Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
07/2007
07/17/2007US7244335 Substrate processing system and substrate processing method
07/17/2007US7244334 Apparatus used in reshaping a surface of a photoresist
07/12/2007WO2007078445A1 Process for preparing stable photoresist compositions
07/12/2007WO2007077920A1 Exposure device and fabrication method thereof
07/12/2007WO2007077901A1 Exposure system, device manufacturing system, exposure method and device manufacturing method
07/12/2007WO2007077875A1 Exposure apparatus, exposure method, and device production method
07/12/2007WO2007076739A2 Coating installation for wafers
07/12/2007WO2007061189A3 Occupancy based pattern generation method for maskless lithography
07/12/2007WO2007053396A3 Silsesquioxane-titania hybrid polymers
07/12/2007WO2007015753A3 Systems and methods for retrieving residual liquid during immersion lens photolithography
07/12/2007WO2006103979A8 (meth)acryloyl group-containing aromatic isocyanate compound and production process thereof
07/12/2007WO2006063098A8 Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers
07/12/2007WO2005119801A3 Compliant device for nano-scale manufacturing
07/12/2007US20070162889 Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography
07/12/2007US20070161764 Novel thiol compound, copolymer and method for producing the copolymer
07/12/2007US20070161530 Photosensitive composition remover
07/12/2007US20070161243 Aqueous solution for removing post-etch residue
07/12/2007US20070161100 Photosensitive resin composition and cured product thereof
07/12/2007US20070160936 Adhesion method using gray-scale photolithography
07/12/2007US20070160935 Lithographic printing plate material for CTP
07/12/2007US20070160934 Actinic radiation absorbing compound uniformly distributed throughout support layer, with photopolymerizable material deposited thereon, and masking layer; relief imaging
07/12/2007US20070160933 Water-developable photopolymer plate for letterpress printing
07/12/2007US20070160932 Electron beam lithography apparatus
07/12/2007US20070160928 Photosensitive resin composition for printing substrate capable of laser sculpture
07/12/2007US20070160927 Radiation-sensitive resin composition, process for producing the same and process for producing semiconductor device therewith
07/12/2007US20070160918 irradiating illumination light onto a mask to transfer (offset) mask patterns to a semiconductor substrate; narrow spacing; reduce the dimensional variation of the outmost pattern
07/12/2007US20070160912 Thermal transfer sheet, process for producing the same, and image formed object produced by transfer of said thermal transfer sheet
07/12/2007US20070160103 Gas discharge laser light source beam delivery unit
07/12/2007US20070159616 Lithographic apparatus, device manufacturing method, and device manufactured thereby
07/12/2007US20070159612 Liquid crystal display substrate fabrication
07/12/2007US20070159611 Source Multiplexing in Lithography
07/12/2007US20070159610 Exposure apparatus, device manufacturing method, maintenance method, and exposure method
07/12/2007US20070159609 Exposure apparatus and device manufacturing method
07/12/2007US20070159608 Exposure apparatus and device manufacturing method
07/12/2007US20070159584 Image forming method
07/12/2007US20070158798 Wafer with optical control modules in ic fields
07/12/2007US20070158597 EUV light source
07/12/2007US20070158596 EUV light source
07/12/2007US20070158401 Stage device
07/12/2007US20070158302 Systems and methods for gas assisted resist removal
07/12/2007DE10335816B4 Verfahren zur Justage eines Substrates vor der Durchführung eines Projektionsschrittes in einem Belichtungsgerät A process for the adjustment of a substrate prior to performing a step in a projection exposure apparatus
07/12/2007DE102006054335A1 Verfahren zur Bestimmung einer Belichtungsdosis und Belichtungsvorrichtung A method of determining an exposure dose and exposure device
07/12/2007DE102006002032A1 Fotoempfindliche Beschichtung zum Verstärken eines Kontrasts einer fotolithographischen Belichtung The photosensitive coating for enhancing a contrast of a photolithographic exposure
07/12/2007CA2635807A1 Bragg diffracting security markers
07/11/2007EP1806828A1 Linear motor, stage apparatus and exposure apparatus
07/11/2007EP1806773A1 Exposure device, exposure method, and device manufacturing method
07/11/2007EP1806772A1 Exposure apparatus and device manufacturing method
07/11/2007EP1806771A1 Exposure device and device manufacturing method
07/11/2007EP1806767A1 Substrate transfer apparatus, substrate transfer method and exposure apparatus
07/11/2007EP1806622A1 Developer for thermal positive type photosensitive composition
07/11/2007EP1806621A1 Coating compositions for photoresists
07/11/2007EP1806620A1 Matte agent for infrared-sensitive planographic printing plate and use thereof
07/11/2007EP1806619A1 Resist composition, method for forming resist pattern, and compound
07/11/2007EP1806618A1 Positive photosensitive insulating resin composition and cured product thereof
07/11/2007EP1806370A1 Copolymer and upper film-forming composition
07/11/2007EP1805561A2 Antireflective compositions for photoresists
07/11/2007EP1805560A2 Edge cure prevention composition and process for using the same
07/11/2007EP1805546A1 Imaging or insulation device, particularly for the creation of an electronic micro-circuit
07/11/2007EP1805544A1 A six degree of freedom (dof) actuator reaction mass
07/11/2007EP1805137A1 Thiol compound and photosensitive composition using the same
07/11/2007EP1805014A1 Solvent resistant imageable element
07/11/2007EP1804979A1 Roller micro-contact printer with pressure control
07/11/2007EP1616224B1 Micromachining process
07/11/2007EP1132773B1 Positive-type photosensitive polyimide precursor composition
07/11/2007EP1078288B1 Method for forming bragg gratings
07/11/2007CN1998036A Adhesive label, adhesive label roll, photosensitive web unit, and apparatus for and method of manufacturing photosensitive laminated body
07/11/2007CN1997944A Pattern forming method
07/11/2007CN1997943A Vacuum system for immersion photolithography
07/11/2007CN1997942A Laser interferometer mirror assembly
07/11/2007CN1997941A Device and method for determining an illumination intensity profile of an illuminator for a lithography system
07/11/2007CN1997940A Microstructuring method of mesogens using contact printing
07/11/2007CN1997939A Method of forming resist pattern, positive resist composition, and layered product
07/11/2007CN1997917A Building up diffractive optics by structured glass coating
07/11/2007CN1997869A Application of scatterometry alignment in imprint lithography
07/11/2007CN1997509A Process for producing a tridimensional object with improved separation of hardened material layers from a base plane
07/11/2007CN1997491A Method and system to control movement of a body for nano-scale manufacturing
07/11/2007CN1997453A Microfluidic chip
07/11/2007CN1996153A Heating device and heating method
07/11/2007CN1996152A Method for real-time monitoring concentration of effective developing solution
07/11/2007CN1996151A Circuit pattern exposure method and mask
07/11/2007CN1996150A Hemi-spherical structure and method for fabricating the same
07/11/2007CN1996149A Lithographic apparatus and device manufacturing method
07/11/2007CN1996148A Method for forming etched color pattern on stainless steel pipe surface
07/11/2007CN1996147A TFT array semi-exposure photoetching technology
07/11/2007CN1996146A Positive quadrupole illuminating exposure method and device therefor
07/11/2007CN1996145A Method for reducing water pollution of optical elements in immersion type photoengraving technology
07/11/2007CN1996144A Method for making hole-plugging ink composition for printed circuit board plating through hole and printed circuit board
07/11/2007CN1996143A Dry film using method
07/11/2007CN1996142A Device for the storage and use of at least one photomask for lithographic projection and method for using the device in an exposure installation
07/11/2007CN1996141A Impression die with zero film thickness and impression-photoetched pattern transferring method
07/11/2007CN1996110A Binding method for UV hardened mask plate and application tool therefor
07/11/2007CN1996061A Processing method for light guide plate
07/11/2007CN1996060A Processing method for light guide plate mesh point
07/11/2007CN1994754A Ceramic tile printing cylinder
07/11/2007CN1994486A 'I' structured three-dimensional micro solid/hollow silicon needle and silicon knife
07/11/2007CN1994178A Method for making laser holographic gold silver coin and product produced thereby
07/11/2007CN1326229C Load-lock technique
07/11/2007CN1326211C Method for forming sub-photoetched opening in semiconductor technology
07/11/2007CN1326204C Grating alignment procedure
07/11/2007CN1326203C Method and device for improving key size consistency between different patterns for semiconductor assembly