| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 09/09/2014 | US8830441 Fluid handling structure, a lithographic apparatus and a device manufacturing method |
| 09/09/2014 | US8830440 Vacuum system for immersion photolithography |
| 09/09/2014 | US8830020 Actuator, lithographic apparatus, and actuator constructing method |
| 09/09/2014 | US8829478 Drive laser delivery systems for EUV light source |
| 09/09/2014 | US8829477 Droplet generator with actuator induced nozzle cleaning |
| 09/09/2014 | US8829436 Phase plate and method of fabricating same |
| 09/09/2014 | US8829420 Two dimensional encoder system and method |
| 09/09/2014 | US8829087 Transparent layer forming polymer |
| 09/09/2014 | US8829070 Ultraviolet-curable resin material for pattern transfer and magnetic recording medium manufacturing method using the same |
| 09/09/2014 | US8829067 Polymerizable compositions with initiators containing several Ge atoms |
| 09/09/2014 | US8828918 Semiconductor surface treating agent composition and method for treating semiconductor surface using the semiconductor surface treating agent composition |
| 09/09/2014 | US8828651 Positive-type photosensitive resin composition and cured film manufactured therefrom |
| 09/09/2014 | US8828650 Method for making a retarder |
| 09/09/2014 | US8828649 Method of patterning a thin film |
| 09/09/2014 | US8828648 Method for producing a planographic printing plate |
| 09/09/2014 | US8828647 Patterning process and resist composition |
| 09/09/2014 | US8828646 Lithographic printing plate precursor and method of producing thereof |
| 09/09/2014 | US8828645 Negative resist composition and patterning process |
| 09/09/2014 | US8828644 Compound, photosensitive composition comprising the same and photosensitive material |
| 09/09/2014 | US8828642 Positive photosensitive resin composition, cured film obtained using same, and optical device |
| 09/09/2014 | US8828641 Chemically amplified resist composition and patterning process |
| 09/09/2014 | US8828632 Multiple-grid exposure method |
| 09/09/2014 | US8828631 Pigment dispersion composition, photosensitive resin composition including the same and color filter using the same |
| 09/09/2014 | US8828629 Black curable composition, light-shielding color filter for a solid-state imaging device and method of producing the same, solid-state imaging device, wafer level lens, and camera module |
| 09/09/2014 | US8828628 Method and system for design of a reticle to be manufactured using variable shaped beam lithography |
| 09/09/2014 | US8828625 Extreme ultraviolet lithography mask and multilayer deposition method for fabricating same |
| 09/09/2014 | US8828624 Method and device for fabricating volume Bragg gratings |
| 09/09/2014 | US8828524 Layered structure and piezoelectric device using the same |
| 09/09/2014 | US8828500 Photocurable resin composition for sealing organic EL device |
| 09/09/2014 | US8828493 Methods of directed self-assembly and layered structures formed therefrom |
| 09/09/2014 | US8828307 Imprint method, chip production process, and imprint apparatus |
| 09/09/2014 | US8828304 Method of forming resist pattern by nanoimprint lithography |
| 09/09/2014 | US8828297 Patterning of non-convex shaped nanostructures |
| 09/09/2014 | US8828282 Photosensitive resin composition for color filter and color filter using the same |
| 09/09/2014 | US8828251 Method for finishing exterior surface of injection-molded product |
| 09/09/2014 | US8828149 Apparatus for fabricating thin film transistor array substrate |
| 09/09/2014 | US8827686 Imprinting apparatus and imprint transfer method |
| 09/09/2014 | US8827400 Liquid application apparatus, liquid application method and imprinting system |
| 09/09/2014 | US8826926 Methods of profiling edges and removing edge beads |
| 09/09/2014 | US8826847 Imprinting apparatus, imprinting method, and manufacturing method of uneven plate |
| 09/04/2014 | WO2014134098A1 Machining of fusion-drawn glass laminate structures containing a photomachinable layer |
| 09/04/2014 | WO2014133807A1 Lithographic printing plate precursors and use |
| 09/04/2014 | WO2014133726A1 Correction of plane-of-incidence azimuth in optical metrology |
| 09/04/2014 | WO2014133187A1 Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device, electronic device and compound |
| 09/04/2014 | WO2014131889A1 Model-based control of an optical imaging device |
| 09/04/2014 | WO2014131796A1 Reflecting coating with optimized thickness |
| 09/04/2014 | WO2014131604A1 Optical assembly for rotating polarization |
| 09/04/2014 | US20140249065 Microelectronic substrate cleaning compositions having copper/azole polymer inhibition |
| 09/04/2014 | US20140248565 Method of patterning a device |
| 09/04/2014 | US20140248564 Aromatic polycarbonate composition |
| 09/04/2014 | US20140248563 Composition, resist pattern-forming method, compound, method for production of compound, and polymer |
| 09/04/2014 | US20140248562 Actinic ray- or radiation-sensitive resin composition, actinic ray- or radiation-sensitive film and method of forming pattern |
| 09/04/2014 | US20140248561 Resist composition, method for forming resist pattern, polyphenolic compound for in the composition, and alcoholic compound that can be derived therefrom |
| 09/04/2014 | US20140248556 Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device |
| 09/04/2014 | US20140248554 Sub-resolution assist devices and methods |
| 09/04/2014 | US20140248429 Fabrication of Free Standing Membranes and Use Thereof for Synthesis of Nanoparticle Patterns |
| 09/04/2014 | US20140247975 Source and mask optimization by changing intensity and shape of the illumination source and magnitude and phase of mask diffraction orders |
| 09/04/2014 | US20140247438 Reticle defect correction by second exposure |
| 09/04/2014 | US20140247437 Illumination system of a microlithographic projection exposure apparatus |
| 09/04/2014 | US20140247436 Exposure apparatus, exposure method, and device manufacturing method |
| 09/04/2014 | US20140247435 Radiation source device, lithographic apparatus, and device manufacturing method |
| 09/04/2014 | US20140247434 Lithographic Focus and Dose Measurement Using A 2-D Target |
| 09/04/2014 | US20140246400 Resin having fluorene structure and material for forming underlayer film for lithography |
| 09/04/2014 | US20140246045 Lithography Mask Repair Methods |
| 09/04/2014 | DE102013202590A1 EUV-Lichtquelle zur Erzeugung eines Nutz-Ausgabestrahls für eine Projektionsbelichtungsanlage EUV light source for producing a useful output beam for a projection exposure apparatus |
| 09/03/2014 | EP2772805A1 Method of making a lithographic printing plate |
| 09/03/2014 | EP2772804A1 Positioning and loading a substrate in an exposure apparatus |
| 09/03/2014 | EP2772803A1 Positioning and loading a substrate in an exposure apparatus |
| 09/03/2014 | EP2772802A1 Dual-mask photolithography method minimising the impact of substrate defects |
| 09/03/2014 | EP2772661A1 Method for dimensioning an oscillation insulator |
| 09/03/2014 | EP2771740A1 Photosensitive negative resin composition, fine structure, production process of fine structure and liquid ejection head |
| 09/02/2014 | US8825191 System and method for improved automated semiconductor wafer manufacturing |
| 09/02/2014 | US8825182 Position control system, lithographic apparatus, and method to control a position of a movable object |
| 09/02/2014 | US8823948 System for measuring the image quality of an optical imaging system |
| 09/02/2014 | US8823936 Structure for critical dimension and overlay measurement |
| 09/02/2014 | US8823926 Method and apparatus for visualizing a signature mark on a spectacle lens |
| 09/02/2014 | US8823921 Programmable illuminator for a photolithography system |
| 09/02/2014 | US8823920 Lithographic apparatus and device manufacturing method |
| 09/02/2014 | US8823919 Lithographic apparatus, removable member and device manufacturing method |
| 09/02/2014 | US8822942 Projection exposure tool for microlithography with a radiation detector detecting radiation with high resolution over a two-dimensional area |
| 09/02/2014 | US8822858 Keyboard design |
| 09/02/2014 | US8822617 Copolymer for organic antireflective film, monomer, and composition comprising the copolymer |
| 09/02/2014 | US8822141 Front side wafer ID processing |
| 09/02/2014 | US8822140 Resist pattern-forming method |
| 09/02/2014 | US8822139 Method for providing an ordered layer of self-assemblable polymer for use in lithography |
| 09/02/2014 | US8822138 Composition for forming resist underlayer film for lithography including resin containing alicyclic ring and aromatic ring |
| 09/02/2014 | US8822136 Patterning process and resist composition |
| 09/02/2014 | US8822135 Method for preparing a composite printing form |
| 09/02/2014 | US8822134 Resist developer, method for forming a resist pattern and method for manufacturing a mold |
| 09/02/2014 | US8822133 Underlayer composition and method of imaging underlayer |
| 09/02/2014 | US8822132 Colored dispersion, photoresist composition and black matrix |
| 09/02/2014 | US8822131 Flexographic printing plate precursor |
| 09/02/2014 | US8822130 Self-assembled structures, method of manufacture thereof and articles comprising the same |
| 09/02/2014 | US8822129 Pattern forming method, electron beam-sensitive or extreme ultraviolet-sensitive composition, resist film, manufacturing method of electronic device, and electronic device |
| 09/02/2014 | US8822128 Production method of resist composition for lithography |
| 09/02/2014 | US8822127 Photosensitive resin composition for black matrix |
| 09/02/2014 | US8822126 Resin composition for laser engraving, relief printing plate precursor for laser engraving, relief printing plate, and method of manufacturing relief printing plate |
| 09/02/2014 | US8822125 Composition for forming pattern and in-plane printing method using the same |
| 09/02/2014 | US8822123 Polymeric materials and methods for making the polymeric materials |
| 09/02/2014 | US8822112 Siloxane-based compound, photosensitive composition comprising the same and photosensitive material |