Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
12/2008
12/31/2008EP1449032B1 Imaging apparatus
12/31/2008CN201174029Y Photolithography thin film evoked by probe
12/31/2008CN101336047A Method for printing circuit board and combination thereof
12/31/2008CN101335198A Method for forming fine pattern of semiconductor device
12/31/2008CN101335187A Substrate treating apparatus
12/31/2008CN101334812A Method for cutting CIF format circular into PG3600 format rectangle
12/31/2008CN101334811A Method for cutting CIF format polygon into PG3600 format rectangle
12/31/2008CN101334591A Levelling focusing mechanism possessing great range control function
12/31/2008CN101334590A Exposure device
12/31/2008CN101334589A Exposure pattern data detecting device, method and program
12/31/2008CN101334588A Chemically amplified positive resist composition
12/31/2008CN101334587A Photosensitive resin composition for organic film transistor
12/31/2008CN101334504A Method for manufacturing erbium-doped hybrid SiO2 optical waveguides amplifier by ultraviolet light direct-writing
12/31/2008CN101334493A Composite lens structure and method for forming same
12/31/2008CN101333069A Titania-doped quartz glass for nanoimprint molds
12/31/2008CN101332650A Casting die for preparing elastic plastics casting with three dimensional structure
12/31/2008CN100447673C Method for aligning exposure mask and method for manufacturing thin film device substrate
12/31/2008CN100447672C Minute pattern photoetching method
12/31/2008CN100447671C Photoetching projector and reflector assembly for the same
12/31/2008CN100447670C Photosensitive glue for high resolution factor cylinder platemaking
12/31/2008CN100447669C Aqueous emulsion type cylinder photoresist
12/31/2008CN100447645C Thin film transistor substrate of horizontal electric field type liquid crystal display device and fabricating method thereof
12/31/2008CN100447643C Thin film transistor substrate and fabricating method thereof
12/31/2008CN100447628C Manufacturing method for chromatic filter layer
12/31/2008CN100447591C Color filter substrate and manufacture method therefor
12/31/2008CN100447127C Single-component hydrogen-capture-type light initiator and its preparing method and use
12/31/2008CN100446993C Method for manufacturing support body for lithographic plate and its support body
12/31/2008CN100446961C Tool for the production of a microstructured surface
12/30/2008US7471469 Device for the low-deformation replaceable mounting of an optical element
12/30/2008US7471374 Projection optical system, exposure apparatus, and exposure method
12/30/2008US7471373 Lithographic apparatus with patterning device position determination
12/30/2008US7471372 Exposure apparatus and production method of device using the same
12/30/2008US7471371 Exposure apparatus and device fabrication method
12/30/2008US7471309 Image exposing apparatus and image exposing method
12/30/2008US7470932 Liquid crystal display panel and fabricating method thereof
12/30/2008US7470824 (Monohalogen-substituted methyl) (adamantyl group-containing alkyl)ethers such as (chloromethyl) (2-oxo-1-adamantyl)ether; useful as a modifying agent for a photoresist resin and a dry etching resistance-improving agent in photolithography field, agricultural and medical intermediates
12/30/2008US7470803 4-(trifluoromethyl)benzyl-4-(4-(triethoxysilyl)butyloxy)phenylsulfone; 4-methylbenzyl-4-(12-(phosphono)dodecyloxy)phenyl sulfone; capable of undergoing surface alteration by irradiation with relatively low energy wavelength, and of forming an organic thin film on a substrate with good reproducibility
12/30/2008US7470611 In situ deposition of a low K dielectric layer, barrier layer, etch stop, and anti-reflective coating for damascene application
12/30/2008US7470544 Sensor array using sail
12/30/2008US7470504 exposing a photoresist layer with regions of photosensitivity to an image in a planography process using high numerical aperture imaging tools
12/30/2008US7470503 Method for reducing lithography pattern defects
12/30/2008US7470502 a curable mixture a cationically polymerizable polyether and an onium salt with a organoboron anion; discharging the mixture onto a recording medium or hydrophilic supports and curing by irradiating with actinic radiation to form hydrophobic images
12/30/2008US7470501 Pattern formation method through liquid immersion lithography
12/30/2008US7470500 polyurethanes or polyetherurethane copolymers, used in image processing by forming a thin layer between a reflective substrate and a photoresist coating; fabrication of semiconductors by photolithography
12/30/2008US7470499 Alicyclic unsaturated compound, polymer, chemically amplified resist composition and method for forming pattern using said composition
12/30/2008US7470491 Overcoating substrate with color filter having opening; forming photosensitive layer, exposure of photosensitve layer through apertures
12/30/2008US7470490 vinyl acetate-vinyl chloride copolymers or polyurethane layers containing carbon black nanoparticles, that is impervious to ultraviolet light and exhibits excellent wear resistance and bonding strength to substrate films, used for preparation of flexographic printing plate
12/25/2008US20080318806 Device for chemical and biochemical reactions using photo-generated reagents
12/25/2008US20080318424 Photoresist residue remover composition and semiconductor circuit element production process employing the same
12/25/2008US20080318171 Method of forming patterns
12/25/2008US20080318169 Pattern forming method
12/25/2008US20080318168 Method and Device for Structuring a Substrate
12/25/2008US20080318167 Copolymer and composition for organic and antireflective layer
12/25/2008US20080318165 Composition For Forming Antireflective Film And Wiring Forming Method Using Same
12/25/2008US20080318164 exposing imaged, negative working, photopolymerizable coating to high pressure stream of heated but otherwise untreated tap water, where water completely removes only less cohesive and adhesive (e.g., partially polymerized) regions, producing printing plate having image pattern of highly cohesive regions
12/25/2008US20080318163 exposing imaged negative working photopolymerizable coating to high pressure stream of tap water, whereby water completely removes only less cohesive and adhesive (e.g., partially polymerized) regions of substrate, producing printing plate having image pattern of highly cohesive oleophilic regions
12/25/2008US20080318162 Use of highly alkaline developer regenerator composition
12/25/2008US20080318160 Novel sulfonate salts and derivatives, photoacid generators, resist compositions, and patterning process
12/25/2008US20080318159 Positive photosensitive composition
12/25/2008US20080318158 Underlayer Coating Forming Composition for Lithography Containing Polysilane Compound
12/25/2008US20080318157 Attaching radiation sensitive compounds to substrate; exposing to e-beam radiation; complexing metal binding group of radiation sensitive compounds with metal, metal compound, or metal or metal-oxide; attaching ligand, complexing; 4-[N-(3-triethoxysilyl)propyl]-carbamoyl-2-nitrobenzyl isonicotinate
12/25/2008US20080318156 Adamantane Based Molecular Glass Photoresists for Sub-200 Nm Lithography
12/25/2008US20080318155 Lithographic printing plate precursor and plate making method
12/25/2008US20080318154 Ink-Less Printing
12/25/2008US20080318153 Photosensitive layer stack
12/25/2008US20080318152 Substrate for Exposure, Exposure Method and Device Manufacturing Method
12/25/2008US20080317084 Laser Interferometer Mirror Assembly
12/25/2008US20080316907 Recording medium, its manufacturing method, mother disc for recording medium, and its manufacturing method
12/25/2008US20080316601 Method for Manufacturing a Hybrid Microlens
12/25/2008US20080316598 Polarization-modulating optical element
12/25/2008US20080316555 Hologram Recording Medium and Method for Manufacturing Same
12/25/2008US20080316456 Catadioptric projection objective with geometric beam splitting
12/25/2008US20080316453 Exposure apparatus, exposure method, and method for producing device
12/25/2008US20080316452 Microlithographic projection exposure apparatus
12/25/2008US20080316451 Catoptric objectives and systems using catoptric objectives
12/25/2008US20080316449 Exposure Device, Exposure Method and Method of Manufacturing Semiconductor Device
12/25/2008US20080315756 Organic light emitting display and manufacturing thereof
12/25/2008US20080315357 Integrated circuit and method including structuring a material
12/25/2008US20080315323 photomask; capable of controlling a line width of an outermost line pattern with different sizes; patterning and transferring the layout on a wafer
12/25/2008US20080315126 Laser light source apparatus, exposure method, and exposure apparatus
12/25/2008US20080315112 Charged particle beam deflection method with separate stage tracking and stage positional error signals
12/25/2008US20080315092 Scanning probe microscopy inspection and modification system
12/25/2008US20080314744 Interdigitated Microelectrode and a Process For Producing the Interdigitated Microelectrode
12/24/2008WO2008157619A2 Total internal reflection displacement scale
12/24/2008WO2008157345A2 Wafer reclamation compositions and methods
12/24/2008WO2008156977A2 Methods of fabricating nanostructures by use of thin films of self-assembling of diblock copolymers, and devices resulting from those methods
12/24/2008WO2008156557A2 Method using highly alkaline developer regenerator composition
12/24/2008WO2008156552A1 On-press developable negative-working imageable elements and methods of use
12/24/2008WO2008156366A1 Clamping device and object loading method
12/24/2008WO2008156148A1 Pigment dispersion, coloring composition for color filter, color filter, liquid crystal display and organic el display
12/24/2008WO2008156137A1 Lithographic printing plate material
12/24/2008WO2008156115A1 Photosensitive resin composition, flexographic printing plate, and method for producing flexographic printing plate
12/24/2008WO2008154907A2 Method and device for transferring nanostructures by means of contact stamping
12/24/2008WO2008106245A3 Method of forming soft lithographic molds with fluorine modified elastomers
12/24/2008WO2008099903A3 Fine pattern transfer material
12/24/2008EP2006899A2 Stage apparatus, exposure apparatus, stage control method, exposure method and device manufacturing method
12/24/2008EP2006885A1 Diffraction optical element, and aligner equipped with that element
12/24/2008EP2006884A2 Mobile device, exposure device, exposure method, micro-motion body, and device manufacturing method
12/24/2008EP2006846A1 Recording medium, its manufacturing method, mother disc for recording medium, and its manufacturing method
12/24/2008EP2006741A2 Maintenance system, substrate processing apparatus, remote operation unit and communication method