Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
03/2008
03/26/2008EP1902019A1 Sulphonium salt initiators
03/26/2008EP1805137B1 Thiol compound and photosensitive composition using the same
03/26/2008EP1730592A4 Permanent resist composition, cured product thereof, and use thereof
03/26/2008EP1690133A4 Fluorinated photoresists prepared, deposited, developed and removed in carbon dioxide
03/26/2008EP1609618B1 Lithographic printing plate original form and plate making method
03/26/2008EP1280664B1 Chemical imaging of a lithographic printing plate
03/26/2008CN101151580A Flame-retardant composition for solder resist and cured product thereof
03/26/2008CN101151579A Photosensitive resin composition and circuit substrate employing the same
03/26/2008CN101151559A Transfer material, and process for producing liquid crystal cell substrate and liquid crystal display device using the same
03/26/2008CN101151338A Colorant dispersion, coloring resin composition, color filter, and liquid-crystal display device
03/26/2008CN101150052A Method of patterning an anti-reflective coating by partial etching
03/26/2008CN101150048A Method for forming patterns using single mask
03/26/2008CN101149570A Process for reclaiming light shield
03/26/2008CN101149569A Lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing method
03/26/2008CN101149568A Detector and its detection method
03/26/2008CN101149567A Step scan projection stepper synchronous controller
03/26/2008CN101149566A Step scan projection stepper synchronous control system
03/26/2008CN101149565A Asymmetric transmission mark combination and its aligning method
03/26/2008CN101149564A Alignment mark and its imaging optical system and imaging method
03/26/2008CN101149563A Electron beam alignment mark manufacture method and its uses
03/26/2008CN101149562A Photosensitive composition, photosensitive film, permanent pattern forming method and printing circuit board
03/26/2008CN101149561A Main body film forming resin for photoresist and its preparation method and uses
03/26/2008CN101149560A Micro structure mold core and its manufacture method
03/26/2008CN101149559A Method for preparing ball-shaped bump biological microelectrode array
03/26/2008CN101149546A Liquid crystal display device with thin-film transistor on color film and its manufacture method
03/26/2008CN101149542A Liquid crystal display device with color film on thin-film transistor and its manufacture method
03/26/2008CN101149541A Liquid crystal display device with color film on thin-film transistor and its manufacture method
03/26/2008CN101149536A Liquid crystal display panel and method of making the same
03/26/2008CN101149513A Block layer structure for a display panel and method for producing same
03/26/2008CN101149505A Liquid crystal display device and manufacturing method thereof
03/26/2008CN100377305C Method for producing semiconductor integrated circuit
03/26/2008CN100377304C Method for improving the critical dimension uniformity of patterned features on wafers
03/26/2008CN100377303C Reflection mirror apparatus, exposure apparatus and device manufacturing method
03/26/2008CN100377298C Substrate processing apparatus and substrate processing method
03/26/2008CN100377004C Image forming material and ammonium compound
03/26/2008CN100376992C Manufacturing method for common electrode of liquid crystal display device
03/26/2008CN100376953C Method for manufacturing light guiding plate core
03/26/2008CN100376917C Programmable optical component for spatially controlling the intensity of beam of radiation
03/26/2008CN100376905C Radiation-ray sensitive composition for colour-filtering piece, colour filtering piece and colour liquid crystal display device
03/25/2008US7350181 Set of masks, method of generating mask data and method for forming a pattern
03/25/2008US7349101 Lithographic apparatus, overlay detector, device manufacturing method, and device manufactured thereby
03/25/2008US7349090 Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography
03/25/2008US7349072 Lithographic apparatus and device manufacturing method
03/25/2008US7349070 Multiple level photolithography
03/25/2008US7349067 Lithographic apparatus and device manufacturing method
03/25/2008US7349065 Exposure apparatus and device fabrication method
03/25/2008US7349064 Immersion exposure technique
03/25/2008US7349063 Reflection mirror apparatus, exposure apparatus and device manufacturing method
03/25/2008US7349050 Ultraviolet irradiating device and method of manufacturing liquid crystal display device using the same
03/25/2008US7348695 Linear motor, moving stage system, exposure apparatus, and device manufacturing method
03/25/2008US7348582 Light source apparatus and exposure apparatus having the same
03/25/2008US7348565 Illumination system particularly for microlithography
03/25/2008US7348300 polyether surfactants used to reduce surface tension of aqueous or nonaqueous process solutions
03/25/2008US7348133 Method of manufacturing solid-state image sensing device
03/25/2008US7348132 Exposing oleophilic photosensitive layer comprising polymeric binder, urethane (meth)acrylate monomer, nonurethane (meth)acrylate monomer, free radical initiator, and sensitizing dye, and water soluble or dispersible overcoat; hardening; removing non-exposed areas with aqueous developer or ink
03/25/2008US7348131 Photosensitive polymeric binder, free radical polymerizable (meth)acrylate monomer or oligomer, free radical initiator, sensitizing dye and water soluble overcoat are exposed and hardened; rinsing; removing overcoat; developing exposed and deactivated plate with both ink and fountain solution; durability
03/25/2008US7348130 Electron exposure to reduce line edge roughness
03/25/2008US7348128 Storage stability, affinity, miscibility; acetalized high cure-related sensitivity; flexibility, uniformity; photocurable hydrogel or pattern formation by use of an aqueous developer
03/25/2008US7348127 Topcoats for use in immersion lithography
03/25/2008US7348126 Negative working, heat-sensitive lithographic printing plate precursor
03/25/2008US7348123 Imagewise exposing to actinic radiation a photopolymerizable elastomeric layer on support having a thermoplastic binder; an addition polymerizable compound; and a photoinitiator; heat treating to remove unpolymerized material to form a relief image; rheology
03/25/2008US7348122 Photosensitive resin composition and method for manufacturing semiconductor device using the same
03/25/2008US7348111 Reduction of imaging artifacts in a platesetter having a diffractive modulator
03/25/2008US7348109 increases the number of semiconductor dice obtained from one semiconductor; dicing line is not formed through the Test Element Group die pattern
03/25/2008US7348108 Design and layout of phase shifting photolithographic masks
03/25/2008US7348107 Reticle, semiconductor exposure apparatus and method, and semiconductor device manufacturing method
03/25/2008US7348104 Performing multilevel alignment; forming resist areas of different thicknesses using varied exposure characteristics; producing large focusing element arrays
03/25/2008US7347894 Pigment dispersants and their use
03/25/2008US7347683 Mold and molding apparatus using the same
03/20/2008WO2008033407A1 Methods for purifying alkane liquids
03/20/2008WO2008032863A1 Immersion exposure apparatus and immersion exposure method, and device manufacturing method
03/20/2008WO2008032819A1 Mask blank and method for manufacturing transfer mask
03/20/2008WO2008032736A1 Dye-containing resist composition containing photoacid generator, and cyclohexadiene-type oxime sulfonate compound
03/20/2008WO2008032716A1 Resist material for lithography and method for formation of resist pattern
03/20/2008WO2008032714A1 Coating/developing apparatus, coating/developing apparatus control method and storage medium
03/20/2008WO2008032675A1 Black-colored photosensitive resin composition, method for formation of black matrix, method for production of color filter, and color filter
03/20/2008WO2008032674A1 Photosensitive resin composition, photosensitive element, method for forming resist pattern, and method for producing printed wiring board
03/20/2008WO2008032522A1 Positive-type resist composition and method for formation of resist pattern
03/20/2008WO2008032512A1 Positive-type resist composition and method for formation of resist pattern
03/20/2008WO2008032440A1 Image recording device
03/20/2008WO2008031576A1 Optical arrangement for immersion lithography with a hydrophobic coating and projection exposure apparatus comprising the same
03/20/2008WO2008031514A2 A collector optical system
03/20/2008WO2008013798A3 Alignment for contact lithography
03/20/2008WO2008012111B1 Multi-reflection optical systems and their fabrication
03/20/2008WO2008011970A3 Movable workpiece support for a machine, and machining system comprising a corresponding workpiece support
03/20/2008WO2007142988A3 Uv and visible laser systems
03/20/2008US20080070416 Phase shift mask including a substrate with recess
03/20/2008US20080070165 Patterning photoresist; transferring to a hardmask layer underlying the photoresist layer and a temporary amorphous or transparent carbon layer; forming spacers on sidewalls; reducing widths by isotropically etching before forming spacers; integrated circuits; photolithography; computers, flash memory
03/20/2008US20080070163 Processless lithographic printing plate precursor
03/20/2008US20080070160 Negative-working photosensitive resin composition and photosensitive resin plate using the same
03/20/2008US20080070156 Structure for pattern formation, method for pattern formation, and application thereof
03/20/2008US20080070155 Inclusion complex, photoresist composition having the inclusion complex and method of forming a pattern using the photoresist composition
03/20/2008US20080070125 laminates comprising sheet substrates provided with a resin layer and hologram formation layer provided between a radiation transparent sheet provided with receptive layers; image colorfastness and transfer accuracy
03/20/2008US20080070124 optical recording media comprising a mixture of polymers, photoinitiators and binder comprising a polymer capable of forming a three-dimensional crosslinked structure by non-polymerization reaction
03/20/2008US20080069606 Image forming method and image forming apparatus
03/20/2008US20080068724 Projection optical system and method for photolithography and exposure apparatus and method using same
03/20/2008US20080068695 Tracing Method And Apparatus
03/20/2008US20080068614 Methods and systems for interferometric analysis of surfaces and related applications
03/20/2008US20080068611 Method and system for measuring patterned structures
03/20/2008US20080068599 Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements