Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
02/2009
02/25/2009CN101375210A Method of making a lithographic printing plate
02/25/2009CN101375209A Contact lithography apparatus, system and method
02/25/2009CN101374886A Curable composition containing thiol compound
02/25/2009CN101374880A Epoxy formulations for use in lithography techniques
02/25/2009CN101374878A Positive photosensitive resin composition and cured film obtained therefrom
02/25/2009CN101374675A Method for manufacturing aluminum support for lithographic printing plate material, aluminum support for lithographic printing plate material, lithographic printing plate material, and method for imag
02/25/2009CN101373707A Processing device
02/25/2009CN101373343A Colour photoresistive agent stripping solution composition for thin film transistor LCD
02/25/2009CN101373342A Acidic stripping liquid and preparing method thereof
02/25/2009CN101373341A Photoresist apparatus for removing edge
02/25/2009CN101373340A Cleaning agent of photoresist
02/25/2009CN101373339A Cleaning agent of thick film photoresist
02/25/2009CN101373338A A method of performing model-based scanner tuning
02/25/2009CN101373337A Exposure method, device manufacturing method, substrate and manufacturing method thereof
02/25/2009CN101373336A Method for optimizing exposure device monitoring
02/25/2009CN101373335A Method for optimizing scan exposure
02/25/2009CN101373334A Method for manually shivering materials of grating net semi-etching connection point
02/25/2009CN101373333A Planographic plate for laser digital scanning and manufacture method thereof
02/25/2009CN101373332A Planographic plate material for CTP, preparing method thereof and planographic plate made thereby
02/25/2009CN101373331A Column spacer, liquid crystal display element and curable resin composition for column spacer
02/25/2009CN101373330A Diazo naphthoquinone overturn imaging photosensitive composition
02/25/2009CN101373329A Colored cured composition
02/25/2009CN101373327A Mask for semiconductor device and patterning method using the same
02/25/2009CN101373325A Half-tone mask plate structure and manufacturing method thereof
02/25/2009CN101373323A Optical mask and manufacturing method thereof
02/25/2009CN101373301A FFS type TFT-LCD array substrate structure and manufacturing method thereof
02/25/2009CN101373300A TFT LCD color film substrate structure and manufacturing method thereof
02/25/2009CN101373291A Liquid crystal display element
02/25/2009CN101373282A Method for manufacturing position phase array machine capable of adjusting two-dimensional photon microstructure
02/25/2009CN100464433C A crossed combined dual cycle grating for quanta trap infrared detector
02/25/2009CN100464224C Color filter and manufacture method therefor
02/25/2009CN100464198C Optical structure for changing light direction and back lighting chock
02/25/2009CN100463911C Acyl- and bisacylphosphine derivatives
02/24/2009US7495840 Very high-aperture projection objective
02/24/2009US7495782 Method and system for measuring patterned structures
02/24/2009US7495744 Exposure method, exposure apparatus, and method for producing device
02/24/2009US7495742 Measuring method and apparatus, exposure method and apparatus using the same, and device manufacturing method
02/24/2009US7495243 Writing method of charged particle beam, support apparatus of charged particle beam writing apparatus, writing data generating method and program-recorded readable recording medium
02/24/2009US7495239 Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement
02/24/2009US7495035 Photo-curable resin composition and sealing agent for flat panel display using the same
02/24/2009US7494766 performing an overlapping partitioned exposure process in one or two processes selected from a mask process of forming a gate line, a mask process of forming an active layer, a mask process of forming a source/drain electrode and a mask process of forming a contact hole on a passivation layer
02/24/2009US7494765 plurality of transmitting nonprinting windows transmitting light in a first phase; a transmitting area transmitting light in a second phase, each transmitting window substantially entirely surrounded by and in contact with the transmitting area with no blocking material intervening
02/24/2009US7494764 Negative photosensitive resin composition
02/24/2009US7494763 Polyhydric phenol compound and chemically amplified resist composition containing the same
02/24/2009US7494762 Positive resist composition for immersion lithography and method for forming resist pattern
02/24/2009US7494761 Cyclodextrin derivative, photoresist composition including the cyclodextrin derivative and method of forming a pattern using the photoresist composition
02/24/2009US7494760 Comprises arylsulfonyloxime; for integrated circuits
02/24/2009US7494759 Positive resist compositions and process for the formation of resist patterns with the same
02/24/2009US7494749 Photolithography using interdependent binary masks
02/24/2009US7494555 Microfabricated elastomeric valve and pump systems
02/19/2009WO2009023489A1 Nanoscale imaging via absorption modulation
02/19/2009WO2009023479A1 Masks for microlithography and methods of making and using such masks
02/19/2009WO2009023112A1 Negative-working imageable elements and methods of use
02/19/2009WO2009023103A1 Multi-layer imageable element with improved properties
02/19/2009WO2009022732A1 Positive photosensitive resin composition, cured film, protective film, insulating film and semiconductor device
02/19/2009WO2009022724A1 Photosensitive resin composition and laminate thereof
02/19/2009WO2009022681A1 Positive resist composition, pattern forming method using the composition, and compound used in the composition
02/19/2009WO2009022644A1 Negative photosensitive resin composition, spacer and liquid crystal display
02/19/2009WO2009022576A1 Image-forming layer coating liquid for positive lithographic printing plate member, method for producing positive lithographic printing plate member, and positive lithographic printing plate member
02/19/2009WO2009022561A1 Positive working resist composition and method for pattern formation using the positive working resist composition
02/19/2009WO2009022540A1 Compound and radiation-sensitive composition
02/19/2009WO2009022506A1 Lighting optical apparatus, photolithography equipment and device manufacturing method
02/19/2009WO2009022504A1 Fine pattern forming method and coat film forming material
02/19/2009WO2009022405A1 Photosensitive polyimide precursor composition and electronic part made with the same
02/19/2009WO2009022224A2 Antireflective coating composition
02/19/2009WO2009021670A1 Method and apparatus for measuring scattered light on an optical system
02/19/2009WO2009021400A1 Cleaning composition for removing resist
02/19/2009WO2009002644A3 Methods of making hierarchical articles
02/19/2009WO2009000241A3 Contact exposure device for a printing screen
02/19/2009WO2008102259A8 Antireflective coating composition based on a silicon polymer
02/19/2009WO2008096211A3 Measurement of critical dimensions of semiconductor wafers
02/19/2009WO2008060266A3 Nanotemplate arbitrary-imprint lithography
02/19/2009WO2008031576A8 Optical arrangement for immersion lithography with a hydrophobic coating and projection exposure apparatus comprising the same
02/19/2009WO2005067514A3 Method and system for reconstructing aberrated image profiles through simulation
02/19/2009US20090047608 Apparatus and method for transferring features to an edge of a wafer
02/19/2009US20090047607 Exposure method, exposure apparatus and device fabricating methods
02/19/2009US20090047605 Method of manufacturing photosensitive epoxy structure using photolithography process and method of manufacturing inkjet printhead using the method of manufacturing photosensitive epoxy structure
02/19/2009US20090047603 Method of making a lithographic printing plate
02/19/2009US20090047602 Fluorine-containing compound, resist composition for immersion exposure, and method of forming resist pattern
02/19/2009US20090047601 Planographic printing plate precursor and printing method using the same
02/19/2009US20090047600 high resolution pattern with reduced line edge roughness; increased alkali solubility under action of acid generator
02/19/2009US20090047599 Initiator having iodonium cation and b anion; infrared radiation absorber compound; polymeric binder and spirolactone or spirolactam colorant
02/19/2009US20090047598 Resist composition for electron beam, x-ray, or euv, and pattern-forming method using the same
02/19/2009US20090047586 Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program
02/19/2009US20090047485 Direct incident beam lithography for patterning nanoparticles, and the articles formed thereby
02/19/2009US20090045552 Positive resist composition for recording medium master, and method of producing recording medium master and method of producing stamper using the same
02/19/2009US20090045396 Composition for forming passivation layer and organic thin film transistor comprising the passivation layer
02/19/2009US20090045357 Contamination barrier and lithographic apparatus comprising same
02/19/2009US20090044971 Printed Wiring Board, Process for Producing the Same and Usage of the Same
02/19/2009US20090044900 Method of and apparatus for laminated substrate assembly
02/19/2009US20090044837 Substrate processing apparatus
02/19/2009DE19753596B4 Vorrichtung zum Aufbringen einer dünnen Schicht auf ein Substrat A device for applying a thin layer on a substrate
02/19/2009DE102008040938A1 Panel facet's optical surface producing method for microlithography projector, involves adjusting tilting angle at longitudinal axis or tilting angle at transverse axis at facet base bodies in predetermined range
02/19/2009DE102007038999A1 Verfahren zur Steigerung des Durchsatzes und zur Reduzierung der Bewegungsunschärfe A method for increasing the throughput and to reduce the motion blur
02/19/2009DE102007037942A1 Optical arrangement for use in projection exposure system for microlithography, has processing device determining thickness of contamination layer at point by processing output signal of optical sensor element
02/18/2009EP2026132A2 Process for making a cylindrically-shaped photosensitive element for use as a printing form
02/18/2009EP2026131A2 Lithography meandering order
02/18/2009EP2025777A2 Low transit thermal stress turbine engine components
02/18/2009EP2025698A1 Crosslinkable prepolymer, process for production thereof, and use thereof
02/18/2009EP2024998A1 Electronic package and method of preparing same