Patents
Sitemap › G03 - Photography; Cinematography; Analogous techniques using waves other than optical waves; Electrography; Holography › G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; Materials therefor; Originals therefor; Apparatus specially adapted therefor › G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
07/2014
07/10/2014US20140193614 Method of patterning block copolymer layer and patterned structure
07/10/2014US20140193591 Method for producing a reflective optical element for euv-lithography
07/10/2014US20140193301 Method of generating a metamaterial, and a metamaterial generated thereof
07/10/2014US20140192339 Collector
07/10/2014US20140192338 Diffraction Based Overlay Metrology Tool and Method of Diffraction Based Overlay Metrology
07/10/2014US20140192337 Lithographic apparatus, method of setting up a lithographic apparatus and device manufacturing method
07/10/2014US20140192336 Optical Imaging Writer System
07/10/2014US20140192334 Pixel Blending For Multiple Charged-Particle Beam Lithography
07/10/2014US20140192301 Color Filter Substrate, Manufacturing Method Thereof and Liquid Crystal Panel
07/10/2014US20140190634 Method and Apparatus for Drying a Wafer
07/10/2014DE102013212779A1 Vorrichtung und Verfahren zur Reinigung eines Spiegels einer mikrolithographischen Projektionsbelichtungsanlage Apparatus and method for cleaning a mirror of a microlithography projection exposure apparatus
07/10/2014DE102013212778A1 Spiegel für eine mikrolithographische Projektionslichtungsanlage sowie Verfahren zur Bearbeitung eines Spiegels Mirrors for a microlithography projection clearing system and method for processing a mirror
07/10/2014DE102013210699A1 Verfahren zur Positionsbestimmung eines Luftbildes Method for determining the position of an aerial image
07/10/2014DE102012223217B9 Optisches System einer mikrolithographischen Projektionsbelichtungsanlage The optical system of a microlithography projection exposure apparatus
07/10/2014DE102007047681B4 Monolithischer dielektrischer Spiegel A monolithic dielectric mirror
07/09/2014EP2752895A1 Optical substrate and semiconductor light-emitting element
07/09/2014EP2752714A1 Exposure apparatus and exposure method
07/09/2014EP2752713A1 Techniques for marking product housings
07/09/2014EP2752712A1 Photosensitive alkali-soluble silicone resin composition
07/09/2014EP2752098A1 Radiation source
07/09/2014EP2751619A1 Lithographic printing plate precursors for on-press development
07/09/2014EP2751618A2 Composite resin composition and method for producing dental components by means of stereo-lithography
07/09/2014CN203705821U 一种光罩支架调平机构 One kind of mask holder leveling mechanism
07/09/2014CN203705820U 一种光罩托架推拉翻转机构 One kind of mask sliding bracket reversing mechanism
07/09/2014CN203705819U 一种光罩支架自动调平机构 One kind of mask holder automatic leveling mechanism
07/09/2014CN203705818U 一种新型节能曝光固化机 A new energy-efficient exposure curing machine
07/09/2014CN103918059A 测定装置、测定方法、及半导体元件制造方法 Apparatus, measurement method, and a semiconductor device manufacturing method for the determination
07/09/2014CN103917920A 光刻设备和方法 Lithographic apparatus and method
07/09/2014CN103917919A 用于在机显影的平版印版前体 Lithographic printing plate precursor used in the machine developable
07/09/2014CN103917918A 平版印刷版前体和平版印刷版的制作方法 Lithographic printing plate precursor and lithographic version of the production method
07/09/2014CN103917917A 感光性树脂组合物以及使用其的感光性膏 The photosensitive resin composition and the use thereof in the photosensitive paste
07/09/2014CN103917916A 有机发光二极管用聚酰亚胺感光性树脂组合物 The organic light emitting diode with the polyimide photosensitive resin composition
07/09/2014CN103915444A 一种阵列基板及其制备方法、液晶显示面板 One kind of array substrate and its preparation method, a liquid crystal display panel
07/09/2014CN103915351A 半导体封装件的制法 The semiconductor package manufacturing method
07/09/2014CN103913961A 一种基于光束波前调制的同轴检焦装置 A coaxial device before check-focus beam wave Modulation
07/09/2014CN103913960A 用于光刻对准的系统和方法 Photolithographic alignment system and method for
07/09/2014CN103913959A 一种光刻胶的剥离装置及剥离方法 A photoresist stripping stripping device and method
07/09/2014CN103913958A 基板边缘光刻胶的去除装置 Means for removing photoresist edge of the substrate
07/09/2014CN103913957A 掩膜版、掩膜图案生成控制系统及方法、掩膜系统 Mask, the mask pattern generation control system and method, the mask system
07/09/2014CN103913956A 节能环保型uvled曝光机均匀度自动检测方法及设备 Uvled energy saving automatic exposure machine uniformity testing methods and equipment
07/09/2014CN103913955A 双面光刻机及双面光刻方法 Double-sided and double-sided lithography lithography method
07/09/2014CN103913954A 一种大芯片曝光方法及芯片 One kind of big chip and chip exposure method
07/09/2014CN103913953A 一种调焦调平检测装置 One kind of focus leveling detection device
07/09/2014CN103913952A 用于滤色镜的感光树脂组合物和利用其的滤色镜 For color filter use of a photosensitive resin composition and the color filter thereof
07/09/2014CN103913951A 产酸剂和含有它的光刻胶 Acid generator and a photoresist containing it
07/09/2014CN103913950A 感光性树脂组合物和由其制备的绝缘层 The insulating layer and the photosensitive resin composition prepared therefrom
07/09/2014CN103913949A 着色感光性树脂组合物 The colored photosensitive resin composition
07/09/2014CN103913948A 着色感光性树脂组合物、彩色滤光片、lcd装置及成像装置 The colored photosensitive resin composition, a color filter, lcd apparatus and image forming apparatus
07/09/2014CN103913947A 可简化数组制程工序的微影成形方法 Simplifies array lithography process step forming method
07/09/2014CN103913946A 光刻胶图案修剪方法 Photoresist pattern pruning method
07/09/2014CN103913944A 半色调掩膜版、阵列基板及其制作方法、显示装置 Halftone mask, array substrate and method of manufacturing the display device
07/09/2014CN103913892A 一种液晶显示面板 A liquid crystal display panel
07/09/2014CN103913807A 光场成像系统、及调节全光成像系统的方法 Light field imaging systems, and methods for regulating all-optical imaging system
07/09/2014CN103913784A 一种聚合物微透镜阵列的制备方法 Method for preparing a polymer microlens array
07/09/2014CN103910610A 硬掩模组合物的单体、硬掩模组合物及形成图案的方法 The monomer composition of the hard mask, the hard mask composition and method for forming a pattern
07/09/2014CN103909758A 柔性印刷板及其制造方法以及液晶面板用基板的制造方法 The flexible printed board and its manufacturing method, and a method of manufacturing a liquid crystal panel substrate
07/09/2014CN102880016B 用于浸没式光刻机的阶梯式自适应气体密封装置 Stepped adaptive gas seal for immersion lithography
07/09/2014CN102875745B 一种碱可溶性树脂和含有其的感光性树脂组合物及其应用 An alkali soluble resin and a photosensitive resin composition containing the same and uses thereof
07/09/2014CN102819192B 抗蚀剂下层组合物及利用其制造集成电路器件的方法 The resist underlayer composition and use of integrated circuit device manufacturing method thereof
07/09/2014CN102792226B 感光性树脂组合物、干膜以及印刷电路板 The photosensitive resin composition, and a printed circuit board dry film
07/09/2014CN102681261B 基板上隔垫物制造方法 Spacer material on a substrate manufacturing method
07/09/2014CN102621803B 一种尖劈型超透镜的制备方法 One kind of wedge-type preparation superlens
07/09/2014CN102597138B 含硅涂料组合物及其使用方法 Silicon-containing coating compositions and methods of use
07/09/2014CN102575201B 用于制造平面显示器的基板的清洗液组合物 A substrate cleaning liquid composition used for the manufacture of flat panel displays
07/09/2014CN102520521B 三级二维光子晶体缩束器及其制作方法 Three-dimensional photonic crystal attenuator and its manufacturing method
07/09/2014CN102483574B 放射线敏感性树脂组合物和化合物 The radiation-sensitive resin composition and the compound
07/09/2014CN102459171B 肟酯化合物、自由基聚合引发剂、聚合性组合物、负型抗蚀剂以及图像图案 Oxime ester compound, a radical polymerization initiator, the polymerizable composition, a negative resist as well as an image pattern
07/09/2014CN102455607B 用于将图案从图案形成装置转移至衬底上的光刻设备和阻尼方法 Apparatus to a lithographic apparatus and a method for damping on a substrate for forming a pattern from a patterning
07/09/2014CN102449553B 曝光装置 Exposure device
07/09/2014CN102422225B 用于微光刻的照明光学系统与光学系统 For microlithography illumination optical system and the optical system
07/09/2014CN102411263B 源偏振的优化 Source polarization optimization
07/09/2014CN102298269B 测量系统、方法和光刻设备 Measurement system, lithographic apparatus and a method
07/09/2014CN102279526B 滤色器用着色组合物和滤色器 The coloring composition for color filter and a color filter
07/09/2014CN102246099B 致动器系统、光刻设备、控制部件位置的方法和器件制造方法 The method of the actuator system, lithographic apparatus, the control section and the position of the device manufacturing method
07/09/2014CN102193342B 涂覆-显影装置和显影方法 Coating - the developing device and a developing method
07/09/2014CN102187277B 喷涂用正型感光性树脂组合物及使用该组合物的贯通电极的制造方法 Spray coating the positive photosensitive resin composition and a production method of the composition through electrode
07/09/2014CN102147570B 放射线敏感性组合物、固化膜及其形成方法 The radiation-sensitive composition, and a cured film forming method
07/09/2014CN102036485B 喷淋装置以及药水槽 Sprinklers and medicine sink
07/09/2014CN101981504B 光刻设备和污染物检测方法 Lithographic apparatus and method for detecting contaminants
07/09/2014CN101978323B 具有测量装置的用于微光刻的投射曝光系统 Having a measuring device for microlithography projection exposure system
07/09/2014CN101738873B 曝光装置 Exposure device
07/09/2014CN101676338B 颜料分散组合物、着色感光性组合物、滤色器、液晶显示元件及固体摄像元件 A pigment dispersion composition, the colored photosensitive composition, a color filter, a liquid crystal display element and solid-state imaging device
07/09/2014CN101320212B 光固化性热固化性树脂组合物及使用其得到的印刷电路板 Photocurable and thermosetting resin composition and the use thereof to obtain a printed circuit board
07/08/2014US8773664 Method and system for aligning substrates for direct laser coupling in an energy assisted magnetic recording head
07/08/2014US8773657 Method to determine the value of process parameters based on scatterometry data
07/08/2014US8773651 Method and apparatus for visualizing a signature mark on a spectacle lens
07/08/2014US8773636 Optical lithography using graphene contrast enhancement layer
07/08/2014US8772740 UV curing creating flattop and roundtop structures on a single printing plate
07/08/2014US8771929 Tone inversion of self-assembled self-aligned structures
07/08/2014US8771928 Method for manufacturing stamper for injection molding
07/08/2014US8771927 Acid-etch resistant, protective coatings
07/08/2014US8771926 Slip film for relief image printing element
07/08/2014US8771925 Flexographic processing solution and method of use
07/08/2014US8771924 Polymerizable composition, lithographic printing plate precursor and lithographic printing method
07/08/2014US8771923 Radiation-sensitive composition
07/08/2014US8771922 Copolymer for resist comprising novel acryl based monomer and resin composition for resist comprising the same
07/08/2014US8771921 Negative resist composition, method of forming resist pattern and polymeric compound
07/08/2014US8771920 Lithographic printing plate precursor and method of preparing the same
07/08/2014US8771919 Laser marking process and articles
07/08/2014US8771918 Lithographic printing plate precursor
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