| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 11/26/2009 | WO2009142705A1 Method of imaging and developing positive-working imageable elements |
| 11/26/2009 | WO2009142435A2 Photosensitive resin composition containing polyimide resin and novolak resin |
| 11/26/2009 | WO2009142183A1 Novel compound, polymer and radiation-sensitive composition |
| 11/26/2009 | WO2009142182A1 Radiation-sensitive resin composition, method for forming resist pattern and photoresist film |
| 11/26/2009 | WO2009142181A1 Radiation-sensitive resin composition for liquid immersion exposure, polymer and method for forming resist pattern |
| 11/26/2009 | WO2009142142A1 Alicyclic structure-containing compound, (meth)acrylate, (meth)acrylic polymer and positive resist composition containing the (meth)acrylic polymer |
| 11/26/2009 | WO2009141932A1 Pattern forming method |
| 11/26/2009 | WO2009141931A1 Barrier film forming material and pattern forming method using same |
| 11/26/2009 | WO2009141930A1 Flexographic printing original plate |
| 11/26/2009 | WO2009141774A1 Aqueous curable imprintable medium and patterned layer forming method |
| 11/26/2009 | WO2009141720A1 Method and apparatus for overlay compensation between subsequently patterned layers on workpiece |
| 11/26/2009 | WO2009141648A1 Method for patterning a surface using selective adhesion |
| 11/26/2009 | WO2009141256A1 Photopolymerizable flexographic printing elements for printing with uv inks |
| 11/26/2009 | WO2009141033A1 Optical system for microlithography |
| 11/26/2009 | WO2009099924A3 Method to produce nanometer-sized features with directed assembly of block copolymers |
| 11/26/2009 | WO2009095220A3 Grazing incidence collector for laser produced plasma sources |
| 11/26/2009 | WO2009053832A3 Bottom antireflective coating compositions |
| 11/26/2009 | WO2008122884A8 A composition for coating over a photoresist pattern comprising a lactem |
| 11/26/2009 | US20090291565 Method for stripping photoresist |
| 11/26/2009 | US20090291561 Method of forming pattern |
| 11/26/2009 | US20090291552 Substrate having film pattern and manufacturing method of the same, manufacturing method of semiconductor device, liquid crystal television, and el television |
| 11/26/2009 | US20090291513 Overlay marks, methods of overlay mark design and methods of overlay measurements |
| 11/26/2009 | US20090291399 Coating/developing apparatus and method |
| 11/26/2009 | US20090291398 Liquid discharge head producing method |
| 11/26/2009 | US20090291397 Methods Of Forming Structures Supported By Semiconductor Substrates |
| 11/26/2009 | US20090291396 Process for on-press developing high speed laser sensitive lithographic printing plate |
| 11/26/2009 | US20090291395 Methods for imaging and processing positive-working imageable elements |
| 11/26/2009 | US20090291394 Manufacturing method of printing plate using free-seal, free-quantity liquid photopolymer sachet and apparatus using the same |
| 11/26/2009 | US20090291393 Positive photoresist composition and method of forming photoresist pattern using the same |
| 11/26/2009 | US20090291392 Wet developable bottom antireflective coating composition and method for use thereof |
| 11/26/2009 | US20090291391 Optical information-recording medium, method for manufacturing optical information-recording medium, method for visible information recording, use of mixture, and mixture |
| 11/26/2009 | US20090291390 Acid generating agent for chemically amplified resist compositions |
| 11/26/2009 | US20090291389 Photopatternable dielectric materials for beol applications and methods for use |
| 11/26/2009 | US20090291388 Method for Forming a Self-Aligned Hard Mask for Contact to a Tunnel Junction |
| 11/26/2009 | US20090291387 Method of imaging and developing positive-working imageable elements |
| 11/26/2009 | US20090291374 Exposure aligning method and exposure apparatus |
| 11/26/2009 | US20090291373 Green Photoresist and Color Filter Substrate using the same |
| 11/26/2009 | US20090291265 Product With Concave-Convex Pattern On Its Surface and Method of Forming the Concave-Convex Pattern |
| 11/26/2009 | US20090290135 Lithographic apparatus and device manufacturing method |
| 11/26/2009 | US20090289257 Exposure mask using gray-tone pattern, manufacturing method of tft substrate using the same and liquid crystal display device having the tft substrate |
| 11/26/2009 | US20090289246 Method for producing at least one multilayer body, and multilayer body |
| 11/26/2009 | US20090289205 Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device |
| 11/26/2009 | DE102009016608A1 Beleuchtungsoptik für eine Mikrolithographie-Projektionsbelichtungsanlage Illumination optics for microlithography projection exposure apparatus |
| 11/26/2009 | DE102009016063A1 Mikrolithographisches Projektionsbelichtungsverfahren, sowie Projektionsbelichtungsanlage Microlithographic projection exposure method, and projection exposure apparatus |
| 11/26/2009 | DE102009014146A1 Beleuchtungsoptik für eine Projektionsbelichtungsanlage Illumination optics for a projection exposure apparatus |
| 11/26/2009 | DE102009001488A1 Entfernen von Kontaminationen von optischen Oberflächen durch aktivierten Wasserstoff Removing contamination from optical surfaces by activated hydrogen |
| 11/26/2009 | DE102008024214A1 Fotopolymerisierbare Flexodruckelemente für den Druck mit UV-Farben Photopolymerizable flexographic printing for printing with UV inks |
| 11/26/2009 | DE102008001892A1 Optisches System für die Mikrolithographie An optical system for microlithography |
| 11/26/2009 | DE102008000709B3 Reinigungsmodul, EUV-Lithographievorrichtung und Verfahren zu seiner Reinigung Cleaning module, EUV lithography apparatus and method for cleaning |
| 11/26/2009 | DE102007026753B4 Fassung für ein optisches Element bei Halbleiterobjektiven Socket for an optical element in semiconductor lenses |
| 11/25/2009 | EP2124105A2 Process and apparatus having an adjustable heater |
| 11/25/2009 | EP2124104A1 Curing of photo-curable printing plates using a light tunnel of mirrored walls and having a polygonal cross-section like a kaleidoscope |
| 11/25/2009 | EP2124103A2 Manufacturing method of printing plate using free-seal, free-quantity liquid photopolymer sachet and apparatus using the same |
| 11/25/2009 | EP2122417A2 Fabrication of microstructures and nanostructures using etching resist |
| 11/25/2009 | EP2122408A1 Optical integrator system, illumination optical apparatus, exposure apparatus, and device manufacturing method |
| 11/25/2009 | EP2122407A1 Optical integrator system, illumination optical apparatus, exposure apparatus, and device manufacturing method |
| 11/25/2009 | EP2122393A2 Method for producing facet mirrors and projection exposure apparatus |
| 11/25/2009 | EP2121514A2 Methods using block copolymer self-assembly for sub-lithographic patterning |
| 11/25/2009 | EP2121324A1 Radiation-sensitive compositions and elements with basic development enhancers |
| 11/25/2009 | EP2121323A1 Hydroxamic esters as photoinitiators |
| 11/25/2009 | EP1632799B1 Optical element holding device, lens barrel, exposing device, and device producing method |
| 11/25/2009 | EP1614001B1 Cleanup method for optics in immersion lithography |
| 11/25/2009 | CN201352302Y Photomask box |
| 11/25/2009 | CN101589453A Device and method for wet treating plate-like-articles |
| 11/25/2009 | CN101589343A Irradiation strength distribution measuring apparatus and method of measuring |
| 11/25/2009 | CN101589342A Method for improving imaging properties of an optical system, and optical system |
| 11/25/2009 | CN101589341A Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method |
| 11/25/2009 | CN101588506A Solid-state imaging device, manufacturing method thereof, and electronic device |
| 11/25/2009 | CN101587833A Method for removing residual photoresist |
| 11/25/2009 | CN101587830A Large-area NW P-N junction array and manufacture method thereof |
| 11/25/2009 | CN101587824A Registration mark and manufacturing method thereof |
| 11/25/2009 | CN101587823A Inflation equipment |
| 11/25/2009 | CN101587357A Temperature control method and temperature control system thereof |
| 11/25/2009 | CN101587307A Exposure aligning method and exposure apparatus |
| 11/25/2009 | CN101587306A Alignment signal processing method in photoetching technology |
| 11/25/2009 | CN101587305A Developing method capable of effectively removing developing defects in wafer photo-etching technological process |
| 11/25/2009 | CN101587304A Pattern transferring method |
| 11/25/2009 | CN101587303A Lithographic apparatus and device manufacturing method |
| 11/25/2009 | CN101587302A Photoetching illuminating system |
| 11/25/2009 | CN101587301A Coating curing device for liquid medicine and coating curing method |
| 11/25/2009 | CN101587300A Method for preparing heat-sensitive CTP plate |
| 11/25/2009 | CN101587299A Photosensitive coloring composition for a filter and a filter |
| 11/25/2009 | CN101587298A Photosensitive composition, photosensitive film, photosensitive layered body, permanent pattern forming method and printed circuit board |
| 11/25/2009 | CN101587297A Preparation for titanium dioxide based organic-inorganic composite film and method for preparing micro-optic device by adopting film |
| 11/25/2009 | CN101587296A Surface plasma nano photolithography |
| 11/25/2009 | CN101587292A Method for manufacturing micro optical device by mobile digital mask |
| 11/25/2009 | CN101587206A Manufacturing method of optical waveguide device |
| 11/25/2009 | CN101587205A Two-dimensional double-layer fiber array and method for manufacturing same |
| 11/25/2009 | CN101587199A Fluorinated quinacridone in LCD color filter |
| 11/25/2009 | CN101587198A Large area photon sieve |
| 11/25/2009 | CN101586001A Positive heat-sensitive CTP coating fluid and preparation method thereof |
| 11/25/2009 | CN101585896A Polymer and chemically amplified resist composition comprising the same |
| 11/25/2009 | CN101585794A Acid generating agent for chemically amplified resist compositions |
| 11/25/2009 | CN100562948C Leadless silver paste composition for PDP addressing electrodes |
| 11/25/2009 | CN100562826C Motor system for locating load |
| 11/25/2009 | CN100562806C Water soluble resin composition, method of pattern formation and method of inspecting resist pattern |
| 11/25/2009 | CN100562805C Lightscribing device and mfg. method of such device |
| 11/25/2009 | CN100562804C CTP plate making method and apparatus by using ink jet imaging principle |
| 11/25/2009 | CN100562801C Raster polarization photomask plate and its application in projection photoetching system |
| 11/25/2009 | CN100562779C Liquid crystal display and fabrication method thereof |