| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 02/04/2009 | CN100459040C Method for fabricating semiconductor device |
| 02/04/2009 | CN100459039C Shot shape measuring method and mask |
| 02/04/2009 | CN100459038C Flexible tank and a chemical liquid supply apparatus using the same |
| 02/04/2009 | CN100459037C Method of processing substrate and chemical used in the same |
| 02/04/2009 | CN100459036C Exposure apparatus, and device manufacturing method |
| 02/04/2009 | CN100459016C Pattern forming method and pattern forming apparatus |
| 02/04/2009 | CN100458571C Semiconductor image sensors and method of forming microlens |
| 02/04/2009 | CN100458570C Stage control apparatus and method, stage apparatus and exposure apparatus |
| 02/04/2009 | CN100458569C Method for forming dent on the surface of photoresist layer |
| 02/04/2009 | CN100458568C Method and apparatus for patterning a workpiece and methods of manufacturing the same |
| 02/04/2009 | CN100458567C Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 02/04/2009 | CN100458566C beamsplitter optical design without inverting image and holding catadioptric photoetching system |
| 02/04/2009 | CN100458565C Acoustooptic frequency modulation single exposure imaging interference photo-etching method and system thereof |
| 02/04/2009 | CN100458533C 薄膜晶体管阵列面板及其制造方法 The thin film transistor array panel and a manufacturing method |
| 02/04/2009 | CN100457725C Novel acid-generator and film composition comprising same |
| 02/04/2009 | CN100457211C I-shaped structured three-dimensional micro solid/hollow silicon needle and silicon knife |
| 02/03/2009 | US7486814 Local bias map using line width measurements |
| 02/03/2009 | US7486707 Optical delay module for lenghtening the propagation path of a light beam and pulse multiplication or elongation module |
| 02/03/2009 | US7486439 Projection optical system, exposure apparatus and device fabricating method |
| 02/03/2009 | US7486420 Flexographic printing |
| 02/03/2009 | US7486385 Exposure apparatus, and device manufacturing method |
| 02/03/2009 | US7486384 Lithographic support structure |
| 02/03/2009 | US7486382 Imaging device in a projection exposure machine |
| 02/03/2009 | US7486381 Lithographic apparatus and device manufacturing method |
| 02/03/2009 | US7486380 Wafer table for immersion lithography |
| 02/03/2009 | US7486377 Developing method and developing apparatus |
| 02/03/2009 | US7485856 Scanning probe microscopy inspection and modification system |
| 02/03/2009 | US7485690 Sacrificial film-forming composition, patterning process, sacrificial film and removal method |
| 02/03/2009 | US7485611 Including alcohol; solubilizing inorganic salts and polar organic compounds; damage-free, residue-free cleaning |
| 02/03/2009 | US7485571 Method of making an integrated circuit |
| 02/03/2009 | US7485413 Photosensitive composition and method for forming pattern using same |
| 02/03/2009 | US7485410 Method of manufacturing thick dielectric pattern and method of manufacturing image displaying apparatus |
| 02/03/2009 | US7485409 Planographic printing plate precursor |
| 02/03/2009 | US7485408 Optionally 1-substituted-2-hydroxy-2,2-bis(trifluoromethyl)ethoxy- group-containing silicon compounds, especially containing norbornane ring; their polymers are base resins in photoresists for use in photolithography using deep-ultraviolet, x-ray or electron beam; reduced collapse due to swelling |
| 02/03/2009 | US7485407 Siloxane compound, photoresist composition including the siloxane compound and method of forming a pattern using the photoresist composition |
| 02/03/2009 | US7485406 Photostorage solid drawing medium |
| 02/03/2009 | US7485405 Soluble polyimide having one or more primary alcoholic groups; formaldehyde condensate of melamine, urea or a phenol as a curing agent; and a photoacid generator (generates acid at a wavelength of 240-500 nm); heat and chemical resistance, dielectric, flexibility |
| 02/03/2009 | US7485404 1-(Chloro-), 2-((1,3,3-(trimethyl-)-3H-indolium-2-yl)-vin-1,2-ylene-),6-((1,3,3-(trimethyl-)-2,3-dihydroindolin-2-ylidene)-ethanediylidene-cyclonex-1-ene;storage stability, highly sensitive to beams emitted by general-purpose semiconductor lasers |
| 02/03/2009 | US7485403 Laser-markable compositions |
| 02/03/2009 | US7485397 Reusable printing plate, printing press and printing unit having the printing plate, process for imaging the printing plate and process for preparation of a fluorinated organic phosphonic acid |
| 02/03/2009 | US7485396 Optical proximity correction; modifying mask layout to include scattering bars |
| 02/03/2009 | US7485341 Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same |
| 02/03/2009 | US7485190 Apparatus for heating a substrate in a variable temperature process using a fixed temperature chuck |
| 02/03/2009 | US7484677 Edge remover having a gas sprayer to prevent a chemical solvent from splashing |
| 01/29/2009 | WO2009015084A2 Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer |
| 01/29/2009 | WO2009014717A1 Contact printing method using an elastomeric stamp having a variable surface area and variable shape |
| 01/29/2009 | WO2009014698A1 Methods and apparatus for measuring thickness of etching residues on a substrate |
| 01/29/2009 | WO2009014501A1 Two-photon stereolithography using photocurable compositions |
| 01/29/2009 | WO2009014439A2 Debris prevention system and lithographic apparatus |
| 01/29/2009 | WO2009014252A1 Movable body drive method and movable body drive system |
| 01/29/2009 | WO2009014251A2 Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, position control method and position control system, and device manufacturing method |
| 01/29/2009 | WO2009014113A1 Positive photosensitive resin composition for spray coating, method for forming cured film using the same, cured film and semiconductor device |
| 01/29/2009 | WO2009014044A1 Color composition and color filter using the same |
| 01/29/2009 | WO2009013905A1 Position measuring system, exposure device, position measuring method, exposure method, device manufacturing method, tool, and measuring method |
| 01/29/2009 | WO2009013903A1 Mobile object driving method, mobile object driving system, pattern forming method and apparatus, exposure method and apparatus and device manufacturing method |
| 01/29/2009 | WO2009013278A1 Device for setting the temperature of an optical element |
| 01/29/2009 | WO2009013230A1 Optical system of a microlithographic projection exposure apparatus |
| 01/29/2009 | WO2009013028A1 Production of stamps, masks or templates for semiconductor device manufacturing |
| 01/29/2009 | WO2009012919A1 Method for examining a wafer with regard to a contamination limit and euv projection exposure system |
| 01/29/2009 | WO2009012738A1 Method and device for producing structured optical materials |
| 01/29/2009 | WO2008145364A3 Method for the production of an optical element by means of a molding process, optical element produced according to said method, collector, and lighting system |
| 01/29/2009 | WO2008139910A3 Method for processing pattern data and method for manufacturing electronic device |
| 01/29/2009 | WO2008135865A3 Exposing printing plates using light emitting diodes |
| 01/29/2009 | WO2008122410A3 Optical correction element and method for the correction of temperature-induced imaging aberrations in optical systems, projection objective and projection exposure apparatus for semiconductor lithography |
| 01/29/2009 | US20090029894 Method for washing device substrate |
| 01/29/2009 | US20090029893 Cleaning Liquid For Lithography and Cleaning Method Using Same |
| 01/29/2009 | US20090029297 Method of forming fine patterns |
| 01/29/2009 | US20090029296 Image recording method and device |
| 01/29/2009 | US20090029295 Micromachined imaging transducer |
| 01/29/2009 | US20090029294 Method for manufacturing semiconductor device |
| 01/29/2009 | US20090029293 Manufacturing method of silicon carbide semiconductor apparatus |
| 01/29/2009 | US20090029292 Engraving with amplifier having multiple exit ports |
| 01/29/2009 | US20090029291 Positive resist composition for thin-film implantation process and method for forming resist pattern |
| 01/29/2009 | US20090029289 Photosensitive Resin Composition, Photosensitive Element, Method for Forming Resist Pattern and Method for Producing Printed Wiring Board |
| 01/29/2009 | US20090029287 Photosensitive resin composition |
| 01/29/2009 | US20090029286 Method for Fabricating Photoresist Pattern |
| 01/29/2009 | US20090029285 Method for producing photosensitive laminate original printing plate for letterpress printing, photosensitive laminate original printing plate for letterpress printing, and method for producing letterpress printing plate |
| 01/29/2009 | US20090029284 Pattern coating material and pattern forming method |
| 01/29/2009 | US20090029270 Projection exposure device and method of separate exposure |
| 01/29/2009 | US20090029222 Fuel cell with structured gas diffusion layer and manufacturing method of gas diffusion layer |
| 01/29/2009 | US20090029125 Photosensitive material for forming conductive film, conductive film, light transmitting electromagnetic wave shielding film and method for manufacturing the same |
| 01/29/2009 | US20090028910 Methods for Fabrication Isolated Micro-and Nano-Structures Using Soft or Imprint Lithography |
| 01/29/2009 | US20090027608 Photosensitive composition, photosensitive resin transfer film, and method for producing a photospacer, and substrate for a liquid crystal display device and liquid display device |
| 01/29/2009 | US20090027605 Method for manufacturing substrate, liquid crystal display apparatus and method for manufacturing the same, and electronic device |
| 01/29/2009 | US20090025584 Method for Developing Printing Plates in an Offset Printing Press and Printing Press for Carrying out the Method |
| 01/29/2009 | US20090025246 Remote Center Compliant Flexure Device |
| 01/29/2009 | DE10260615B4 Technik zum Verringern der Lackvergiftung bei der Herstellung einer Metallisierungsschicht mit einem Dielektrikum mit kleinem ε Technique for reducing the poisoning lacquer in the manufacture of a metallization layer with a dielectric with small ε |
| 01/29/2009 | DE10237325B4 Gerät zur Belichtung eines Objektes mit Licht Apparatus for exposing an object with light |
| 01/29/2009 | DE102008040613A1 Optisches System einer mikrolithographischen Projektionsbelichtungsanlage The optical system of a microlithography projection exposure apparatus |
| 01/29/2009 | DE102008040181A1 Illumination system for microlithographic projection exposure system, has astigmatic refractive optical element astigmatically changing intensity distribution in pupil surface by arrangement on different positions along optical axis |
| 01/29/2009 | DE102008033341A1 Projektionsobjektiv Projection lens |
| 01/29/2009 | DE102008002622A1 Optical system i.e. illuminating device, for projection exposure apparatus utilized in semiconductor lithography, has measuring structure exhibiting continuous plain reference surface extending along optical modules |
| 01/29/2009 | DE102007061800A1 Lighting system for projection exposure system, has screen positioned towards optical axis by one of optical elements and arranged in region of pupil level of optical system and formed as part of polarizer |
| 01/29/2009 | DE102007035387A1 Verfahren und Vorrichtung zur Herstellung von strukturierten optischen Materialien Method and apparatus for the production of structured optical materials |
| 01/29/2009 | DE102007034652A1 Vorrichtung zur Temperatureinstellung eines optischen Elements Device for adjusting the temperature of an optical element |
| 01/29/2009 | DE102007030051A1 Scheibenlayoutoptimierungsverfahren und System Disk layout optimization method and system |
| 01/28/2009 | EP2019336A1 Process for preparing a polymeric relief structure |
| 01/28/2009 | EP2019335A1 Lithographic apparatus and contamination removal or prevention method |
| 01/28/2009 | EP2019334A2 Positive resist composition and method of pattern formation with the same |
| 01/28/2009 | EP2019333A1 Production of stamps, masks or templates for semiconductor device manufacturing |