Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
05/2008
05/15/2008US20080110358 Non-Attenuating Light Collimating Articles for Graphic Arts
05/15/2008DE19753655B4 α-Aminoacetophenonverbindungen, Massen, die diese Verbindungen enthalten und deren Verwendung als Photostarter α-Aminoacetophenonverbindungen, compositions containing these compounds and their use as photoinitiators
05/15/2008DE19637923B9 Unter Verwendung von lichtempfindlichem Material zum Orientieren des Flüssigkristalls hergestellte Flüssigkristallanzeige Vorrichtung Using of photosensitive material for orienting the liquid crystal produced liquid crystal display device
05/15/2008DE102007026753A1 Holder for e.g. projection objective, supports optical element over multiple support surfaces, where outer rings are fixed in holder and are partially made of ceramic material having high elasticity modulus of preset value
05/15/2008DE102006053074A1 Semiconductor wafer structuring method for semiconductor process technology, involves performing texture illumination and exposure of photo-resist layer in section with ultra violet light with spectrum below threshold frequency
05/15/2008CA2668612A1 Waterless planographic printing plate precursor
05/14/2008EP1921721A1 Injection-locked laser, interferometer, exposure apparatus, and device manufacturing method
05/14/2008EP1921505A1 Lithography apparatus and device manufacturing method
05/14/2008EP1921504A2 Liquid-immersion exposure method and liquid-immersion exposure apparatus
05/14/2008EP1921503A2 Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit system
05/14/2008EP1921502A1 Combined motion control system
05/14/2008EP1921501A2 Planographic printing plate precursor and stack thereof
05/14/2008EP1921500A1 UV-sensitive elements with triarylamine derivatives as sensitizers
05/14/2008EP1920942A1 Original plate for lithography, and resin composition for photosensitive layer in original plate for lithography
05/14/2008EP1920295A2 Methods of using a nanotransfer printing stamp having conductively coated sidewalls
05/14/2008EP1766477B1 Method and apparatus for the drying of the printing plates for flexography
05/14/2008EP1629046B1 Curable polymer compound
05/14/2008EP1424210B1 Photosensitive resin composition and laser engravable printing element
05/14/2008EP1207959B1 Individually addressable micro-electromagnetic unit array chips
05/14/2008CN101180707A Exposure apparatus and method for manufacturing device
05/14/2008CN101180706A Exposure apparatus and exposure method
05/14/2008CN101180582A Lithographic apparatus and device manufacturing method
05/14/2008CN101180581A Optical system of a microlithographic projection exposure apparatus
05/14/2008CN101180580A Coating-type underlayer film forming composition containing naphthalene resin derivative for lithography
05/14/2008CN101180579A Polysilane compound-containing lower layer film forming composition for lithography
05/14/2008CN101180578A Photosensitive resin composition, photosensitive element, method for forming resist pattern and method for producing printed wiring board
05/14/2008CN101180577A Photosensitive resin composition
05/14/2008CN101180419A Etchant solutions and additives therefor
05/14/2008CN101180324A Polymerizable compound for photoresist, polymer thereof, and photoresist composition containing such polymer
05/14/2008CN101179613A Technique for manufacturing stainless push-button of mobile phone
05/14/2008CN101179018A SONOS structure corrode process used for memory cell
05/14/2008CN101178549A Method for removing photoresist layer and method for forming opening
05/14/2008CN101178548A Alkaline-based developer composition
05/14/2008CN101178547A Lithography apparatus and device manufacturing method
05/14/2008CN101178546A Image portrayal device and method
05/14/2008CN101178545A Position detecting method and device, patterning device, and subject to be detected
05/14/2008CN101178544A Alignment unit and image recording apparatus using the same
05/14/2008CN101178543A Absorption workbench and base plate treating apparatus
05/14/2008CN101178542A Photoresist heating control system used for photoresist film build
05/14/2008CN101178541A Photosensitive resin compsition
05/14/2008CN101178540A Green photosensitive resin compsition, photosensitive transprint material, color filter substrate and display device
05/14/2008CN101178539A 可光固化树脂组合物 The photocurable resin composition
05/14/2008CN101178538A Pattern modifying apparatus
05/14/2008CN101178537A Asymmetric high-pressure MOS component grid oxidizing layer protection method and uses thereof
05/14/2008CN101178527A Semi-penetrate through type liquid crystal display board and pixel structure thereof
05/14/2008CN101178455A Thin film pattern layer and manufacturing method therefor
05/14/2008CN101178454A Preparation method of filling type sub-wavelength guide mode resonance optical filter
05/14/2008CN101178453A Color filter as well as liquid crystal display device and CCD device
05/14/2008CN101178452A Color filter and liquid crystal display device employing the same
05/14/2008CN100388067C Conductor structure and manufacturing method thereof
05/14/2008CN100388026C Patterned grid element polarizer
05/14/2008CN100387442C Combination mask
05/13/2008US7373213 Management system and apparatus, method therefor, and device manufacturing method
05/13/2008US7372634 Reticle-masking objective with aspherical lenses
05/13/2008US7372624 8-mirror microlithography projection objective
05/13/2008US7372548 Levitated reticle-masking blade stage
05/13/2008US7372547 Process and apparatus for achieving single exposure pattern transfer using maskless optical direct write lithography
05/13/2008US7372544 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
05/13/2008US7372543 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
05/13/2008US7372542 Immersion exposure technique
05/13/2008US7372539 Method for distortion correction in a microlithographic projection exposure apparatus
05/13/2008US7372538 Apparatus and method for maintaining immerison fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
05/13/2008US7372478 Pattern exposure method and pattern exposure apparatus
05/13/2008US7372250 Methods and apparatus for determining a position of a substrate relative to a support stage
05/13/2008US7372048 Source multiplexing in lithography
05/13/2008US7372047 Charged particle system and a method for measuring image magnification
05/13/2008US7371800 Derivatized novolak polyhydroxystyrene from hydroxyphenylmethylcarbinol
05/13/2008US7371783 Ionizing radiation curable terpolymer comprising monomers of N-cyclohexylmaleimide, N-benzylmaleimide and/or a substituted N-benzylmaleimide; (meth)acrylic acid; and (meth)acrylic acid ester; blue pigment dispersion containing phthalocyanine; color filters; photopolymerization; discoloration inhibition
05/13/2008US7371703 To be used in near ultraviolet region
05/13/2008US7371690 Dry etching method and apparatus
05/13/2008US7371625 Semiconductor device and manufacturing method thereof, liquid crystal television system, and EL television system
05/13/2008US7371510 Material for forming resist protecting film for use in liquid immersion lithography process, composite film, and method for forming resist pattern
05/13/2008US7371509 reflow stabilizing solution polymer is applied after the photoresist material has been developed and patterned; integrated circuit semiconductors
05/13/2008US7371508 Plasma display panel and method for fabricating the same
05/13/2008US7371507 Multilayer; electroconductive layer, dielectrics, antireflectivity layer; forming photoresist pattern; dry etching using photoresist pattern as mask
05/13/2008US7371506 comprising a polyamic acid, a 1,4-dihydropyridine derivative and an amine compound; low elasticity, high heat resistance, and high resolution
05/13/2008US7371505 Photosensitive composition and method for forming pattern using the same
05/13/2008US7371504 Lithographic printing plate precursor
05/13/2008US7371503 excelling in transparency to deep ultraviolet rays at wavelength of 220 nm or less, exhibiting well-balanced excellent performance such as sensitivity, resolution, pattern form, LER, and storage stability; nonafluoro-n-butanesulfonates such as 1-(naphthalen-2-yl)tetrahydrothiophenium nonafluoro-n-butanes
05/13/2008US7371502 Methods of fabricating organic light emitting display and donor substrate
05/13/2008US7371501 Photosensitive resin composition and method for manufacturing semiconductor apparatus using the same
05/13/2008US7371500 Alkali soluble resin with phenolic hydroxyl group, quinonediazide, crosslinked fine particles, compound containing alkyletherified amino groups, and solvent; resolution, thermal shock, bonding strength
05/13/2008US7371499 Photoresist resin composition, method of forming a photoresist pattern, and method of manufacturing a display substrate using the same
05/13/2008US7371484 Photomask blank and method of fabricating a photomask from the same
05/13/2008US7371483 Monitoring apertures in radiation transparent substrate; masking; halftone film; stacks of radiation transparent materials and opacque film ; etching
05/13/2008US7371467 Process chamber component having electroplated yttrium containing coating
05/13/2008US7371434 Liquid film forming method and solid film forming method
05/13/2008US7371331 Method of creating a patterned monolayer on a surface
05/13/2008US7371023 Apparatus for processing substrates and method therefor
05/13/2008US7370659 Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines
05/13/2008US7370582 Method for handling printing plates
05/08/2008WO2008054513A2 Appararus and method for the calibration of laser ablateable printing plates
05/08/2008WO2008054003A1 Optical element, liquid immersion exposure apparatus, liquid immersion exposure method, and method for producing micro device
05/08/2008WO2008053985A1 Photosensitive resin composition, cured product thereof, and method for producing photosensitive resin
05/08/2008WO2008053974A1 Radiation-sensitive composition
05/08/2008WO2008053918A1 Liquid holding apparatus, liquid holding method, exposure apparatus, exposure method and device manufacturing method
05/08/2008WO2008053881A1 Dimmer plate, exposure apparatus, method of exposure and process for manufacturing device
05/08/2008WO2008053877A1 Polymer, resist composition, and method for producing substrate provided with pattern
05/08/2008WO2008053757A1 Gravure printing plate
05/08/2008WO2008053698A1 Compound and polymeric compound