2007EP1803034A2 Holographic storage medium
07/04/2007EP1803033A2 Lithography technique using silicone molds
07/04/2007EP1803029A2 Method and apparatus having a reticle stage safety feature
07/04/2007EP1803012A1 Optical projection system
07/04/2007EP1802702A2 Polymeric conductor donor and transfer method
07/04/2007EP1802700A2 Low-viscosity, radiation-curable formulation for producing adaptive ear pieces
07/04/2007EP1802694A1 Aqueous developable benzocyclobutene-based polymer composition and method of use of such compositions
07/04/2007EP1802693A1 Benzocyclobutene based polymer formulations and methods for processing such formulations in oxidative environments
07/04/2007EP1802448A2 Apparatus for the rapid development of photosensitive printing elements
07/04/2007EP1697800B1 Method for joining at least two members
07/04/2007EP1310022A4 Laser wavelength control unit with piezoelectric driver
07/04/2007CN2919303Y Baseplate supporting structure of photo exposing machine
07/04/2007CN2919302Y Device for piling up dry film resist when manufacturing plasma display panel
07/04/2007CN1993811A Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition
07/04/2007CN1993804A Stage apparatus and exposure apparatus
07/04/2007CN1993652A Method of calibrating alignment section, image-drawing device with calibrated alignment section, and conveying device
07/04/2007CN1993651A Developer for thermal positive type photosensitive composition
07/04/2007CN1993650A Positive photosensitive composition
07/04/2007CN1993457A Cleaning compositions for microelectronics substrates
07/04/2007CN1993394A High-molecular compound, acid generator, positive resist compositions, and method for formation of resist patterns
07/04/2007CN1993393A Fluorinated compound, fluoropolymer, corrosion inhibitor composition, and composition for corrosion inhibitor protective film
07/04/2007CN1992170A Method for forming a mask pattern for ion-implantation
07/04/2007CN1992161A Substrate processing method, substrate processing system and substrate processing apparatus
07/04/2007CN1992158A 基板处理装置 The substrate processing apparatus
07/04/2007CN1992156A Method for manufacturing semiconductor device
07/04/2007CN1992155A Method for manufacturing semiconductor device
07/04/2007CN1992126A Exposure platform for producing color display tube
07/04/2007CN1991594A Method and device for developing solution recovery treatment
07/04/2007CN1991593A Supporting mechanism and mask carrying stage using the same
07/04/2007CN1991592A 载物台装置 Stage means
07/04/2007CN1991591A Lithographic apparatus and device manufacturing method
07/04/2007CN1991590A Method for forming pattern and method for fabricating LCD device using the same
07/04/2007CN1991589A Apparatus for fabricating flat panel display device and method of fabricating the same
07/04/2007CN1991588A Method for fabricating printing plate with fine pattern using electric field
07/04/2007CN1991587A Laser processing device, exposure device and exposure method
07/04/2007CN1991586A An optical metrology system and metrology mark characterization method
07/04/2007CN1991585A Salt suitable for an acid generator and a chemically amplified corrosion resistant composition containing the same
07/04/2007CN1991584A Light solidification pigmentation composition and color filter, and liquid crystal display device
07/04/2007CN1991583A Polymerizable composition and planographic printing plate precursor using the same
07/04/2007CN1991582A Component of negative photosensitive gap control material and method for forming same
07/04/2007CN1991581A Hardmask composition coated under photoresist and process of producing integrated circuit devices using thereof
07/04/2007CN1991580A Chromatic photosensitivity composition and method for manufacturing same
07/04/2007CN1991579A Apparatus for fabricating flat panel display device and method for fabricating thereof
07/04/2007CN1991578A Printing device and printing method using the same
07/04/2007CN1991577A Phase shift mask and method for fabricating the same
07/04/2007CN1991576A Master mold, master mold fabrication method, and method for fabricating liquid crystal display device using the same
07/04/2007CN1991549A Array substrate for ips-mode LCD device and method of fabricating the same
07/04/2007CN1991548A Array substrate for ips-mode LCD device and method of fabricating the same
07/04/2007CN1991547A Array substrate for ips-mode LCD device and method of fabricating the same
07/04/2007CN1991545A 显示器件及其制造方法 A display device and manufacturing method thereof
07/04/2007CN1991544A Liquid crystal display device and method of manufacturing the same
07/04/2007CN1991543A Liquid crystal display device and its manufacturing method
07/04/2007CN1991497A Semi-penetrating and semi-reflecting LCD panel, colorful filter and method for manufacturing same
07/04/2007CN1991479A Liquid crystal display device and method for fabricating the same
07/04/2007CN1991477A Liquid crystal display device and method of fabricating the same
07/04/2007CN1991474A Chromatic cholesterol type LCD and method for manufacturing same
07/04/2007CN1991470A Array substrate for liquid crystal display device and method for manufacturing same
07/04/2007CN1991465A Method of fabricating array substrate for in-plane switching liquid crystal display device
07/04/2007CN1991456A Liquid crystal display and fabrication method thereof
07/04/2007CN1991451A Array substrate for liquid crystal display device and method of fabricating the same
07/04/2007CN1991449A Liquid crystal display device and method of fabricating the same
07/04/2007CN1990232A Developing method and printing machine for executing the developing method
07/04/2007CN1324652C Method for fabricating semiconductor device
07/04/2007CN1324651C Crystallite picture making process
07/04/2007CN1324512C Extraction method of dangerous patterns, program and mfg. method of semiconductor
07/04/2007CN1324407C Substrate treatment device and method
07/04/2007CN1324406C Etching device and manufacture of components
07/04/2007CN1324405C Lighographic apparatus, alignment method and device mfg method
07/04/2007CN1324404C Photosensitive printing original edition
07/04/2007CN1324403C Photosensitive lithographic printing plate
07/04/2007CN1324402C Photosensitive resin composition and photosensitive films and laminates made by using the same
07/04/2007CN1324401C Holotype photoresist combination and forming method of resist pattern
07/04/2007CN1324400C Phase shift mask, method for forming pattern using phase shift mask and manufacturing method for electronic device
07/04/2007CN1324389C Producing method for liquid-crystal displaying device
07/04/2007CN1324388C Manufacture of low temperature polycrystal silicon film electric crystal LCD device
07/04/2007CN1324362C Mould for forming optical panel and its production process and using
07/04/2007CN1324359C Planar displaying device and producing method thereof
07/04/2007CN1324351C Particle clearing device
07/04/2007CN1324342C Optical projection system, exposure device and method
07/04/2007CN1324037C Multimer forms of mono- and bis-acylphosphine oxides
07/04/2007CN1323912C Recording material feeding device
07/04/2007CN1323844C Bubble ink-jet printing head and producing method thereof
07/03/2007US7239934 System and method for delivering writing data of a semiconductor device and fabricating a semiconductor device
07/03/2007US7239453 Projection optical system and projection exposure apparatus
07/03/2007US7239447 Objective with crystal lenses
07/03/2007US7239446 Optical reduction system with control of illumination polarization
07/03/2007US7239443 Condenser optic with sacrificial reflective surface
07/03/2007US7239393 Calibration method for a lithographic apparatus and device manufacturing method
07/03/2007US7239375 Illumination apparatus, exposure apparatus and device manufacturing method
07/03/2007US7239370 Lithographic apparatus and device manufacturing method
07/03/2007US7239369 Lithographic apparatus and device manufacturing method
07/03/2007US7239161 Gantry-type XY stage