Patents
Sitemap › G03 - Photography; Cinematography; Analogous techniques using waves other than optical waves; Electrography; Holography › G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; Materials therefor; Originals therefor; Apparatus specially adapted therefor › G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
08/2009
08/06/2009US20090197034 Method of manufacturing a stamper for replicating a high density relief structure
08/06/2009US20090195847 Holographic recording medium
08/06/2009US20090195762 Cleanup method for optics in immersion lithography
08/06/2009US20090194840 Method of Double Patterning, Method of Processing a Plurality of Semiconductor Wafers and Semiconductor Device
08/06/2009US20090194319 Photocurable resin composition, dry film, cured product, and printed circuit board
08/06/2009DE102008006438A1 Verfahren und Vorrichtung zum Strukturieren eines strahlungsempfindlichen Materials Method and apparatus for patterning a radiation-sensitive material
08/06/2009DE102004037008B4 Verfahren zum Herstellen einer Flüssigkristalldisplay-Vorrichtung mit strukturierten Abstandshaltern A method of manufacturing a liquid crystal display device having patterned spacers
08/05/2009EP2085825A1 Liquid composition for removing photoresist residue and polymer residue
08/05/2009EP2085824A1 Optical system of a microlithographic exposure system
08/05/2009EP2085823A1 Method for manufacturing semiconductor device using quadruple-layer laminate
08/05/2009EP2085822A1 Process for semiconductor device production using under-resist film cured by photocrosslinking
08/05/2009EP2085821A1 Dye-containing negative curable composition, color filter and method of producing color filter
08/05/2009EP2085820A2 Apparatus and method for preparing relief printing form
08/05/2009EP2085741A1 Line width measuring method, image forming status detecting method, adjusting method, exposure method and device manufacturing method
08/05/2009EP2085220A2 Resin composition for laser engraving, relief printing plate precursor for laser engraving, relief printing plate and method of producing the same
08/05/2009EP2084576A1 Surface treatment method and surface treatment apparatus
08/05/2009EP2083995A2 Polymer object optical fabrication process
08/05/2009EP1994549A4 Active spectral control of duv light source
08/05/2009EP1875307B1 Method for mask inspection for mask design and mask production
08/05/2009EP1690883B1 Pellicle and novel fluorinated polymer
08/05/2009EP1679297B1 Fluorine compound, fluoropolymer, and process for producing the same
08/05/2009EP1606670A4 Applications of semiconductor nano-sized particles for photolithography
08/05/2009EP1417198B1 Sulfonium salts as photoinitiators for radiation curable systems
08/05/2009EP1066365B1 Acidic composition containing fluoride for removal of photoresists and etch residues
08/05/2009CN101501574A Long length flexible circuits and method of making same
08/05/2009CN101501573A Electronic circuit device and method for fabricating the same
08/05/2009CN101501572A Antireflective composition for photoresists
08/05/2009CN101501571A Method of preparing a patterned film with a developing solvent
08/05/2009CN101501570A Photoresist composition and patterning method thereof
08/05/2009CN101501569A A method of applying a material on a substrate
08/05/2009CN101500817A Production method and production device of cylindrical print substrate
08/05/2009CN101499406A Method for producing silicide nano-structure on insulated underlay
08/05/2009CN101499393A Electron emitter, cold-cathode field electron emitter, and method for manufacturing cold-cathode field electron emission display
08/05/2009CN101498902A Substrate transfer appartus
08/05/2009CN101498901A Development method for flat display screen fabrication
08/05/2009CN101498900A Exposure bench
08/05/2009CN101498899A Focus measurement method and method of manufacturing a semiconductor device
08/05/2009CN101498898A Alignement scanning validation simulating device and its control method
08/05/2009CN101498897A Edge exposure device and its control method
08/05/2009CN101498896A Monitoring structure and mask plate comprising the same, and its use method
08/05/2009CN101498895A Photoresist supply recovering system and photoresist recovering method
08/05/2009CN101498894A Photosensitive resin composition, optical spacer, protecting film, coloring pattern, display device and substrate thereof
08/05/2009CN101498890A Violet laser-sensitive silver salt aluminum-base offset plate and its production method
08/05/2009CN101498858A Production method of colorful optical filtering substrate and LCD panel
08/05/2009CN101498802A Color filter structure and manufacturing method thereof, and LCD
08/05/2009CN101497599A Monomer, resin, resist composition using the resin, and method producing semiconductor device using the resist composition
08/05/2009CN100524646C Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition
08/05/2009CN100524618C Resistless lithography method for producing fine structures
08/05/2009CN100524617C Development apparatus and development method
08/05/2009CN100524616C Exposure apparatus, exposure method, and device fabricating method
08/05/2009CN100524584C Plasma display panel manufacturing method
08/05/2009CN100524041C Lithographic projection apparatus and device manufacturing method
08/05/2009CN100524040C Pattern forming method and method of manufacturing semiconductor device
08/05/2009CN100524039C Photo-etching machine exposal image forming apparatus
08/05/2009CN100524038C Apparatus and method for measuring Image field flexural distribution of photo-etching machine
08/05/2009CN100524037C Array of spatial light modulators and method of production of a spatial light modulator device
08/05/2009CN100524036C Uniformity correction system having light leak and shadow compensation
08/05/2009CN100524035C Lithographic apparatus and device manufacturing method
08/05/2009CN100524034C Lithographic apparatus and device manufacturing method
08/05/2009CN100524033C Lithographic apparatus and device manufacturing method
08/05/2009CN100524032C Method of generating writing pattern, method of forming resist pattern, method of controlling exposure tool
08/05/2009CN100524031C Projection exposure apparatus, device manufacturing method, and sensor unit
08/05/2009CN100524030C Lithographic apparatus and device manufacturing method
08/05/2009CN100524029C Improved lithographic process
08/05/2009CN100524028C Optimized polarization illumination
08/05/2009CN100524027C Device and method for operating and transmitting metrological light beam
08/05/2009CN100524026C 光刻系统 Lithography system
08/05/2009CN100524025C System and method for making laser beam expend without expanding space coherence
08/05/2009CN100524024C Exposure method, exposure apparatus and element mfg. method
08/05/2009CN100524023C Photoetching device and method for manufacturing the apparatus
08/05/2009CN100524022C 抗反射膜和曝光方法 Antireflection film and exposure method
08/05/2009CN100524021C Photosensitive resin composition and coating film cured product thereof
08/05/2009CN100524020C Method for forming photosensitive polyimide pattern and electronic devices having the pattern
08/05/2009CN100524019C Photoetching adhesive composition
08/05/2009CN100523973C Array substrate for liquid crystal display device and method of fabricating the same
08/05/2009CN100523971C Array substrate for in-plane switching mode LCD and method of fabricating of the same
08/05/2009CN100523970C Array substrate for liquid crystal display device using organic semiconductor material and method of fabricating the same
08/05/2009CN100523969C Liquid crystal display device with color film on thin-film transistor and its manufacture method
08/05/2009CN100523967C Transflective liquid crystal display and manufacturing method of the same
08/05/2009CN100523925C In-plane-switching-mode liquid crystal display device
08/05/2009CN100523916C Control method for light field in holographic printing technology and its system
08/05/2009CN100523878C Reflecting plate manufacturing method
08/05/2009CN100523804C Evaluation method of resist composition using immersion solvent
08/05/2009CN100523795C Inspection device and inspection method for pattern profile, exposure system
08/05/2009CN100523030C Curable compositions and rapid prototyping process using the same
08/05/2009CN100523008C Thiol compound, photopolymerization initiator composition and photosensitive composition
08/05/2009CN100523007C New difunctional photoinitiators
08/05/2009CN100522939C Thiol compound, photopolymerization initiator composition and photosensitive composition
08/05/2009CN100522630C Device for building a printing image by using a laser
08/04/2009US7571417 Method and system for correcting a mask pattern design
08/04/2009US7570431 Optical arrangement of autofocus elements for use with immersion lithography
08/04/2009US7570345 Method of optimizing imaging performance
08/04/2009US7570323 Color filter substrate, liquid crystal display apparatus including color filter substrate, and method of manufacturing color filter substrate
08/04/2009US7569842 Method for correcting electron beam exposure data
08/04/2009US7569403 Pattern evaluation method, manufacturing method of semiconductor device, correction method of mask pattern and manufacturing method of exposure mask
08/04/2009US7569336 Composition for removing photoresist and method of forming a pattern using the same
08/04/2009US7569335 Photosensitive resin composition for optical waveguides, and optical waveguide and manufacturing method thereof
08/04/2009US7569334 Method of manufacturing for conductive pattern substrate
08/04/2009US7569333 Wiring line structure and method for forming the same
08/04/2009US7569332 Radiation transparent; opacity
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